公开(公告)号：US09552959B2

公开(公告)日：2017-01-24

申请号：US14783310

申请日：2014-03-24

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Toshihiko Ogura

IPC: H01J37/20 ,  H01J37/244 ,  H01J37/28 ,  H01J37/22

CPC classification number: H01J37/20 ,  G01N2223/309 ,  G01N2223/418 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/153 ,  H01J2237/2003 ,  H01J2237/2007 ,  H01J2237/2608 ,  H01J2237/2801

Abstract: A water solution in which an observation sample is, for example, dissolved is sandwiched on a first insulative thin film side provided under a conductive thin film. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film. The electric charges are detected by a terminal section and changes to a measurement signal. In a state in which an electron beam is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film also disappear, and the measurement signal output from the terminal section changes to 0.

Abstract translation: 将例如溶解有观察样品的水溶液夹在设置在导电性薄膜下方的第一绝缘性薄膜侧。 当电子束入射部分被充电时，水分子的电偶极子沿着电位梯度排列。 在第二绝缘薄膜的表面上也产生电荷。 电荷由终端部分检测并改变为测量信号。 在电子束被阻挡的状态下，负电位消失。 因此，第一绝缘薄膜的表面上的电荷也消失，从端子部输出的测量信号变为0。

公开(公告)号：US09269534B2

公开(公告)日：2016-02-23

申请号：US14416848

申请日：2013-06-12

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  LIFESEM INC.

Inventor： Toshihiko Ogura

IPC: H01J37/26 ,  H01J37/28 ,  H01J37/20 ,  G01N23/225

CPC classification number: H01J37/261 ,  G01N23/225 ,  H01J37/20 ,  H01J2237/004 ,  H01J2237/2003

Abstract: In an upper main body of a sample holder, a laminate of an insulative thin film and a secondary electron emission protective thin film is provided. An electron beam emitted from an electron gun enters the secondary electron emission protective thin film side. The undersurface of the insulative thin film is a sample adhesion surface, where a sample to be an observation target is held by adsorption or the like. The secondary electron emission protective thin film is made of a material having a low secondary electron emission coefficient δ and, preferably, is non-insulative. That is, the secondary electron emission protective thin film is conductive even though the electric resistance is high. Accordingly, the charge level of a site irradiated with the electron beam has a low charge level.

Abstract translation: 在样品保持器的上主体中，设置绝缘薄膜和二次电子发射保护薄膜的叠层体。 从电子枪发射的电子束进入二次电子发射保护薄膜一侧。 绝缘性薄膜的下表面是样品粘合面，通过吸附等保持作为观察对象物的样品。 二次电子发射保护薄膜由二次电子发射系数δ低的材料制成，优选为非绝缘性。 也就是说，即使电阻高，二次电子发射保护薄膜也是导电的。 因此，用电子束照射的部位的电荷水平具有低的电荷水平。

公开(公告)号：US12265041B2

公开(公告)日：2025-04-01

申请号：US17767813

申请日：2019-10-10

Applicant: Hitachi High-Tech Corporation ,  National Institute of Advanced Industrial Science and Technology

Inventor： Michio Hatano ,  Mitsuhiro Nakamura ,  Toshihiko Ogura

IPC: G01N23/2204 ,  G01N23/2251

Abstract: A risk of breakage of a sample holder can be reduced and a biochemical sample or a liquid sample can be observed easily and with a high observation throughput. A sample holder 101 holding a sample includes: a sample chamber including a first insulating thin film 110 and a second insulating thin film 111 that sandwich and hold the sample 200 in a liquid or gel form and face each other, a vacuum partition wall inside which the sample chamber holding the sample is fixed in a state in which the thin film is exposed to a surrounding atmosphere, and whose internal space is kept at a degree of vacuum at least lower than that of the sample room at the time of observation of the sample, a detection electrode 820 disposed to face the second insulating thin film in a state in which the sample chamber is fixed to the vacuum partition wall, and a signal detection unit 50 connected to the detection electrode. Before the surrounding atmosphere of the sample holder is evacuated from an atmospheric pressure to a vacuum, the charged particle beam device receives a detection signal from the signal detection unit via a connector and detects an abnormality of the sample chamber based on the detection signal.

公开(公告)号：US20150214003A1

公开(公告)日：2015-07-30

申请号：US14416848

申请日：2013-06-12

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY ,  LIFESEM INC.

