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公开(公告)号：US4437038A
公开(公告)日：1984-03-13
申请号：US43529
申请日：1979-05-29
Applicant: Vincent F. Link , George K. Yamasaki
Inventor： Vincent F. Link , George K. Yamasaki
Abstract: A hollow cathode type light source is provided having improved operating stability by forming the cathode of an alloy of a highly reactive, unstable prime metal of interest for spectral emission, and of a chemically stable, readily sputtered metal. An alloy of silver and calcium with a small amount of magnesium provides a hollow cathode device which exhibits stable operation after a minimum warm-up time.
Abstract translation: 通过形成用于光谱发射的高反应性，不稳定的主要金属的合金的阴极和化学稳定的容易溅射的金属，提供了具有改进的操作稳定性的空心阴极型光源。 银和钙与少量镁的合金提供了一种空心阴极装置，其在最小预热时间后表现出稳定的操作。
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公开(公告)号：US4339691A
公开(公告)日：1982-07-13
申请号：US199057
申请日：1980-10-20
Applicant: Osami Morimiya , Setsuo Suzuki , Shigeki Monma
Inventor： Osami Morimiya , Setsuo Suzuki , Shigeki Monma
Abstract: Discharge apparatus comprises a vacuum envelope which is evacuated by a pamping apparatus. In the envelope, an anode and a hollow cathode are disposed and are connected to an arc power supply. A disk having an orfice covers one end of the hollow cathode. A low pressure gas is supplied from a gas source to the envelope through the hollow cathode and the orifice, the gas pressure in the hollow cathode being maintained higher than that in the envelope. The hollow cathode and the disk are made of an electrically conductive material and are connected to an ignition power supply. Before effecting discharging between the anode and the hollow cathode, the ignition power supply causes an ignition between the disk and the inner surface of the hollow cathode.
Abstract translation: 排放装置包括由冲压装置抽真空的真空外壳。 在外壳中，设置阳极和中空阴极并连接到电弧电源。 具有透明物的盘覆盖中空阴极的一端。 低压气体通过空心阴极和孔口从气体源供给到外壳，空气阴极中的气体压力保持高于外壳中的气体压力。 空心阴极和盘由导电材料制成，并连接到点火电源。 在阳极和空心阴极之间进行放电之前，点火电源引起盘与中空阴极的内表面之间的点燃。
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53.发明授权
公开(公告)号：US4253038A
公开(公告)日：1981-02-24
申请号：US919610
申请日：1978-06-27
Applicant: Akira Hosoya , Kunihiro Maeda , Keiichi Kuniya , Sadami Tomita , Kohnosuke Ohishi
Inventor： Akira Hosoya , Kunihiro Maeda , Keiichi Kuniya , Sadami Tomita , Kohnosuke Ohishi
CPC classification number: H01J1/025
Abstract: A light source is disclosed which can be used in atomic absorption analysis using the Zeeman effect. In operation, an external magnetic field is applied to the hollow cathode of the light source to cause the Zeeman-splitting of an emission line from the cathode material. The hollow cathode is made of a ferromagnetic metal as which is the element of interest for analysis and a metal for reducing the magnetic shield of the externally applied magnetic field by the ferromagnetic metal so that the external magnetic field effectively acts on the hollow portion of the cathode to provide the desired Zeeman-splitting. The hollow cathode is designed such that the product of the saturation flux densities of the cathode materials and the volume thereof is equal to or smaller than 0.2(Wb.multidot.m).times.10.sup.-6. The emission line from the cathode material is produced by excitation from a high frequency power supply, the power supply being connected to the cathode and the anode of the light source.
