公开(公告)号：US20140375999A1

公开(公告)日：2014-12-25

申请号：US14314210

申请日：2014-06-25

Applicant: Katsunari OKAMOTO

Inventor： Katsunari OKAMOTO

IPC: G01J3/45

CPC classification number: G01J3/4532 ,  G01J3/4531

Abstract: An apparatus including a transform spectrometer with n×4 multi-mode interface optical hybrid couplers, wherein n=2 or 4, is herein provided. A transform spectrometer apparatus implemented on a planar waveguide circuit is also provided, including: an input optical signal waveguide for carrying an input optical signal; a plurality of input couplers connected to the input optical signal waveguide, each input coupler capable of sending an output signal; an array of interleaved waveguide Mach-Zehner interferometers (MZI), with each MZI coupled to a respective input coupler and each MZI having at least one MZI waveguide for receiving an output signal; and, a plurality of output coupler portions, each output coupler portion coupled to a respective MZI. Each output coupler portion includes one or more inputs along which the output is received from the MZI, and a plurality of outputs for outputting a plurality of signals.

Abstract translation: 本发明提供一种包括n×4多模式界面光学混合耦合器的变换光谱仪，其中n = 2或4。 还提供了在平面波导电路上实现的变换光谱仪装置，包括：用于承载输入光信号的输入光信号波导; 连接到输入光信号波导的多个输入耦合器，每个输入耦合器能够发送输出信号; 交织波导马赫切纳干涉仪阵列（MZI），每个MZI耦合到相应的输入耦合器，每个MZI具有至少一个用于接收输出信号的MZI波导; 以及多个输出耦合器部分，每个输出耦合器部分耦合到相应的MZI。 每个输出耦合器部分包括从MZI接收输出的一个或多个输入，以及用于输出多个信号的多个输出。

公开(公告)号：US20140139839A1

公开(公告)日：2014-05-22

申请号：US14165997

申请日：2014-01-28

Applicant: Si-Ware Systems

Inventor： Mostafa Medhat ,  Bassem Mortada ,  Ahmed Othman El Shater ,  Muhammed Nagy ,  Mina Gad Seif ,  Bassam A. Saadany ,  Amr N. Hafez

IPC: G01B9/02 ,  G02B26/08

CPC classification number: G01B9/02068 ,  G01B7/08 ,  G01B9/02071 ,  G01B2290/35 ,  G01J3/45 ,  G01J3/4532 ,  G01J3/4535 ,  G02B26/0841

Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.

Abstract translation: 微机电系统（MEMS）干涉仪提供可移动镜的镜像定位的自校准。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS干涉仪包括用于确定MEMS致动器在可移动反射镜的两个或更多个已知位置处的电容的电容感测电路，以及用于在已知位置处使用致动器电容的校准模块来补偿电容感测电路中的任何漂移。

公开(公告)号：US08717573B1

公开(公告)日：2014-05-06

申请号：US13039254

申请日：2011-03-02

Applicant: Jason D. Mudge ,  Christopher W. Tischhauser ,  Gregory S. Feller ,  James Wes Irwin

Inventor： Jason D. Mudge ,  Christopher W. Tischhauser ,  Gregory S. Feller ,  James Wes Irwin

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/45 ,  G01J3/06 ,  G01J3/4532 ,  G01J2003/067

Abstract: A tunable interferometric scanning spectrometer is provided. In one aspect of the disclosure, the interferometric scanning spectrometer splits incoming light beams among different optical paths in the spectrometer, recombines the light beams from the different optical paths to produce combined light beams, detects intensities of the combined light beams across a focal plane (e.g., with a sensor array), and calculates a spectra based on the detected intensities and a filter function that is a function of optical path difference (OPD) between the optical paths. In one aspect, the filter function varies across the focal plane. In another aspect, the spectrometer comprises a rotatable dispersive element (e.g., glass plate) in one the optical paths and/or a moveable mirror in the other optical path. In this aspect, the spectrometer may be adjusted away from zero OPD by rotation of the dispersive element and/or displacement of the mirror.

