公开(公告)号：US4514682A

公开(公告)日：1985-04-30

申请号：US398542

申请日：1982-07-15

Applicant: Hans-Peter Feuerbaum

Inventor： Hans-Peter Feuerbaum

IPC: G01R31/26 ,  G01Q30/02 ,  G01R31/302 ,  H01J37/252 ,  H01J49/08 ,  H01J49/44 ,  H01L21/66 ,  G01N27/00

CPC classification number: H01J49/08 ,  H01J49/44

Abstract: An improved secondary electron spectrometer for measuring voltages occurring on a specimen, such as an integrated circuit chip, utilizing an electron probe has a grating structure for measuring the energy distribution of the secondary electrons independently of the angular distribution of the secondary electrons at the measuring point on the specimen. If the secondary electron spectrometer has an extraction electrode and a deceleration electrode, the grating structure is spherically symmetric.

Abstract translation: 用于测量在诸如集成电路芯片的样本上发生的电压的改进的二次电子光谱仪利用电子探针具有用于独立于测量点处的二次电子的角分布来测量二次电子的能量分布的光栅结构 在标本上。 如果二次电子光谱仪具有提取电极和减速电极，则光栅结构是球形对称的。

公开(公告)号：US12278100B2

公开(公告)日：2025-04-15

申请号：US17785728

申请日：2020-12-16

Applicant: Leybold GmbH

Inventor： Niklas Pengemann ,  Yessica Brachthaeuser ,  Thorsten Benter

IPC: H01K1/18 ,  H01J49/08 ,  H01J49/14

Abstract: The invention relates to a holding device for at least one filament, comprising: at least one filament receptacle for receiving the at least one filament. The holding device is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to a container of an ionization device. The invention also relates to a mass spectrometer comprising: an ionization device having a container in which an ionization space for ionizing a gas is formed, at least one holding device which is designed for the detachable attachment, in particular clamping attachment, of the at least one filament receptacle to the container, and a vacuum housing to which the holding device, in particular a base body of the holding device, is detachably connected.

公开(公告)号：US20230411135A1

公开(公告)日：2023-12-21

申请号：US18251853

申请日：2021-11-19

Applicant: Thermo Finnigan LLC

Inventor： Dustin D. Holden ,  Nicholas A. Pedrazas

IPC: H01J49/10 ,  H01J49/08

CPC classification number: H01J49/10 ,  H01J49/08

Abstract: A mass spectrometer includes an ionization assembly including an ionization chamber and at least one ion lens. The removable ionization assembly has a primary axis defined by the direction of an ion beam exiting the ionization assembly, and the ionization chamber and the at least one ion lens arranged along the primary axis. The mass spectrometer further includes an electron source aligned along the primary axis of the ionization assembly and a magnet assembly including a magnet. The electron source configured to provide an electron beam parallel to the primary axis. The magnet assembly movable between a first position in which the magnet is positioned to allow removal of the ion source and a second position in which the magnet is aligned with the electron source.

公开(公告)号：US10985002B2

公开(公告)日：2021-04-20

申请号：US16438342

申请日：2019-06-11

Applicant: PERKINELMER HEALTH SCIENCES, INC.

Inventor： Adam Patkin

IPC: H01J49/00 ,  H01J49/08

Abstract: Certain configurations of an ionization source comprising a multipolar rod assembly are described. In some examples, the multipolar rod assembly can be configured to provide a magnetic field and a radio frequency field into an ion volume formed by a substantially parallel arrangement of rods of the multipolar rod assembly. The ionization source may also comprise an electron source configured to provide electrons into the ion volume of the multipolar rod assembly to ionize analyte introduced into the ion volume. Systems and methods using the ionization source are also described.

公开(公告)号：US10541122B2

公开(公告)日：2020-01-21

申请号：US15621241

申请日：2017-06-13

Applicant: MKS Instruments, Inc.

Inventor： James E. Blessing ,  Jonathan Leslie ,  Jonathan Hugh Batey

IPC: H01J49/14 ,  H01J49/08

Abstract: Apparatus (e.g., ion source), systems (e.g., residual gas analyzer), and methods provide extended life and improved analytical stability of mass spectrometers in the presence of contamination gases while achieving substantial preferential ionization of sampled gases over internal background gases. One embodiment is an ion source that includes a gas source, nozzle, electron source, and electrodes. The gas source delivers gas via the nozzle to an evacuated ionization volume and is at a higher pressure than that of the evacuated ionization volume. Gas passing through the nozzle freely expands in an ionization region of the ionization volume. The electron source emits electrons through the expanding gas in the ionization region to ionize at least a portion of the expanding gas. The electrodes create electrical fields for ion flow from the ionization region to a mass filter and are located at distances from the nozzle and oriented to limit their exposure to the gas.

