公开(公告)号：US20130140976A1

公开(公告)日：2013-06-06

申请号：US13758450

申请日：2013-02-04

Applicant: FUJIKURA LTD.

Inventor： Satoshi YAMAMOTO ,  Tatsuo SUEMASU

IPC: B05D3/06 ,  B05D3/10

CPC classification number: B05D3/06 ,  B01L3/502707 ,  B01L3/502715 ,  B01L2300/0654 ,  B01L2300/0816 ,  B01L2300/0851 ,  B01L2300/0877 ,  B01L2300/168 ,  B01L2400/086 ,  B05D3/10 ,  B81B2201/058 ,  B81B2203/033 ,  B81B2203/0361 ,  B81B2207/056 ,  B81C1/00063 ,  B81C1/00515 ,  B81C2201/0143 ,  G01N21/554 ,  G01N21/6452 ,  G01N21/648

Abstract: A method of manufacturing a microfluidic chip includes: irradiating, with a laser light, an area to be provided with a valley for storing a fluid on a surface of a substrate so as to form a modified region having a periodic pattern formed in a self-organizing manner in a light-collecting area of the laser light, the laser light having a pulse width for which the pulse duration is on the order of picoseconds or less; carrying out an etching treatment on the substrate in which the modified region is formed, removing at least some of the modified portion so as to provide the valley, and forming a periodic structure having a plurality of groove portions along one direction which have a surface profile based on the periodic pattern on at least a bottom surface of the valley; and forming a metal layer that covers the periodic structure of the bottom surface.

Abstract translation: 一种微流体芯片的制造方法，其特征在于，具备：激光照射在基板表面上设置有用于存储流体的谷部的区域，形成具有形成于所述自流体的周期性图案的改质区域， 在激光的聚光区域中组织的方式，具有脉冲宽度大约为皮秒或更小的脉冲宽度的激光; 对其中形成有改质区域的基板进行蚀刻处理，除去至少一部分改性部分以提供谷部，并形成沿着一个方向具有多个凹槽部分的周期性结构，其具有表面轮廓 基于谷的至少底表面上的周期性图案; 并形成覆盖底面的周期性结构的金属层。

公开(公告)号：US08446021B2

公开(公告)日：2013-05-21

申请号：US12679636

申请日：2008-07-28

Applicant: Christian Maeurer ,  Johanna May

Inventor： Christian Maeurer ,  Johanna May

IPC: H01L23/31

CPC classification number: B81C1/0023 ,  B01L3/502707 ,  B01L2300/0645 ,  B01L2400/0415 ,  B81B2201/058 ,  B81C3/008 ,  B81C2201/019 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: A microfluidic component having at least one first polymer layer, which is provided with a microstructure for at least one fluid, and having at least one second polymer layer. It is provided that at least one semiconductor component is situated on the first and/or the second polymer layer. Furthermore, a manufacturing method for such a microfluidic component is described.

Abstract translation: 具有至少一个第一聚合物层的微流体组分，其具有用于至少一种流体的微结构并且具有至少一个第二聚合物层。 提供了至少一个半导体部件位于第一和/或第二聚合物层上。 此外，描述了这种微流体组分的制造方法。

公开(公告)号：US20130108801A1

公开(公告)日：2013-05-02

申请号：US13808792

申请日：2011-07-07

Applicant: Kris Naessens ,  Tony Montoye

Inventor： Kris Naessens ,  Tony Montoye

IPC: B05D3/14

CPC classification number: B05D3/142 ,  B01L3/502707 ,  B01L3/50273 ,  B01L2300/163 ,  B81B2201/058 ,  B81B2203/0338 ,  B81C1/00206

Abstract: A method for obtaining a hydrophilic effect in a microfluidics device, wherein the microfluidics device includes a channel for transporting fluid from an entrance towards an exit, and is subjected to an activation treatment, such as, for example, local plasma treatment, for selectively increasing the surface energy of part of the walls of the channel at those positions where a hydrophilic effect is desired. Thereafter a coating is selectively applied on selected parts of the walls of the channel by providing a predetermined amount of wetting agent in the channel.

