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公开(公告)号：US09878943B2
公开(公告)日：2018-01-30
申请号：US15471344
申请日：2017-03-28
Applicant: Corning Incorporated
Inventor： Dana Craig Bookbinder , Robert Brett Desorcie , Hazel Benton Matthews, III , Pushkar Tandon
CPC classification number: C03C25/66 , C03B37/01205 , C03B37/01446 , C03B37/0146 , C03B37/027 , C03B2201/10 , C03B2201/12 , C03B2201/20 , C03B2201/22 , C03B2201/31 , C03B2201/32 , C03B2201/34 , C03B2201/42 , C03B2203/23 , C03B2203/24 , C03C3/06 , C03C13/045 , C03C25/1061 , C03C25/1068 , C03C2201/11 , C03C2201/22 , C03C2201/31 , C03C2203/54 , G02B6/02 , G02B6/021 , G02B6/03627 , G02B6/0365 , Y02P40/57
Abstract: The present disclosure is directed to a method of making an optical fiber with improved bend performance, the optical fiber having a core and at least one cladding layer, and a chlorine content in the in the last layer of the at least one cladding layer that is greater than 500 ppm by weight. The fiber is prepared using a mixture of a carrier gas, a gaseous chlorine source material and a gaseous reducing agent during the sintering of the last or outermost layer of the at least one cladding layer. The inclusion of the reducing gas into a mixture of the carrier gas and gaseous chlorine material reduces oxygen-rich defects that results in at least a 20% reduction in TTP during hydrogen aging testing.
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42.发明申请公开(公告)号：US20170351023A1
公开(公告)日：2017-12-07
申请号：US15537005
申请日：2015-12-15
Applicant: NKT PHOTONICS A/S
Inventor： Thomas Tanggaard ALKESKJOLD , Casper Laur BYG , Christian JAKOBSEN , Jens Kristian LYNGSØE , Kim G. JESPERSEN , Jeppe JOHANSEN , Martin Dybendal MAACK , Martin Erland Vestergaard PEDERSEN , Carsten L. THOMSEN
IPC: G02B6/036 , C03C13/04 , C03C25/10 , C03B37/027 , G02B6/14 , G02B6/02 , G02F1/365 , C03C25/60 , G02F1/35
CPC classification number: G02B6/03694 , C03B37/02781 , C03B37/0279 , C03B37/10 , C03B2201/02 , C03B2201/12 , C03B2201/21 , C03B2201/22 , C03B2203/14 , C03B2203/23 , C03B2203/42 , C03C13/045 , C03C13/046 , C03C25/1061 , C03C25/1062 , C03C25/1068 , C03C25/607 , C03C2201/02 , C03C2201/21 , C03C2201/22 , G02B6/02347 , G02B6/02357 , G02B6/02361 , G02B6/02366 , G02B6/02395 , G02B6/14 , G02F1/365 , G02F2001/3528
Abstract: The invention concerns a Photonic Crystal Fiber (PCF) a method of its production and a supercontinuum light source comprising such PCF. The PCF has a longitudinal axis and comprises a core extending along the length of said longitudinal axis and a cladding region surrounding the core. At least the cladding region comprises a plurality of microstructures in the form of inclusions extending along the longitudinal axis of the PCF in at least a microstructured length section. In at least a degradation resistant length section of the microstructured length section the PCF comprises hydrogen and/or deuterium. In at least the degradation resistant length section the PCF further comprises a main coating surrounding the cladding region, which main coating is hermetic for the hydrogen and/or deuterium at a temperature below Th, wherein Th is at least about 50° C., preferably 50° C.
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公开(公告)号：US20160002105A1
公开(公告)日：2016-01-07
申请号：US14791624
申请日：2015-07-06
Applicant: FUJIKURA LTD.
