公开(公告)号：US09349571B2

公开(公告)日：2016-05-24

申请号：US14481823

申请日：2014-09-09

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Thomas Kemen ,  Pascal Anger ,  Dirk Zeidler ,  Gerd Benner

IPC: H01J37/26 ,  G21K5/04 ,  H01J37/10 ,  H01J37/147 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J37/04

CPC classification number: H01J37/265 ,  H01J37/04 ,  H01J37/10 ,  H01J37/1472 ,  H01J37/1474 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2802

Abstract: A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).

Abstract translation: 粒子光学系统包括：束生成系统（3），其被配置为产生多个粒子束（5）并将多个粒子束（5）引导到物平面（7）上;第一偏转器装置（35）被布置 在物体平面（7）上游的粒子束（5）的光束路径中，并且被配置为在多个粒子束（5）入射到物体平面（7）之前使多个粒子束（5）偏转，配置有物体保持器 为了保持在物体平面（7）中被检查的物体（17），被配置为接收和检测已经穿过物体平面（7）的多个粒子束（5）的多个检测器（27），其中， 检测器布置在与光束产生系统（3）相对的物平面（7）侧的检测平面（21）中，至少一个第一粒子光学透镜（19）被配置成收集从 检测器（27）上的物体平面，以及配置成共用的控制器（31） 控制第一偏转器装置（35），以通过偏转粒子束（5）来偏转物体平面（7）上的粒子束（5）的入射（9）的位置。

公开(公告)号：US20150069235A1

公开(公告)日：2015-03-12

申请号：US14481823

申请日：2014-09-09

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Thomas Kemen ,  Pascal Anger ,  Dirk Zeidler ,  Gerd Benner

IPC: H01J37/26 ,  H01J37/147 ,  H01J37/10 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/265 ,  H01J37/04 ,  H01J37/10 ,  H01J37/1472 ,  H01J37/1474 ,  H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2802

Abstract: A particle optical system comprises a beam generating system (3) configured to generate a plurality of particle beams (5) and to direct the plurality of particle beams (5) onto an object plane (7), a first deflector arrangement (35) arranged in the beam path of the particle beams (5) upstream of the object plane (7) and configured to deflect the plurality of particle beams (5) before they are incident on the object plane (7), an object holder (15) configured to hold an object (17) to be inspected in the object plane (7), a plurality of detectors (27) configured to receive and to detect the plurality of particle beams (5) having traversed the object plane (7), wherein the detectors are arranged in a detection plane (21) on a side of the object plane (7) opposite to the beam generating system (3), at least one first particle optical lens (19) configured to collect particles of the particle beams emanating from the object plane on the detectors (27), and a controller (31) configured to control the first deflector arrangement (35) in order to deflect locations of incidence (9) of the particle beams (5) on the object plane (7) by deflecting the particle beams (5).

Abstract translation: 粒子光学系统包括：束生成系统（3），其被配置为产生多个粒子束（5）并将多个粒子束（5）引导到物平面（7）上;第一偏转器装置（35）被布置 在物体平面（7）上游的粒子束（5）的光束路径中，并且被配置为在多个粒子束（5）入射到物体平面（7）之前使多个粒子束（5）偏转，配置有物体保持器 为了保持在物体平面（7）中被检查的物体（17），被配置为接收和检测已经穿过物体平面（7）的多个粒子束（5）的多个检测器（27），其中， 检测器被布置在物镜平面（7）与光束产生系统（3）相对的一侧的检测平面（21）中，至少一个第一粒子光学透镜（19）被配置为收集从 检测器（27）上的物体平面，以及配置成共用的控制器（31） 控制第一偏转器装置（35），以通过偏转粒子束（5）来偏转物体平面（7）上的粒子束（5）的入射（9）的位置。