Abstract translation: 提供可调谐干涉扫描光谱仪。 在本公开的一个方面，干涉扫描光谱仪在光谱仪中分离不同光路中的入射光束，将来自不同光路的光束重新组合以产生组合光束，检测组合光束穿过焦平面的强度（ 例如，使用传感器阵列），并且基于检测到的强度和作为光路之间的光程差（OPD）的函数的滤波器函数来计算光谱。 在一个方面，滤波器功能在焦平面上变化。 在另一方面，光谱仪包括在一个光路中的可旋转色散元件（例如，玻璃板）和/或另一光路中的可移动镜。 在这方面，可以通过分散元件的旋转和/或反射镜的位移来调节光谱仪远离零OPD。

公开(公告)号：US08570524B2

公开(公告)日：2013-10-29

申请号：US12849046

申请日：2010-08-03

Applicant: Xiaoke Wan ,  Jian Ge

Inventor： Xiaoke Wan ,  Jian Ge

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/02 ,  G01B9/02051 ,  G01J3/0259 ,  G01J3/28 ,  G01J3/45 ,  G01J3/4531 ,  G01J3/4532 ,  G01J2003/2866

Abstract: Calibration of an arbitrary spectrometer can use a stable monolithic interferometer as a wavelength calibration standard. Light from a polychromatic light source is input to the monolithic interferometer where it undergoes interference based on the optical path difference (OPD) of the interferometer. The resulting wavelength-modulated output beam is analyzed by a reference spectrometer to generate reference data. The output beam from the interferometer can be provided to an arbitrary spectral instrument. Wavelength calibration of the arbitrary spectral instrument may then be performed based on a comparison of the spectral instrument output with the reference data. By appropriate choice of materials for the monolithic interferometer, a highly stable structure can be fabricated that has a wide field and/or is thermally compensated. Because the interferometer is stable, the one-time generated reference data can be used over an extended period of time without re-characterization.

Abstract translation: 任意光谱仪的校准可以使用稳定的单片干涉仪作为波长校准标准。 来自多色光源的光被输入到单片干涉仪，其中它基于干涉仪的光程差（OPD）而受到干扰。 所得到的波长调制输出光束由参考光谱仪分析以产生参考数据。 来自干涉仪的输出光束可以提供给任意的光谱仪器。 然后可以基于光谱仪器输出与参考数据的比较来执行任意光谱仪器的波长校准。 通过适当地选择用于单片干涉仪的材料，可以制造具有宽场和/或热补偿的高度稳定的结构。 因为干涉仪是稳定的，所以一次性生成的参考数据可以在延长的时间段内被使用，而无需重新表征。

公开(公告)号：US08531675B2

公开(公告)日：2013-09-10

申请号：US12877888

申请日：2010-09-08

Applicant: Diaa A. Khalil ,  Bassem Mortada ,  Mohamed Nabil ,  Mostafa Medhat ,  Bassam A. Saadany

Inventor： Diaa A. Khalil ,  Bassem Mortada ,  Mohamed Nabil ,  Mostafa Medhat ,  Bassam A. Saadany

IPC: G01B9/02

CPC classification number: G01J3/4532 ,  G01J3/02 ,  G01J3/021 ,  G01J3/45

Abstract: A Micro Electro-Mechanical System (MEMS) spectrometer architecture compensates for verticality and dispersion problems using balancing interfaces. A MEMS spectrometer/interferometer includes a beam splitter formed on a first surface of a first medium at an interface between the first medium and a second medium, a first mirror formed on a second surface of the first medium, a second mirror formed on a third surface of the first medium and balancing interfaces designed to minimize both a difference in tilt angles between the surfaces and a difference in phase errors between beams reflected from the first and second mirrors.