公开(公告)号：US20190287775A1

公开(公告)日：2019-09-19

申请号：US16298654

申请日：2019-03-11

Applicant: Agilent Technologies, Inc.

Inventor： Kenneth R. Newton ,  Nigel P. Gore ,  Mark Denning

IPC: H01J49/00 ,  H01J49/08 ,  H01J49/06

Abstract: Electron capture dissociation (ECD) is performed by transmitting an electron beam through a cell along an electron beam axis, generating plasma in the cell by energizing a gas with the electron beam, and transmitting an ion beam through the interaction region along an ion beam axis to produce fragment ions. Generating the plasma forms an interaction region in the cell spaced from and not intersecting the electron beam, and including low-energy electrons effective for ECD. The ion beam axis may be at an angle to and offset from the ion beam axis, such that the electron beam does not intersect the ion beam.

公开(公告)号：US10236165B2

公开(公告)日：2019-03-19

申请号：US16055080

申请日：2018-08-04

Applicant: The United States of America, as represented by the Secretary of the Navy

Inventor： Benjamin R Conley

IPC: G01J5/02 ,  H01J40/06 ,  H04N5/33 ,  H01J40/16 ,  H01J43/24 ,  H01J47/00 ,  H01J49/08

Abstract: Exemplary metamaterial photocathodes enable detection of light from visible through long wave infrared wavelengths. Metamaterial stacks, comprising gold, silicon, and cesium-oxide, coupled to a semiconductor allow hot electrons to efficiently enter a vacuum. The hot electrons are multiplied in a multichannel plate and directly through another vacuum towards a phosphorus screen.

公开(公告)号：US20180358217A1

公开(公告)日：2018-12-13

申请号：US15621241

申请日：2017-06-13

Applicant: MKS Instruments, Inc.

Inventor： James E. Blessing ,  Jonathan Leslie ,  Jonathan Hugh Batey

IPC: H01J49/14 ,  H01J49/08

CPC classification number: H01J49/147 ,  H01J49/08

Abstract: Apparatus (e.g., ion source), systems (e.g., residual gas analyzer), and methods provide extended life and improved analytical stability of mass spectrometers in the presence of contamination gases while achieving substantial preferential ionization of sampled gases over internal background gases. One embodiment is an ion source that includes a gas source, nozzle, electron source, and electrodes. The gas source delivers gas via the nozzle to an evacuated ionization volume and is at a higher pressure than that of the evacuated ionization volume. Gas passing through the nozzle freely expands in an ionization region of the ionization volume. The electron source emits electrons through the expanding gas in the ionization region to ionize at least a portion of the expanding gas. The electrodes create electrical fields for ion flow from the ionization region to a mass filter and are located at distances from the nozzle and oriented to limit their exposure to the gas.

公开(公告)号：US09899201B1

公开(公告)日：2018-02-20

申请号：US15346977

申请日：2016-11-09

Applicant: Bruker Daltonics, Inc.

Inventor： Melvin Andrew Park

IPC: H01J49/40 ,  H01J49/06 ,  H01J49/08 ,  H01J49/02

CPC classification number: H01J49/08 ,  H01J43/246 ,  H01J49/025 ,  H01J49/027 ,  H01J49/40

Abstract: The invention relates to the linear dynamic range of ion abundance measurement devices in mass spectrometers, such as time-of-flight mass spectrometers. The invention solves the problem of ion current peak saturation by producing a second ion measurement signal at an intermediate stage of amplification in a secondary electron multiplier, e.g. a signal generated between the two multichannel plates in chevron arrangement. Because saturation effects are observed only in later stages of amplification, the signal from the intermediate stage of amplification will remain linear even at high ion intensities and will remain outside saturation. In the case of a discrete dynode detector this could encompass, for example, placement of a detection grid between two dynodes near the middle of the amplification chain. The invention uses detection of the image current generated by the passing electrons.

公开(公告)号：US09741551B2

公开(公告)日：2017-08-22

申请号：US15332734

申请日：2016-10-24

Applicant: Thermo Fisher Scientific (Bremen) GmbH

Inventor： Alexander Alekseevich Makarov

IPC: H01J49/00 ,  H01J49/28 ,  H01J49/02 ,  H01J49/38 ,  H01J49/42 ,  H01J49/08

CPC classification number: H01J49/282 ,  H01J49/027 ,  H01J49/08 ,  H01J49/38 ,  H01J49/4245

Abstract: Mass analyzers and methods of ion detection for a mass analyzer are provided. An electrostatic field generator provides an electrostatic field causing ion packets to oscillate along a direction. A pulse transient signal is detected over a time duration that is significantly shorter than a period of the ion oscillation or using pulse detection electrodes having a width that is significantly smaller than a span of ion harmonic motion. A harmonic transient signal is also detected. Ion intensity with respect to mass-to-charge ratio is then identified based on the pulse transient signal and the harmonic transient signal.