公开(公告)号：US07935425B2

公开(公告)日：2011-05-03

申请号：US10536352

申请日：2003-11-28

Applicant: Daiji Hara ,  Keisuke Yoshida

Inventor： Daiji Hara ,  Keisuke Yoshida

IPC: B32B9/04 ,  C23C16/40

CPC classification number: H01L21/02126 ,  B05D1/62 ,  C07F7/1804 ,  C07F7/1876 ,  C07F7/21 ,  C23C16/401 ,  H01L21/02216 ,  H01L21/02274 ,  H01L21/3121 ,  H01L21/3122 ,  H01L21/31633 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A material for insulating film suitable as an interlayer insulating material for a semiconductor device, from which an insulating film is formed by chemical vapor deposition, and an insulating film formed from such a material and a semiconductor device employing an insulating film, are provided.A material for insulating film comprising an organosilicon compound which is one of an organosilane compound in which a secondary hydrocarbon group and an alkenyl group, or an alkenyl group, is directly bonded to a silicon atom, or an organosiloxane compound in which a secondary hydrocarbon group and/or an alkenyl group is directly bonded to a silicon atom, represented by the formulae (1) to (4), from which an insulating film is formed by chemical vapor deposition of the organosilicon compound:

Abstract translation: 提供了适合作为半导体器件的层间绝缘材料的绝缘膜的材料，通过化学气相沉积形成绝缘膜，以及由这种材料形成的绝缘膜和采用绝缘膜的半导体器件。 或作为其中第二烃基和链烯基或链烯基直接与硅原子结合的有机硅烷化合物的有机硅化合物或其中第二烃基 和/或链烯基直接键合到由式（1）至（4）表示的硅原子上，通过有机硅化合物的化学气相沉积形成绝缘膜：

公开(公告)号：US07909263B2

公开(公告)日：2011-03-22

申请号：US10886757

申请日：2004-07-08

Applicant: Daniel S. Marshall

Inventor： Daniel S. Marshall

IPC: A62C5/02

CPC classification number: B05D1/62 ,  B05B7/22 ,  B05B9/005 ,  B05D1/025 ,  B05D1/12 ,  B05D2401/90 ,  C23C4/134

Abstract: A method of dispersing fine particles in a spray including the steps of providing a liquid carrier having a critical point and fine particles of at least one material. The fine particles are dispersed in the liquid carrier. A supercritical carrier containing dispersed particles is created by driving the liquid carrier containing dispersed fine particles above the critical point. The pressure of the supercritical carrier containing dispersed particles is reduced thereby forming a vapor carrier containing dispersed particles therein. The vapor carrier containing dispersed fine particles is then discharged.

Abstract translation: 一种在喷雾中分散细颗粒的方法，包括提供具有临界点和至少一种材料的细颗粒的液体载体的步骤。 细颗粒分散在液体载体中。 含有分散颗粒的超临界载体通过驱动含有高于临界点的分散细颗粒的液体载体来产生。 包含分散颗粒的超临界载体的压力降低，从而形成其中含有分散颗粒的蒸气载体。 然后排出含有分散的细颗粒的蒸气载体。

公开(公告)号：US07906217B2

公开(公告)日：2011-03-15

申请号：US11884772

申请日：2006-02-07

Applicant: Hajime Inagaki ,  Toshihide Ieki ,  Satoru Kitou ,  Ryuta Nakano ,  Megumi Nakayama

Inventor： Hajime Inagaki ,  Toshihide Ieki ,  Satoru Kitou ,  Ryuta Nakano ,  Megumi Nakayama

IPC: B32B1/08 ,  B32B7/00 ,  B32B9/00 ,  B32B18/00 ,  B32B33/00

CPC classification number: C23C16/401 ,  B05D1/62 ,  B05D2201/00 ,  B05D2490/50 ,  C23C16/0272 ,  C23C16/045 ,  C23C16/515 ,  Y10T428/13 ,  Y10T428/131 ,  Y10T428/1317 ,  Y10T428/1321 ,  Y10T428/1355 ,  Y10T428/1359 ,  Y10T428/1383 ,  Y10T428/1393 ,  Y10T428/31678

Abstract: A vapor deposited film is formed on a base material surface by a plasma CVD method where an organic metal compound and an oxidizing gas are used as a reactive gas. The vapor deposited film has three sections of a base material side adhesive layer having 5% or more carbon, a barrier intermediate layer having less than 5% carbon, and a surface protection film having 5% or more carbon, by element concentration with respect to the total amount of three elements of a metal element (M), oxygen (O) and carbon (C) derived from the organic metal compound. The vapor deposited film has excellent adhesiveness to the base material, and has excellent resistance to water, especially to alkaline aqueous solutions, as well.

