Optical spectrometer and method for spectrally resolved two-dimensional imaging of an object

    公开(公告)号:US12152937B2

    公开(公告)日:2024-11-26

    申请号:US17623291

    申请日:2020-06-18

    Applicant: Diego Guénot

    Abstract: The disclosure relates to an optical spectrometer for spectrally resolved two-dimensional imaging of an object, comprising a dispersing device arranged to disperse radiation from object, a multi-lens array arrangement arranged to receive the dispersed radiation from the dispersing device, a two-dimensional detector arranged to receive 5 the dispersed radiation as directed by the multi-lens array arrangement, wherein the optical spectrometer further comprises a collimating arrangement for collimating the radiation from object before the radiation reaches the dispersing device, the collimating arrangement comprising a diffusing plate for diffusing the radiation and an optical micro-channel arranged to receive the diffused radiation comprising a plurality 10 of parallel and linear optical micro-channels directed towards the dispersing device. The disclosure further relates to a method for spectrally resolved two-dimensional imaging of an object.

    Spectral feature control apparatus
    78.
    发明授权

    公开(公告)号:US11561407B2

    公开(公告)日:2023-01-24

    申请号:US17034132

    申请日:2020-09-28

    Applicant: Cymer, LLC

    Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

    APPARATUS FOR MEASURING RAMAN SPECTRUM AND METHOD THEREOF

    公开(公告)号:US20220373392A1

    公开(公告)日:2022-11-24

    申请号:US17763957

    申请日:2020-10-28

    Abstract: An apparatus for measuring time-resolved optical spectrum includes a light source, a sensor for collecting, forming, manipulating and measuring the intensity of the optical radiation, and a controller coupled to the light source and sensor. The sensor includes at least one optical delay element to provide a time delay to a first portion of the optical radiation. The sensor arrangement further includes an optical spectral disperser to split the delayed first portion and the second portion of the optical radiation into dispersed radiation having a plurality of wavelengths, and a sensor element configured to receive each wavelength of the dispersed radiation on a different spatial region, and measure the light intensity associated with each wavelength of the dispersed radiation. The controller collects the light intensity associated with each wavelength of the dispersed radiation measured by the sensor element to form a time-resolved optical spectrum.

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