公开(公告)号：US6002477A

公开(公告)日：1999-12-14

申请号：US68798

申请日：1998-05-15

Applicant: Michael Ron Hammer

Inventor： Michael Ron Hammer

IPC: G01J3/04 ,  G01J3/42 ,  G01J11/00 ,  G01N21/27 ,  G01N21/59

CPC classification number: G01J3/42

Abstract: A spectrophotometer including a light source (1) operative to emit a beam of light (15), an optical system for directing the light beam (15) to a sample (8) to be analyzed, and a detector (9) which detects the intensity of the light beam after the beam interacts with the sample (8). The light source (1) is operative to emit bursts of light separated by an interval during which no light is emitted. By way of example, a xenon tube may be used for that purpose. The spectrophotometer measures the intensity of the light beam generated by each burst of light after that beam interacts with the sample. Each such light beam may be divided into first and second parts (5 and 4) prior to interaction with the sample (8), and the optical system is arranged to direct the first part (5) to the sample (8) and to direct the second part (4) to a second detector (7) for conducting a reference measurement. A dark signal measurement may be conducted immediately before or after each burst of light.

Abstract translation: PCT No.PCT / AU97 / 00603 Sec。 371日期：1998年5月15日 102（e）日期1998年5月15日PCT提交1997年9月16日PCT公布。 第WO98 / 12541号公报 日期1998年3月26日一种分光光度计，包括可操作地发射光束的光源（1），用于将光束（15）引导到待分析的样品（8）的光学系统，以及检测器 9），其在光束与样品（8）相互作用之后检测光束的强度。 光源（1）可操作地发射以不发射光的间隔分开的一束光。 作为示例，可以使用氙管用于该目的。 分光光度计测量在该光束与样品相互作用后由每个光束产生的光束的强度。 在与样品（8）相互作用之前，每个这样的光束可以分成第一和第二部分（5和4），并且光学系统被布置成将第一部分（5）引导到样品（8）并引导 第二部分（4）到用于进行参考测量的第二检测器（7）。 可以在每次突发的光之前或之后立即进行暗信号测量。

公开(公告)号：US5866935A

公开(公告)日：1999-02-02

申请号：US756295

申请日：1996-11-25

Applicant: Michael R. Sogard

Inventor： Michael R. Sogard

IPC: G02B27/58 ,  G01J1/42 ,  G01J3/04 ,  G01J4/00 ,  G01Q60/18 ,  G03F7/20 ,  H01L21/027 ,  H01L31/0232

CPC classification number: G01J1/4257 ,  B82Y20/00 ,  B82Y35/00 ,  G01J3/04 ,  G01J4/00 ,  G01Q60/22 ,  G03F7/70358 ,  G03F7/70566 ,  G03F7/706

Abstract: A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.

Abstract translation: 使用亚波长狭缝分析光学系统的空间图像的方法和装置。 狭缝配置产生比通过圆形孔径可获得的信噪比更高的信噪比。 狭缝还允许分析航空图像的极化。 在替代实施例中，使用隧道狭缝。 隧道狭缝包括安装到基底的光学透明的脊状结构，由薄的平面金属膜覆盖的组合结构。

公开(公告)号：US5767966A

公开(公告)日：1998-06-16

申请号：US719365

申请日：1996-09-25

Applicant: Takashi Iwasaki

Inventor： Takashi Iwasaki

IPC: G01J3/04 ,  G01J3/18 ,  G01J3/28

CPC classification number: G01J3/18 ,  G01J3/04

Abstract: Light source 1 emits light composed of various wavelength components from an emission end 1a. An optical fiber 2 receives the light from one end portion 2a and emits the light from the other end portion 2b. A Czerny-Turner dispersion spectroscope is formed by this end portion 2b, concave mirrors 3 and 5, a diffraction grating 4, and an emission slit 6. A mask 9 restricts the aperture diameter, so as to remove light which has spread wider than the aperture diameter of the mask 9 from the light which has passed through the emission slit 6.