Abstract translation: 通过使用有机金属化合物和氧化性气体作为反应气体的等离子体CVD法，在基材表面上形成蒸镀膜。 气相沉积膜具有三个部分，具有5％或更多碳的基材侧粘合剂层，具有小于5％碳的阻挡中间层和具有5％或更多碳的表面保护膜，元素浓度相对于 由有机金属化合物衍生的金属元素（M），氧（O）和碳（C）的三种元素的总量。 蒸镀膜与基材的密合性优异，耐水性优异，特别是碱性水溶液。

公开(公告)号：US20110059284A1

公开(公告)日：2011-03-10

申请号：US12877791

申请日：2010-09-08

Applicant: Peter Butzloff ,  Robert Berger ,  Jamie Antongiovanni

Inventor： Peter Butzloff ,  Robert Berger ,  Jamie Antongiovanni

IPC: B32B37/06 ,  B32B1/04

CPC classification number: B29C65/1425 ,  B05D1/62 ,  B05D7/04 ,  B29C65/04 ,  B29C65/1496 ,  B29C65/3412 ,  B29C65/3476 ,  B29C66/1122 ,  B29C66/3452 ,  B29C66/43 ,  B29C66/53262 ,  B29C66/71 ,  B29C66/72321 ,  B29C66/72341 ,  B29C66/72343 ,  B29C66/73143 ,  B29C66/73771 ,  B29C66/73773 ,  B29C66/73775 ,  B29C66/73791 ,  B29C66/73921 ,  B29K2105/162 ,  B29L2031/712 ,  B32B37/203 ,  B65D65/466 ,  B65D75/5883 ,  Y02W90/13 ,  Y10T428/19 ,  Y10T428/192 ,  Y10T428/24942 ,  B29K2067/046

Abstract: A microwave processing device/system can create strong temperature gradients in biodegradable polymer material. Novel physical phenomena caused by the heated particles cause local changes in viscosity and flow, leading to high mass transport and current densities in activated polymer matrix materials and to dramatically shorter reaction times and solvent-free reaction conditions. Advancements in the process speed and quality of packaging films in general can be achieved by increasing the polymeric amorphous to crystalline ratio, especially with regard to the claimed methods for manufacturing and sealing biodegradable packaging films. Micron-size particles or nanoparticles in the processed materials can interact with microwaves of different frequencies and intensities to create intentionally varied local material property changes to create an tunable flexible packaging product that is sustainable and “green.” Related systems, apparatus, methods, and/or articles are also described.

Abstract translation: 微波处理装置/系统可在可生物降解的聚合物材料中产生强烈的温度梯度。 由加热的颗粒引起的新的物理现象引起粘度和流动的局部变化，导致活性聚合物基体材料中的高质量传输和电流密度以及显着更短的反应时间和无溶剂的反应条件。 通常可以通过增加聚合物非晶态至结晶比来实现包装膜的加工速度和质量的进步，特别是关于制造和密封可生物降解的包装膜的要求保护的方法。 加工材料中的微米级颗粒或纳米颗粒可与不同频率和强度的微波相互作用，以产生有意改变的本地材料性质变化，从而创建可持续和“绿色”的可调谐软包装产品。相关系统，设备，方法和 /或物品也被描述。

公开(公告)号：US20110027457A1

公开(公告)日：2011-02-03

申请号：US12735387

申请日：2009-02-16

Applicant: Malcolm Woodcock

Inventor： Malcolm Woodcock

IPC: C23C16/52 ,  B05C11/00 ,  C23C16/00

CPC classification number: C23C16/4481 ,  B05D1/60 ,  B05D1/62

Abstract: A delivery system (10) for delivering species (12) to a processing (chamber 14) comprises a species container (16) for containing species supplied from a source (18) of liquid species. Heating means (44) is provided for heating the liquid species. The heating means is connected by conductors (46) to a heating control unit (48) which is operable by control means (30) to control evaporation of liquid species from container (16). Flow guide means (22, 24) guide flow of evaporated species to a processing chamber.

Abstract translation: 用于将物质（12）输送到处理（室14）的输送系统（10）包括用于容纳从液体物质源（18）供应的物质的物质容器（16）。 提供加热装置（44）以加热液体种类。 加热装置通过导体（46）连接到加热控制单元（48），加热控制单元可由控制装置（30）操作以控制来自容器（16）的液体物质的蒸发。 引导装置（22,24）引导蒸发的物质流到处理室。

公开(公告)号：US20110008525A1

公开(公告)日：2011-01-13

申请号：US12501308

申请日：2009-07-10

Applicant: George Theodore Dalakos ,  Christian Maria Anton Heller ,  Ahmet Gun Erlat

Inventor： George Theodore Dalakos ,  Christian Maria Anton Heller ,  Ahmet Gun Erlat

IPC: B05D5/12 ,  B05D3/04 ,  C23C16/00 ,  B05D3/06

CPC classification number: B05D1/62 ,  B05D3/0254 ,  B05D3/067

Abstract: Present embodiments are directed to a system and method for condensing and curing organic materials within a deposition chamber. Present embodiments may include condensing an organic component from a gas phase into a liquid phase on a target surface within the deposition chamber, wherein the gas phase of the organic component might be mixed with an inert gas. Further, present embodiments may include solidifying the liquid phase of the organic component into a solid phase within the deposition chamber using an inert plasma formed from the inert gas.