Inventor： Hiroki HAMAGUCHI
CPC classification number: C03C25/607 , C03B37/01 , C03B2201/22 , C03C13/047 , C03C25/106 , C03C2201/22 , C03C2203/54 , G02B6/02 , Y02P40/57
Abstract: A method of processing an optical fiber of the invention includes: a determination step of determining at least an ambient temperature of conditions of a diffusion treatment that causing an optical fiber to be subjected to an non-oxygen bridging atmosphere; an exposure step of exposing the optical fiber to a gas including an oxygen bridging element that is capable of processing the Non-Bridging Oxygen Hole Centers by being bonded to a non-bridging oxygen in the optical fiber, and causing the oxygen bridging element to infiltrate into the optical fiber; and a diffusion step of subsequently causing the optical fiber to be subjected to the non-oxygen bridging atmosphere in the exposure ambient temperature which is determined by the determination step and at which the optical fiber is subjected to the non-oxygen bridging atmosphere, and thereby diffusing the oxygen bridging element into the optical fiber.
Abstract translation: 一种处理本发明的光纤的方法包括：确定步骤，确定使光纤经受非氧桥接气氛的扩散处理的条件的至少环境温度; 曝光步骤，将光纤暴露于包括氧桥接元件的气体，所述氧桥接元件能够通过与所述光纤中的非桥接氧键合而将所述非桥接氧中心加工，并且使所述氧桥接元件渗透 进入光纤; 以及扩散步骤，随后在由确定步骤确定并且光纤经受非氧桥接气氛的曝光环境温度下使光纤经受非氧桥接气氛，由此 将氧桥接元件扩散到光纤中。
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公开(公告)号：US20110209503A1
公开(公告)日：2011-09-01
申请号：US13106165
申请日：2011-05-12
Applicant: Michael A. Mueller , Michael Thomas Murtagh
Inventor： Michael A. Mueller , Michael Thomas Murtagh
CPC classification number: C03C3/06 , C03C4/0085 , C03C2201/22 , C03C2201/23 , C03C2203/54 , G03F7/70958
Abstract: A method of making a fused silica article having a combined concentration of protium and deuterium in a range from about 1×1016 molecules/cm3 up to about 6×1019 molecules/cm3. In some embodiments, deuterium is present in an amount greater than its natural isotopic abundance. The method includes the steps of providing a fused silica boule, diffusing at least one of protium and deuterium into the boule, and annealing the boule to form the fused silica article. A method of diffusing hydrogen into fused silica and a fused silica article loaded with hydrogen formed by the method are also described.
Abstract translation: 制备具有约1×10 16分子/ cm 3至多约6×10 19分子/ cm 3范围内的ium和氘的组合浓度的熔融二氧化硅制品的方法。 在一些实施方案中，氘的存在量大于其天然同位素丰度。 该方法包括以下步骤：提供熔融二氧化硅焦耳，将钚和氘中的至少一种扩散到该原子核中，以及对该坯进行退火以形成熔融二氧化硅制品。 还描述了将氢扩散到熔融二氧化硅中的方法和通过该方法形成的负载有氢的熔融二氧化硅制品。
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公开(公告)号：US07732359B2
公开(公告)日：2010-06-08
申请号：US11981434
申请日：2007-10-31
Applicant: Dana Craig Bookbinder , Michael Lucien Genier , Lisa Anne Moore
Inventor： Dana Craig Bookbinder , Michael Lucien Genier , Lisa Anne Moore
CPC classification number: G02B6/102 , C03B2201/07 , C03B2201/12 , C03B2201/21 , C03B2201/22 , C03C3/06 , C03C13/047 , C03C2201/11 , C03C2201/12 , C03C2201/21 , C03C2201/22 , C03C2201/23 , C03C2201/50 , G03F1/60 , G03F7/70958 , H01J61/302
Abstract: An optical member comprising OD-doped silica glass, optionally doped with fluorine. The optical member is particularly advantageous for use in connection with radiation having a wavelength shorter than about 248 nm. In certain embodiments the optical member can be advantageously used for wavelength as short as about 157 nm.