Abstract translation: 光源1从发射端1a发射由各种波长成分组成的光。 光纤2从一个端部2a接收光，并从另一端部2b发射光。 由该端部2b，凹面镜3和5，衍射光栅4和发射狭缝6形成Czerny-Turner色散光谱仪。掩模9限制光圈直径，以便去除已经扩展到 掩模9的光径从已经通过发光狭缝6的光线开始。

公开(公告)号：US5748310A

公开(公告)日：1998-05-05

申请号：US791512

申请日：1997-01-30

Applicant: Kenichi Fujiyoshi

Inventor： Kenichi Fujiyoshi

IPC: G01J3/04 ,  G01J3/12 ,  G01J3/18 ,  G02B5/00 ,  G01J3/06

CPC classification number: G01J3/04 ,  G01J3/12 ,  G01J3/18

Abstract: A high-precision spectrum separation apparatus enables to generate an output beam having a specific wavelength from a multi-wavelength input beam. The input beam is focused on a diffraction grating through a focusing lens to generate a number of diffracted component beams, of which a diffracted component beam having a specific wavelength is directed to an output slit, resulting in an output beam having well-defined spectral properties. When the output beam is required to have a band of wavelengths, the fixed focal distance of the focusing lens is shorter than is required to generate well-defined output beam, resulting that the diffracted component beam cannot be focused precisely on the output slit. In such a case, a flat glass plate is introduced between the focusing lens and the output slit to adjust the focal-point of the focusing lens so that the diffracted component beams are focused precisely on the output slit. An output beam having well-defined spectral properties is thus produced from the apparatus.

Abstract translation: 高精度频谱分离装置能够从多波长输入光束产生具有特定波长的输出光束。 输入光束通过聚焦透镜聚焦在衍射光栅上以产生多个衍射分量光束，其中具有特定波长的衍射分量光束被引导到输出狭缝，导致输出光束具有明确的光谱特性 。 当输出光束需要具有波长带时，聚焦透镜的固定焦距比生成明确定义的输出光束所需要的短，导致衍射分量光束不能精确地聚焦在输出狭缝上。 在这种情况下，在聚焦透镜和输出狭缝之间引入平板玻璃板，以调整聚焦透镜的焦点，使得衍射分量光束精确地聚焦在输出狭缝上。 因此，从设备产生具有明确定义的光谱特性的输出光束。

公开(公告)号：US5631731A

公开(公告)日：1997-05-20

申请号：US209026

申请日：1994-03-09

Applicant: Michael R. Sogard

Inventor： Michael R. Sogard

IPC: G02B27/58 ,  G01J1/42 ,  G01J3/04 ,  G01J4/00 ,  G01Q60/18 ,  G03F7/20 ,  H01L21/027 ,  G03B27/42

CPC classification number: G01J1/4257 ,  B82Y20/00 ,  B82Y35/00 ,  G01J3/04 ,  G01J4/00 ,  G01Q60/22 ,  G03F7/70358 ,  G03F7/70566 ,  G03F7/706

Abstract: A method and apparatus to analyze the aerial image of an optical system using a subwavelength slit. A slit configuration yields a higher signal-to-noise ratio than that achievable with a round aperture. The slit also allows the polarization of the aerial image to be analyzed. In an alternative embodiment a tunneling slit is used. The tunneling slit comprises an optically transparent ridge-like structure mounted to a substrate, the combined structure covered by a thin, planar metal film.

Abstract translation: 使用亚波长狭缝分析光学系统的空间图像的方法和装置。 狭缝配置产生比通过圆形孔径可获得的信噪比更高的信噪比。 狭缝还允许分析航空图像的极化。 在替代实施例中，使用隧道狭缝。 隧道狭缝包括安装到基底的光学透明的脊状结构，由薄的平面金属膜覆盖的组合结构。

公开(公告)号：US5627671A

公开(公告)日：1997-05-06

申请号：US336750

申请日：1994-11-07

Applicant: Hiroaki Yamura ,  Shigenori Hashimoto ,  Takeshi Kanomata ,  Takahiro Kadota ,  Shinichi Kikuchi

Inventor： Hiroaki Yamura ,  Shigenori Hashimoto ,  Takeshi Kanomata ,  Takahiro Kadota ,  Shinichi Kikuchi

IPC: G01J3/04

CPC classification number: G01J3/04

Abstract: A spectrometer slit switching mechanism includes a slit plate having a plurality of entrance slits and exit slits formed at prescribed positions, parallel support rods for supporting the slit plate so as to be movable along the support rods, a screw portion formed on at least one support rod for transmitting forced to the slit plate, and a driving motor for transmitting rotational energy to the support rod provided with the screw portion, wherein the entrance slits are arranged on a line that runs parallel to the direction of movement of the slit plate and the exit slits are arranged on a line that is both parallel to and spaced a prescribed distance from the line on which the entrance slits are arranged. In accordance with this structure, the driving motor is operated in the clockwise and counterclockwise directions to raise and lower the slit plate in order to align a desired entrance slit and exit slit with the light path of the spectrometer. Also, after the desired slits have been positioned and the driving motor is stopped, the slit plate is prevented from moving downwards by the engagement of the slit plate with the screw portion of the support rod, and this eliminates the need for an excitation current to be supplied to the driving motor.