Abstract translation: 公开了一种可用于使用塞曼效应进行原子吸收分析的光源。 在操作中，将外部磁场施加到光源的中空阴极，以使来自阴极材料的发射线的塞曼分裂。 中空阴极由用于分析的元素的铁磁金属制成，并且金属用于通过强磁性金属减少外部施加的磁场的磁屏蔽，使得外部磁场有效地作用在 阴极以提供所需的塞曼分裂。 空心阴极的设计使得阴极材料的饱和磁通密度及其体积的乘积等于或小于0.2（Wb×m）×10-6。 来自阴极材料的发射线通过从高频电源的激发产生，电源连接到光源的阴极和阳极。
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公开(公告)号：US3253180A
公开(公告)日：1966-05-24
申请号：US21614162
申请日：1962-08-10
Applicant: CSF
Inventor： HARRY HUBER
CPC classification number: H01J3/025 , H01J1/025 , H01J17/00 , H01J2893/006
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公开(公告)号：US09659732B2
公开(公告)日：2017-05-23
申请号：US14456835
申请日：2014-08-11
Applicant: Honeywell International Inc.
Inventor： Matthew Clark , Dean E. Johnson , Bruce A. Seiber
CPC classification number: H01J1/025 , G01C19/665 , H01J9/02 , H01J17/06 , H01J17/16
Abstract: A partially-insulated cathode for exciting plasma in a plasma chamber is provided. The partially-insulated cathode includes a conductive structure enclosing a cavity having a cavity surface and an insulating material contiguously covering a portion of the cavity surface from the cavity opening up to an insulation height that is less than a cavity height. Cross-sections of the cavity in X-Y planes have at least one respective cavity-width. A cavity opening has a diameter less than a minimum cavity-width of the at least one cavity-width.
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Patent Agency Ranking
公开(公告)号：US20160365215A1
公开(公告)日：2016-12-15
申请号：US15121502
申请日：2015-02-23
Inventor： Wonho Choe , Youbong Lim , Holak Kim , Jooyoung Park , Jongho Seon
IPC: H01J1/02
CPC classification number: H01J1/025 , B64G1/405 , H01J37/32596
Abstract: The present invention relates to a high efficiency hollow cathode and a cathode system applying the same, and comprises: a tube comprising at least two refractory metal parts; a gas providing unit and a gas outlet which are respectively formed at the distal ends of the tube; and an insert mounted inside the tube. According to the present invention, since the present invention constitutes a hollow cathode using more than two substances, the present invention can not only enhance thermal stability, lifespan and efficiency, but also can reduce costs accordingly.
Abstract translation: 本发明涉及一种高效率中空阴极及其应用的阴极系统，包括：包含至少两个难熔金属部件的管; 气体供给单元和气体出口分别形成在管的远端; 和安装在管内的插入件。 根据本发明，由于本发明构成使用两种以上物质的中空阴极，因此本发明不仅可以提高热稳定性，寿命和效率，而且可以相应地降低成本。
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公开(公告)号：US09236211B2
公开(公告)日：2016-01-12
申请号：US14521873
申请日：2014-10-23
Applicant: OCE-TECHNOLOGIES B.V.
Inventor： Herman Kuypers
CPC classification number: H01J1/025 , H01J7/24 , H01J37/32596 , H01T19/00
Abstract: An electrode for dielectric barrier discharge treatment of a substrate includes a tubular housing that is made of electrically insulating material and has a bottom wall facing the substrate, two side walls extending away from the substrate, and a top wall connecting the distal ends of the side walls. The electrode further includes an electrically conductive electrode member disposed inside the housing and having a plate that engages an internal surface of the bottom wall of the housing. The electrode has two wings formed in one piece with the plate and engaging internal surfaces of the side walls of the housing.