Abstract translation: 一种光学部件，包括掺杂有掺杂二氧化硅的石英玻璃，任选掺杂氟。 光学构件特别有利于与波长短于约248nm的辐射结合使用。 在某些实施方案中，光学构件可有利地用于短至约157nm的波长。
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Patent Agency Ranking
46.发明授权Deuteroxyl-doped silica glass, optical member and lithographic system comprising same and method of making same 有权含氧化锑的石英玻璃，光学构件和包括其的光刻系统及其制造方法公开(公告)号：US07635658B2
公开(公告)日：2009-12-22
申请号：US11583619
申请日：2006-10-19
IPC: C03C3/06 , C03C15/00 , C03B19/06 , C03B37/00 , C03B37/014
CPC classification number: C03C3/06 , C03B19/06 , C03B19/066 , C03B19/12 , C03B19/14 , C03B19/1453 , C03B20/00 , C03B32/00 , C03B2201/07 , C03B2201/075 , C03B2201/08 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/32 , C03B2201/42 , C03C4/0085 , C03C2201/11 , C03C2201/12 , C03C2201/22 , C03C2201/23
Abstract: What is disclosed includes OD-doped synthetic silica glass capable of being used in optical elements for use in lithography below about 300 nm. OD-doped synthetic silica glass was found to have significantly lower polarization-induced birefringence value than non-OD-doped silica glass with comparable concentration of OH. Also disclosed are processes for making OD-doped synthetic silica glasses, optical member comprising such glasses, and lithographic systems comprising such optical member. The glass is particularly suitable for immersion lithographic systems due to the exceptionally low polarization-induced birefringence values at about 193 nm.
Abstract translation: 公开的内容包括能够用于低于约300nm的光刻中的光学元件的OD掺杂合成石英玻璃。 发现OD掺杂的合成二氧化硅玻璃具有比具有相当浓度的OH的非OD掺杂的石英玻璃具有显着更低的偏振诱导双折射值。 还公开了制造掺杂OD的合成二氧化硅玻璃，包含这种玻璃的光学构件以及包括这种光学构件的光刻系统的方法。 由于在约193nm处极度低的偏振诱发双折射值，该玻璃特别适用于浸没式光刻系统。
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公开(公告)号：US20090029842A1
公开(公告)日：2009-01-29
申请号：US11881599
申请日：2007-07-27
Applicant: Rostislav Radievich Khrapko , Nicolas LeBlond , James Edward Tingley
Inventor： Rostislav Radievich Khrapko , Nicolas LeBlond , James Edward Tingley
CPC classification number: C03B19/1453 , C03B2201/22 , C03C3/06 , C03C2201/22 , C03C2201/23
Abstract: A fused silica article having a combined concentration of hydroxyl (OH) and deuteroxyl (OD) concentration of less than 10 parts per million (ppm) and, in one embodiment, less than 1 ppm. The fused silica article is formed by drying a soot blank in a halogen-free atmosphere comprising carbon monoxide. The dried soot blank may optionally be doped to reach target levels of OH and OD concentrations and improve homogeneity within the fused silica article. The dried soot blank is then oxidized and, sintered to form the article. A method of reducing the combined concentration of OH and OD to less than 10 ppm is also described.
Abstract translation: 具有小于10ppm（ppm）的羟基（OH）和氘氧化（OD）浓度的组合浓度的熔融二氧化硅制品，在一个实施方案中小于1ppm。 熔融二氧化硅制品通过在包含一氧化碳的无卤素气氛中干燥烟炱坯料而形成。 干燥的烟炱坯料可以任选地被掺杂以达到OH和OD浓度的目标水平并且改善熔融二氧化硅制品内的均匀性。 然后将干燥的烟灰坯料氧化并烧结以形成制品。 还描述了将OH和OD的组合浓度降低至小于10ppm的方法。
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公开(公告)号：US20080131794A1
公开(公告)日：2008-06-05
申请号：US11981434
申请日：2007-10-31
Applicant: Dana Craig Bookbinder , Michael Lucien Genier , Lisa Anne Moore
Inventor： Dana Craig Bookbinder , Michael Lucien Genier , Lisa Anne Moore
CPC classification number: G02B6/102 , C03B2201/07 , C03B2201/12 , C03B2201/21 , C03B2201/22 , C03C3/06 , C03C13/047 , C03C2201/11 , C03C2201/12 , C03C2201/21 , C03C2201/22 , C03C2201/23 , C03C2201/50 , G03F1/60 , G03F7/70958 , H01J61/302
Abstract: An optical member comprising OD-doped silica glass, optionally doped with fluorine. The optical member is particularly advantageous for use in connection with radiation having a wavelength shorter than about 248 nm. In certain embodiments the optical member can be advantageously used for wavelength as short as about 157 nm.