Abstract translation: 本实施例涉及用于在沉积室内冷凝和固化有机材料的系统和方法。 本实施方案可以包括将有机组分从气相中冷凝到沉积室内的目标表面上的液相，其中有机组分的气相可能与惰性气体混合。 此外，本实施例可以包括使用由惰性气体形成的惰性等离子体将有机组分的液相固化成沉积室内的固相。

公开(公告)号：US07838071B2

公开(公告)日：2010-11-23

申请号：US11631622

申请日：2005-07-05

Applicant: Laurent Danel ,  Frédéric Lecomte ,  Nicolas Chomel

Inventor： Laurent Danel ,  Frédéric Lecomte ,  Nicolas Chomel

IPC: B05D7/22

CPC classification number: C23C16/511 ,  B05D1/62 ,  B05D3/0493 ,  B05D7/227 ,  C23C16/045

Abstract: A container-treatment method, of the type in which the container (12) is disposed inside a chamber (16) which defines a cavity (18) outside the container (12) and which is connected to a Vacuum pumping circuit (50), the interior of the container (12) being connected to the pumping circuit (50). The method includes a preliminary pumping step (E1) which is followed by a treatment step (E2). The preliminary step (E1) includes the following successive phases, namely: an external pumping phase (P1) which produces a drop in the pressure inside the cavity (18) only; and an internal pumping phase (P2) which produces a drop in the pressure inside the container (12) only. A machine used to implement the method is also disclosed.

Abstract translation: 一种容器处理方法，其中容器（12）设置在限定容器（12）外部并且连接到真空泵电路（50）的空腔（18）内的腔室（16）内， 容器（12）的内部连接到泵送回路（50）。 该方法包括初步泵送步骤（E1），其后是处理步骤（E2）。 初步步骤（E1）包括以下连续相，即仅产生空腔（18）内压力的外部泵送相（P1）; 和内部泵送相（P2），仅产生容器（12）内的压力下降。 还公开了用于实现该方法的机器。

公开(公告)号：US20100240827A1

公开(公告)日：2010-09-23

申请号：US12085986

申请日：2006-03-15

Applicant: David Barwick ,  Declan Oliver Hastings Teare ,  Jas Pal Singh Badyal

Inventor： David Barwick ,  Declan Oliver Hastings Teare ,  Jas Pal Singh Badyal

IPC: C08F257/02 ,  B05D7/24 ,  B05D3/14 ,  C23C14/58

CPC classification number: C08F257/00 ,  B05D1/34 ,  B05D1/62 ,  B05D7/02 ,  C08F265/04 ,  C08F291/04 ,  C08F291/06 ,  C08F293/005 ,  C08F2438/01 ,  C08F2438/02 ,  Y10T428/31504 ,  C08F2/38

Abstract: A method for producing polymer coatings by surface initiated polymerization from a plasma deposited coating is provided. The modification of surfaces by polymer attachment is a versatile and efficient means of controlling interfacial properties, such as surface energy (i.e. wetting behavior), permeability, bio-activity, and chemical reactivity. The present invention provides a method whereby a plasma deposited coating is applied to a substrate and the polymer coating formed by surface initiated polymerization is formed on the coating rather than the substrate itself. This means that the growth of the polymer using the grafting from procedure can be performed efficiently and independently of the substrate from.

Abstract translation: 提供了通过从等离子体沉积涂层的表面引发聚合制备聚合物涂层的方法。 通过聚合物附着改性表面是控制界面性质，如表面能（即润湿行为），渗透性，生物活性和化学反应性的通用和有效的手段。 本发明提供了一种方法，其中将等离子体沉积涂层施加到基底上，并且通过表面引发聚合形成的聚合物涂层形成在涂层而不是基底本身上。 这意味着使用来自程序的接枝的聚合物的生长可以有效且独立于底物进行。

公开(公告)号：US20100227372A1

公开(公告)日：2010-09-09

申请号：US12452882

申请日：2008-07-25

Applicant: Marcela Bilek ,  David McKenzie ,  Yongbai Yin

Inventor： Marcela Bilek ,  David McKenzie ,  Yongbai Yin

IPC: C08F290/14 ,  C08J7/12 ,  C08G61/02 ,  C08G73/02 ,  C08F38/02 ,  C08F10/02 ,  B32B27/00 ,  C08L89/00 ,  C08G63/91 ,  C12N11/08 ,  D03D15/00 ,  C23C14/00

