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公开(公告)号：US11094498B2
公开(公告)日：2021-08-17
申请号：US16910270
申请日：2020-06-24
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
Abstract: There is provided a monochromator capable of reducing angular dispersion in electron rays. In the monochromator, a first Wien filter and a second Wien filter are arranged symmetrically with respect to a first plane of symmetry. A third Wien filter and a fourth Wien filter are arranged symmetrically with respect to a second plane of symmetry. A pair of the first and second Wien filters and a pair of the third and fourth Wien filters are arranged symmetrically with respect to a third plane of symmetry. The first through fourth Wien filters produce their respective electromagnetic fields which are identical in sense and strength.
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公开(公告)号：US20160071683A1
公开(公告)日：2016-03-10
申请号：US14823222
申请日：2015-08-11
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
CPC classification number: H01J37/05 , H01J37/265 , H01J2237/057
Abstract: An electron microscope is offered which can adjust an energy-selecting slit in a short time by smoothly moving the slit. The electron microscope (100) includes an electron beam source (10) emitting an electron beam (EB), an energy filter (22) producing a deflecting field in the path of the electron beam (EB) to disperse the beam (EB) according to energy, a slit plate (24) disposed on an energy dispersive plane and provided with at least one energy-selecting slit (25), a current measuring section (50) for measuring the electrical current of the beam (EB) absorbed into the slit plate (24), and an energy filter controller (60) for controlling the intensity of the deflecting field of the energy filter (22) on the basis of results of measurements made by the current measuring section (50).
Abstract translation: 提供一种电子显微镜，其可以通过平滑地移动狭缝来在短时间内调节能量选择缝。 电子显微镜（100）包括发射电子束（EB）的电子束源（10），在电子束（EB）的路径中产生偏转场的能量过滤器（22），以使光束（EB）分散 设置在能量分散平面上并且设置有至少一个能量选择狭缝（25）的狭缝板（24），用于测量吸收到所述光束中的所述光束（EB）的电流的电流测量部分（50） 狭缝板（24）和能量过滤器控制器（60），用于根据由电流测量部件（50）进行的测量结果控制能量过滤器（22）的偏转场强度。
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公开(公告)号：US09589761B2
公开(公告)日：2017-03-07
申请号：US14823222
申请日：2015-08-11
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
CPC classification number: H01J37/05 , H01J37/265 , H01J2237/057
Abstract: An electron microscope is offered which can adjust an energy-selecting slit in a short time by smoothly moving the slit. The electron microscope (100) includes an electron beam source (10) emitting an electron beam (EB), an energy filter (22) producing a deflecting field in the path of the electron beam (EB) to disperse the beam (EB) according to energy, a slit plate (24) disposed on an energy dispersive plane and provided with at least one energy-selecting slit (25), a current measuring section (50) for measuring the electrical current of the beam (EB) absorbed into the slit plate (24), and an energy filter controller (60) for controlling the intensity of the deflecting field of the energy filter (22) on the basis of results of measurements made by the current measuring section (50).
Abstract translation: 提供一种电子显微镜，其可以通过平滑地移动狭缝来在短时间内调节能量选择缝。 电子显微镜（100）包括发射电子束（EB）的电子束源（10），在电子束（EB）的路径中产生偏转场的能量过滤器（22），以使光束（EB）分散 设置在能量分散平面上并且设置有至少一个能量选择狭缝（25）的狭缝板（24），用于测量吸收到所述光束中的所述光束（EB）的电流的电流测量部分（50） 狭缝板（24）和能量过滤器控制器（60），用于根据由电流测量部件（50）进行的测量结果控制能量过滤器（22）的偏转场强度。
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公开(公告)号：US20160079030A1
公开(公告)日：2016-03-17
申请号：US14823141
申请日：2015-08-11
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
CPC classification number: H01J37/05 , H01J37/21 , H01J37/26 , H01J2237/057 , H01J2237/24535
Abstract: An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy filter (22) for dispersing the beam (EB) according to energy and a slit plate (24) disposed on an energy dispersive plane. The slit plate (24) is provided with plural energy-selecting slits (25) which are different in width taken in a direction where the beam (EB) is dispersed. The microscope (100) further includes a lens system (30) on which the beam impinges after being monochromatized by the monochromator (20), a first measuring section (50) for measuring the intensity of the beam (EB) emitted from an electron beam source (10), a second measuring section (60) for measuring the intensity of the beam (EB) that has passed through an active one (25-L) of the energy-selecting slits (25), and a slit identifying portion (72) for identifying the active energy-selecting slit (25-L) from the plural energy-selecting slits (25) on the basis of the results of measurements made by the first and second measuring sections (50, 60).
