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公开(公告)号：US09823208B2
公开(公告)日：2017-11-21
申请号：US15084976
申请日：2016-03-30
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masafumi Watanabe , Takehiro Yamaoka
CPC classification number: G01N27/041 , G01L1/10 , G01L1/20 , G01L1/22 , G01N17/00 , G01N27/02 , G01Q60/30
Abstract: A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.
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2.发明申请公开(公告)号：US20160290945A1
公开(公告)日：2016-10-06
申请号：US15084976
申请日：2016-03-30
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masafumi Watanabe , Takehiro Yamaoka
CPC classification number: G01N27/041 , G01L1/10 , G01L1/20 , G01L1/22 , G01N17/00 , G01N27/02 , G01Q60/30
Abstract: A method includes: removing at least a part of an oxide formed on a surface of the sample by relatively scanning the surface of the sample in X and Y directions parallel to the surface while bringing a probe into contact with the surface of the sample; detecting a signal by bringing the probe into contact with the surface of the sample from which at least a part of the oxide is removed at a predetermined detection position in the X direction or the Y direction while a bias voltage is applied to the sample; calculating a spreading resistance value based on the signal; and retracting the probe to keep the probe relatively away from the surface in a Z direction perpendicular to the surface while relatively moving the probe to a next detection position to start scanning the sample from the next detection position.
Abstract translation: 一种方法包括：通过在使样本与样品的表面接触的同时在与所述表面平行的X和Y方向上相对扫描所述样品的表面来除去形成在所述样品表面上的至少一部分氧化物; 通过使所述探针与所述样品的表面接触来检测信号，所述样品的表面在X方向或Y方向上的预定检测位置处除去所述氧化物的至少一部分，同时向所述样品施加偏置电压; 基于该信号计算扩展电阻值; 并且使所述探针缩回以使所述探针在垂直于所述表面的Z方向上相对远离所述表面远离所述探针，同时相对地将所述探针移动到下一个检测位置以开始从所述下一个检测位置扫描所述样品。
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公开(公告)号：US08621660B2
公开(公告)日：2013-12-31
申请号：US13737022
申请日：2013-01-09
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masafumi Watanabe , Hiroumi Momota
IPC: G01Q70/10
Abstract: Provided is a method of evaluating a probe tip shape in a scanning probe microscope, including: measuring the probe tip shape by a probe shape test sample having a needle-like structure; determining radii of cross-sections at a plurality of distances from the apex; and calculating, based on the distances and the radii, a radius of curvature when the probe tip shape is approximated by a circle.
Abstract translation: 提供了一种在扫描探针显微镜中评价探针尖端形状的方法，包括：通过具有针状结构的探针形状测试样品测量探针尖端形状; 确定距所述顶点多个距离处的横截面的半径; 并且基于距离和半径计算当探针尖端形状由圆近似时的曲率半径。
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公开(公告)号：US10161958B2
公开(公告)日：2018-12-25
申请号：US14794968
申请日：2015-07-09
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
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公开(公告)号：US20160011231A1
公开(公告)日：2016-01-14
申请号：US14794968
申请日：2015-07-09
Applicant: Hitachi High-Tech Science Corporation
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe
IPC: G01Q10/04
Abstract: A three-dimensional fine movement device includes a moving body, a fixation member to which the moving body is fixed, a three-dimensional fine movement unit, to which the fixation member is fixed, and which allows for three-dimensional fine movement of the moving body with the fixation member interposed therebetween, a base member to which the three-dimensional fine movement unit is fixed, and movement amount detecting means that is fixed to the base member to detect a movement amount of the fixation member.
