公开(公告)号：US06804004B1

公开(公告)日：2004-10-12

申请号：US09583229

申请日：2000-05-30

Applicant: Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt

Inventor： Blaine D. Johs ,  Craig M. Herzinger ,  Ping He ,  Martin M. Liphardt

IPC: G01B1106

CPC classification number: G01N21/211 ,  G01J3/14 ,  G01J3/447

Abstract: Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing lens(es), optionally in combination with beam directing and/or window elements present in an ellipsometer system which are positioned with respect to input and/or output len(es) so as to be ellipsometrically indistinguishable therefrom, to arrive at material system characterizing ellipsometric PSI and DELTA results.

Abstract translation: 公开了多元素透镜，其在椭偏仪和偏光计系统中表现出减少的消色差焦距和降低的电磁光束光斑尺寸分散效应。 还公开了用于评估参数化方程式中的参数的方法，该方法能够计算在电磁辐射束中输入到或之间的正交分量的延迟，所述正交分量被引导通过输入和/或输出光学元件并与材料系统相互作用 的输入和输出光学元件，与材料系统进入的延迟基本上不相关。 本发明的输入和/或输出聚焦透镜在光谱椭偏仪介导的对材料系统上的小斑点的调查中的应用发现，其中使电磁辐射束通过输入透镜会聚，与非常小的，色散的未分散的点相互作用 区域，然后在进入检测器系统之前可选地通过输出透镜重新校准。 本发明的方法在需要分离输入和/或输出光学元件聚焦透镜的双折射效应（可选地与存在于椭圆偏振仪系统中的光束引导和/或窗口元件）相关联的位置方面提供了益处，所述光学元件聚焦透镜相对于 输入和/或输出len（es）以便椭圆不能与其区分开来，以得到表征椭圆偏振PSI和DELTA结果的材料系统。

公开(公告)号：US06784428B2

公开(公告)日：2004-08-31

申请号：US09984137

申请日：2001-10-29

Applicant: John F. Rabolt ,  Mei-Wei Tsao

Inventor： John F. Rabolt ,  Mei-Wei Tsao

IPC: G01N2135

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0224 ,  G01J3/0294 ,  G01J3/14 ,  G01J3/2803 ,  G01J3/42 ,  G01N21/35 ,  G01N21/3563 ,  G01N21/3577

Abstract: An apparatus and method capable of providing IR spectral information using IR absorption phenomena requires no moving parts or Fourier Transform during operation. IR spectral information and chemical analysis of a sample in a sample containing functional groups is determined by using an IR source, a sampling accessory for positioning the sample volume, an optically dispersive element, a focal plane array (FPA) arranged to detect the dispersed light beam, and a processor and display to control the FPA, and display an IR spectrograph. Fiber-optic coupling allows remote sensing, and portability, reliability, and ruggedness is enhanced due to the no-moving part construction. Use of the apparatus and method has broad industrial and environmental application, including measurement of thickness and chemical composition of various films, coatings, and liquids, and may also be used in real-time sensing of hazardous materials, including chemical and biological warfare agents.

Abstract translation: 能够使用红外吸收现象提供红外光谱信息的装置和方法在运行期间不需要移动部件或傅立叶变换。 通过使用IR源，用于定位样品体积的取样附件，光学色散元件，布置成检测分散光的焦平面阵列（FPA）来确定含有官能团的样品中的样品的IR光谱信息和化学分析 光束，以及处理器和显示器来控制FPA，并显示IR光谱仪。 由于无移动部件结构，光纤耦合允许遥感，便携性，可靠性和耐用性得到提高。 该设备和方法的使用具有广泛的工业和环境应用，包括测量各种膜，涂料和液体的厚度和化学成分，还可用于实时检测危险物质，包括化学和生物战剂。