Abstract translation: 提供了一种可以方便调整单色仪的电子显微镜。 电子显微镜（100）包括具有用于根据能量分散光束（EB）的能量过滤器（22）和设置在能量分散平面上的狭缝板（24）的单色仪（20）。 狭缝板（24）设置有多个能量选择狭缝（25），其沿着分散光束（EB）的方向而具有不同的宽度。 所述显微镜（100）还包括透镜系统（30），所述透镜系统（30）在由所述单色仪（20）单色化之后入射到所述透镜系统（30）上;第一测量部分（50），用于测量从电子束 源极（10），用于测量已经通过能量选择狭缝（25）的有源光源（25-L）的光束（EB）的强度的第二测量部分（60）和狭缝识别部分 72），用于基于由第一和第二测量部（50,60）进行的测量结果，从多个能量选择缝（25）识别活动能量选择缝（25-L）。
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公开(公告)号：US20130248699A1
公开(公告)日：2013-09-26
申请号：US13804380
申请日：2013-03-14
Applicant: JEOL LTD.
Inventor： Masaki Mukai
IPC: H01J37/02
CPC classification number: H01J37/023 , H01J37/05 , H01J37/26 , H01J2237/057 , H01J2237/21 , H01J2237/248 , H01J2237/2802
Abstract: There is provided a method of adjusting a transmission electron microscope to facilitate an adjustment for bringing a focal plane of an electron beam exiting a two-stage filter type monochromator into coincidence with an achromatic plane. The method starts with obtaining a transmission electron microscope image including interference fringes of the electron beam that are generated by an aperture located behind the monochromator. The focal plane of the beam exiting the monochromator is brought into coincidence with the achromatic plane by adjusting the intensity of an electrostatic lens, the intensities of the electric and magnetic fields produced by at least one of two energy filters, or astigmatism generated in the monochromator based on an intensity distribution of the interference fringes in the obtained transmission electron microscope image.
Abstract translation: 提供了一种调节透射电子显微镜以便于使离开两级滤光器型单色仪的电子束的焦平面与无色平面一致的调整的方法。 该方法从获得透射电子显微镜图像开始，包括由位于单色仪后面的孔产生的电子束的干涉条纹。 离开单色仪的光束的焦平面通过调节静电透镜的强度，由两个能量过滤器中的至少一个产生的电场和磁场的强度或在单色仪中产生的像散而与无色平面一致 基于获得的透射电子显微镜图像中的干涉条纹的强度分布。
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Patent Agency Ranking
公开(公告)号：US10134561B2
公开(公告)日：2018-11-20
申请号：US15591331
申请日：2017-05-10
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
IPC: H01J37/24 , H01J37/05 , H01J37/06 , H01J37/147 , H01J37/26 , H01J37/317
Abstract: There is provided an electron microscope in which a crossover position can be kept constant. The electron microscope (100) includes: an electron source (110) for emitting an electron beam; an acceleration tube (170) having acceleration electrodes (170a-170f) and operative to accelerate the electron beam; a first electrode (160) operative such that a lens action is produced between this first electrode (160) and the initial stage of acceleration electrode (170a); an accelerating voltage supply (112) for supplying an accelerating voltage to the acceleration tube (170); a first electrode voltage supply (162) for supplying a voltage to the first electrode (160); and a controller (109b) for controlling the first electrode voltage supply (162). The lens action produced between the first electrode (160) and the initial stage of acceleration electrode (170a) forms a crossover (CO2) of the electron beam. The controller (109b) controls the first electrode voltage supply (162) such that, if the accelerating voltage is modified, the ratio between the voltage applied to the first electrode (160) and the voltage applied to the initial stage of acceleration electrode (170a) is kept constant.
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公开(公告)号：US08853616B2
公开(公告)日：2014-10-07
申请号：US13804380
申请日：2013-03-14
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
CPC classification number: H01J37/023 , H01J37/05 , H01J37/26 , H01J2237/057 , H01J2237/21 , H01J2237/248 , H01J2237/2802
Abstract: There is provided a method of adjusting a transmission electron microscope to facilitate an adjustment for bringing a focal plane of an electron beam exiting a two-stage filter type monochromator into coincidence with an achromatic plane. The method starts with obtaining a transmission electron microscope image including interference fringes of the electron beam that are generated by an aperture located behind the monochromator. The focal plane of the beam exiting the monochromator is brought into coincidence with the achromatic plane by adjusting the intensity of an electrostatic lens, the intensities of the electric and magnetic fields produced by at least one of two energy filters, or astigmatism generated in the monochromator based on an intensity distribution of the interference fringes in the obtained transmission electron microscope image.