Abstract translation: 一种在微流体装置中获得亲水效果的方法，其中微流体装置包括用于将流体从入口输送到出口的通道，并且进行活化处理，例如局部等离子体处理，用于选择性地增加 在需要亲水效果的那些位置处的通道的壁的一部分的表面能。 此后通过在通道中提供预定量的润湿剂，将选择性地涂覆在通道的壁的选定部分上。

公开(公告)号：US08383060B2

公开(公告)日：2013-02-26

申请号：US12293284

申请日：2007-03-07

Applicant: Ronald Dekker ,  Remco Henricus Wilhelmus Pijnenburg ,  Nicolaas Johannes Anthonius Van Veen

Inventor： Ronald Dekker ,  Remco Henricus Wilhelmus Pijnenburg ,  Nicolaas Johannes Anthonius Van Veen

IPC: G01N15/06 ,  G01N33/00 ,  G01N33/48

CPC classification number: H01L37/00 ,  B01J2219/00783 ,  B01J2219/0095 ,  B01L3/502707 ,  B01L3/502715 ,  B01L2200/12 ,  B01L2200/14 ,  B01L2300/0645 ,  B01L2300/1827 ,  B01L2300/1883 ,  B01L2400/0415 ,  B81B2201/058 ,  B81C1/0023 ,  H01L2224/11 ,  Y10T436/11

Abstract: An integrated electronic-micro fluidic device an integrated electronic-micro fluidic device, comprising a semiconductor substrate on a first support, an electronic circuit on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. A micro fluidic structure is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away from the first support.

Abstract translation: 一种集成电子微流体装置，包括在第一支撑件上的半导体衬底，半导体衬底的第一半导体衬底侧上的电子电路以及到外部器件的信号接口结构的集成电子微流体装置。 微流体结构形成在半导体衬底中，并且被配置为限制流体并且允许仅在与第一半导体衬底侧相反的第二半导体衬底侧上流体流过微流体结构 并远离第一支撑。

公开(公告)号：US08347696B2

公开(公告)日：2013-01-08

申请号：US12803664

申请日：2010-07-01

Applicant: Horacio D. Espinosa ,  Nicolaie A. Moldovan

Inventor： Horacio D. Espinosa ,  Nicolaie A. Moldovan

IPC: B01L3/02 ,  G01Q60/54

CPC classification number: B81C1/00071 ,  B81B2201/058 ,  G01Q80/00 ,  G03F7/0002 ,  Y10T29/42

Abstract: A method of forming a microchannel as well as a thin film structure including same is made by forming a first thin film on a side of a substrate, forming a fugitive second thin film on the first thin film such that the second thin film defines a precursor of the elongated microchannel and a plurality of extensions connected to and extending transversely relative to the precursor along a length thereof A third thin film is formed on the first thin film and the fugitive second thin film such that the second thin film resides between the first thin film and the third thin film. A respective access site is formed in a region of the third thin film residing on a respective extension and penetrating to the fugitive second thin film. The fugitive second thin film forming the precursor is selectively removed from between the first thin film and the third thin film using an etching medium introduced through the access sites, thereby forming the microchannel between the first thin film and the third thin film. The method preferably further includes forming a sealing layer on the third thin film in a manner to close off open access sites remaining after selective removal of the second thin film.

Abstract translation: 通过在基板一侧形成第一薄膜，在第一薄膜上形成短暂的第二薄膜，使得第二薄膜限定前体，形成微通道的方法以及包括其的薄膜结构 的细长的微通道，以及多个延伸部，其沿着其长度相对于前体横向相对并延伸。第三薄膜形成在第一薄膜和逸散的第二薄膜上，使得第二薄膜位于第一薄膜 电影和第三薄膜。 相应的进入位置形成在位于相应延伸部上的第​​三薄膜的区域中，并穿透到逸出的第二薄膜。 使用通过进入位置引入的蚀刻介质，从第一薄膜和第三薄膜之间选择性地去除形成前体的短效第二薄膜，从而在第一薄膜和第三薄膜之间形成微通道。 所述方法优选还包括在所述第三薄膜上形成密封层，以封闭在选择性去除所述第二薄膜之后留下的开放进入位置。

公开(公告)号：US20120305400A1

公开(公告)日：2012-12-06

申请号：US13486777

申请日：2012-06-01

Applicant: Wyatt C. Nelson ,  Chang-Jin Kim

Inventor： Wyatt C. Nelson ,  Chang-Jin Kim

IPC: C25B9/00 ,  B05D3/00 ,  B05D5/12

CPC classification number: B81C1/00119 ,  B01L3/502707 ,  B01L3/502792 ,  B01L2400/0427 ,  B81B2201/058

Abstract: A monolithic fabrication method of parallel-plate electrowetting-on-dielectric (EWOD) chips for digital microfluidics of picoliter droplets is disclosed. Instead of assembling a second substrate to form a top plate, the top plate is generated in situ as a thin-film membrane that forms a monolithic cavity having a gap height on the order of micrometers with excellent accuracy and uniformity. The membrane is embedded with EWOD driving electrodes and confines droplets against the device substrate to perform digital microfluidic operations. Two main attributes of the monolithic architecture that distinguish it from tradition methods are: (i) it enables excellent control of droplet dimensions down to the micrometer scale, and (ii) it does not require the typical alignment and assembly steps of the two plates.