Inventor： Toshihiko Ogura

IPC: H01J37/26 ,  G01N23/225

CPC classification number: H01J37/261 ,  G01N23/225 ,  H01J37/20 ,  H01J2237/004 ,  H01J2237/2003

Abstract: In an upper main body of a sample holder, a laminate of an insulative thin film and a secondary electron emission protective thin film is provided. An electron beam emitted from an electron gun enters the secondary electron emission protective thin film side. The undersurface of the insulative thin film is a sample adhesion surface, where a sample to be an observation target is held by adsorption or the like. The secondary electron emission protective thin film is made of a material having a low secondary electron emission coefficient δ and, preferably, is non-insulative. That is, the secondary electron emission protective thin film is conductive even though the electric resistance is high. Accordingly, the charge level of a site irradiated with the electron beam has a low charge level.

Abstract translation: 在样品保持器的上主体中，设置绝缘薄膜和二次电子发射保护薄膜的叠层体。 从电子枪发射的电子束进入二次电子发射保护薄膜一侧。 绝缘性薄膜的下表面是样品粘合面，通过吸附等保持作为观察对象物的样品。 二次电子发射保护薄膜由二次电子发射系数δ低的材料制成，优选为非绝缘性。 也就是说，即使电阻高，二次电子发射保护薄膜也是导电的。 因此，用电子束照射的部位的电荷水平具有低的电荷水平。

公开(公告)号：US20140346352A1

公开(公告)日：2014-11-27

申请号：US14364530

申请日：2012-12-26

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Toshihiko Ogura

IPC: H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G21K5/08 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2813

Abstract: When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film and a conductive thin film at a site of electron beam injection, the potential barrier of the surface of the insulative thin film becomes thin, and an electron emission phenomenon is caused by tunnel effects. Secondary electrons caused in the insulative thin film tunnel to the conductive thin film along the potential gradient. The secondary electrons, having tunneled, reach a sample while diffusing in the conductive thin film. In the case where the sample is a sample with a high electron transmittance, such as a biological sample, the secondary electrons also tunnel through the interior of the sample. The secondary electrons are detected to acquire an SEM image in which the inner structure of the sample is reflected.

Abstract translation: 当电子注入样品支撑构件时，在电子束注入位置处导致绝缘薄膜和导电薄膜之间的电势梯度，绝缘薄膜表面的势垒变薄，并且电子发射现象 是由隧道效应造成的。 二次电子在绝缘薄膜隧道中引发导电薄膜沿着电位梯度。 已经隧穿的二次电子在导电薄膜中扩散时到达样品。 在样品是具有高电子透射率的样品（例如生物样品）的情况下，二次电子也穿过样品的内部。 检测二次电子以获得样品的内部结构被反射的SEM图像。

公开(公告)号：US11454605B2

公开(公告)日：2022-09-27

申请号：US17253115

申请日：2019-04-22

Applicant: National Institute of Advanced Industrial Science and Technology

Inventor： Toshihiko Ogura

IPC: G01N27/02 ,  H01J37/22 ,  H01J37/244 ,  H01J37/28

Abstract: An image forming method includes: arranging a sample between a first main surface of an insulating thin film and a counter electrode, measuring an impedance value by inputting an AC potential signal to the counter electrode, scanning a physical beam while focusing and irradiating a conductive thin film given to cover a second main surface of the insulating thin film with the physical beam to lower an insulation property of the insulating thin film directly below an irradiation position, guiding the AC potential signal to the irradiation position, and forming an image from the impedance value corresponding to the irradiation position.

公开(公告)号：US09589765B2

公开(公告)日：2017-03-07

申请号：US14364530

申请日：2012-12-26

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Toshihiko Ogura

IPC: G21K5/08 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G21K5/08 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2813

Abstract: When injection of electrons into a sample supporting member causes a potential gradient between an insulative thin film and a conductive thin film at a site of electron beam injection, the potential barrier of the surface of the insulative thin film becomes thin, and an electron emission phenomenon is caused by tunnel effects. Secondary electrons caused in the insulative thin film tunnel to the conductive thin film along the potential gradient. The secondary electrons, having tunneled, reach a sample while diffusing in the conductive thin film. In the case where the sample is a sample with a high electron transmittance, such as a biological sample, the secondary electrons also tunnel through the interior of the sample. The secondary electrons are detected to acquire an SEM image in which the inner structure of the sample is reflected.

Abstract translation: 当电子注入样品支撑构件时，在电子束注入位置处导致绝缘薄膜和导电薄膜之间的电势梯度，绝缘薄膜表面的势垒变薄，并且电子发射现象 是由隧道效应造成的。 二次电子在绝缘薄膜隧道中引发导电薄膜沿着电位梯度。 已经隧穿的二次电子在导电薄膜中扩散时到达样品。 在样品是具有高电子透射率的样品（例如生物样品）的情况下，二次电子也穿过样品的内部。 检测二次电子以获得样品的内部结构被反射的SEM图像。