公开(公告)号：US20040145740A1

公开(公告)日：2004-07-29

申请号：US10361304

申请日：2003-02-10

Inventor： Mark D. Hopler ,  Rong Liu

IPC: G01J003/12

CPC classification number: G01J3/12 ,  G01J3/021 ,  G01J3/14 ,  G01J3/18

Abstract: Inverting optics are used to invert, with respect to the dispersion plane, the wavefront of a monochromator employing a beam making more than one pass through the dispersing medium. Further, the inverting functionality can be turned-on or turned-off, thereby reversibly converting between additive and subtractive monochromator architectures. Inversion reversal is accomplished by reorienting the inverting optics orthogonally about an axis coaxial with the beam, either back and forth or monotonically, or by displacing portions or all of the inverting optics into and out of the beam. Examples of inverting optics include Dove prisms and equivalent multiple all-reflective surfaces. The system and method can be applied to two-pass and other multi-pass monochromators and to dual and other multiple serial monochromator configurations using diffraction gratings or other dispersing elements.

Abstract translation: 反相光学器件用于相对于色散平面反转单色仪的波前，其使用多于一个的光束通过分散介质。 此外，反相功能可以被打开或关闭，从而在加和减色单色器结构之间的可逆转换。 逆向反转是通过使与反射光学器件正交的轴正交地绕着与光束前后或单调相同轴的方向，或通过将部分或全部反相光学器件移入和移出光束来实现的。 反转光学器件的示例包括Dove棱镜和等效的多个全反射表面。 该系统和方法可以应用于使用衍射光栅或其他分散元件的双通等多色单色仪和双重和其他多个串行单色仪配置。

公开(公告)号：US20040145739A1

公开(公告)日：2004-07-29

申请号：US10349898

申请日：2003-01-23

Inventor： Mark D. Hopler ,  Rong Liu

IPC: G01J003/18 ,  G01J003/12

CPC classification number: G01J3/18 ,  G01J3/021 ,  G01J3/12 ,  G01J3/14

Abstract: Inverting optics are used to invert, with respect to the dispersion plane, the wavefront of a monochromator employing a beam making more than one pass through the dispersing medium. Further, the inverting functionality can be turned-on or turned-off, thereby reversibly converting between additive and subtractive monochromator architectures. Inversion reversal is accomplished by rotating the inverting optics by 90 degrees coaxially with the beam, either back and forth or monotonically, or by translating portions or all of the inverting optics into and out of the beam. Examples of inverting optics include Dove prisms and equivalent multiple all-reflective surfaces. The system and method can be applied to two-pass and other multi-pass monochromators and to dual and other multiple serial monochromator configurations using diffraction gratings or other dispersing elements.

Abstract translation: 反相光学器件用于相对于色散平面反转单色仪的波前，其使用多于一个的光束通过分散介质。 此外，反相功能可以被打开或关闭，从而在加和减色单色器结构之间的可逆转换。 通过将反相光学器件与光束同时地前后旋转或单调地旋转90度来实现反转反转，或者通过将反射光学器件的部分或全部平移到和离开光束来实现。 反转光学器件的示例包括Dove棱镜和等效的多个全反射表面。 该系统和方法可以应用于使用衍射光栅或其他分散元件的双通等多色单色仪和双重和其他多个串行单色仪配置。

公开(公告)号：US20040125607A1

公开(公告)日：2004-07-01

申请号：US10688200

申请日：2003-10-17

Applicant: Board of Regents, The University of Texas System

Inventor： Carl W. Dirk

IPC: F21S002/00

CPC classification number: G01J3/51 ,  G01J3/12 ,  G01J3/14 ,  G01J3/28 ,  G01J3/524 ,  G01J2003/1282 ,  G02B27/0012 ,  Y10T29/49

Abstract: Methods for generating a customized spectral profile, which can be used to generate a corresponding filter. A trial source spectrum is generated. An uncorrected lamp source spectrum is determined. One or more optical indices are calculated using the trial source spectrum or the uncorrected lamp source spectrum, and one or more of the optical indices are optimized by varying the trial source spectrum to generate the customized spectral profile.

