公开(公告)号：US07468517B2

公开(公告)日：2008-12-23

申请号：US10571345

申请日：2004-09-02

Applicant: Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schönecker

Inventor： Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schönecker

IPC: G21K1/08 ,  H01J37/21 ,  H01J37/20

CPC classification number: H01J37/153 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2801

Abstract: The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

Abstract translation: 本发明提供一种带电粒子束装置。 该装置包括产生交叉的第一透镜，位于交叉后的第二透镜和以聚焦和分散方式作用在x-z平面中的元件，其中元件的中心具有与交叉点基本相同的z位置。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。

公开(公告)号：US20060226361A1

公开(公告)日：2006-10-12

申请号：US11384044

申请日：2006-03-17

Applicant: Juergen Frosien ,  Stefan Lanio

Inventor： Juergen Frosien ,  Stefan Lanio

IPC: G21K7/00

CPC classification number: H01J37/05 ,  G01R31/305 ,  H01J37/244 ,  H01J49/488 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/26

Abstract: The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.

Abstract translation: 本发明涉及具有改进的检测方案的分析系统和包括该分析系统的带电粒子束装置。 用于分析带电粒子束的分析系统具有分隔器，用于将带电粒子束根据其能量分成低能量束和高能量束; 用于检测高能束的前检测器; 以及用于检测低能量束的至少一个反向检测器。 分隔器位于前检测器和至少一个反向检测器之间，并且前分辨器和/或至少一个反向检测器被分段。

公开(公告)号：US06667478B2

公开(公告)日：2003-12-23

申请号：US10231686

申请日：2002-08-30

Applicant: Jürgen Frosien ,  Stefan Lanio

Inventor： Jürgen Frosien ,  Stefan Lanio

IPC: G01N2300

CPC classification number: H01J37/244 ,  H01J2237/047 ,  H01J2237/2446 ,  H01J2237/2448 ,  H01J2237/28

Abstract: A particle beam apparatus with a source for generating a primary particle beam, means for focussing the primary particle beam onto a specimen, a detection system for detecting particles released at the specimen, first means to accelerate the primary particle beam to a first energy, first means to decelerate the primary particle beam before the detection system from the first energy to a second lower energy, second means to accelerate the primary particle beam after the detection system from the second energy to a third higher energy and second means to decelerate the primary particle beam from the third energy to a final beam energy. The detection system further comprises a converter to convert particles released at the specimen into converted secondary particles which will be detected by the detector.

公开(公告)号：US06407387B1

公开(公告)日：2002-06-18

申请号：US09409109

申请日：1999-09-30

Applicant: Jurgen Frosien ,  Stefan Lanio

Inventor： Jurgen Frosien ,  Stefan Lanio

IPC: H01J3728

CPC classification number: H01J37/28 ,  H01J2237/04756

Abstract: The invention relates to a particle beam apparatus with a source for generating a primary particle beam, means for focussing the primary particle beam onto a specimen, means for decelerating back-scattered and/or secondary electrons released at the specimen, said detecting means being located between said source and said focussing means, means for accelerating the primary particle beam from a first energy to a second higher energy and means for decelerating the primary particle beam to a final beam energy. Furthermore, there are provided first additional means to decelerate the primary particle beam shortly before the detecting means and second additional means to accelerate the primary particle beam immediately after the detecting means.

Abstract translation: 本发明涉及一种具有用于产生一次粒子束的源的粒子束装置，用于将一次粒子束聚焦到试样上的装置，用于减速在试样处释放的反向散射和/或二次电子的装置，所述检测装置位于 在所述源和所述聚焦装置之间，用于将所述初级粒子束从第一能量加速到第二较高能量的装置，以及用于将所述一次粒子束减速至最终射束能量的装置。 此外，提供了在检测装置之前不久减速初级粒子束的第一附加装置和第二附加装置，以在紧接在检测装置之后加速初级粒子束。

公开(公告)号：US6104034A

公开(公告)日：2000-08-15

申请号：US112953

申请日：1998-07-09

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/141 ,  H01J37/145 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26

CPC classification number: H01J37/145

Abstract: The invention relates to an objective lens for influencing a particle beam, particularly an electron beam with a magnetic single-pole lens and an electrostatic lens having a first and a second electrode which can be supplied with different potentials. The objective lens is characterized in that the electrostatic lens is disposed after the magnetic single-pole lens in the direction of the particle beam.

Abstract translation: 本发明涉及一种用于影响粒子束的物镜，特别是具有磁性单极透镜的电子束和具有可提供不同电位的第一和第二电极的静电透镜。 物镜的特征在于，静电透镜沿着粒子束的方向设置在磁性单极透镜之后。

公开(公告)号：US6051838A

公开(公告)日：2000-04-18

申请号：US947226

申请日：1997-10-08

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Reinhold Schmitt ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Reinhold Schmitt ,  Gerald Schonecker

IPC: G21K1/087 ,  H01J37/12 ,  H01J3/18

CPC classification number: H01J37/12 ,  H01J2237/1207

Abstract: An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.

Abstract translation: 一种具有用于影响粒子束的静电透镜的光学单元，其中所述透镜在所述粒子束的方向上具有至少一个第一和第二电极，所述至少一个第一和第二电极在所述粒子束的方向上彼此下游，每个所述电极可被充电并且与电接触 具有用于粒子束的通道的高电阻体。 提供了另一个组件来影响静电透镜区域中的粒子束。

公开(公告)号：US5895919A

公开(公告)日：1999-04-20

申请号：US991681

申请日：1997-12-16

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/06 ,  H01J3/02 ,  H01J37/063 ,  H01J37/073 ,  H01J37/145 ,  G21K1/08

CPC classification number: H01J3/029 ,  H01J37/063

Abstract: The invention relates to a gun lens for generating a particle beam with a cathode, an extraction electrode, an anode and a condenser lens, wherein a deceleration field is generated between the extraction electrode and the anode and the condenser lens produces a magnetic field which is superimposed on both the cathode, the extraction electrode and the anode.

Abstract translation: 本发明涉及一种用于产生具有阴极，提取电极，阳极和聚光透镜的粒子束的枪式透镜，其中在引出电极和阳极之间产生减速场，聚光透镜产生磁场， 叠加在阴极，引出电极和阳极上。