公开(公告)号：US10172223B2

公开(公告)日：2019-01-01

申请号：US15387433

申请日：2016-12-21

Applicant: X-Illumina, Inc.

Inventor： Steven D. Hansen

IPC: H05G2/00 ,  H01J35/06 ,  H01J35/08 ,  H05H1/52 ,  H01J19/04 ,  H01J19/24

Abstract: Described herein are methods and systems relating to an x-ray generation system. In some embodiments, the system includes an electron beam acceleration region that generates an electron beam and accelerates electrons in the beam and a radiation generation region that (i) receives the electron beam and (ii) generates an electric field having an energy of greater than about 10E7 V/m without electrical breakdown of vacuum gaps. The electric field is configured to decelerate electrons in the electron beam sufficiently to generate x-ray energy.

公开(公告)号：US10062539B2

公开(公告)日：2018-08-28

申请号：US15000523

申请日：2016-01-19

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yoshihiro Yanagisawa ,  Shuji Yamada ,  Takao Ogura ,  Nobuhiro Ito

IPC: H01J35/08 ,  H01J35/16

CPC classification number: H01J35/08 ,  H01J35/16 ,  H01J35/186 ,  H01J2235/081 ,  H01J2235/083

Abstract: Provided is an anode capable of keeping the X-ray dose steady in an X-ray generating tube by preventing a crack in a connecting electrode layer, which electrically connects a target layer and an anode member. The anode includes a first bonding boundary where the connecting electrode layer, which electrically connects the target layer and the anode member, is bonded to a supporting substrate of a target, and a second bonding boundary where the connecting electrode layer is bonded to the anode member in which the connecting electrode layer is formed so that the first bonding boundary and the second bonding boundary are on the same side with respect to the connecting electrode layer.

公开(公告)号：US10049850B2

公开(公告)日：2018-08-14

申请号：US14841726

申请日：2015-09-01

Applicant: Bruker AXS GmbH

Inventor： Christoph Ollinger ,  Carsten Michaelsen ,  Andreas Kleine ,  Juergen Graf

IPC: H01J35/30 ,  H01J35/08 ,  H01J35/14 ,  H05G1/58 ,  G21K1/06

Abstract: An x-ray apparatus (1), has an electron beam source (2), a target (4), onto which the electron beam (3) is directed to form a focal spot (5; 5a, 5b) on the target (4), x-ray optics (6) for collecting x-rays emitted from the focal spot (5; 5a, 5b) to form an x-ray beam (8) and a sample position (9) at which the x-ray beam (8) is directed. The x-ray apparatus (1) further includes an electrostatic or electromagnetic electron beam deflection device (10) suitable for moving the focal spot (5; 5a, 5b) on the target (4). The extension of the focal spot (5; 5a, 5b) in any direction (x, y, z) is at least a factor of 1.5 smaller than the extension of the target (4). An x-ray apparatus is thereby provided with simplified alignment of the x-ray optics with respect to a microfocus x-ray source.

公开(公告)号：US10014149B2

公开(公告)日：2018-07-03

申请号：US14762477

申请日：2013-11-05

Applicant: Futaba Corporation ,  HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Nakamura ,  Norimasa Kosugi ,  Naoki Okumura ,  Yoshitaka Sato ,  Akira Matsumoto ,  Yoshihisa Marushima ,  Kazuhito Nakamura

IPC: H01J35/18 ,  H05G1/06 ,  H01J35/06 ,  H01J35/08 ,  H01J35/16

CPC classification number: H01J35/18 ,  H01J35/06 ,  H01J35/08 ,  H01J35/116 ,  H01J35/16 ,  H05G1/06

Abstract: In an X-ray radiation source, a counter wall made of alkali-containing glass, out of walls of a housing of an X-ray tube, is sandwiched between a filament and an electric field control electrode to each of which a negative high voltage is applied. This configuration prevents an electric field from being generated in the counter wall and thus suppresses precipitation of alkali ions from the glass. Therefore, it prevents change in potential relationship between electrodes at different potentials such as the filament, grid, and target and enables stable operation to be maintained, without occurrence of a trouble of failure in maintaining a desired X-ray amount.

公开(公告)号：US20180180560A1

公开(公告)日：2018-06-28

申请号：US15391356

申请日：2016-12-27

Applicant: MALVERN PANALYTICAL B.V.

Inventor： Milen GATESHKI ,  Detlef BECKERS

IPC: G01N23/04 ,  H01J35/08

CPC classification number: G01N23/046 ,  G01N2223/309 ,  G01N2223/419 ,  G01N2223/501

Abstract: Apparatus for computed tomography is described that is also suitable for X-ray diffraction. The computed tomography measurement uses a line focus 8 and passes the X-rays from the line focus through a perpendicular slit 22 and then through a sample onto a two dimensional detector. A plurality of images are taken, each with the sample rotated about a rotation axis 14 by a different amount, and combined to create a computed tomography image.

