公开(公告)号：US20110280276A1

公开(公告)日：2011-11-17

申请号：US13101478

申请日：2011-05-05

Applicant: Jean-Francois Mainguet ,  Alain Chambron ,  Bruno Charrat ,  Emmanuel Defay ,  Guy-Michel Parat

Inventor： Jean-Francois Mainguet ,  Alain Chambron ,  Bruno Charrat ,  Emmanuel Defay ,  Guy-Michel Parat

IPC: G01K3/10 ,  H01L21/02

CPC classification number: G06K9/0002 ,  G01J5/024 ,  G01J5/046 ,  G01J5/10 ,  G01J5/34 ,  G01J2005/0048 ,  G01K3/10 ,  G01K7/003 ,  G06K9/00053

Abstract: A transducer for transducing time-related temperature variations into a difference in potentials includes an upper conductive electrode designed to be exposed to a time-related temperature variation to be measured, a lower conductive electrode, and at least one layer of pyroelectric material based on a III-V nitride directly interposed between the upper and lower conductive electrodes to generate, between the upper and lower conductive electrodes, a difference in potentials corresponding to the temperature variation even in the absence of external mechanical stress.

Abstract translation: 用于将与时间有关的温度变化转换为电位差的换能器包括被设计为暴露于要测量的时间相关温度变化的上导电电极，下导电电极和至少一层基于 直接介于上下导电电极之间的III-V族氮化物，即使在没有外部机械应力的情况下，在上下导电电极之间产生与温度变化相对应的电位差。

公开(公告)号：US08050884B2

公开(公告)日：2011-11-01

申请号：US11951698

申请日：2007-12-06

Applicant: Ronald N. Murata

Inventor： Ronald N. Murata

IPC: G01K11/30 ,  G01K17/00 ,  G01J5/48

CPC classification number: G01J5/602 ,  G01J5/0003 ,  G01J2005/0048 ,  G01J2005/0051 ,  G01J2005/0074 ,  G01J2005/0081 ,  G01J2005/0092

Abstract: Methods and apparatus are provided to determine the emissivity, temperature and area of an object. The methods and apparatus are designed such that the emissivity and area of the object may be separately determined as functions dependent upon the temperature of the object derived from a three or more band infrared measurement sensor. As such, the methods and apparatus may only require a regression analysis of the temperature of the object without any regression analysis of the emissivity and area of the object.

Abstract translation: 提供方法和装置来确定物体的发射率，温度和面积。 方法和装置被设计成使得物体的发射率和面积可以单独地确定为取决于从三个或更多个带状红外测量传感器导出的物体的温度的函数。 因此，方法和装置可以仅需要物体的温度的回归分析，而不对物体的发射率和面积进行任何回归分析。

公开(公告)号：US07957926B2

公开(公告)日：2011-06-07

申请号：US12787165

申请日：2010-05-25

Applicant: Paul Janis Timans

Inventor： Paul Janis Timans

IPC: G01K11/12

CPC classification number: G01J5/0896 ,  G01J5/0003 ,  G01J5/0007 ,  G01J5/0285 ,  G01J5/06 ,  G01J5/08 ,  G01J5/0803 ,  G01J5/0821 ,  G01J5/0831 ,  G01J5/0846 ,  G01J5/089 ,  G01J5/522 ,  G01J5/58 ,  G01J2005/0048 ,  G01J2005/065 ,  H01L21/324 ,  H01L21/67115 ,  H01L21/67248

Abstract: A method and system for calibrating temperature measurement devices, such as pyrometers, in thermal processing chambers are disclosed. According to the present invention, the system includes a calibrating light source that emits light energy onto a substrate contained in the thermal processing chamber. A light detector then detects the amount of light that is being transmitted through the substrate. The amount of detected light energy is then used to calibrate a temperature measurement device that is used in the system.

