公开(公告)号：US20120327416A1

公开(公告)日：2012-12-27

申请号：US13579838

申请日：2011-02-15

Applicant: Rainer Simons ,  Armin Schmidt

Inventor： Rainer Simons ,  Armin Schmidt

IPC: G01J3/46

CPC classification number: G01J3/20 ,  G01J3/02 ,  G01J3/0286 ,  G01J3/443

Abstract: The invention relates to a spectrometer comprising a hollow main optical body having at least one light channel, a light source, a diffraction grating having a grating central point, a light inlet opening, and a detector unit, which are arranged in such a way that the focal curve of the spectrometer satisfies the back focus equation. In order to create a spectrometer having sufficient spectral resolution from a low-price, light, and easy-to-process material, which spectrometer is able to operate in a large temperature interval even without thermostatic control, according to the invention the light inlet opening is arranged on a compensation body, the compensation body is arranged in the light channel and fastened to the main optical body between the light source and the diffraction grating, and the compensation body is dimensioned in such a way that the compensation body changes the distance between the light inlet opening and the grating central point when the main optical body thermally expands.

Abstract translation: 本发明涉及一种光谱仪，其包括具有至少一个光通道的中空主光学主体，光源，具有光栅中心点的衍射光栅，光入口和检测器单元，其布置成 光谱仪的焦点曲线满足后焦点方程。 为了从低价格，轻便且易于处理的材料制造具有足够的光谱分辨率的光谱仪，即使没有恒温控制，该光谱仪也能够在大的温度范围内操作，根据本发明，光入口开口 被配置在补偿体上，补偿体配置在光通道中并且紧固在光源与衍射光栅之间的主光学体上，并且补偿体的尺寸使得补偿体的尺寸使得补偿体之间的距离 当主光学体热膨胀时，光入口和光栅中心点。

公开(公告)号：US20120268730A1

公开(公告)日：2012-10-25

申请号：US13540109

申请日：2012-07-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to an apparatus and related method of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本发明涉及在产品生产过程中产品样品的高速分析的装置和相关方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US20120261578A1

公开(公告)日：2012-10-18

申请号：US13160509

申请日：2011-06-15

Applicant: David C. Scott ,  Kelly M. Rickey ,  Alexander Ksendzov ,  Warren P. George ,  Abdullah S. Aljabri ,  Joel M. Steinkraus

Inventor： David C. Scott ,  Kelly M. Rickey ,  Alexander Ksendzov ,  Warren P. George ,  Abdullah S. Aljabri ,  Joel M. Steinkraus

IPC: G01J3/28 ,  G01J5/02

CPC classification number: G01N21/031 ,  G01J3/0205 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/4338 ,  G01N21/3504 ,  G01N2021/3513 ,  G01N2201/0636

Abstract: An infrared laser spectrometer employs a laser and a thermoelectrically cooler detector. The spectrometer uses a monolithic ring mirror with a single aperture that serves to accept the input laser illumination and the output optical signal. The laser is tunable. The number of passes of the input laser illumination can be controlled, so as to define a laser path length. In some embodiments, the ring mirror is open to the atmosphere, and in other embodiments the ring mirror is closed from the ambient atmosphere to allow samples of known origin to be measured in the spectrometer.

Abstract translation: 红外激光光谱仪采用激光和热电冷却器检测器。 光谱仪使用具有单个孔径的单片环镜，其用于接受输入激光照明和输出光信号。 激光是可调的。 可以控制输入激光照射的通过次数，以便限定激光路径长度。 在一些实施例中，环形反射镜对大气开放，并且在其它实施例中，环形镜从环境大气封闭，以允许在光谱仪中测量已知来源的样品。

公开(公告)号：US20120234522A1

公开(公告)日：2012-09-20

申请号：US13046924

申请日：2011-03-14

Applicant: William E. Hunt, JR. ,  Michael P. Chrisp

Inventor： William E. Hunt, JR. ,  Michael P. Chrisp

IPC: F28F7/00

CPC classification number: G01J3/0202 ,  G01J3/0286 ,  G01J3/2803 ,  G01J3/36

Abstract: A focal plane assembly facilitates a molybdenum base plate being mounted to another plate made from aluminum. The molybdenum pin is an interference fit (press fit) in the aluminum base plate. An annular cut out area in the base plate forms two annular flexures.