Abstract translation: 公开了一种用于皮秒液滴的数字微流体的平行板电润湿介电（EWOD）芯片的单片制造方法。 代替组装第二基板以形成顶板，顶板作为薄膜膜原位产生，其形成具有高度精确度和均匀性的间隔高度在几微米的单片空腔。 膜被嵌入EWOD驱动电极并且将液滴限制在器件衬底上以执行数字微流控操作。 整体式结构的两个主要特征与传统方法区分开来：（i）它可以很好地控制液滴尺寸，直到微米级，以及（ii）它不需要两个板的典型对准和组装步骤。

公开(公告)号：US20120261263A1

公开(公告)日：2012-10-18

申请号：US13205640

申请日：2011-08-09

Applicant: Liang-Ju Chien ,  Chi-Han Chiou

Inventor： Liang-Ju Chien ,  Chi-Han Chiou

IPC: G01N27/453 ,  G03F7/20 ,  B44C1/22

CPC classification number: B44C1/22 ,  B44C1/227 ,  B81B2201/058 ,  B82Y15/00 ,  G01N27/453 ,  G03F7/40 ,  Y10T137/4673 ,  Y10T137/4841

Abstract: A three-dimensional nanochannel device and a method of manufacturing the same are provided. In the device, a first substrate, a second substrate, and a channel layer sandwiched by the first and the second substrates are included. At least one channel is constituted by the first and the second substrates and the channel layer and includes a fluid inlet, a fluid outlet, and at least one condensed channel between the fluid inlet and the fluid outlet. The condensed channel at least has a first size and a second size on an X-Y plane and has a third size and a fourth size on an X-Z plane. A difference between the first size and the second size is about at least two orders in scale, and a difference between the third size and the fourth size is about at least two orders in scale.

Abstract translation: 提供了三维纳米通道装置及其制造方法。 在该器件中，包括第一衬底，第二衬底和夹在第一和第二衬底之间的沟道层。 至少一个通道由第一和第二基板和通道层构成，并且包括流体入口，流体出口以及流体入口和流体出口之间的至少一个冷凝通道。 冷凝通道在X-Y平面上至少具有第一尺寸和第二尺寸，并且在X-Z平面上具有第三尺寸和第四尺寸。 第一尺寸和第二尺寸之间的差异大约是至少两个等级，并且第三尺寸和第四尺寸之间的差异大约是至少两个等级。

公开(公告)号：US20120196376A1

公开(公告)日：2012-08-02

申请号：US13391508

申请日：2010-08-20

Applicant: Seung-min Park ,  Yun Suk Huh ,  David Erickson ,  Harold G. Craighead

Inventor： Seung-min Park ,  Yun Suk Huh ,  David Erickson ,  Harold G. Craighead

IPC: G01N33/48 ,  G01N27/447 ,  B29C43/44 ,  H01L27/146 ,  G01J3/44 ,  B01L3/00 ,  B29C59/02 ,  B82Y5/00 ,  B82Y40/00

CPC classification number: G01N21/658 ,  B01D67/0088 ,  B01D71/70 ,  B01D2323/283 ,  B01L3/502707 ,  B01L3/502761 ,  B01L2200/0663 ,  B01L2300/0816 ,  B01L2300/0896 ,  B01L2300/123 ,  B01L2400/0421 ,  B81B2201/058 ,  B81C1/00071 ,  B82Y30/00 ,  G01N33/48721

Abstract: A method is provided for fabricating a nanochannel. The method comprises providing a microchannel and controlling collapse of the microchannel so that it collapses to form a nanochannel of desired dimensions. The method employs a collapsible, flexible material such as the elastomer polydimethylsiloxane (PDMS) to form the nanochannel. A master is provided that is configured to have geometric conditions that promote a desired frequency of microchannel collapse. A collapsible material having a stiffness that also promotes a desired frequency of microchannel collapse is molded on the master. The molded collapsible material is removed from the master and bonded to a base, thereby forming the microchannel, which then collapses (or is collapsed) to form the nanochannel of desired dimensions. Nanofluidic and microfluidic devices comprising complex nanochannel structures and micro to nanochannel transitions are also provided.