Abstract translation: 公开了一种在热处理室中校准温度测量装置，例如高温计的方法和系统。 根据本发明，该系统包括在包含在热处理室中的基板上发射光能的校准光源。 然后光检测器检测正在透过基板的光量。 然后使用检测到的光能量来校准在系统中使用的温度测量装置。

公开(公告)号：US07928393B2

公开(公告)日：2011-04-19

申请号：US12081370

申请日：2008-04-15

Applicant: Kevin C. Brady ,  Michael Seskin ,  Anthony J. Grichnik

Inventor： Kevin C. Brady ,  Michael Seskin ,  Anthony J. Grichnik

IPC: G01J5/02

CPC classification number: G01K1/024 ,  G01J5/0003 ,  G01J5/0022 ,  G01J5/0088 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/068 ,  G01K1/026

Abstract: A method of correlating thermal sensors data with temperature sensor data is disclosed. The method may include generating one or more temperature sensor data points and receiving the one or more temperature sensor data points at a remote location. The method may also include generating one or more thermal sensor data points or images and receiving the one or more thermal sensor data points or images at the remote location. Additionally, the method may include correlating the one or more thermal sensor data points or images based on the one or more temperature sensor data points and generating a notification when a temperature of one or more correlated thermal sensor data points or images fails to maintain a determined relationship with a preset limit in one or more locations other than the location of one or more temperature sensor data point.

Abstract translation: 公开了一种将热传感器数据与温度传感器数据相关联的方法。 该方法可以包括产生一个或多个温度传感器数据点并在远程位置接收一个或多个温度传感器数据点。 该方法还可以包括生成一个或多个热传感器数据点或图像并且在远程位置处接收一个或多个热传感器数据点或图像。 另外，该方法可以包括基于一个或多个温度传感器数据点来关联一个或多个热传感器数据点或图像，并且当一个或多个相关热传感器数据点或图像的温度不能维持确定时，产生通知 与除一个或多个温度传感器数据点的位置之外的一个或多个位置中的预设限制的关系。

公开(公告)号：US07795578B2

公开(公告)日：2010-09-14

申请号：US12293190

申请日：2007-03-14

Applicant: Nicholas Högasten ,  Peter Uddenfelt

Inventor： Nicholas Högasten ,  Peter Uddenfelt

IPC: G01D18/00

CPC classification number: H04N5/33 ,  G01J2005/0048 ,  G01J2005/0077 ,  H04N5/3651

Abstract: A method for correction of non-uniformity in signal level in different image points in an IR-camera, based on a scene being observed during movement in time of detector elements, of a camera in which the detector elements are arranged and/or of the scene, with deviating output signals for the same energy in the scene measured by different detector elements being corrected for image interference so that they provide essentially the same output signal. Micro-mechanical gyros are introduced that measure the angular velocity parallel to and perpendicular to the optical axis of the scene. The measured movement is used as an estimate for calculating the movement with a movement estimation method based on scene data. The estimated movement is coordinated with an associated image. The difference between the most recent image and the immediately preceding image or the average value of a plurality of preceding images is calculated as offset parameters. The offset parameters are updated by correction of previous offset parameters with the most recent offset parameters. The most recent image is corrected for static noise by applying the most recently produced offset parameters to the most recent image.

Abstract translation: 一种用于根据在检测器元件的移动期间观察到的场景在IR摄像机中的不同图像点中的信号电平的不均匀性的校正方法，其中检测器元件被布置在其中和/或 场景中，由不同检测器元件测量的相同能量的偏移输出信号被校正为图像干扰，使得它们提供基本上相同的输出信号。 引入微机械陀螺仪，测量与场景的光轴平行并垂直于其的角速度。 测量的运动用作基于场景数据的运动估计方法来计算运动的估计。 估计的运动与相关联的图像协调。 计算最近的图像和紧接在前的图像之间的差异或多个先前图像的平均值作为偏移参数。 通过使用最近的偏移参数校正以前的偏移参数来更新偏移参数。 通过将最近生成的偏移参数应用于最近的图像，最新的图像被修正为静态噪声。