Abstract translation: 光谱仪狭缝切换机构包括具有形成在规定位置的多个入口狭缝和出口狭缝的狭缝板，用于支撑狭缝板的平行支撑杆，以便沿着支撑杆可移动;形成在至少一个支撑件上的螺纹部分 用于传递到狭缝板的杆;以及驱动电机，用于将旋转能量传递到设置有螺纹部分的支撑杆，其中，入口狭缝布置在平行于狭缝板的运动方向延伸的线上， 出口狭缝布置在与布置有入口狭缝的线平行并且间隔规定距离的线上。 根据这种结构，驱动电动机沿顺时针和逆时针方向操作以升高和降低狭缝板，以使所需的入口狭缝和出口狭缝与光谱仪的光路对准。 此外，在所需的狭缝已经定位并且驱动电机停止之后，通过狭缝板与支撑杆的螺钉部分的接合来防止狭缝板向下移动，因此不需要激励电流 提供给驱动电机。

公开(公告)号：US5627639A

公开(公告)日：1997-05-06

申请号：US476708

申请日：1995-06-06

Applicant: Stephen B. Mende ,  Edward S. Claflin

Inventor： Stephen B. Mende ,  Edward S. Claflin

IPC: G01J3/28 ,  G01J3/04

CPC classification number: G01J3/2823 ,  G01J3/2846

Abstract: An imaging spectrometer that includes a mask (214) that has an array of n rows (302) and n columns (304) of transmissive elements (306) for transmitting the light from a plurality of locations of an image and of opaque elements (308) for blocking light from a plurality of locations of the image. The transmissive and opaque elements are arranged in a Hadamard pattern having rows (and columns) that are different cyclic iterations of an m-sequence. A grating (110) disperses the transmitted light from the transmissive elements (306) in a linear spatial relationship in a predetermined relationship to the wavelength of the transmitted light. A detector array (406) has a plurality of detector elements (408) arranged in a row to receive the dispersed transmitted light from the grating (110). Each detector element (408) provides an intensity signal indicative of the intensity of the light impinging thereon. A computer (410) generates a spectrum matrix having elements indicative of the frequency spectrum of the plurality of locations of the image. The spectrum matrix is produced by matrix multiplication of an inverse mask pattern matrix and a data matrix. Each element of the mask pattern matrix is either a 0 for opaque elements (308) or a 1 for transmissive elements (306). The inverse mask pattern matrix is generated by replacing each 0 of the pattern by -1, taking the transpose, and multiplying by 2/(n+1). Each row of the data matrix represents data taken from the same location of the image and through a corresponding row of the mask (214).

Abstract translation: 一种成像光谱仪，其包括具有用于从图像的多个位置和不透明元件（308）传输光的n行（302）和n列（304）的阵列的掩模（214） ），用于阻挡来自图像的多个位置的光。 透射和不透明元件以具有m序列的不同循环迭代的行（和列）的Hadamard图案排列。 光栅（110）将来自透射元件（306）的透射光以与透射光的波长成预定关系的线性空间关系分散。 检测器阵列（406）具有排列成一行的多个检测器元件（408），以接收来自光栅（110）的分散的透射光。 每个检测器元件（408）提供指示入射到其上的光的强度的强度信号。 计算机（410）产生具有指示图像的多个位置的频谱的元素的频谱矩阵。 频谱矩阵由逆掩模图案矩阵和数据矩阵的矩阵乘法产生。 掩模图案矩阵的每个元素对于不透明元素（308）而言为0，对于透射元件（306）为1。 通过将模式的每个0替换为-1，进行转置，乘以2 /（n + 1）来生成逆掩模图案矩阵。 数据矩阵的每一行表示从图像的相同位置和掩模（214）的相应行获得的数据。

