公开(公告)号：US20240347306A1

公开(公告)日：2024-10-17

申请号：US18294251

申请日：2022-06-23

Applicant: Denka Company Limited ,  NATIONAL INSTITUTE FOR MATERIALS SCIENCE

Inventor： Hiromitsu CHATANI ,  Daisuke ISHIKAWA ,  Jie TANG ,  Tadakatsu OHKUBO ,  Shuai TANG ,  Jun UZUHASHI ,  Kazuhiro HONO

IPC: H01J1/02 ,  H01J9/02

CPC classification number: H01J1/02 ,  H01J9/02

Abstract: A manufacturing method for an electron source according to the present disclosure includes steps of: (A) cutting out a chip from a block of an electron emission material, (B) fixing a first end portion of the chip to a distal end of a support needle, and (C) sharpening a second end portion of the chip. The step (A) includes forming first and second grooves which constitute first and second surfaces of the chip in the block by irradiating a surface of the block with an ion beam. The first end portion of the chip includes the first surface and the second surface with the surfaces forming an angle α of 10 to 90°. The step (B) includes forming a joint between the distal end of the support needle and the first end portion of the chip.

公开(公告)号：US20230215679A1

公开(公告)日：2023-07-06

申请号：US17996469

申请日：2021-04-14

Applicant: Denka Company Limited

Inventor： Dai TSUKADA ,  Hiromitsu CHATANI ,  Daisuke ISHIKAWA

IPC: H01J9/04 ,  H01J1/16 ,  H01J37/063

CPC classification number: H01J9/042 ,  H01J1/16 ,  H01J37/063

Abstract: An electron source according to the present disclosure includes a columnar portion made of a first material having an electron emission characteristic; and a tubular portion that is disposed to surround the columnar portion and made of a second material having a higher work function than the first material, wherein a hole that extends in a direction from one end face toward the other end face and has a substantially circular cross-sectional shape is formed in the tubular portion, and the columnar portion has a substantially triangular or substantially quadrangular cross-sectional shape and is fixed to the tubular portion in an abutting engagement with an inner surface of the hole.

公开(公告)号：US20240153730A1

公开(公告)日：2024-05-09

申请号：US18550077

申请日：2022-03-09

Applicant: Denka Company Limited

Inventor： Daisuke ISHIKAWA

IPC: H01J37/073

CPC classification number: H01J37/073

Abstract: An emitter includes an insulator, a pair of terminals attached to the insulator separately from each other, at least one filament attached between the pair of terminals in an arch shape, and an electron source fixed to the filament. The filament has bent portions between a contact with respect to the electron source and contacts with respect to the terminals. A device is provided with the emitter.

公开(公告)号：US20230317395A1

公开(公告)日：2023-10-05

申请号：US17996520

申请日：2021-04-14

Applicant: Denka Company Limited

Inventor： Daisuke ISHIKAWA ,  Hiromitsu CHATANI

IPC: H01J9/04 ,  H01J37/06

CPC classification number: H01J9/04 ,  H01J37/06 ,  H01J2237/06308

Abstract: A method for manufacturing an electron source according to the present disclosure includes steps of: (A) preparing a first member provided with a columnar portion made of a first material having an electron emission characteristic, (B) preparing a second member which has a higher work function and a lower strength than the first material, and in which a hole is formed extending in a direction from one end surface toward the other end surface, and (C) pushing the columnar portion into the hole in the second member, wherein the first member has a cross-sectional shape that is dissimilar to the cross-sectional shape of the hole; and in the step (C), by pressing the columnar portion into the hole, a portion of a side surface of the columnar portion scrapes the inner surface of the hole and bites into the second member, thereby fixing the columnar portion to the second member.

公开(公告)号：US20230298846A1

公开(公告)日：2023-09-21

申请号：US18041408

申请日：2021-08-05

Applicant: Denka Company Limited

Inventor： Daisuke ISHIKAWA ,  Hiromitsu CHATANI

IPC: H01J37/06

CPC classification number: H01J37/06 ,  H01J2237/06308

Abstract: An emitter according to the present disclosure includes: first and second heaters generating heat by energization; an electron source comprising a first material emitting an electron by being heated by the first and second heaters; and an intermediate member interposed between the electron source, and the first and second heaters, the intermediate member comprising a second material lower in thermal conductivity than the first material.