Reticle defect inspection apparatus and inspection method using thereof
    41.
    发明授权
    Reticle defect inspection apparatus and inspection method using thereof 有权
    光栅缺陷检查装置及其检查方法

    公开(公告)号:US08049897B2

    公开(公告)日:2011-11-01

    申请号:US12047844

    申请日:2008-03-13

    CPC classification number: G01N21/95607 G01N2021/95676 G01N2201/0631

    Abstract: A reticle defect inspection apparatus that suppresses deterioration of optical components resulting from luminescent spots generated by an integrator and can sustain a defect inspection with high precision for a long time is provided. The reticle defect inspection apparatus is a reticle defect inspection apparatus for inspecting for defects on a reticle using a pattern image obtained by irradiating the reticle on which a pattern is formed with light. And the apparatus includes an illuminating optical system for irradiating the reticle with an inspection light and a detecting optical system for detecting a pattern image of the reticle irradiated with the inspection light, wherein the illuminating optical system comprises an integrator for equalizing illumination distribution of the inspection light and a moving mechanism for enabling the integrator to slightly move in a direction perpendicular to an optical axis of the integrator.

    Abstract translation: 提供了一种掩模版缺陷检查装置,其抑制由积分器产生的发光点导致的光学部件的劣化,并且能够长期高精度地进行缺陷检查。 掩模版缺陷检查装置是使用通过用光照射其上形成图案的掩模版获得的图案图像来检查掩模版上的缺陷的掩模版缺陷检查装置。 该装置包括用于用检查光照射标线的照明光学系统和用于检测用检查光照射的掩模版的图案图像的检测光学系统,其中照明光学系统包括用于均衡检查的照明分布的积分器 光和移动机构,用于使积分器能够在垂直于积分器的光轴的方向上稍微移动。

    Turbidimeter employing a semiconductor laser diode and a photodiode
    42.
    发明授权
    Turbidimeter employing a semiconductor laser diode and a photodiode 失效
    浊度计采用半导体激光二极管和光电二极管

    公开(公告)号:US4725148A

    公开(公告)日:1988-02-16

    申请号:US739319

    申请日:1985-05-30

    Abstract: In a turbidimeter for measuring a turbidity of a test solution to be measured i.e. culture solution in a fermentation apparatus, a semiconductor laser diode and a semiconductor photodiode are integrally arranged in a detection portion of the turbidimeter in such a manner that a laser beam emitted from the semiconductor laser diode is made incident upon the semiconductor photodiode through the test solution. Moreover, a protection circuit for the semiconductor laser diode and the semiconductor photodiode is also arranged in the turbidimeter to cut off a current flowed therethrough when an environmental temperature becomes above a predetermined temperature. Therefore, the turbidimeter can be made small in size and light in weight, and the turbidity can be measured accurately over wide range.

    Abstract translation: 在浊度计中,用于测量待测试的测试溶液的浊度,即发酵设备中的培养溶液,半导体激光二极管和半导体光电二极管一体地布置在浊度计的检测部分中,使得从 半导体激光二极管通过测试溶液入射到半导体光电二极管上。 此外,当环境温度高于预定温度时,用于半导体激光二极管和半导体光电二极管的保护电路也布置在浊度计中以截断流过其中的电流。 因此,可以使浊度计尺寸小,重量轻,并且可以在宽范围内精确地测量浊度。

    HOMOGENIZED COHERENT EXCITATION OF A SAMPLE FOR DETERMINING MOLECULAR STRUCTURE

    公开(公告)号:US20240068947A1

    公开(公告)日:2024-02-29

    申请号:US18269557

    申请日:2021-12-22

    CPC classification number: G01N21/65 G01N2201/06113 G01N2201/0631

    Abstract: The invention provides a method for homogenized coherent excitation of a sample for determining molecular structure. The method includes selecting a monochromatic coherent light, homogenizing the monochromatic coherent light; irradiating the sample with the homogenized monochromatic light; collecting the Raman scattered light to obtain a profile and analyzing the profile to obtain chemical specific signature of the sample. The invention also provides a method for obtaining two dimensional imaging of a sample using irradiation of large sample area by homogenized monochromatic light without compromise in spatial resolution. A system for homogenized coherent excitation of a sample for determining molecular structure is also provided.

    End-Point Optical System and Method of Use
    50.
    发明申请
    End-Point Optical System and Method of Use 审中-公开
    端点光学系统及其使用方法

    公开(公告)号:US20160340715A1

    公开(公告)日:2016-11-24

    申请号:US15162559

    申请日:2016-05-23

    Abstract: Systems and methods are used to detect spectral and spatial information in a continuous flow PCR system. An incident beam of electromagnetic radiation is emitted using a laser. The incident beam is received from the laser and the incident beam is transformed into an incident line of electromagnetic radiation using a line generator. The incident line is received from the line generator using a tube array that includes one or more transparent tubes in fluid communication with one or more micro-channels. Reflected electromagnetic radiation is received from the tube array and the reflected electromagnetic radiation is focused using an imaging lens. The focused reflected electromagnetic radiation is received from the imaging lens and a spectral intensity is detected from the focused reflected electromagnetic radiation using a spectrograph. The focused reflected electromagnetic radiation is received from the imaging lens and a location of the spectral intensity is detected using an imager.

    Abstract translation: 系统和方法用于检测连续流PCR系统中的光谱和空间信息。 使用激光发射入射的电磁辐射光束。 从激光器接收入射光束,并且使用线发生器将入射光束变换成电磁辐射的入射线。 使用管阵列从线发生器接收入射线,该管阵列包括与一个或多个微通道流体连通的一个或多个透明管。 从管阵列接收反射的电磁辐射,并且使用成像透镜聚焦反射的电磁辐射。 从成像透镜接收聚焦的反射电磁辐射,并且使用光谱仪从聚焦的反射电磁辐射检测光谱强度。 从成像透镜接收聚焦的反射电磁辐射,并使用成像器检测光谱强度的位置。

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