Abstract translation: 微机电系统（MEMS）光谱仪架构使用平衡接口补偿垂直度和色散问题。 MEMS光谱仪/干涉仪包括在第一介质和第二介质之间的界面处形成在第一介质的第一表面上的分束器，形成在第一介质的第二表面上的第一反射镜，形成在第三介质上的第三反射镜 第一介质的表面和平衡界面被设计成最小化表面之间的倾斜角的差异以及从第一和第二反射镜反射的光束之间的相位误差。

公开(公告)号：US20130120754A1

公开(公告)日：2013-05-16

申请号：US13296317

申请日：2011-11-15

Applicant: Michael Wilson ,  Thomas G. Giallorenzi

Inventor： Michael Wilson ,  Thomas G. Giallorenzi

IPC: G01J3/453

CPC classification number: G01J3/26 ,  G01J3/2823 ,  G01J3/4532 ,  G01J2003/064

Abstract: Micro-spectral sensors and methods are presented in which a Fizeau wedge interference filter is disposed between a focal plane array and a visible scene with an increasing wedge filter dimension varying along a scan direction, where the scene is scanned along the FPA to obtain light intensity measurements of a given scene location at different times using different FPA sensor elements through different wedge filter thicknesses, and the measurements correlated to the given scene location are Fourier transform to generate spectral data for the location.

Abstract translation: 提出了微光谱传感器和方法，其中Fizeau楔形干涉滤光器设置在焦平面阵列和可见场景之间，其中沿着扫描方向变化的楔形滤波器尺寸增加，其中沿FPA扫描场景以获得光强度 使用不同的FPA传感器元件通过不同的楔形滤波器厚度在不同时间对给定场景位置的测量以及与给定场景位置相关的测量进行傅立叶变换以产生位置的光谱数据。

公开(公告)号：US08081319B2

公开(公告)日：2011-12-20

申请号：US12483653

申请日：2009-06-12

Applicant: Malcolm C. Smith ,  Michael A. Butler ,  Erik Deutsch

Inventor： Malcolm C. Smith ,  Michael A. Butler ,  Erik Deutsch

IPC: G01B9/02 ,  G02B26/08 ,  G02B26/10 ,  G02B26/12 ,  G02B5/18 ,  G02B27/44

CPC classification number: G02B5/1866 ,  G01J3/4532 ,  G01J3/4535 ,  G02B5/1857

Abstract: An adjustable two-dimensional lamellar grating system including a lamellar grating and a movable mirror disposed substantially parallel to one another, and an interferometer using the adjustable lamellar grating system. In one example, the lamellar grating includes a dielectric wafer having a dielectric wafer having a plurality of periodically spaced recesses formed therein, wherein the dielectric wafer has higher reflectivity at its surface facing the movable mirror than at a second opposing surface. In one example, the system also includes a mechanism for moving the mirror relative to the dielectric wafer.

Abstract translation: 一种可调节的二维层状光栅系统，包括基本上彼此平行设置的层状光栅和可移动反射镜，以及使用可调节层状光栅系统的干涉仪。 在一个示例中，层状光栅包括具有在其中形成有多个周期性间隔的凹槽的电介质晶片的介质晶片，其中介电晶片在其面向可移动反射镜的表面处具有比在第二相对表面处更高的反射率。 在一个示例中，该系统还包括用于相对于电介质晶片移动镜的机构。

公开(公告)号：US07738108B2

公开(公告)日：2010-06-15

申请号：US10577463

申请日：2004-10-29

Applicant: Jyrki Kauppinen

Inventor： Jyrki Kauppinen

IPC: G01B9/02 ,  G02B27/00

CPC classification number: G01J3/26 ,  G01J3/021 ,  G01J3/4532 ,  G01J3/4535

Abstract: The present invention relates to an interferometer, comprising at least a beamsplitter (10), at least one end reflector (11) for returning beams (S2, S3), and a set of reflectors (14, 15) for reflecting the beams (S2, S3) between the beamsplitter (10) and the end reflector (11) or the end reflectors, at least some of said set of reflectors (14, 15) being adapted to be rotatable around an axis (ω). Said set of reflectors comprises two angle reflectors (14, 15), constituted by plane reflectors, and the said end reflector (11) is or the end reflectors are an angle reflector constituted by plane reflectors (11′, 11″). An angle line of the end reflector (11) is or the angle lines of end reflectors are arranged perpendicular to an angle line of both of the angle reflectors (14, 15).