Abstract translation: 一种光学部件，包括掺杂有掺杂二氧化硅的石英玻璃，任选掺杂氟。 光学构件特别有利于与波长短于约248nm的辐射结合使用。 在某些实施方案中，光学构件可有利地用于短至约157nm的波长。
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49.发明申请Optical fiber and preform, method of manufacturing same, and optical component made therefrom 失效光纤和预制件，其制造方法和由其制成的光学部件公开(公告)号：US20050163443A1
公开(公告)日：2005-07-28
申请号：US11074886
申请日：2005-03-07
Applicant: A. Antos , Dana Bookbinder , Richard Fiacco , Kevin Sparks
Inventor： A. Antos , Dana Bookbinder , Richard Fiacco , Kevin Sparks
IPC: C03B37/014 , C03B37/018 , C03C13/04 , G02B6/02 , G02B6/036 , G02B6/28 , G02B6/34 , G02B6/16
CPC classification number: G02B6/03694 , C03B37/01446 , C03B37/01853 , C03B2201/07 , C03B2201/10 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/31 , C03B2203/22 , C03C13/045 , C03C13/047 , C03C2201/22 , G02B6/02 , G02B6/03622 , G02B6/2835 , Y02P40/57
Abstract: An optical waveguide fiber or body having a doped outer region which can be utilized in an optical coupler, a preform which can serve as the precursor for the fiber, an optical coupler, and methods of making same. Water, for example in the form of H2O and/or D2O, may be added to the cladding of the optical waveguide fiber or body.
Abstract translation: 具有可用于光耦合器中的掺杂外部区域的光波导纤维或主体，可用作光纤的前体的预成型件，光耦合器及其制造方法。 例如可以将H 2 O 2和/或D 2 O的形式的水添加到光波导纤维或体的包层中。
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50.发明申请Optical fiber and preform, method of manufacturing same, and optical component made therefrom 失效光纤和预制件，其制造方法和由其制成的光学部件公开(公告)号：US20020094180A1
公开(公告)日：2002-07-18
申请号：US10044452
申请日：2002-01-11
Inventor： A. Joseph Antos , Dana C. Bookbinder , Richard M. Fiacco , Kevin B. Sparks
IPC: G02B006/16 , G02B006/22 , G02B006/26
CPC classification number: G02B6/03694 , C03B37/01446 , C03B37/01853 , C03B2201/07 , C03B2201/10 , C03B2201/12 , C03B2201/22 , C03B2201/23 , C03B2201/31 , C03B2203/22 , C03C13/045 , C03C13/047 , C03C2201/22 , G02B6/02 , G02B6/03622 , G02B6/2835 , Y02P40/57
Abstract: An optical waveguide fiber or body having a doped outer region which can be utilized in an optical coupler, a preform which can serve as the precursor for the fiber, an optical coupler, and methods of making same. Water, for example in the form of H2O and/or D2O, may be added to the cladding of the optical waveguide fiber or body.
Abstract translation: 具有可用于光耦合器中的掺杂外部区域的光波导纤维或主体，可用作光纤的前体的预成型件，光耦合器及其制造方法。 可以将例如以H 2 O和/或D 2 O形式的水添加到光波导纤维或体的包层中。
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