公开(公告)号：US20190307914A1

公开(公告)日：2019-10-10

申请号：US16434678

申请日：2019-06-07

Applicant: Charles Houston WADDELL

Inventor： Charles Houston WADDELL

IPC: A61L9/22 ,  H01J33/02

Abstract: A flexible ion generator device that includes a dielectric layer having a first end, a second end, a first side, a second side, a top side, and a bottom side, at least one trace positioned on the dielectric layer and having a plurality of emitters engaged to the at least one trace, wherein the trace extends along the top side of the dielectric layer and along a substantially parallel plane with respect to either the first side or the second side and in predetermined locations periodically along the length of the dielectric layer, the at least one trace extends downwardly from the parallel plane for a distance and then upwardly towards the parallel plane.

公开(公告)号：US20190198282A1

公开(公告)日：2019-06-27

申请号：US16231667

申请日：2018-12-24

Applicant: Nuctech Company Limited

Inventor： Yaohong LIU ,  Liang ZHANG ,  Xiaotong ZHANG

IPC: H01J33/02 ,  H05H5/03

CPC classification number: H01J33/02 ,  H01J2229/8626 ,  H05H5/03

Abstract: The present disclosure provides a drawer-type carrying device for an accelerator and an cabin structure for the accelerator, the drawer-type carrying device for the accelerator includes a frame mechanism and a drawing mechanism. The frame mechanism is used for installing the accelerator; the drawing mechanism is connected with the frame mechanism and the frame mechanism is movable relative to the drawing mechanism. The cabin structure for the accelerator includes a cabin, a shielding mechanism and a drawer-type carrying device for the accelerator. The cabin has a working area and a maintenance area. The shielding mechanism is disposed in the working area and has a side opening door facing towards the maintenance area. The frame mechanism is capable of drawn from the shielding mechanism into the maintenance area when the side opening door is opened.

公开(公告)号：US10322205B2

公开(公告)日：2019-06-18

申请号：US15816027

申请日：2017-11-17

Applicant: Charles Houston Waddell

Inventor： Charles Houston Waddell

IPC: A61L9/22 ,  H01J33/02

Abstract: The present invention provides methods and systems for the flexible ion generation device includes at least one dielectric layer, at least one trace having a first end and a second end, the at least one trace is engaged to the at least one dielectric layer, and at least one emitter engaged to the trace for emitting ions.

公开(公告)号：US09412550B2

公开(公告)日：2016-08-09

申请号：US14126036

申请日：2012-06-27

Applicant: Werner Haag ,  Dominique Cloetta ,  Urs Hostettler ,  Benno Zigerlig ,  Toni Waber

Inventor： Werner Haag ,  Dominique Cloetta ,  Urs Hostettler ,  Benno Zigerlig ,  Toni Waber

IPC: H01J17/24 ,  H01J19/70 ,  H01J61/26 ,  H01J7/18 ,  A61L2/08 ,  H01J3/02 ,  H01J33/02 ,  H01J9/24

CPC classification number: H01J7/18 ,  A61L2/087 ,  H01J3/027 ,  H01J7/186 ,  H01J9/24 ,  H01J33/02

Abstract: An electron beam device has a body provided with an exit window, said body is forming or is at least partly forming a vacuum chamber, the vacuum chamber comprising therein a cathode housing and at least one electron generating filament. At least one getter sheet is provided between the cathode housing and the filament. The invention is further comprising a getter sheet for use in an electron beam device and a method of manufacturing an electron beam device comprising at least one getter sheet.

Abstract translation: 电子束装置具有设置有出射窗的主体，所述主体正在形成或至少部分地形成真空室，真空室包括阴极壳体和至少一个电子产生细丝。 在阴极壳体和灯丝之间设置至少一个吸气片。 本发明还包括用于电子束装置的吸气片和制造包括至少一个吸气片的电子束装置的方法。

公开(公告)号：US20070090303A1

公开(公告)日：2007-04-26

申请号：US11258215

申请日：2005-10-26

Applicant: Anders Kristiansson ,  Lars-Ake Naslund ,  Hans Hallstadius

Inventor： Anders Kristiansson ,  Lars-Ake Naslund ,  Hans Hallstadius

IPC: H01J33/02 ,  H01J37/244

CPC classification number: G01R19/0061

Abstract: A detector and method are disclosed for sensing an intensity of an electron beam. An exemplary detector includes a multilayer composite structure having a conductive core, an insulating layer formed on the conductive core, and an outer conductive layer electrically connected to a voltage potential and formed on the insulating layer. A support is configured to locate the conductive core in alignment with an electron beam generator, between an electron beam generator and a target area, and within a direct path of an electron beam to be generated by the electron beam generator.

