公开(公告)号：US07550716B2

公开(公告)日：2009-06-23

申请号：US11581574

申请日：2006-10-17

Applicant: Osamu Furuhashi ,  Kiyoshi Ogawa

Inventor： Osamu Furuhashi ,  Kiyoshi Ogawa

IPC: B01D59/44 ,  H01J49/00

CPC classification number: H01J49/005 ,  H01J27/026

Abstract: The present invention provides a mass spectrometer capable of breaking even a sample molecule having a large molecular weight by a CID process. In an embodiment of the present invention, the mass spectrometer includes an ionizing source 10 for turning a sample into ions, mass-separating sections 40 and 60 for mass-separating the sample ions, a detecting section 20 for detecting the mass-separated ions, and a collision section (collision cell) 51 located on an ion path extending from the ionizing source 10 through the mass-separating sections 40 and 60 to the detecting section 20. It also includes a cluster generator 30 for producing clusters of atoms or molecules. The clusters produced by the cluster generator 30 are introduced into the collision cell 51. The use of the clusters having a huge mass as the target gas in the CID process enables the collision energy of the sample ions to be efficiently assigned to the breaking of the ions.

Abstract translation: 本发明提供一种能够通过CID方法破坏甚至具有大分子量的样品分子的质谱仪。 在本发明的一个实施例中，质谱仪包括用于将样品转换成离子的电离源10，用于质量分离样品离子的质量分离部分40和60;用于检测质量分离的离子的检测部分20， 以及位于从电离源10经由质量分离部40,60延伸到检测部20的离子路径上的碰撞部（碰撞单元）51。还包括用于产生原子或分子簇的簇生成器30。 由簇生成器30产生的簇被引入到碰撞池51.在CID处理中使用具有巨大质量的簇作为目标气体使得能够有效地将样品离子的碰撞能量分配给 离子。

公开(公告)号：US20090140165A1

公开(公告)日：2009-06-04

申请号：US11950128

申请日：2007-12-04

Applicant: John J. Hautala ,  Matthew C. Gwinn ,  Jerald P. Dykstra

Inventor： John J. Hautala ,  Matthew C. Gwinn ,  Jerald P. Dykstra

IPC: G21K5/00 ,  G21K5/08

CPC classification number: H01J37/304 ,  H01J27/026 ,  H01J37/3053 ,  H01J2237/006 ,  H01J2237/0812 ,  H01J2237/24507 ,  H01J2237/30455 ,  H01L21/26566

Abstract: Methods and apparatus for controlling a gas cluster ion beam formed from a plurality of process gases in a gas mixture. The methods and apparatus involve measuring gas analysis data relating to the composition of the gas mixture and modifying the irradiation of the workpiece in response to the detected parameter. The gas analysis data can be derived from samples of the composition of the gas mixture flowing from a gas source to the gas cluster ion beam apparatus or samples of the residual gases inside the vacuum vessel of the gas cluster ion beam apparatus.

Abstract translation: 用于控制由气体混合物中的多种处理气体形成的气体簇离子束的方法和装置。 所述方法和装置包括测量与气体混合物的组成相关的气体分析数据，并响应于检测到的参数来修改工件的照射。 气体分析数据可以从气体源到气体簇离子束装置的气体混合物的组成的样本或气体团簇离子束装置的真空容器内的残留气体的样品的样品得到。

公开(公告)号：US20080087219A1

公开(公告)日：2008-04-17

申请号：US11940136

申请日：2007-11-14

Applicant: Thomas Horsky

Inventor： Thomas Horsky

IPC: B05C11/10 ,  H01J7/24

CPC classification number: C23C14/48 ,  H01J27/026 ,  H01J27/08 ,  H01J27/205 ,  H01J37/08 ,  H01J37/3171 ,  H01J2237/0815 ,  H01J2237/082 ,  H01J2237/0827 ,  H01J2237/31701 ,  H01L21/265 ,  H01L21/26513 ,  H01L21/2658 ,  H01L21/823814

Abstract: An ion source is disclosed for providing a range of ion beams consisting of either ionized clusters, such as B2Hx+, B5Hx+, B18Hx+, B18Hx+, P4+ or As4+, or monomer ions, such as Ge+, In+, Sb+, B+, As+, and P+, to enable cluster implants and monomer implants into silicon substrates for the purpose of manufacturing CMOS devices, and to do so with high productivity. The range of ion beams is generated by a universal ion source in accordance with the present invention which is configured to operate in two discrete modes: an electron impact mode, which efficiently produces ionized clusters, and an arc discharge mode, which efficiently produces monomer ions.