Abstract translation: 提供了一种调节透射电子显微镜以便于使离开两级滤光器型单色仪的电子束的焦平面与无色平面一致的调整的方法。 该方法从获得透射电子显微镜图像开始，包括由位于单色仪后面的孔产生的电子束的干涉条纹。 离开单色仪的光束的焦平面通过调节静电透镜的强度，由两个能量过滤器中的至少一个产生的电场和磁场的强度或在单色仪中产生的像散而与无色平面一致 基于获得的透射电子显微镜图像中的干涉条纹的强度分布。
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公开(公告)号：US10607803B2
公开(公告)日：2020-03-31
申请号：US16177634
申请日：2018-11-01
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
IPC: H01J37/05 , H01J37/26 , H01J37/12 , H01J37/147
Abstract: An electron microscope includes an electron source, an extraction electrode that extracts an electron beam emitted from the electron source, a monochromator having an energy filter that disperses the electron beam emitted from the electron source based on an energy thereof and an energy selection slit that selects the energy of the electron beam, an incident-side electrode provided between the extraction electrode and the monochromator, and an incident-side electrode controller that controls the incident-side electrode based on a change in a voltage applied to the extraction electrode.
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公开(公告)号：US20180301315A1
公开(公告)日：2018-10-18
申请号：US15952989
申请日：2018-04-13
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
CPC classification number: H01J37/153 , H01J37/05 , H01J37/12 , H01J37/14 , H01J37/21 , H01J37/22 , H01J2237/057 , H01J2237/1532 , H01J2237/24578 , H01J2237/24585
Abstract: An electron microscope includes a monochromator, an image acquiring portion for obtaining an electron microscope image containing interference fringes of the electron beam formed by an aperture located behind the monochromator, a line profile acquiring portion for obtaining a plurality of line profiles passing through the center of the aperture on the EM image, an energy dispersion direction identifying portion for identifying the direction of energy dispersion of the monochromator on the basis of the line profiles obtained by the line profile acquiring portion, and an optics controller for controlling an optical system on the basis of a line profile in the direction of energy dispersion to bring the focal plane for the electron beam exiting from the monochromator into coincidence with the achromatic plane.
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公开(公告)号：US09362082B2
公开(公告)日：2016-06-07
申请号：US14823141
申请日：2015-08-11
Applicant: JEOL Ltd.
Inventor： Masaki Mukai
CPC classification number: H01J37/05 , H01J37/21 , H01J37/26 , H01J2237/057 , H01J2237/24535
Abstract: An electron microscope is offered which can facilitate adjusting a monochromator. The electron microscope (100) includes the monochromator (20) having an energy filter (22) for dispersing the beam (EB) according to energy and a slit plate (24) disposed on an energy dispersive plane. The slit plate (24) is provided with plural energy-selecting slits (25) which are different in width taken in a direction where the beam (EB) is dispersed. The microscope (100) further includes a lens system (30) on which the beam impinges after being monochromatized by the monochromator (20), a first measuring section (50) for measuring the intensity of the beam (EB) emitted from an electron beam source (10), a second measuring section (60) for measuring the intensity of the beam (EB) that has passed through an active one (25-L) of the energy-selecting slits (25), and a slit identifying portion (72) for identifying the active energy-selecting slit (25-L) from the plural energy-selecting slits (25) on the basis of the results of measurements made by the first and second measuring sections (50, 60).
Abstract translation: 提供了一种可以方便调整单色仪的电子显微镜。 电子显微镜（100）包括具有用于根据能量分散光束（EB）的能量过滤器（22）和设置在能量分散平面上的狭缝板（24）的单色仪（20）。 狭缝板（24）设置有多个能量选择狭缝（25），其沿着分散光束（EB）的方向而具有不同的宽度。 所述显微镜（100）还包括透镜系统（30），所述透镜系统（30）在由所述单色仪（20）单色化之后入射到所述透镜系统（30）上;第一测量部分（50），用于测量从电子束 源极（10），用于测量已经穿过能量选择狭缝（25）的有源（25-L）的光束（EB）的强度的第二测量部分（60）和狭缝识别部分 72），用于基于由第一和第二测量部（50,60）进行的测量结果，从多个能量选择缝（25）识别活动能量选择缝（25-L）。
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