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公开(公告)号:US20200309637A1
公开(公告)日:2020-10-01
申请号:US16765564
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Takashi KASAHARA , Katsumi SHIBAYAMA , Masaki HIROSE , Toshimitsu KAWAI , Hiroki OYAMA , Yumi KURAMOTO
Abstract: An electrical inspection method includes: a step of preparing a wafer in which a plurality of Fabry-Perot interference filter portions is formed, each of the plurality of Fabry-Perot interference filter portions in which a distance between a first mirror portion and a second mirror portion facing each other varies by an electrostatic force; and a step of inspecting electrical characteristics of each of the plurality of Fabry-Perot interference filter portions.
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公开(公告)号:US20200292386A1
公开(公告)日:2020-09-17
申请号:US16765765
申请日:2018-11-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Hiroki OYAMA , Katsumi SHIBAYAMA , Takashi KASAHARA , Masaki HIROSE , Toshimitsu KAWAI , Yumi KURAMOTO
IPC: G01J3/26 , H01L21/673
Abstract: A transportation method for transporting an object including a plurality of Fabry-Perot interference filters, the transportation method including a first step of accommodating the object in an accommodating container, wherein the Fabry-Perot interference filter includes a substrate, a first mirror portion and a second minor portion provided on the substrate to face each other via a gap and in which a distance from each other is variable, and in the first step, the object is accommodated and supported in the accommodating container in a state where the plurality of Fabry-Perot interference filters is two-dimensionally arranged.
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公开(公告)号:US10775238B2
公开(公告)日:2020-09-15
申请号:US16059744
申请日:2018-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai
Abstract: A spectral sensor includes a wiring substrate which has a principal surface; a light detector which is disposed on the principal surface of the wiring substrate and is electrically connected to the wiring substrate; spacer which is disposed around the light detector, on the principal surface of the wiring substrate; and a Fabry-Perot interference filter which has a light transmission region and is disposed on the principal surface of the wiring substrate with the spacer therebetween. The spacer support the Fabry-Perot interference filter in a surrounding region of the light transmission region and the spacer is arranged to form opening communicating with an inner side of the surrounding region and an outer side of the surrounding region, when viewed from a light transmission direction in the transmission region.
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公开(公告)号:US10739197B2
公开(公告)日:2020-08-11
申请号:US15607087
申请日:2017-05-26
Applicant: University of Hawaii
Inventor: Paul Lucey
Abstract: A spatial Fourier transform spectrometer is disclosed. The Fourier transform spectrometer includes a Fabry-Perot interferometer with first and second optical surfaces. The gap between the first and second optical surfaces spatially varies in a direction that is orthogonal to the optical axis of the Fourier transform spectrometer. The Fabry-Perot interferometer creates an interference pattern from input light. An image of the interference pattern is captured by a detector, which is communicatively coupled to a processor. The processor is configured to process the interference pattern image to determine information about the spectral content of the input light.
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公开(公告)号:US20200232852A1
公开(公告)日:2020-07-23
申请号:US16843244
申请日:2020-04-08
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Masaki HIROSE , Katsumi SHIBAYAMA , Takashi KASAHARA , Toshimitsu KAWAI , Hiroki OYAMA , Yumi TERAMACHI
IPC: G01J5/08 , G02B26/00 , G01J3/26 , G01J3/02 , G01J5/20 , G02F1/21 , H01L31/02 , H01L31/0203 , H01L31/0232 , H01L31/0304
Abstract: A light detection device includes: a Fabry-Perot interference filter provided with a light transmission region; a light detector configured to detect light transmitted through the light transmission region; a package having an opening and accommodating the Fabry-Perot interference filter and the light detector, and a light transmitting unit arranged on an inner surface of the package so as to close an opening, the light transmitting unit including a band pass filter configured to transmit light incident on the light transmission region. When viewed from a direction parallel to the line, an outer edge of the Fabry-Pert interference filter is positioned outside an outer edge of the opening, and an outer edge of the light transmitting unit is positioned outside the outer edge of the Fabry-Perot interference filter.