Abstract translation: 公开了一种离子源，用于提供由离子簇组成的一系列离子束，例如B 2 H 2，H 2，SUP 2 +，/ B 2， B，B，B，B，B，C，B，C， 或B 1，B 3，B 3，...，...，...， 或者单体离子，例如Ge +，Sb +，SO 3 +，...， 为了使集群植入物和单体植入物进入硅衬底以用于制造CMOS器件，以及 以高生产力这样做。 离子束的范围由根据本发明的通用离子源产生，其被配置为以两种离散模式操作：电子冲击模式，其有效地产生离子簇，以及电弧放电模式，其有效地产生单体离子 。

公开(公告)号：US07247845B1

公开(公告)日：2007-07-24

申请号：US10031542

申请日：2000-07-20

Applicant: Christoph Gebhardt ,  Hartmut Schroder

Inventor： Christoph Gebhardt ,  Hartmut Schroder

IPC: H01J49/26

CPC classification number: F03H1/00 ,  H01J27/026 ,  H01J49/0463 ,  H05H3/02

Abstract: A method for cluster fragmentation comprises the production of at least one cluster which contains a carrier substance and the fragmentation of the cluster into cluster fragments, with the cluster being loaded before the fragmentation with at least one reaction partner and the reaction partner being part of at least one cluster fragment after the fragmentation. A cluster beam system for performing the method, and applications of the cluster fragmentation for analysis and purification of surfaces, for analysis of clusters, and for the operation of ion thrusters are also described.

Abstract translation: 簇分裂的方法包括产生含有载体物质的至少一个簇和将簇分解成簇片段，其中簇在与至少一个反应伴侣和反应伴侣之间的一部分在碎片化之前被加载 碎片后至少有一个集群片段。 还描述了用于执行该方法的群集束系统，以及用于分析和净化表面的群集碎片的应用，用于群集分析以及离子推进器的操作的应用。

公开(公告)号：US20050205802A1

公开(公告)日：2005-09-22

申请号：US11084632

申请日：2005-03-18

Applicant: David Swenson ,  John Hautala ,  Michael Mack ,  Martin Tabat ,  Matthew Gwinn

Inventor： David Swenson ,  John Hautala ,  Michael Mack ,  Martin Tabat ,  Matthew Gwinn

IPC: H01J27/00 ,  H01J27/02 ,  H01J37/305

CPC classification number: H01J27/026 ,  H01J37/3056 ,  H01J2237/0812 ,  H01J2237/188 ,  H01J2237/3151

Abstract: Apparatus and methods for improving processing of workpieces with gas-cluster ion beams and modifying the gas-cluster ion energy distribution in the GCIB. In a reduced-pressure environment, generating an energetic gas-cluster ion beam and subjecting the beam to increased pressure region.

Abstract translation: 用气团聚合离子束改善工件加工并改进GCIB中气团离子能量分布的装置和方法。 在减压环境中，产生高能气体团簇离子束，并使束受到增加的压力区域。