Abstract translation: 本发明涉及一种干涉仪，其至少包括分束器（10），用于返回光束（S2，S3）的至少一个端部反射器（11）和用于反射光束（S2）的一组反射器（14,15） 在分束器（10）和端部反射器（11）或端部反射器之间的至少一些反射器（14,15）中的至少一些适于围绕轴线（ω）旋转。 所述反射器组包括由平面反射器构成的两个角度反射器（14,15），并且所述端部反射器（11）是或端部反射器是由平面反射器（11'，11“）构成的角度反射器。 端部反射器（11）的角度线是或端部反射器的角度线垂直于两个角度反射器（14,15）的角度线布置。

公开(公告)号：US07474405B2

公开(公告)日：2009-01-06

申请号：US12033927

申请日：2008-02-20

Applicant: Michael Scott Kranz ,  Larry Christopher Heaton ,  Calvin Wayne Long

Inventor： Michael Scott Kranz ,  Larry Christopher Heaton ,  Calvin Wayne Long

IPC: G01B9/02

CPC classification number: G01J3/4532 ,  G01N21/31 ,  G01N2021/3595

Abstract: The Miniature Fourier Transform Spectrophotometer provides the capability, in a miniaturized device, of determining the light absorption/transmission spectra of a collected sample of gas or liquid though Fourier Transform spectroscopy techniques. The device takes an optical input from an optical fiber, manipulates that light through miniature optical components, and launches it into a miniaturized Michelson interferometer with a scanning mirror that acquires the interferogram of the optical input. The interferogram can be processed to retrieve the spectrum of the input light. A novel multi-stepped micro-mirror operates as the optical path length modulator in the miniaturized interferometer. A unique monolithic beamsplitter/mirror combination provides for accurate alignment of the components and greatly simplifies product integration. The device is designed to cover various optical spectra of interest. During operation, the precision and accuracy of the microfabricated components in the device allow operation and resolution even at extremely low wavelengths. In addition, the miniaturized nature of the device allows it to be used in new and extremely space-constrained applications.

Abstract translation: 微型傅里叶变换分光光度计在小型化装置中提供了通过傅里叶变换光谱技术确定收集的气体或液体样品的光吸收/透射光谱的能力。 该设备从光纤获取光学输入，通过微型光学组件操纵该光，并将其发射到具有获取光学输入的干涉图的扫描镜的小型化迈克尔逊干涉仪中。 可以处理干涉图以检索输入光的光谱。 一种新颖的多阶微型微镜作为微型干涉仪中的光程长度调制器。 独特的单片分光镜/镜组合可以精确对齐组件，大大简化了产品集成。 该器件被设计为覆盖所关注的各种光谱。 在操作过程中，器件中的微加工元件的精度和精度允许甚至在极低波长下进行操作和分辨。 此外，该设备的小型化使其能够用于新的和极其空间受限的应用。

公开(公告)号：US20070278407A1

公开(公告)日：2007-12-06

申请号：US11446806

申请日：2006-06-02

Applicant: Roland A. Wood ,  James A. Cox ,  Robert E. Higashi ,  Fouad A. Nusseibeh

Inventor： Roland A. Wood ,  James A. Cox ,  Robert E. Higashi ,  Fouad A. Nusseibeh

IPC: G01J5/02

CPC classification number: G01J5/12 ,  G01J3/42 ,  G01J3/4532 ,  G01J5/02 ,  G01J5/023 ,  G01J5/08 ,  G01J5/0837 ,  G01J5/40 ,  G01J2005/0077

Abstract: A radiation sensor that can operate in the THz regime comprising: a micro antenna, which may comprise a two-dimensional patterned thin-film metallizations on a thin dielectric pellicle fabricated by micro machining of a silicon wafer; a thermally isolated microstructure; a coupling mechanism for coupling the energy from the micro antenna to the microstructure, the coupling mechanism providing high thermal isolation between the micro antenna and the microstructure; a temperature signal detector on the microstructure; and signal processing electronics for receiving the temperature signal and processing it into useful data.

Abstract translation: 一种能够以太赫兹方式操作的辐射传感器，包括：微天线，其可以包括通过硅晶片的微加工制造的薄介电薄膜上的二维图案化薄膜金属化; 热隔离微结构; 用于将来自微天线的能量耦合到微结构的耦合机构，所述耦合机构在微天线和微结构之间提供高热隔离; 微结构的温度信号检测器; 以及用于接收温度信号并将其处理成有用数据的信号处理电子装置。