Abstract translation: 公开了用于感测电子束强度的检测器和方法。 一种示例性检测器包括具有导电芯的多层复合结构，形成在导电芯上的绝缘层，以及电连接到电压电位并形成在绝缘层上的外导电层。 支撑件被配置成将导电芯与电子束发生器，电子束发生器和目标区域之间以及由电子束发生器产生的电子束的直接路径内的定位。

公开(公告)号：US5955829A

公开(公告)日：1999-09-21

申请号：US934678

申请日：1997-09-22

Applicant: Ulf Seyfert ,  Olaf Roder ,  Siegfried Schiller ,  Siegfried Panzer ,  Robert Mohs

Inventor： Ulf Seyfert ,  Olaf Roder ,  Siegfried Schiller ,  Siegfried Panzer ,  Robert Mohs

IPC: H01J33/02 ,  H01J37/065 ,  H01J1/46

CPC classification number: H01J33/02 ,  H01J37/065

Abstract: Electron gun with band-shaped beams that includes a vacuum chamber extend in a longitudinal direction, a beam window running in the longitudinal direction along the vacuum chamber, and a cathode control-electrode system positioned within the vacuum chamber in the longitudinal direction. The cathode control-electrode system includes at least one substantially straight cathode positioned substantially parallel to a longitudinal axis of the cathode control-electrode system and the at least one substantially straight cathode has bulges formed at defined distances. The bulges are shaped to produce a substantially homogeneous current density distribution along the at least one substantially straight cathode and support units are located in the cathode control-electrode system to correspond with the bulges. The bulges are removably couplable to the support units.

Abstract translation: 具有带状梁的电子枪，其包括在纵向方向上延伸的真空室，沿着该真空室在纵向方向上延伸的梁窗，以及沿纵向方向定位在真空室内的阴极控制电极系统。 阴极控制电极系统包括基本上平行于阴极控制电极系统的纵轴定向的至少一个基本上直的阴极，并且至少一个基本上直的阴极具有以限定的距离形成的凸起。 凸起成形为沿着至少一个基本上直的阴极产生基本均匀的电流密度分布，并且支撑单元位于阴极控制电极系统中以对应于凸起。 凸起可拆卸地联接到支撑单元。

公开(公告)号：US5631471A

公开(公告)日：1997-05-20

申请号：US528957

申请日：1995-09-15

Applicant: Peter Anderl ,  Klaus Bloemer ,  Alfred Mueller ,  Ulrich Schwab ,  Eberhard Hartmann ,  Reiner Mehnert ,  Alexander Mende

Inventor： Peter Anderl ,  Klaus Bloemer ,  Alfred Mueller ,  Ulrich Schwab ,  Eberhard Hartmann ,  Reiner Mehnert ,  Alexander Mende

IPC: B05D3/06 ,  H01J33/02 ,  H01J37/065

CPC classification number: H01J33/02 ,  B05D3/068

Abstract: The invention relates to a device to irradiate surfaces with electrons, especially to harden surface layers. The device includes a vacuum chamber that has an electron beam window; an electron beam-permeable film that closes off the vacuum chamber from the ambient medium; and an electron beam generating system, consisting of a cathode and a forming electrode which are connected to a high-voltage and beam current feed line. In order to achieve an increase of the electron beam power and to reduce the energy losses during the transfer out of the electron beam window in such a device, according to the invention, the forming electrode is designed as a tubular hollow body with inner hollow space lengthwise dividers and with a lengthwise slit that is open towards the electron beam window. A wire-shaped cathode is arranged in each hollow space segment divided off by the hollow space lengthwise divider.

Abstract translation: 本发明涉及一种用电子照射表面的装置，特别涉及硬化表面层。 该装置包括具有电子束窗的真空室; 一个电子束可透过的膜，它从真空室中封闭环境介质; 以及由阴极和成形电极组成的电子束产生系统，其连接到高压和束电流馈送线。 根据本发明，为了实现电子束功率的增加和减少在这种装置中的电子束窗口传送期间的能量损失，成形电极被设计成具有内部中空空间的管状空心体 并且具有向电子束窗开放的纵向狭缝。 在由中空空间纵向分隔线分隔的每个中空空间段中布置有线状阴极。

公开(公告)号：US5523577A

公开(公告)日：1996-06-04

申请号：US360372

申请日：1994-12-21

Applicant: Peter R. Schonberg ,  Russell G. Schonberg ,  David R. Fadness

Inventor： Peter R. Schonberg ,  Russell G. Schonberg ,  David R. Fadness

IPC: A62D3/00 ,  A62D3/15 ,  A62D3/34 ,  A62D3/38 ,  A62D101/20 ,  A62D101/22 ,  B01D53/00 ,  B01D53/32 ,  B01D53/34 ,  B01D53/75 ,  B01J19/08 ,  B01J19/12 ,  B01J19/24 ,  B09C1/00 ,  B09C1/06 ,  B09C1/08 ,  C02F1/00 ,  C02F1/30 ,  C02F1/72 ,  C02F1/76 ,  C02F1/78 ,  H01J33/00 ,  H01J33/02