Abstract translation: 提供了制造纳米通道的方法。 该方法包括提供微通道并控制微通道的塌陷，使得其塌缩以形成具有期望尺寸的纳米通道。 该方法采用可折叠的柔性材料，例如弹性体聚二甲基硅氧烷（PDMS）以形成纳米通道。 提供了一个主设备，其配置为具有促进微通道倒塌的期望频率的几何条件。 在主体上模制具有也促进所需频率的微通道塌陷的刚度的可折叠材料。 模制的可折叠材料从主体中取出并结合到基底上，从而形成微通道，然后将其收缩（或折叠）以形成所需尺寸的纳米通道。 还提供了包括复杂纳米通道结构和微到纳通道转换的纳流体和微流体装置。

公开(公告)号：US08173356B2

公开(公告)日：2012-05-08

申请号：US11509368

申请日：2006-08-24

Applicant: Chin Sung Park ,  Joon Ho Kim

Inventor： Chin Sung Park ,  Joon Ho Kim

IPC: G03F7/00 ,  G03F7/004 ,  G03F7/26 ,  G03F7/40

CPC classification number: H01L21/20 ,  B81B2201/058 ,  B81C1/00111 ,  C12N2535/10

Abstract: A three dimensional scaffold having a three dimensional structure is easily fabricated by employing a lithography process used in a semiconductor manufacturing process. A method of fabricating the same is also disclosed have a conformational structure. In the method of fabricating a three dimensional scaffold having the conformational structure according to the present invention, a first pattern is first formed on a substrate by using a first photoresist through a lithography process, and a temporary photoresist is coated on a whole surface of the substrate. Next, a temporary pattern exposing the upper part of the first pattern to the surface is formed by using the lithography process, and a second photoresist contacting the first pattern via the temporary pattern is coated on the whole surface of the substrate. Subsequently, the temporary pattern is removed after exposing and developing the second photoresist, and then, a second pattern connected to the first pattern is formed with the second photoresist, to thereby obtain the three dimensional scaffold. Accordingly, the present invention can readily fabricate a three dimensional scaffold having a three dimensional structure through a lithography process using a photoresist.

Abstract translation: 通过采用在半导体制造工艺中使用的光刻工艺，可以容易地制造具有三维结构的三维支架。 还公开了一种制造该方法的方法，其具有构象结构。 在制造根据本发明的构象结构的三维支架的方法中，首先通过使用通过光刻工艺的第一光致抗蚀剂在衬底上形成第一图案，并且在整个表面上涂覆临时光致抗蚀剂 基质。 接下来，通过使用光刻工艺形成将第一图案的上部暴露于表面的临时图案，并且经由临时图案与第一图案接触的第二光致抗蚀剂涂覆在基板的整个表面上。 随后，在曝光和显影第二光致抗蚀剂之后去除临时图案，然后用第二光致抗蚀剂形成连接到第一图案的第二图案，从而获得三维支架。 因此，本发明可以通过使用光致抗蚀剂的光刻工艺容易地制造具有三维结构的三维支架。

公开(公告)号：US20120009099A1

公开(公告)日：2012-01-12

申请号：US12830578

申请日：2010-07-06

Applicant: Pinyen LIN

Inventor： Pinyen LIN

IPC: B01L99/00

CPC classification number: B01L3/502707 ,  B81B2201/058 ,  B81C1/00119 ,  B81C2201/0184 ,  B81C2201/019

Abstract: Microfluidic devices are prepared by providing a substrate material having a solid adhesive thin sheet, printing solid ink on the substrate using a conventional printer, selectively etching the substrate using a wax masking layer to obtain a desired pattern, removing the masking layer from the substrate, aligning and bonding together the pattern of the substrate to a pattern of a second substrate to form a layer of substrates, and curing the layer of substrates to result in a three-dimensional microfluidic device.

Abstract translation: 微流体装置通过提供具有固体粘合薄片的基底材料，使用常规打印机在基底上印刷固体油墨，使用蜡掩模层选择性地蚀刻基底以获得所需图案，从基底去除掩模层， 将衬底的图案对准和结合到第二衬底的图案以形成衬底层，并固化衬底层以产生三维微流体器件。