BUFFER FILM FOR MULTI-CHIP PACKAGING
    3.
    发明申请
    BUFFER FILM FOR MULTI-CHIP PACKAGING 审中-公开
    多芯片包装的缓冲膜

    公开(公告)号:US20140248477A1

    公开(公告)日:2014-09-04

    申请号:US14275460

    申请日:2014-05-12

    Abstract: A buffer film for multi-chip packaging which does not cause out of alignment during multi-chip packaging and ensures favorable connection reliability has a structure in which a heat-resistant resin layer having a linear expansion coefficient of 80 ppm/° C. or less and a flexible resin layer made of a resin material having a Shore A hardness according to JIS K6253 of 10 to 80 are laminated. A multi-chip module can be produced by aligning a plurality of chip devices on a substrate through an adhesive to perform temporary adhesion, disposing the buffer film for multi-chip packaging between the chip devices and a bonding head so that the heat-resistant resin layer is on a chip device side, and connecting the plurality of chip devices with the substrate by applying heat and pressure to the chip devices toward the substrate with the bonding head.

    Abstract translation: 用于多芯片封装的缓冲膜在多芯片封装期间不会导致对准并且确保良好的连接可靠性具有这样的结构,其中线膨胀系数为80ppm /℃或更低的耐热树脂层 并且层压由具有根据JIS K6253的肖氏A硬度为10至80的树脂材料制成的柔性树脂层。 可以通过粘合剂对基板上的多个芯片装置进行临时粘合,在芯片装置之间设置用于多芯片封装的缓冲膜和接合头,从而制造多芯片模块,使得耐热树脂 层位于芯片器件侧,并且通过利用接合头向衬底施加热和压力来将多个芯片器件与衬底连接。

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