Abstract translation: 焦平面组件便于将钼基板安装到由铝制成的另一个板上。 钼销是铝基板中的过盈配合（压配合）。 底板中的环形切割区域形成两个环形弯曲部。

公开(公告)号：US08237929B2

公开(公告)日：2012-08-07

申请号：US13196802

申请日：2011-08-02

Applicant: Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

Inventor： Michael L. Myrick ,  Robert P. Freese ,  William Soltmann ,  David L. Perkins

IPC: G01N21/00

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0235 ,  G01J3/0243 ,  G01J3/0286 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/1213 ,  G01N2201/1293

Abstract: The present subject matter relates to methods of high-speed analysis of product samples during production of the product. Light is directed to a portion of a product under analysis and reflected from or transmitted through the product toward optical detectors. Signals from the optical detectors are compared to determine characteristics of the product under analysis. Temperature within the monitoring system may be monitored in order to provide compensation for the signals produced by the optical detectors. The products under analysis may be stationary, moved by an inspection point by conveyor or other means, or may be contained within a container, the container including a window portion through which the product illuminating light may pass.

Abstract translation: 本主题涉及产品生产过程中产品样品的高速分析方法。 光被引导到被分析产品的一部分，从产品反射或透射到光学检测器。 将来自光学检测器的信号进行比较，以确定正在分析的产品的特性。 可以监视监视系统内的温度，以便为由光学检测器产生的信号提供补偿。 被分析的产品可以是固定的，由检查点通过输送机或其他方式移动，或者可以容纳在容器内，该容器包括产品照明光通过的窗口部分。

公开(公告)号：US08189192B2

公开(公告)日：2012-05-29

申请号：US12491546

申请日：2009-06-25

Applicant: Pete Huening ,  Robert H. Hart ,  Eric L. Buckland

Inventor： Pete Huening ,  Robert H. Hart ,  Eric L. Buckland

IPC: G01J3/28

CPC classification number: G01J3/1838 ,  A61B5/0066 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/0256 ,  G01J3/0262 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/2803 ,  G01N2021/1787 ,  G02B5/32

Abstract: A Spectrometer is provided including a camera and an axial symmetric camera mount configured to receive the camera and to rotate. The spectrometer furthers include an input for providing optical radiation to a spectrometer system; a diffraction grating for dispersing the optical radiation along a prescribed plane; at least one lens for focusing wavelength-dispersed light onto at least one array of a detector of optical radiation, wherein the camera has at least one linear array of elements for detecting optical radiation; a mechanical housing, wherein the axial symmetric camera mount is configured to couple the camera to the mechanical housing; and a means for rotating the camera coupled to the mechanical housing about an axis. Related systems and methods are also provided.

Abstract translation: 提供了一种光谱仪，其包括相机和配置成接收相机并旋转的轴向对称相机底座。 光谱仪还包括用于向光谱仪系统提供光辐射的输入; 用于沿着规定平面分散光学辐射的衍射光栅; 至少一个透镜，用于将波长分散的光聚焦到光学辐射检测器的至少一个阵列上，其中相机具有用于检测光学辐射的至少一个线性阵列的元件; 机械壳体，其中所述轴向对称相机底座被配置为将所述照相机耦合到所述机械壳体; 以及用于围绕轴线旋转耦合到机械壳体的相机的装置。 还提供了相关系统和方法。

公开(公告)号：US08184287B2

公开(公告)日：2012-05-22

申请号：US12547317

申请日：2009-08-25

Applicant: Mark A. Hamilton ,  John E. Goulter

Inventor： Mark A. Hamilton ,  John E. Goulter

IPC: G01N21/67 ,  G01N21/63

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0272 ,  G01J3/0283 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/18

Abstract: An optical emission spectroscopic system contains multiple distinct light paths that provide increased light to a spectrometer, thereby increasing sensitivity and signal-to-noise of the system.