Abstract translation: 用于生成定制光谱分布的方法，其可用于生成相应的滤波器。 产生试验源光谱。 确定未校正的灯源光谱。 使用试验源光谱或未校正的灯源光谱计算一个或多个光学指数，并且通过改变试验光谱来优化一个或多个光学折射率以产生定制的光谱分布。

公开(公告)号：US06741408B2

公开(公告)日：2004-05-25

申请号：US09751042

申请日：2000-12-29

Applicant: Jim Beattie ,  Ian Turner ,  Ninghui Zhu

Inventor： Jim Beattie ,  Ian Turner ,  Ninghui Zhu

IPC: G02B702

CPC classification number: G01J3/14 ,  G01J3/0202 ,  G01J3/0286 ,  G01J3/2803 ,  G02B7/008 ,  H04J14/02

Abstract: A wavelength division multiplexer (WDM) including a support structure that is coupled to at least one optical component. A diffraction grating is optically coupled to at least one optical component coupled to the at least one optical component. A frame is coupled to the diffraction grating. Pins may be coupled between the support structure and the frame to substantially thermally isolate the support structure from the frame. The pins may be substantially geometrically equally spaced and have approximately the same exposed length extending from the lens barrel. The pins may have the same coefficient of thermal expansion as the support structure.

Abstract translation: 一种波分复用器（WDM），包括耦合到至少一个光学部件的支撑结构。 衍射光栅光耦合到耦合到至少一个光学部件的至少一个光学部件。 一个框架耦合到衍射光栅。 引脚可以联接在支撑结构和框架之间，以将支撑结构与框架基本上热隔离。 销可以基本上几何等间隔，并且具有从透镜镜筒延伸的大致相同的暴露长度。 销可以具有与支撑结构相同的热膨胀系数。

公开(公告)号：US06731838B1

公开(公告)日：2004-05-04

申请号：US09724770

申请日：2000-11-28

Applicant: Robert H. Dueck ,  Gregory G Cappiello

Inventor： Robert H. Dueck ,  Gregory G Cappiello

IPC: G02B634

CPC classification number: H04J14/02 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0286 ,  G01J3/14 ,  G01J3/18 ,  G01J3/2803 ,  G02B5/18 ,  G02B6/2931 ,  G02B6/2938 ,  G02B7/008 ,  G02B7/028 ,  G02B27/1073 ,  G02B27/1086 ,  G02B27/123 ,  G02B27/126 ,  H04B10/077 ,  H04B10/07955 ,  H04J14/0201 ,  H04J14/0206 ,  H04J14/0217

Abstract: A wavelength division multiplexer/demultiplexer (WDM) for use in an optical network and in an optical performance monitor that minimizes increases in insertion losses over temperature variations has a structure for holding at least one optical component. A diffraction grating assembly having a substrate is held in relation to the at least one optical component by the structure. A lens assembly having a focal length is held in relation to the at least one optical component. The coefficient of thermal expansion of the lens assembly and structure are approximately equal. The grating assembly has an angular dispersion that changes with temperature and the product of the focal length and angular dispersion remains constant over temperature. The WDM further comprises a prism having a change in index of refraction with temperature that is approximately equal to a negative of a coefficient of thermal expansion of the substrate.

Abstract translation: 用于光网络和光学性能监视器中的波分多路复用器/解复用器（WDM）使得在温度变化上的插入损耗的增加最小化具有用于保持至少一个光学部件的结构。 通过该结构，具有基板的衍射光栅组件相对于至少一个光学部件保持。 相对于至少一个光学部件保持具有焦距的透镜组件。 透镜组件和结构的热膨胀系数近似相等。 光栅组件具有随温度变化的角度色散，并且焦距和角度色散的乘积在温度上保持恒定。 WDM还包括棱镜，其折射率随着温度的变化大致等于衬底的热膨胀系数的负值。

