Abstract:
A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the light transmission region.
Abstract:
A spectral sensor includes a Fabry-Perot interference filter which is provided with an opening to pass light transmitted according to a distance between a first mirror and a second mirror along a facing direction; a light detector which has a light reception unit to receive the light having passed through the opening; a wiring substrate on which the light detector is mounted; and a plurality of spacers which support the filter on the wiring substrate, such that a second space continuous with a first space in the opening and including the first space when viewed from the facing direction is formed between the filter and the wiring substrate. The light detector is disposed in the second space. The light reception unit is disposed in a region corresponding to the first space in the second space, when viewed from the facing direction.
Abstract:
A surface-enhanced Raman scattering unit comprises a measurement board used upon measurement; a surface-enhanced Raman scattering element, secured to the measurement board, having a substrate and an optical function part, formed on the substrate, for generating surface-enhanced Raman scattering; and a pressing member, secured to the measurement board, having a ring-shaped contact part contacting a peripheral part of the surface-enhanced Raman scattering element and pressing the surface-enhanced Raman scattering element toward the measurement board.
Abstract:
A SERS unit 1A comprises a SERS element 2 having a substrate 21 and an optical function part 20 formed on the substrate 21, the optical function part 20 for generating surface-enhanced Raman scattering; a transportation board 3 supporting the SERS element 2 during transportation, the SERS element 2 being removed from the transportation board 3 upon measurement; and a holding part 4 having a pinching part 41 pinching the SERS element 2 in cooperation with the transportation board 3, and detachably holding the SERS element 2 in the transportation board 3.
Abstract:
A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
Abstract:
A light detection system includes a Fabry-Perot interference filter including a first mirror and a second mirror, a distance therebetween being variable, a light detection unit configured to detect light in a wavelength range of λ1 or more and λ2 or less, and a control unit configured to apply a voltage to the Fabry-Perot interference filter such that the distance changes in a distance range of d1 or more and d2 or less. For a transmission spectrum T1 (λ) of light in a case where the distance is d1, a peak transmittance T1 (λa) appears within the wavelength range, and a transmittance T1 (λ2) is less than or equal to 1%. For a transmission spectrum T2 (λ) of light in a case where the distance is d2, a peak transmittance T2 (λb) appears within the wavelength range, and a transmittance T2 (λ1) is less than or equal to 1%.
Abstract:
A mirror unit 2 includes a mirror device 20 including a base 21 and a movable mirror 22, an optical function member 13, and a fixed mirror 16 that is disposed on a side opposite to the mirror device 20 with respect to the optical function member 13. The mirror device 20 is provided with a light passage portion 24 that constitutes a first portion of an optical path between the beam splitter unit 3 and the fixed mirror 16. The optical function member 13 is provided with a light transmitting portion 14 that constitutes a second portion of the optical path between the beam splitter unit 3 and the fixed mirror 16. A second surface 21b of the base 21 and a third surface 13a of the optical function member 13 are joined to each other.
Abstract:
An optical filter device includes: a Fabry-Perot interference filter that includes: a first structural body having first and second surfaces; a second structural body having a third surface; a first mirror portion provided to the first structural body; a second mirror portion provided to the second structural body so as to face the first mirror portion via an air gap; a first driving electrode provided to the first structural body; a second driving electrode provided to the second structural body; first and third terminals electrically connected to the first driving electrode; and a second terminal electrically connected to the second driving electrode. A distance between the first driving electrode and the air gap is shorter than a distance between the second surface and the air gap. A resistance measurement unit is electrically connected to the first and third terminals and measures a resistance value of the first driving electrode.
Abstract:
Provided is a control device for controlling a Fabry-Perot interference filter having a pair of mirror parts and a pair of driving electrodes. The control device includes: a first driving source that is controlled by using a current as a control parameter, and changes the distance between the pair of mirror parts; a second driving source that is controlled by using a voltage as a control parameter, and changes the distance; and a control unit that controls the first driving source and the second driving source in such a way that the distance is changed by a first driving source in a first region and the distance is changed by the second driving source in at least one part of an region other than the first region when an region including a maximum of the voltage is defined as the first region.
Abstract:
A spectroscopic sensor includes a wiring substrate having a main surface, a light detector disposed on the main surface of the wiring substrate, a Fabry-Perot interference filter, a spacer which is provided on the main surface of the wiring substrate and supports the Fabry-Perot interference filter so that the Fabry-Perot interference filter and the light detector are separated from each other, and a stein connected to a ground potential. A second current path which has a smaller electric resistance than that of an arbitrary first current path which extends from the Fabry-Perot interference filter to the light detector via the spacer and the wiring substrate is formed between the Fabry-Perot interference filter and the stein.