公开(公告)号：US09953798B2

公开(公告)日：2018-04-24

申请号：US15377133

申请日：2016-12-13

Applicant: Airdrie Partners I, LP

Inventor： Thomas A Case ,  Josh Star-Lack ,  Brian Patrick Wilfley

IPC: H01J35/14 ,  H01J27/14 ,  H01J27/02 ,  H01J35/08 ,  H01J35/06

CPC classification number: H01J35/14 ,  H01J35/06 ,  H01J35/08 ,  H01J2235/087

Abstract: The present invention pertains to an apparatus for generating a charged particle beam comprising a magnetic element for controlling the profile of the beam in a predetermined plane. A cathode can be provided for emitting charged particles and an anode for accelerating the charged particles along an axis of travel. The present invention also pertains to a method for generating a particle beam that has a uniform profile in a predetermined plane comprising inducing emission of charged particles from an emitter, accelerating those particles along and toward an axis of beam travel, generating a magnetic field with a component aligned with the axis of beam travel but different in the predetermined plane than at the emitter, and modifying the beam profile.

公开(公告)号：US09941091B2

公开(公告)日：2018-04-10

申请号：US15074859

申请日：2016-03-18

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Jin-Woo Jeong ,  Yoon-Ho Song

IPC: H01J35/00 ,  H01J35/06 ,  H01J35/08

CPC classification number: H01J35/065 ,  H01J35/08

Abstract: An X-ray tube includes a cathode including an emitter emitting an electron beam, an anode at which a target material is disposed, the target material emitting an X-ray by colliding with the electron beam, and an insulating spacer isolating the anode, wherein the cathode or the anode is disposed between the emitter and the insulating spacer.

公开(公告)号：US09934932B2

公开(公告)日：2018-04-03

申请号：US15331251

申请日：2016-10-21

Applicant: Wisconsin Alumni Research Foundation

Inventor： Thomas R. Mackie ,  Brandon J. Walker ,  Jonathon R. Seaton

IPC: H01J35/08 ,  H01J35/14 ,  A61B6/03 ,  A61B6/00 ,  H01J35/04 ,  H01J35/06 ,  H01J35/12 ,  A61B6/06 ,  H01J35/00 ,  H01J35/30 ,  A61N5/10

CPC classification number: H01J35/14 ,  A61B6/032 ,  A61B6/035 ,  A61B6/06 ,  A61B6/40 ,  A61B6/4007 ,  A61B6/4014 ,  A61B6/4021 ,  A61B6/405 ,  A61B6/4488 ,  A61B6/482 ,  A61N5/1077 ,  H01J35/00 ,  H01J35/045 ,  H01J35/06 ,  H01J35/12 ,  H01J35/30 ,  H01J2235/068 ,  H01J2235/1204 ,  H01J2235/1262 ,  H01J2235/127

Abstract: An imaging module includes a plurality of cathodes and respective gates, each cathode configured to generate a separate beam of electrons directed across a vacuum chamber and each gate matched to at least one respective cathode to enable and disable each separate beam of electrons from being directed across the vacuum chamber. A target anode is fixed within the vacuum chamber and arranged to receive the separate beam of electrons from each of the plurality of cathodes and, therefrom, generate a beam of x-rays. A deflection system is arranged between the plurality of cathodes and the target anode to generate a variable magnetic field to control a path followed by each of the separate beams of electrons to the target anode.

公开(公告)号：US20180068821A1

公开(公告)日：2018-03-08

申请号：US15256692

申请日：2016-09-05

Applicant: Mark F. Eaton

Inventor： Mark F. Eaton

IPC: H01J35/08 ,  H01J35/06 ,  H01J29/08 ,  G03F7/20

CPC classification number: H01J35/08 ,  G03F7/7005 ,  G21K1/067 ,  G21K2201/067 ,  H01J29/085 ,  H01J35/06 ,  H01J35/112 ,  H01J2235/062 ,  H01J2235/068 ,  H01J2235/086

Abstract: An efficient source of EUV or SXR flux uses multiple e-beams from multiple cathodes to impact a wide anode target with a flux-generating surface to generate flux over a wide area. The conversion efficiency of e-beam power to flux power may be improved by the direction of the e-beams towards the anode target at shallow or grazing incidence angles or the use of mirrored anode surfaces which reflect EUV or SXR. The source is enclosed in a vacuum chamber and performs work such as the penetration of photoresist on a semiconductor wafer in vacuum.

公开(公告)号：US09911569B2

公开(公告)日：2018-03-06

申请号：US14993163

申请日：2016-01-12

Applicant: Malvern Panalytical B.V.

Inventor： J. van der Borst ,  Bart Filmer ,  Ben Hageluken ,  Jos Schalley ,  Romulus Mihalca

IPC: H01J35/18 ,  H01J35/08 ,  H01J9/14 ,  H01J35/12

CPC classification number: H01J35/08 ,  H01J9/14 ,  H01J35/12 ,  H01J2235/084 ,  H01J2235/1204 ,  H01J2235/1262

Abstract: A method of manufacturing an X-ray tube component, includes diffusion bonding or brazing an anode of rhodium, molybdenum or tungsten to a heat spreader of molybdenum, tungsten, or a composite of molybdenum and/or tungsten. Suitable joint materials for diffusion bonding include gold; suitable joint materials for brazing include an alloy of silver and copper, an alloy of silver, copper and palladium, an alloy of gold and copper or an alloy of gold, copper and nickel. The resulting tube component delivers reliable behaviors and the joint can withstand high temperatures, high temperature gradients, fast temperature changes, extremely high radiation and extremely high electric field, while maintaining good high vacuum properties.