CPC classification number: A61L27/34 ,  A61L27/042 ,  A61L27/54 ,  A61L2300/252 ,  A61L2300/254 ,  A61L2300/606 ,  A61L2400/18 ,  B05D1/62 ,  G01N33/54306 ,  G01N2333/908 ,  Y10T442/30

Abstract: The invention relates to an activated metallic, semiconductor, polymer, composite and/or ceramic substrate, the substrate being bound through a mixed or graded interface to a hydrophilic polymer surface that is activated to enable direct covalent binding to a functional biological molecule, the polymer surface comprising a sub-surface that includes a plurality of cross-linked regions, as well as to such activated substrates that have been functionalised with a biological molecule and to devices comprising such functionalised substrates. Such substrates can be produced by a method comprising steps of: a. exposing a surface of the substrate to any or more of (i) to (iii): (i) plasma ion implantation with carbon containing species; (ii) co-deposition under conditions in which substrate material is deposited with carbon containing species while gradually reducing substrate material proportion and increasing carbon containing species proportion; (iii) deposition of a plasma polymer surface layer with energetic ion bombardment; incubating the surface treated according to step (a) with a desired biological molecule.

Abstract translation: 本发明涉及活化的金属，半导体，聚合物，复合材料和/或陶瓷基材，所述基材通过混合或分级界面结合到亲水性聚合物表面，所述界面被活化以实现与功能性生物分子的直接共价结合，所述聚合物 表面，其包括包含多个交联区域的子表面，以及已经用生物分子官能化的这种活化的底物和包含这种官能化底物的装置。 这样的基材可以通过包括以下步骤的方法制备：a。 （i）至（iii）中的任何一种或多种：（i）用含碳物质进行等离子体离子注入; （ii）在使含有碳的物质沉积衬底材料的条件下共沉积，同时逐渐降低衬底材料比例并增加含碳物质比例; （iii）用能量离子轰击沉积等离子体聚合物表面层; 将根据步骤（a）处理的表面与所需的生物分子一起孵育。

公开(公告)号：US20100221452A1

公开(公告)日：2010-09-02

申请号：US11988442

申请日：2006-07-07

Applicant: Bang-Kwon Kang

Inventor： Bang-Kwon Kang

IPC: C23C16/50 ,  C23C16/22

CPC classification number: C23C16/50 ,  B05D1/62 ,  B05D5/083 ,  B05D2201/04 ,  B05D2202/00 ,  B05D2203/35 ,  C23C16/22 ,  C23C16/26

Abstract: The present invention relates to a method of coating fluorocarbon or hydrocarbon on the surface of a workpiece using atmospheric pressure plasma. More particularly, the present invention relates to a method of coating hydrocarbon or fluorocarbon on the surface of a workpiece using plasma generated under atmospheric pressure such that the workpiece can have a hydrophobic or super-hydrophobic surface.The method of coating a surface of a workpiece with fluorocarbon to be hydrophobic or super-hydrophobic according to the present invention comprises the steps of generating first atmospheric pressure glow plasma by supplying a reaction gas into a discharge space formed between a first electrode and a second electrode, the reaction gas containing hydrogen gas, fluorocarbon gas and inert gas, the first and second electrodes being connected to an RF power supply of an atmospheric pressure plasma generator; and approaching the workpiece to the first electrode downstream of a reaction gas flow passing through the discharge space, such that the plasma created in the discharge space is transferred into a space between the first electrode and the workpiece to generate a second atmospheric pressure glow plasma therein, whereby a fluorocarbon coating layer can be formed on the surface of the workpiece.

Abstract translation: 本发明涉及使用大气压等离子体在工件表面上涂覆碳氟化合物或碳氢化合物的方法。 更具体地说，本发明涉及使用在大气压下产生的等离子体在工件表面上涂覆碳氢化合物或碳氟化合物的方法，使得工件可以具有疏水或超疏水表面。 根据本发明的将碳氟化合物表面涂覆为疏水或超疏水的工件表面的方法包括以下步骤：通过将反应气体供应到形成在第一电极和第二电极之间的放电空间中来产生第一大气压发光等离子体 电极，含有氢气的反应气体，碳氟化合物气体和惰性气体，第一和第二电极连接到大气压等离子体发生器的RF电源; 并使工件接近通过放电空间的反应气体流下游的第一电极，使得在放电空间中产生的等离子体转移到第一电极和工件之间的空间中，以在其中产生第二大气压发光等离子体 由此可以在工件的表面上形成氟碳涂层。