CPC classification number: B01D53/007 ,  A62D3/15 ,  B01D53/323 ,  B01D53/75 ,  B01J19/085 ,  B01J19/2415 ,  B01J19/2425 ,  B09C1/00 ,  B09C1/06 ,  B09C1/08 ,  C02F1/30 ,  C02F1/722 ,  C02F1/76 ,  C02F1/766 ,  C02F1/78 ,  H01J33/00 ,  H01J33/02 ,  A62D2101/20 ,  A62D2203/10 ,  B01D2257/708 ,  B01D2259/812 ,  B01J2219/00076 ,  B01J2219/00103 ,  B01J2219/00132 ,  B01J2219/00153 ,  B01J2219/00159 ,  B01J2219/00162 ,  C02F1/008 ,  C02F1/305

Abstract: An electron beam source or generator is described for the treatment of toxic materials in a treatment system in which electron beams are reacted with a flowing influent in a reaction chamber. The system is modular allowing different configurations as demanded by the site and by the clean-up job. It is also portable in that it can be easily moved from place to place. If mounted on a movable base it can be taken from place to place for use.

公开(公告)号：US5325271A

公开(公告)日：1994-06-28

申请号：US896178

申请日：1992-06-10

Applicant: James T. Hutchisson

Inventor： James T. Hutchisson

IPC: B60Q1/26 ,  F21K99/00 ,  F21S8/10 ,  H05B33/08 ,  F21V8/00 ,  H01J33/02

CPC classification number: H05B33/0812 ,  B60Q1/2696 ,  B60Q1/32 ,  F21S48/215 ,  F21W2101/00 ,  F21Y2107/10 ,  F21Y2115/10 ,  Y02B20/343

Abstract: A lamp assembly (10) for use as a vehicle marker lamp or a vehicle clearance lamp is disclosed. A lamp assembly includes a multifaceted prismatic diffuser (12) to which a number of LEDs (14) are fitted. The diffuser has an outwardly directed portion (20), a center portion (22), and an inwardly directed portion (24). The outwardly directed portion and inwardly directed portion are both formed with angularly offset facets (26-38). The LEDs are fitted into openings (40) that are formed in the facets (32, 34) of the inwardly directed portion of the diffuser. When the LEDs are energized, the light emitted thereby is initially diffused throughout all of the diffuser. It is then emitted from the facets forming the outer portion of the diffuser such that it can be seen over a wide viewing angle.

Abstract translation: 公开了一种用作车辆标志灯或车辆间隙灯的灯组件（10）。 灯组件包括多个方形的棱柱形扩散器（12），多个LED（14）安装在该多面体棱镜扩散器上。 扩散器具有向外指向部分（20），中心部分（22）和向内指向部分（24）。 向外指向的部分和向内指向的部分都形成有角度偏移的平面（26-38）。 LED被装配到形成在扩散器的向内指向部分的小平面（32,34）中的开口（40）中。 当LED通电时，由此发射的光最初扩散到整个漫射器中。 然后从形成扩散器的外部的小平面发射，使得其可以在宽的视角上看到。

公开(公告)号：US4560880A

公开(公告)日：1985-12-24

申请号：US533823

申请日：1983-09-19

Applicant: Paul F. Petric ,  Michael S. Foley ,  John J. Waz ,  Robert W. Milgate, III

Inventor： Paul F. Petric ,  Michael S. Foley ,  John J. Waz ,  Robert W. Milgate, III

IPC: H01J37/20 ,  H01J37/18 ,  H01J37/28 ,  H01J37/30 ,  H01L21/027 ,  H01L21/265 ,  H01L21/68 ,  H01J33/02

CPC classification number: H01L21/68

Abstract: Apparatus for positioning a semiconductor wafer with respect to a localized vacuum envelope so as to maintain a prescribed gap between the tip of the vacuum envelope and the wafer includes an x-y table, a stage assembly movable along the z-axis for holding the wafer and a z-axis actuator assembly. The z-axis actuator assembly includes a plurality of fluid-containing bellows coupled between the x-y table and the stage assembly and a hydraulic controller operated by a linear stepper motor for varying the fluid volume in each of the bellows in response to an actuator control signal so as to move the stage assembly along the z-axis. The z-axis actuator assembly can further include a flexible disk positioned in the plane of x-y movement and coupled between the x-y table and the stage assembly for preventing lateral and rotational movement of the stage assembly relative to the x-y table. The positioning apparatus is suitable for use in an electron beam lithography system.

Abstract translation: 用于将半导体晶片相对于局部真空外壳定位以便在真空外壳和晶片的尖端之间保持规定间隙的装置包括xy台，可沿z轴移动以保持晶片的台架组件和 z轴致动器组件。 z轴致动器组件包括耦合在xy台和台组件之间的多个含流体的波纹管和由线性步进电机操作的液压控制器，用于响应于致动器控制信号改变每个波纹管中的流体体积 以使台架组件沿z轴移动。 z轴致动器组件还可以包括定位在x-y运动平面中并耦合在x-y工作台和台架组件之间的柔性盘，用于防止平台组件相对于x-y工作台的横向和旋转运动。 定位装置适用于电子束光刻系统。