Abstract translation: 光发射光谱系统包含多个不同的光路，其向光谱仪提供增加的光，从而增加系统的灵敏度和信号对噪声。

公开(公告)号：US20120120395A1

公开(公告)日：2012-05-17

申请号：US13293265

申请日：2011-11-10

Applicant: Jae Won HAHN

Inventor： Jae Won HAHN

IPC: G01J3/28

CPC classification number: G01J3/0229 ,  G01J3/0286 ,  G01J3/443 ,  H01J49/0422 ,  H01J49/068 ,  H05K9/009

Abstract: A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.

Abstract translation: 提供了用于防止光信号强度降低的装置的装置，光发射光谱仪，光学仪器和包括其的质谱仪。 用于防止强度降低的装置包括具有能够阻挡从用于晶片处理的等离子体场辐射的RF电磁波的网格结构的屏蔽滤波器，安装在用于测量等离子体的光发射光谱仪的光学窗口的前面 从等离子体场的发射光谱图像中收集通过网格的带电粒子。

公开(公告)号：US20120113522A1

公开(公告)日：2012-05-10

申请号：US13348723

申请日：2012-01-12

Applicant: Alexander Jacobson ,  Zvi Bleier

Inventor： Alexander Jacobson ,  Zvi Bleier

IPC: G02B27/14 ,  B23P11/00 ,  F16F1/18 ,  G02B27/10 ,  F16M13/00

CPC classification number: G01J3/02 ,  G01J3/0202 ,  G01J3/0286 ,  G01J3/453 ,  G02B7/008 ,  G02B7/181 ,  Y10T29/49826

Abstract: A monolithic frame for optics used in interferometers where the material of the monolithic frame may have a substantially different coefficient of thermal expansion from the beamsplitter and compensator without warping, bending or distorting the optics. This is accomplished through providing a securing apparatus holding the optics in place while isolating the expansion thereof from the expansion of the frame. Stability in optical alignment is therefore achieved without requiring a single material or materials of essentially identical coefficients of thermal expansion. The present invention provides stability in situations where it is not possible to utilize a single material for every component of the interferometer.

Abstract translation: 用于干涉仪的光学单片框架，其中整体框架的材料可能具有与分束器和补偿器基本上不同的热膨胀系数，而不会使光学器件翘曲，弯曲或变形。 这通过提供将光学器件保持在适当位置的固定装置来实现，同时隔离其与框架的膨胀的膨胀。 因此，在不需要单一材料或基本上相同的热膨胀系数的材料的情况下实现光学对准的稳定性。 本发明在不可能对干涉仪的每个部件使用单一材料的情况下提供稳定性。

公开(公告)号：US08125638B2

公开(公告)日：2012-02-28

申请号：US12426366

申请日：2009-04-20

Applicant: Toshikazu Yamamoto ,  Tsutomu Kaneko ,  Manabu Kojima

Inventor： Toshikazu Yamamoto ,  Tsutomu Kaneko ,  Manabu Kojima

IPC: G01J3/28

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/0291

Abstract: An improvement is added to a spectroscope for performing wavelength dispersion of measured light with a wavelength dispersion element and receiving the light at a light reception element. The spectroscope has a first compound lens made up of a plurality of lenses for converting measured light into parallel light and emitting the parallel light to the wavelength dispersion element; a second compound lens made up of a plurality of lenses for gathering the measured light subjected to the wavelength dispersion in the wavelength dispersion element and causing the light reception element to receive the light; and a base for fixing the wavelength dispersion element, the first compound lens, and the second compound lens. The linear expansion coefficient of the compound focal length of the first compound lens, the linear expansion coefficient of the compound focal length of the second compound lens, and the linear expansion coefficient of a material forming the base are substantially equal.

Abstract translation: 增加了用于利用波长色散元件进行测量光的波长色散并在光接收元件处接收光的分光镜。 该分光镜具有由多个透镜构成的第一复合透镜，用于将测量的光转换成平行光并将平行光发射到波长色散元件; 由多个透镜构成的第二复合透镜，用于聚集经受波长色散元件中的波长色散的测量光，并使光接收元件接收光; 以及用于固定波长色散元件，第一复合透镜和第二复合透镜的基座。 第一复合透镜的复合焦距的线膨胀系数，第二复合透镜的复合焦距的线膨胀系数和形成基底的材料的线膨胀系数基本相等。