公开(公告)号：US07791719B1

公开(公告)日：2010-09-07

申请号：US12013523

申请日：2008-01-14

Applicant: Douglas Lent Cohen ,  David James Crain ,  Richard James Hertel

Inventor： Douglas Lent Cohen ,  David James Crain ,  Richard James Hertel

IPC: G01J1/56 ,  G01P3/40

CPC classification number: G01J1/08 ,  G01J1/02 ,  G01J1/0266 ,  G01J1/04 ,  G01J1/0403 ,  G01J5/007 ,  G01J5/04 ,  G01J5/047 ,  G01J5/08 ,  G01J5/089 ,  G01J2005/0048

Abstract: An optical system measures scene inhomogeneity. The system includes a mirror for receiving radiance of a field-of-view (FOV) of a scene, and reflecting a portion of the radiance to an optical detector. A controller is coupled to the mirror for changing the FOV. The optical detector provides a signal of the reflected portion of radiance of the scene. A processor determines scene inhomogeneity, based on amplitude of the signal provided from the optical detector. The controller is configured to modulate the FOV at a periodic interval, using a sinusoidal waveform, a pulse code modulated waveform, or a pseudo-random waveform.

Abstract translation: 光学系统测量场景不均匀性。 该系统包括用于接收场景的视场（FOV）的辐射的反射镜，并将辐射的一部分反射到光学检测器。 控制器耦合到镜子以改变FOV。 光学检测器提供场景的反射部分的信号。 处理器基于从光学检测器提供的信号的幅度来确定场景不均匀性。 控制器被配置为使用正弦波形，脉冲编码调制波形或伪随机波形以周期性间隔调制FOV。

公开(公告)号：US20100213374A1

公开(公告)日：2010-08-26

申请号：US12380318

申请日：2009-02-26

Applicant: Walter B. Meinel ,  Kalin V. Lazarov

Inventor： Walter B. Meinel ,  Kalin V. Lazarov

IPC: H01L27/14 ,  H01L21/00

CPC classification number: G01J5/12 ,  G01J5/22 ,  G01J2005/0048

Abstract: A radiation sensor includes an integrated circuit radiation sensor chip (1A) including first (7) and second (8) thermopile junctions connected in series to form a thermopile (7,8) within a dielectric stack (3). The first thermopile junction (7) is insulated from a substrate (2) of the chip. A resistive heater (6) in the dielectric stack for heating the first thermopile junction is coupled to a calibration circuit (67) for calibrating responsivity of the thermopile (7,8). The calibration circuit causes a current flow in the heater and multiplies the current by a resulting voltage across the heater to determine power dissipation. A resulting thermoelectric voltage (Vout) of the thermopile (7,8) is divided by the power to provide the responsivity of the sensor.

Abstract translation: 辐射传感器包括集成电路辐射传感器芯片（1A），其包括串联连接的第一（7）和第二（8）热电堆接头，以在电介质叠层（3）内形成热电堆（7,8）。 第一热电堆结（7）与芯片的基片（2）绝缘。 用于加热第一热电堆结的电介质堆叠中的电阻加热器（6）耦合到用于校准热电堆（7,8）的响应度的校准电路（67）。 校准电路导致加热器中的电流流动，并将电流乘以加热器两端的所得电压，以确定功率耗散。 热电堆（7,8）的所得热电电压（Vout）除以功率以提供传感器的响应度。

公开(公告)号：US20100213373A1

公开(公告)日：2010-08-26

申请号：US12380316

申请日：2009-02-26

Applicant: Walter B. Meinel ,  Kalin V. Lazarov

Inventor： Walter B. Meinel ,  Kalin V. Lazarov

IPC: H01L27/14 ,  H01L21/00

CPC classification number: G01J5/12 ,  G01J2005/0048 ,  H01L27/14649 ,  H01L31/02 ,  H01L31/18

Abstract: A radiation sensor (27) includes a radiation sensor chip (1) including first (7) and second (8) thermopile junctions connected to form a thermopile (7,8). The first thermopile junction is disposed in a floating portion of a dielectric membrane (3) thermally insulated from a silicon substrate (2) of the chip, and the second thermopile junction is disposed in the dielectric membrane directly adjacent to the substrate. Bump conductors (28) are bonded to corresponding bonding pads (28A) coupled to the thermopile (7,8) to physically and electrically connect the chip to conductors on a printed circuit board (23). The silicon substrate transmits infrared radiation to the thermopile while blocking visible light.

