公开(公告)号：US20230020387A1

公开(公告)日：2023-01-19

申请号：US17777656

申请日：2020-11-19

Applicant: LAM RESEARCH CORPORATION

Inventor： David Joseph WETZEL ,  Lin XU ,  John DAUGHERTY ,  John Michael KERNS ,  Satish SRINIVASAN ,  Robin KOSHY ,  Michael LOPEZ ,  Douglas DETERT

IPC: C23C16/40 ,  C23C4/11 ,  H01J37/32 ,  C23C16/56 ,  C23C14/08 ,  C23C14/58

Abstract: A method for forming a coating on a component of a substrate processing system includes arranging the component in a processing chamber and applying a ceramic material to form the coating on one or more surfaces of the component. The ceramic material is comprised of a mixture including a rare earth oxide and having a grain size of less than 150 nm and is applied while a temperature within the processing chamber is less than 400° C. The coating has a thickness of less than 30 μm. A heat treatment process is performed on the coated component in a heat treatment chamber. The heat treatment process includes increasing a temperature of the heat treatment chamber from a first temperature to a second temperature that does not exceed a melting temperature of the mixture over a first period and maintaining the second temperature for a second period.

公开(公告)号：US20180065274A1

公开(公告)日：2018-03-08

申请号：US15255854

申请日：2016-09-02

Applicant: Lam Research Corporation

Inventor： William CHARLES ,  Thomas STEVENSON ,  Nash ANDERSON ,  Russell ORMOND ,  Michael LOPEZ

IPC: B28B11/24 ,  C04B35/10 ,  C04B35/645

CPC classification number: B28B11/243 ,  B01J3/062 ,  B01J2219/0894 ,  C04B35/111 ,  C04B35/6455 ,  C04B2235/3217 ,  C04B2235/5436 ,  C04B2235/612 ,  C04B2235/656 ,  C04B2235/661 ,  C04B2235/667

Abstract: A method for forming a ceramic object from a ceramic powder is provided. The ceramic powder is placed in a press. Pressure is applied to the ceramic powder with a pressure to cause consolidation of the ceramic powder. Ultrasonic energy is applied to the ceramic powder for at least a period of time during the applying pressure to the ceramic powder, forming the ceramic powder into a ceramic object. The applying pressure to the ceramic powder is ended.