公开(公告)号：US06660999B2

公开(公告)日：2003-12-09

申请号：US09965900

申请日：2001-09-28

Applicant: Raymond J. Bemish

Inventor： Raymond J. Bemish

IPC: B01D5944

CPC classification number: H01J49/10 ,  H01J27/026

Abstract: A method and device for mass spectrometry analysis, wherein a mass spectrometer is adapted for use with helium droplets, as an ionization site medium, with a proton being initially captured by a large helium droplet (˜10,000 helium atoms) and then cooled evaporatively to 0.4 Kelvin. The protonated helium droplet then picks up a neutral molecule of interest and the neutral molecule is protonated inside of the droplet with the liquid helium droplet acting as a heat bath to provide rapid cooling of the newly formed protonated molecule. As a result, there is essentially no energy available, at 0.4 Kelvin, for the protonated molecule to fragment. Remaining liquid helium is removed and the stably maintained protonated molecule is detected by a mass spectrometer. Since the molecules do not fragment when protonated (ionized), each compound in a mixture analyses gives one mass and the number of ions of a particular mass detected is directly proportional to the molar percentage of that mass in the sample. The device for effecting the method, comprises the elements of: (1) Helium cluster or droplet source; (2) Proton source for introduction of protons to the droplet (i.e., ionization); (3) atmospheric pressure (AP) Source for reduction of pressure to form a low pressure stream; (4) Cell pick-up elements where compound molecules are protonated or ionized at low temperature; (5) Desolvation area for removal of residual helium; and (6) Mass spectrometer and detector.

Abstract translation: 用于质谱分析的方法和装置，其中质谱仪适用于氦液滴，作为电离位点介质，质子最初被大氦液滴（〜10,000氦原子）捕获，然后蒸发冷却至0.4 开尔文 质子化的氦液滴然后拾取一个中性分子的兴趣，并且中性分子在液滴内被质子化，液体氦液滴作为热浴，以提供新形成的质子化分子的快速冷却。 因此，质子化分子片段基本上没有能量以0.4开尔文可用。 除去剩余的液氦，通过质谱仪检测稳定保持的质子化分子。 由于分子在质子化（离子化）时不会分裂，所以混合物分析中的每种化合物都会产生一个质量，并且检测到的特定质量的离子数与样品中该质量的摩尔百分比成正比。 用于实现该方法的装置包括以下元件：（1）氦簇或液滴源; （2）将质子引入液滴的质子源（即电离）; （3）大气压（AP）用于降低压力以形成低压流的源; （4）化合物分子在低温下质子化或离子化的细胞吸收元件; （5）去除残留氦的去溶剂区; 和（6）质谱仪和检测器。

公开(公告)号：US5767511A

公开(公告)日：1998-06-16

申请号：US686005

申请日：1996-07-25

Applicant: Michel Macler

Inventor： Michel Macler

IPC: H01J49/04 ,  H01J49/26

CPC classification number: H01J49/147 ,  H01J27/026 ,  H01J49/0422 ,  H01J2237/0812

Abstract: Clusters, such as Argon gas clusters, provided by a cluster source are doped in a water pick-up cell, and subsequent electron impact ionization of the doped clusters in a mass spectrometer or gas analyzer produce ionized cluster fragments that retain water. Water is supplied under pressure to the pick-up cell disposed within a vacuum chamber, and the water pressure is metered by a metering valve and monitored by a pressure gauge. A vacuum pump is coupled to the vacuum chamber that generates a vacuum within the vacuum chamber and pick-up cell. Interaction between the gas clusters and the water in the pick-up cell produces doped clusters, some of which retain water. The electron impact ionized doped cluster fragments are analyzed using the mass spectrometer or gas analyzer permits determination (detection) of the mean cluster size of the clusters. The variation in intensity of the water-containing fragments versus water pressure in the pick-up cell exhibits a Poisson behavior, from which the cross-section and mean cluster size is derived.

Abstract translation: 由聚簇源提供的诸如氩气团簇的簇被掺杂在吸水池中，并且随后在质谱仪或气体分析仪中的掺杂簇的电子轰击电离产生保留水的电离簇片段。 将水在压力下供给到设置在真空室内的拾取池中，并且通过计量阀计量水压并通过压力计监测水压。 真空泵耦合到真空室，在真空室和拾取单元内产生真空。 气体簇和吸收池中的水之间的相互作用产生掺杂的簇，其中一些保留水。 使用质谱仪或气体分析仪分析电子轰击电离掺杂的簇片段，以允许确定（检测）簇的平均簇大小。 含水碎片的强度与拾取池中水压的变化呈现出泊松行为，从中可以得出横截面和平均簇尺寸。