Abstract translation: 辐射传感器（27）包括辐射传感器芯片（1），其包括连接以形成热电堆（7,8）的第一（7）和第二（8）热电堆。 第一热电堆接头设置在与芯片的硅衬底（2）热绝缘的电介质膜（3）的浮动部分中，并且第二热电堆接头设置在与衬底直接相邻的电介质膜中。 凸起导体（28）被接合到耦合到热电堆（7,8）的相应接合焊盘（28A），以将芯片物理地和电连接到印刷电路板（23）上的导体。 硅衬底将红外辐射传输到热电堆上，同时阻挡可见光。

公开(公告)号：US07750301B1

公开(公告)日：2010-07-06

申请号：US11865927

申请日：2007-10-02

Applicant: James T. Woolaway ,  Austin A. Richards

Inventor： James T. Woolaway ,  Austin A. Richards

IPC: G01J5/02

CPC classification number: G01J5/02 ,  G01J5/0275 ,  G01J5/08 ,  G01J5/0862 ,  G01J2005/0048 ,  H04N5/33

Abstract: Systems and methods are disclosed herein, as an example, to provide microbolometer resonant cavity tuning techniques and calibration techniques in accordance with one or more embodiments of the present invention. For example, in accordance with one embodiment, a method of operating an array of microbolometers on a substrate of an infrared camera system includes filtering infrared radiation to pass a first infrared radiation wavelength and to block a second infrared radiation wavelength, wherein the first infrared radiation wavelength is different than the second infrared radiation wavelength; setting a spacing between the microbolometers and the substrate to approximately tune the microbolometers to the second infrared radiation wavelength which is blocked by the filtering; and determining calibration data for the microbolometers.

Abstract translation: 作为示例，本文公开了系统和方法，以提供根据本发明的一个或多个实施例的微测辐射热计谐振腔调谐技术和校准技术。 例如，根据一个实施例，在红外相机系统的基板上操作微电热计阵列的方法包括：过滤红外辐射以通过第一红外辐射波长并阻挡第二红外辐射波长，其中第一红外辐射 波长不同于第二红外辐射波长; 设置微电热计和基板之间的间距，以近似调谐微电热计到被过滤阻挡的第二红外辐射波长; 并确定微型测光计的校准数据。

公开(公告)号：US07683321B1

公开(公告)日：2010-03-23

申请号：US12339434

申请日：2008-12-19

Applicant: Stephen R. King ,  Mathew N. Rekow ,  Paul S. Carlson

Inventor： Stephen R. King ,  Mathew N. Rekow ,  Paul S. Carlson

IPC: G01J5/00

CPC classification number: H04N5/33 ,  G01J2005/0048 ,  G01J2005/0077 ,  G01J2005/068 ,  H04N5/3651 ,  H04N5/3655

Abstract: An infrared imaging system having functionality for maintaining image quality in the presence of temperature drift of the system. Such functionality is applied repetitively to maintain image quality of a target scene, yet without continuous actuation of a shutter of the system. The functionality of the imaging system results from implementing an imager algorithm. In use, the imager algorithm functions with a calibration curve created for the imaging system, with the curve comprising a plot of system output versus target scene temperature.

Abstract translation: 一种红外成像系统具有在存在系统温度漂移的情况下保持图像质量的功能。 这样的功能被重复地应用以保持目标场景的图像质量，而没有连续致动系统的快门。 成像系统的功能来自实现成像器算法。 在使用中，成像器算法使用为成像系统创建的校准曲线，曲线包括系统输出与目标场景温度的关系曲线。