Abstract translation: 三维细动装置包括：移动体，固定有移动体的固定部件，固定部件固定于其上的三维细微移动部，能够进行三维细微移动 移动体，其中固定构件插入其间，固定有三维细微移动单元的基座构件，以及移动量检测装置，其固定到基座构件以检测固定构件的移动量。
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Patent Agency Ranking
6.发明授权公开(公告)号：US10466271B2
公开(公告)日：2019-11-05
申请号：US15249474
申请日：2016-08-29
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Masafumi Watanabe , Toshihiro Ueno , Susumu Ito , Shoichi Hasegawa
IPC: G01Q20/02
Abstract: A scanning probe microscope includes: a cantilever; a cantilever supporting portion; a movement mechanism that moves a position of the cantilever; a light source that emits detection light; a detector that receives the detection light reflected on a reflecting surface of the cantilever; an objective lens; and a controller that controls the movement mechanism to perform a process including: detecting a spot position of a spot light of the detection light; detecting a position of the cantilever from an image captured by the imaging device; and controlling the movement mechanism based on the spot position, the position of the cantilever, an incident angle of the detection light, and the attachment angle such that the detection light is reflected on the reflecting surface when the cantilever is attached to the cantilever supporting portion.
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公开(公告)号：US10151773B2
公开(公告)日：2018-12-11
申请号：US15468668
申请日：2017-03-24
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Masatsugu Shigeno , Kazutoshi Watanabe , Masafumi Watanabe , Hiroyoshi Yamamoto , Kazuo Chinone
Abstract: According to this invention, a scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.
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公开(公告)号：US09831077B2
公开(公告)日：2017-11-28
申请号：US15356580
申请日：2016-11-19
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Hideyuki Akiyama , Masafumi Watanabe , Kantaro Maruoka
CPC classification number: H01J49/0422 , G01N30/7206 , G01N33/0009 , H01J49/0468 , H01J49/10
Abstract: Disclosed herein is an evolved gas analyzer and a method for analyzing evolved gas, the apparatus enhancing detection accuracy for gas component without providing the apparatus in a large size. The apparatus includes a heating unit evolving a gas component by heating a sample, a detecting means detecting the gas component, a gas channel connecting the heating unit to the detecting means, the gas channel through which mixed gas of the gas component and carrier gas flows, wherein the gas channel includes a branching channel being open to outside and including a discharge flow rate controlling device, and a flow rate control device controlling the discharge flow rate controlling device based on a detection signal received from the detecting means so as to control the detection signal to be within a predetermined range.
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公开(公告)号：US11646188B2
公开(公告)日：2023-05-09
申请号：US16041683
申请日：2018-07-20
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Ryusuke Hirose , Hideyuki Akiyama , Noriaki Sakai , Masafumi Watanabe
CPC classification number: H01J49/0422 , G01N33/0021 , H01J49/0031 , G01N33/442
Abstract: Disclosed is an apparatus and method for analyzing an evolved gas, wherein the precision of detection of a gas component is improved without enlarging the apparatus. The apparatus includes a gas component evolving unit, a detection member for detecting the gas component, and a mixed gas channel for allowing a mixed gas containing the gas component and carrier gas to flow therethrough, and further includes a branch channel branched from the mixed gas channel, an inert gas channel for allowing an inert gas to flow therethrough, a first flow rate regulator for adjusting the flow rate of the carrier gas, a second flow rate regulator for adjusting the flow rate of the inert gas, and a flow rate control unit for controlling the second flow rate regulator such that the flow rate of the mixed gas guided to the detection member is a predetermined value.
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公开(公告)号：US09899198B2
公开(公告)日：2018-02-20
申请号：US15356581
申请日：2016-11-19
Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION
Inventor： Hideyuki Akiyama , Kentaro Yamada , Masafumi Watanabe , Toshitada Takeuchi , Kantaro Maruoka
CPC classification number: H01J49/0422 , G01N30/7206 , H01J49/0009 , H01J49/0409 , H01J49/049 , H01J49/10
Abstract: Disclosed herein is a method for analyzing evolved gas and an evolved gas analyzer, the method correcting detection sensitivity differences in analysis devices, day-to-day variations thereof, thereby quantifying a measurement target with high accuracy. The method for analyzing evolved gas of the apparatus including: a sample holder; a heating unit evolving a gas component; an ion source generating ions by ionizing the gas component; a mass spectrometer detecting the gas component; and a gas channel through which mixed gas flows, the method including: operating a discharged flow rate controlling process of controlling a flow rate of the mixed gas discharged to outside; operating a sample holder cooling process of cooling the sample holder by bringing the sample holder into contact with a cooling unit; and operating a correction process including: correcting a mass spectrum position; calculating a sensitivity correction factor; and calculating a heating correction factor.
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