Optical metrology for in-situ measurements

    公开(公告)号:US09915624B2

    公开(公告)日:2018-03-13

    申请号:US15385495

    申请日:2016-12-20

    Abstract: A method and system are presented for use in controlling a process applied to a patterned structure having regions of different layered stacks. The method comprises: sequentially receiving measured data indicative of optical response of the structure being processed during a predetermined processing time, and generating a corresponding sequence of data pieces measured over time; and analyzing and processing the sequence of the data pieces and determining at least one main parameter of the structure. The analyzing and processing comprises: processing a part of said sequence of the data pieces and obtaining data indicative of one or more parameters of the structure; utilizing said data indicative of said one or more parameters of the structure and optimizing model data describing a relation between an optical response of the structure and one or more parameters of the structure; utilizing the optimized model data for processing at least a part of the sequence of the measured data pieces, and determining at least one parameters of the structure characterizing said process applied to the structure, and generating data indicative thereof.

    Method and Apparatus for Calculating Electromagnetic Scattering Properties of Finite Periodic Structures

    公开(公告)号:US20180011014A1

    公开(公告)日:2018-01-11

    申请号:US15644072

    申请日:2017-07-07

    CPC classification number: G01N21/4788 G01N2201/12 G03F7/705 G03F7/70625

    Abstract: A method of determining electromagnetic scattering properties of a finite periodic structure has the steps: 1002: Calculating a single-cell contrast current density, within a unit-cell supporting domain of a single one of a finite collection of unit cells. 1004: Calculating a scattered electric field outside the finite collection of unit cells, by integrating, over the single unit cell's supporting domain, a Green's function with the determined single-cell contrast current density. 1006: The Green's function is obtained for observation points outside the finite collection of unit cells by summation across the finite collection of unit cells. The Green's function integrated with the determined single-cell contrast current density is obtained for observation points above the supporting domain with respect to a substrate underlying the finite periodic structure. 1008: Determining an electromagnetic scattering property, for example a diffraction pattern, of the finite periodic structure using the calculated scattered electric field.

Patent Agency Ranking