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公开(公告)号:US20200232849A1
公开(公告)日:2020-07-23
申请号:US16649332
申请日:2018-09-07
Applicant: FONDAZIONE ISTITUTO ITALIANO DI TECNOLOGIA
Inventor: Giuseppe ANTONACCI
Abstract: A spectrometer is provided which comprises a Virtually Imaged Phased Array member configured to receive an electromagnetic input radiation and to generate an electromagnetic output radiation, in which a spectrum of the electromagnetic output radiation is dispersed along a dispersion axis (x) transverse to an optical axis (z) of propagation of the electromagnetic output radiation; a Fourier lens adapted to convert the output electromagnetic radiation into a spectral pattern; an image sensor adapted to detect the spectral pattern; and at least one diffraction mask arranged along the optical axis (z) for propagating the output electromagnetic radiation, in a position not coincident with a spectral plane of the spectrometer. Through the diffraction mask, which comprises a material blocking the transmission of the output electromagnetic radiation, an aperture is obtained which allows the transmission of the output electromagnetic radiation, and whose edge comprises at least one inclined segment.
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公开(公告)号:US20200182695A1
公开(公告)日:2020-06-11
申请号:US16625612
申请日:2018-06-18
Applicant: ams Sensors Singapore Pte. Ltd.
Inventor: Peter Roentgen , Kotaro Ishizaki , Camilla Camarri , Markus Rossi , Elisa Parola , Bassam Hallal
Abstract: Compact spectrometer modules include an illumination channel and a detection channel. The illumination channel includes an illumination source operable to generate a broad spectrum of electromagnetic radiation. The detection channel includes an illumination detector and a Fabry-Perot component. The Fabry-Perot component is operable to pass a narrow spectrum of wavelengths to the illumination detector. Further, the Fabry-Perot component can be actuatable such that the Fabry- Perot component is operable to pass a plurality of narrow spectrums of wavelengths to the illumination detector.
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公开(公告)号:US10656014B2
公开(公告)日:2020-05-19
申请号:US15512977
申请日:2015-09-23
Applicant: AMS SENSORS SINGAPORE PTE. LTD.
Inventor: Peter Riel , Peter Roentgen
IPC: G01J3/10 , H01S5/04 , H01S5/183 , H01S5/40 , G01J3/06 , G01J3/26 , H01S5/00 , H01S5/10 , H01S5/343 , H01S3/094 , H01S5/323 , H01S5/028
Abstract: The present disclosure describes broadband optical emission sources that include a stack of semiconductor layers, wherein each of the semiconductor layers is operable to emit light of a different respective wavelength; a light source operable to provide optical pumping for stimulated photon emission from the stack; wherein the semiconductor layers are disposed sequentially in the stack such that a first one of the semiconductor layers is closest to the light source and a last one of the semiconductor layers is furthest from the light source, and wherein each particular one of the semiconductor layers is at least partially transparent to the light generated by the other semiconductor layers that are closer to the light source than the particular semiconductor layer. The disclosure also describes various spectrometers that include a broadband optical emission device, and optionally include a tuneable wavelength filter operable to allow a selected wavelength or narrow range of wavelengths to pass through.
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公开(公告)号:US10648861B2
公开(公告)日:2020-05-12
申请号:US15908455
申请日:2018-02-28
Applicant: VERIFOOD, LTD.
Inventor: Damian Goldring , Dror Sharon , Guy Brodetzki , Sagee Rosen , Omer Keilaf , Uri Kinrot , Ittai Nir , Nitzan Waisberg , Ofer Rachman , Assaf Carmi
Abstract: A protective sheath having a closed end and an open end is sized to receive a hand held spectrometer. The spectrometer can be placed in the sheath to calibrate the spectrometer and to measure samples. In a calibration orientation, an optical head of the spectrometer can be oriented toward the closed end of the sheath where a calibration material is located. In a measurement orientation, the optical head of the spectrometer can be oriented toward the open end of the sheath in order to measure a sample. To change the orientation, the spectrometer can be removed from the sheath container and placed in the sheath container with the calibration orientation or the measurement orientation. Accessory container covers can be provided and placed on the open end of the sheath with samples placed therein in order to provide improved measurements.
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公开(公告)号:US10591715B2
公开(公告)日:2020-03-17
申请号:US15117757
申请日:2015-02-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor: Katsumi Shibayama , Takashi Kasahara , Masaki Hirose , Toshimitsu Kawai
Abstract: A Fabry-Perot interference filter includes a fixed mirror and a movable mirror disposed opposite to the fixed mirror via a gap, distance between the fixed mirror and the movable in a light transmission region being adjusted by electrostatic force. A plurality of first annular grooves surrounding the light transmission region and a plurality of first through-holes opening to the gap side and the opposite side are formed at a surrounding portion surrounding the light transmission region in the movable mirror.
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