公开(公告)号：US06577786B1

公开(公告)日：2003-06-10

申请号：US09724804

申请日：2000-11-28

Applicant: Gregory G. Cappiello ,  Michael Sussman ,  Mikhail N. Sokolskiy

Inventor： Gregory G. Cappiello ,  Michael Sussman ,  Mikhail N. Sokolskiy

IPC: G02B628

CPC classification number: H04J14/02 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/14 ,  G01J3/18 ,  G01J3/2803 ,  G02B5/18 ,  G02B6/2931 ,  G02B6/29385 ,  G02B6/29397 ,  G02B6/4215 ,  G02B7/008 ,  G02B7/028 ,  G02B27/108 ,  G02B27/1086 ,  G02B27/123 ,  G02B27/126 ,  H04B10/077 ,  H04B10/07955 ,  H04J14/0201

Abstract: An optical performance monitoring device and corresponding diffraction grating are disclosed for utilization within a fiber optic communications network. The diffraction grating includes a substrate and reflective material adjacent the substrate, wherein the diffraction grating is substantially polarization insensitive over a wavelength range of approximately 30 nm.

Abstract translation: 公开了一种用于光纤通信网络内的光学性能监视装置和相应的衍射光栅。 衍射光栅包括与衬底相邻的衬底和反射材料，其中衍射光栅在大约30nm的波长范围内基本上是偏振不敏感的。

公开(公告)号：US20020176037A1

公开(公告)日：2002-11-28

申请号：US10185777

申请日：2002-06-27

Inventor： Zong-Fu Li

IPC: G02F001/1335

CPC classification number: G02B3/0018 ,  G01J3/14 ,  G01J3/51 ,  G01J3/513 ,  G02B3/0012 ,  G02B3/0056 ,  G02B5/201 ,  G02F1/133526 ,  H01L27/14621 ,  H01L27/14627 ,  H01L31/02327

Abstract: The making and use of color microlenses in color image sensors and color display devices is described and claimed. The color microlenses combine the function of a colorless microlens and a color filter into a single structure simplifying the fabrication of, and increasing the reliability of display devices and image sensors using the described color microlenses.

Abstract translation: 描述和要求保护彩色图像传感器和彩色显示装置中的彩色微透镜的制造和使用。 彩色微透镜将无色微透镜和滤色器的功能结合成单个结构，简化了使用所述彩色微透镜的显示装置和图像传感器的制造和可靠性的可靠性。

公开(公告)号：US06355930B1

公开(公告)日：2002-03-12

申请号：US09237014

申请日：1999-01-25

Applicant: Yudaya R. Sivathanu ,  Rony K. Joseph

Inventor： Yudaya R. Sivathanu ,  Rony K. Joseph

IPC: G01J502

CPC classification number: G01J3/14 ,  G01J5/601 ,  G01J5/62

Abstract: An infrared spectrometer is adapted to capture spectral data at high frequency and includes an aperture defining slit and tuning fork chopper for periodically admitting infrared radiation. A lens and a plurality of mirrors direct the infrared radiation through pair of calcium fluoride prisms that split the infrared radiation into spectral components. The spectral components are directed by an additional mirror and lens to an array of lead selenide pixels that generate a set of data indicative of the spectral component intensities. Data collection circuitry coupled to the pixel array and coupled to the tuning fork chopper collects the set of data at a selectable rate at least once during each opening of the aperture. A serial output on the data collection circuitry provides a list of data values representative of the spectral intensity at each pixel which can be then stored in a mass storage device as well as immediately analyzed based on selected criteria.

Abstract translation: 红外光谱仪适于以高频率捕获光谱数据，并且包括用于周期性地接收红外辐射的限定狭缝和音叉切割器的孔。 透镜和多个反射镜通过将红外辐射分成光谱分量的一对氟化钙棱镜来引导红外辐射。 光谱分量由附加镜和透镜引导到产生一组表示光谱分量强度的数据的硒化铅像素阵列。 耦合到像素阵列并耦合到音叉斩波器的数据采集电路在每个开口期间至少一次以可选择的速率收集数据集。 数据采集​​电路上的串行输出提供表示每个像素处的光谱强度的数​​据值列表，然后可以将其存储在大容量存储设备中，并且基于所选择的标准立即分析。