Abstract translation: 用于基板的电介质阻挡放电处理的电极包括由电绝缘材料制成并具有面向基板的底壁的管状壳体，远离基板延伸的两个侧壁和连接侧面的远端的顶壁 墙壁 电极还包括设置在壳体内部的导电电极构件，并且具有与壳体的底壁的内表面接合的板。 电极具有与板成一体并且与壳体的侧壁的内表面接合的两个翼。
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公开(公告)号：US09099292B1
公开(公告)日：2015-08-04
申请号：US12787827
申请日：2010-05-26
Applicant: Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
Inventor： Ilya Bezel , Anatoly Shchemelinin , Yanming Zhao , Gildardo R. Delgado
CPC classification number: H05H1/24 , H01J1/025 , H01J23/033 , H01J61/09 , H01J61/28 , H01J61/52 , H01J61/54 , H01J61/545 , H01J65/042
Abstract: A laser sustained plasma light source having a cell formed as a continuous tube with a circular cross section, a gas volume contained within the cell, at least one laser directed into the gas volume, for sustaining a plasma within the gas volume, the plasma producing a light, where the gas volume is heated as it leaves the plasma, cools as it circulates around the continuous tube of the cell, and reenters the plasma cooler than when it left the plasma and in a laminar flow, and a reflector for collecting the light and providing the light to a desired location.
Abstract translation: 一种激光持续等离子体光源，其具有形成为圆形横截面的连续管的单元，容纳在该单元内的气体体积，至少一个引导到气体体积中的激光，用于维持气体体积内的等离子体，等离子体产生 气体体积在离开等离子体时被加热的光在其围绕电池的连续管周围循环时冷却，并且比等离子体离开等离子体和层流时重新进入等离子体冷却器，以及用于收集等离子体的反射器 光并将光提供到所需位置。
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公开(公告)号：US20150115791A1
公开(公告)日：2015-04-30
申请号：US14521873
申请日：2014-10-23
Applicant: OCE-TECHNOLOGIES B.V.
Inventor： Herman KUYPERS
CPC classification number: H01J1/025 , H01J7/24 , H01J37/32596 , H01T19/00
Abstract: An electrode for dielectric barrier discharge treatment of a substrate includes a tubular housing that is made of electrically insulating material and has a bottom wall facing the substrate, two side walls extending away from the substrate, and a top wall connecting the distal ends of the side walls. The electrode further includes an electrically conductive electrode member disposed inside the housing and having a plate that engages an internal surface of the bottom wall of the housing. The electrode has two wings formed in one piece with the plate and engaging internal surfaces of the side walls of the housing.
Abstract translation: 用于基板的电介质阻挡放电处理的电极包括由电绝缘材料制成并具有面向基板的底壁的管状壳体，远离基板延伸的两个侧壁和连接侧面的远端的顶壁 墙壁 电极还包括设置在壳体内部的导电电极构件，并且具有与壳体的底壁的内表面接合的板。 电极具有与板成一体并且与壳体的侧壁的内表面接合的两个翼。
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公开(公告)号：US07667379B2
公开(公告)日：2010-02-23
申请号：US11339783
申请日：2006-01-25
Applicant: Harold R. Kaufman , James R. Kahn
Inventor： Harold R. Kaufman , James R. Kahn
IPC: F03H1/00
Abstract: In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the plurality of shields in turn comprise one or more spiral windings external to that tube and approximately flush with the open end from which electron emission takes place. The axial length of at least one of the inner windings (closer to the tantalum tube) is equal to or less than approximately half the length of the tantalum tube. An enclosed keeper surrounds the cathode. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the cathode and out the open end. An electrical discharge is then started between the keeper and the hollow cathode. When heated to operating temperature, electrons exit from the open end of the hollow cathode.
Abstract translation: 根据本发明的一个实施例，中空阴极装置包括具有多个钽箔辐射屏蔽的小直径钽管，其中多个屏蔽依次包括该管外部的一个或多个螺旋绕组，以及 大致与发生电子发射的开口端齐平。 内部绕组（更靠近钽管）中的至少一个的轴向长度等于或小于钽管的长度的大约一半。 封闭的门将围绕阴极。 为了启动阴极，通过阴极引出电离惰性气体（通常为氩气）流出开口端。 然后在保持器和中空阴极之间开始放电。 当加热到工作温度时，电子从空心阴极的开口端排出。
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