公开(公告)号：US5212537A

公开(公告)日：1993-05-18

申请号：US551349

申请日：1990-07-12

Applicant: Monoocher Birang ,  Kien Chuc ,  Ronnie Northrup ,  Bruno Strul

Inventor： Monoocher Birang ,  Kien Chuc ,  Ronnie Northrup ,  Bruno Strul

IPC: G01M11/00 ,  G01J3/02 ,  G01J3/04 ,  G01J3/28

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0221 ,  G01J2003/2866 ,  G01N2201/082

Abstract: A photometer having a plurality of input fibers to its optical entrance, at least one of which is for transmission of calibration light and at least one of which is for transmission of sample light. The exit ends of these fibers are aligned into a linear array, thereby producing an effective entrance slit for the optical entrance of the photometer. The fiber(s) for calibration light are positioned at the center of the linear array to avoid miscalibration due to photometer astigmatism.

Abstract translation: 一种光度计，其具有到其入口的多个输入光纤，其中至少一个用于校准光的透射，并且其中至少一个用于透射样品光。 这些光纤的出射端被排列成直线阵列，由此产生用于光度计的光学入口的有效入口狭缝。 用于校准光的光纤位于线性阵列的中心，以避免由于光度计散光而造成的误差。

公开(公告)号：US4856898A

公开(公告)日：1989-08-15

申请号：US166870

申请日：1988-03-11

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Felix Kerstan ,  Guenther Moebius ,  Horst Sanders

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Felix Kerstan ,  Guenther Moebius ,  Horst Sanders

IPC: G01J3/04 ,  G01J3/12 ,  G01J3/18

CPC classification number: G01J3/04 ,  G01J3/1809 ,  G01J2003/1208

Abstract: An adjustable Echelle spectrometer arrangement which can be used in single- and multi-element analysis by the emission or absorption of optical radiation. To compensate all the manufacturing and setup errors, the only arrangements present are those to change the height of the entry slit arrangement above the base plate and to rotate the dispersion prism about a first axis, approximately parallel to its roof edge, and about a second axis, that is vertical thereto. This compensates for the effect of errors associated with component and setup parameters which results from greater tolerances, without impairing mechanical and thermal stability and imaging quality.

Abstract translation: 可调节的Echelle光谱仪布置，可用于通过发射或吸收光学辐射的单元素和多元素分析。 为了补偿所有的制造和设置误差，存在的仅仅是在基板上方改变进入狭缝布置的高度并使分散棱镜围绕大致平行于其屋顶边缘的第一轴线旋转的大约第二 轴，与其垂直。 这补偿了由较大公差引起的与部件和设置参数相关的误差的影响，而不损害机械和热稳定性和成像质量。

公开(公告)号：US4790659A

公开(公告)日：1988-12-13

申请号：US108510

申请日：1987-10-13

Applicant: Marko Erman ,  Claude E. Hily ,  Jean Le Bris

Inventor： Marko Erman ,  Claude E. Hily ,  Jean Le Bris

IPC: G01J3/10 ,  G01J3/02 ,  G01J3/04 ,  G01J3/447 ,  G01N21/21

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/04 ,  G01N21/211

Abstract: The invention relates to an optical sample illumination device for a spectroscopic ellipsometer of the rotating analyzer type. The image of the exit slit (F') of a monochromator is conjugated with a point (F'.sub.2) of a surface of a sample (E) by means of two spherical mirrors (M.sub.7 and M.sub.8). An astigmatism correction slit (F'.sub.15) is arranged in the proximity of the conjugate (F'.sub.1) of the exit slit(F') of the monochromator with respect to the spherical mirror (M.sub.7) and is arranged perpendicularly to this exit slit and to the optical path so that said correction slit is conjugated with the said point (F'.sub.2) through the spherical mirror (M.sub.8). A luminous spot without astigmatic errors is thus obtained.

Abstract translation: 本发明涉及一种旋转分析仪型光谱椭偏仪的光学样本照明装置。 单色仪的出射狭缝（F'）的图像通过两个球面镜（M7和M8）与样品（E）的表面的点（F'2）共轭。 散光校正狭缝（F'15）布置在单色仪相对于球面镜（M7）的出射狭缝（F'）的共轭物（F'1）附近，并且垂直于该出射狭缝 以及光路，使得所述校正狭缝通过球面镜（M8）与所述点（F'2）共轭。 从而获得没有散光误差的发光点。