公开(公告)号：US20240212969A1

公开(公告)日：2024-06-27

申请号：US18288405

申请日：2022-04-19

Applicant: NIKON CORPORATION

Inventor： Takakuni GOTO ,  Motofusa ISHIKAWA ,  Baku OGASAWARA ,  Shunta KUSU ,  Yuta KOMATSU ,  Tomoya UCHIDA

IPC: H01J37/145 ,  H01J37/141 ,  H01J37/143 ,  H01J37/147

CPC classification number: H01J37/145 ,  H01J37/141 ,  H01J37/143 ,  H01J37/1472

Abstract: A charged particle optical system includes a permanent magnetic lens disposed closer to an object than a central point between a charged particle beam source and the object in an optical axis direction of the charged particle optical system, an electromagnetic lens disposed such that a position of at least a part of the electromagnetic lens overlaps the permanent magnetic lens in the optical axis direction of the charged particle optical system, and an electrostatic lens disposed such that a position of at least a part of the electrostatic lens overlaps at least one of the permanent magnetic lens and the electromagnetic lens in the optical axis direction of the charged particle optical system.

公开(公告)号：US20240102389A1

公开(公告)日：2024-03-28

申请号：US18275367

申请日：2021-02-05

Applicant: NIKON CORPORATION

Inventor： Masayuki SHIRAISHI ,  Takahiro KURASHIMA ,  Baku OGASAWARA

IPC: F01D5/14

CPC classification number: F01D5/141

Abstract: A blade member on a surface of which a groove structure is formed, wherein the groove structure includes a plurality of first groove structures, a plurality of second groove structures, and a third groove structure, the plurality of first groove structures are formed to extend in a first direction, the plurality of second groove structures are formed to extend in a second direction that is different from the first direction, the third groove structure extends along a third direction that is different from the first and second directions, and is formed between one first groove structure and one second groove structure.

公开(公告)号：US20220203477A1

公开(公告)日：2022-06-30

申请号：US17604252

申请日：2019-04-24

Applicant: NIKON CORPORATION

Inventor： Masayuki SHIRAISHI ,  Kenta SUDO ,  Yosuke TATSUZAKI ,  Baku OGASAWARA

IPC: B23K26/359 ,  B23K26/067 ,  B23K26/082 ,  B23K26/362

Abstract: A processing apparatus is a processing apparatus that irradiates a surface of an object with processing light to process an object and is provided with: a light irradiation apparatus that emits first processing light to form a first irradiation area on the surface and emits second processing light to form a second irradiation area, at least a part of which overlaps with the first irradiation area, on the surface, and has a change member that is configured to change a state of an overlap between the first and second irradiation areas.

公开(公告)号：US20210197312A1

公开(公告)日：2021-07-01

申请号：US16756898

申请日：2017-10-25

Applicant: NIKON CORPORATION

Inventor： Masayuki SHIRAISHI ,  Shigeki EGAMI ,  Yoshio KAWABE ,  Yosuke TATSUZAKI ,  Baku OGASAWARA

IPC: B23K26/04 ,  B23K26/03

Abstract: A processing apparatus has: a light irradiation apparatus that irradiates a surface of an object with a processing light; and a measurement apparatus that measures a position of an irradiation area, which is formed on the surface of the object by the light irradiation apparatus, relative to the object.