公开(公告)号：US20160071694A1

公开(公告)日：2016-03-10

申请号：US14932049

申请日：2015-11-04

Applicant: JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED

Inventor： Akinobu SATO ,  Akiko SUZUKI ,  Emmanuel BOURELLE ,  Jiro MATSUO ,  Toshio SEKI

IPC: H01J37/317 ,  H01J37/305

CPC classification number: C23F4/00 ,  H01J27/026 ,  H01J37/20 ,  H01J37/3053 ,  H01J37/317 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01L21/3065

Abstract: A solid surface smoothing apparatus for smoothing a solid surface with a gas cluster ion beam includes a plurality of gas cluster ion beam emitters, each emitter having an irradiation axis and emitting a respective gas cluster ion beam along its irradiation axis onto the solid surface, wherein irradiation axes of the plurality of the gas cluster ion beam emitters are not parallel to each other so as to expose substances in the solid surface transferred laterally by collisions with gas clusters to collisions with other gas clusters so that the substances do not remain on the solid surface.

Abstract translation: 用气体簇离子束平滑固体表面的固体表面平滑装置包括多个气体簇离子束发射器，每个发射器具有照射轴并且沿其照射轴将相应的气体簇离子束发射到固体表面上，其中 多个气体簇离子束发射体的照射轴线彼此不平行，以便暴露在侧面通过与气体团簇碰撞而横向转移的物质与其它气体团簇碰撞的物质，使得物质不保留在固体 表面。

公开(公告)号：US20160068970A1

公开(公告)日：2016-03-10

申请号：US14932038

申请日：2015-11-04

Applicant: JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED

Inventor： Akinobu SATO ,  Akiko SUZUKI ,  Emmanuel BOURELLE ,  Jiro MATSUO ,  Toshio SEKI

IPC: C23F4/00

CPC classification number: C23F4/00 ,  H01J27/026 ,  H01J37/20 ,  H01J37/3053 ,  H01J37/317 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01L21/3065

Abstract: A method of smoothing a solid surface with a gas cluster ion beam includes irradiating the solid surface with the gas cluster ion beam. The irradiating includes, when scratches which can be likened to a line-and-space pattern structure with widths and heights on the order of a submicrometer to micrometer are present on the solid surface, a process of emitting the gas cluster ion beam so as to expose substances, which remain on side-walls of the scratches due to lateral transferal caused by collisions with gas clusters, to other gas clusters, and the gas cluster ion beam diverges non-concentrically and/or non-uniformly.

Abstract translation: 用气体团簇离子束平滑固体表面的方法包括用气体团簇离子束照射固体表面。 照射包括，当固体表面上存在可以比较具有亚微米级到微米级的宽度和高度的线间距图案结构的划痕时，发射气体簇离子束的过程，以便 暴露由于与气体团簇碰撞引起的横向传递而残留在划痕的侧壁上的物质到其它气体团簇，并且气体团簇离子束非同心地和/或不均匀地发散。

公开(公告)号：US20140319333A1

公开(公告)日：2014-10-30

申请号：US14265766

申请日：2014-04-30

Applicant: Ionoptika Limited

Inventor： Paul William Miles Blenkinsopp ,  Andrew Mark Barber

IPC: H01J49/10 ,  H01J49/00 ,  H01J49/04

CPC classification number: H01J49/142 ,  H01J27/026 ,  H01J49/0031

Abstract: A mass spectrometer comprising means for producing a primary beam of ions for bombarding a sample under vacuum, and a detector for detecting a secondary beam of ions released from the sample. The primary beam of ions includes water clusters where each water cluster contains between 1 and 10,000 water molecules.

Abstract translation: 一种质谱仪，包括用于产生用于在真空下轰击样品的一次离子束的装置和用于检测从样品释放出的次级次级束的检测器。 主要离子束包括水簇，其中每个水簇含有1至10,000个水分子。