公开(公告)号：US20210042943A1

公开(公告)日：2021-02-11

申请号：US16985700

申请日：2020-08-05

Applicant: Shimadzu Corporation

Inventor： Ryuta MATSUMOTO ,  Kiyoshi OGAWA ,  Tomomi TAMURA ,  Hiroki MAEDA

IPC: G06T7/40 ,  G06T11/60 ,  H01J37/22 ,  H01J37/29 ,  H01J37/285

Abstract: A scanning electron microscope is provided that is capable of displaying an image highly visible for a user when an image is displayed by visualization by combining morphological image information with component image information. A scanning electron microscope 1 for observing a sample S by irradiating the sample S with an electron ray, the scanning electron microscope 1 includes: a morphological calculation unit 24 configured to calculate intensity data of at least one of secondary electrons and reflected electrons obtained from the sample S to obtain morphological image information of the sample S; a component calculation unit 34 configured to calculate spectrum data of X-ray energy obtained from the sample S to obtain component image information of the sample S; and a display unit 50 configured to display an image visualized by combining the morphological image information with the component image information, wherein the morphological calculation unit 24 is configured to change the morphological image information in accordance with one or more morphological image parameters input by a user, and the component calculation unit 34 is configured to change the component image information in accordance with one or more component image parameters input by a user.

公开(公告)号：US20150103979A1

公开(公告)日：2015-04-16

申请号：US14501727

申请日：2014-09-30

Applicant: Shimadzu Corporation

Inventor： Akihiro MIYAOKA ,  Tomomi TAMURA ,  Hiroki MAEDA

IPC: H05G1/02 ,  H01J35/18

CPC classification number: H01J35/18 ,  H01J2235/122 ,  H01J2235/1291 ,  H01J2235/183 ,  H01J2235/186

Abstract: An object of the invention is to provide an X-ray generator having a simple configuration where heat generated in the irradiation window can be prevented from conducting to a desired portion in accordance with the purpose of use, the method of use or the structure of the X-ray tube. In an X-ray generator for releasing X-rays generated by irradiating a target placed in a vacuumed atmosphere within an X-ray tube with an electron beam from an electron source through an irradiation window of the X-ray tube, the irradiation window has thermal anisotropy where the thermal conductivity is different between the direction in which the irradiation window spreads and the direction of the thickness of the irradiation window, and therefore, the thermal conductivity in the direction in which the heat from the irradiation window is desired not to conduct is made relatively smaller.

Abstract translation: 本发明的目的是提供一种X射线发生器，其具有简单的构造，其中根据使用目的，使用方法或使用的结构可以防止在照射窗中产生的热量进入所需部分 X光管。 在通过X射线管的照射窗从电子源通过用X射线管内的真空气氛中照射放置在真空气氛中的靶的X射线发生器中，照射窗具有 热导率在照射窗口扩散的方向和照射窗口的厚度方向之间的热导率不同的热各向异性，因此，期望来自照射窗的热量的方向上的导热性不会导致 相对较小。

公开(公告)号：US20200328071A1

公开(公告)日：2020-10-15

申请号：US16814036

申请日：2020-03-10

Applicant: SHIMADZU CORPORATION

Inventor： Osamu FURUHASHI ,  Tomomi TAMURA ,  Kiyoshi OGAWA

IPC: H01J49/08 ,  H01J49/04

Abstract: A mass spectrometer, includes: a sampling probe that irradiates a specimen disposed in the atmosphere with an electron and obtains a sample separated from the specimen; and a measurement unit that performs mass spectrometry of the sample obtained by the sampling probe, wherein the sampling probe comprises: a casing having an opening which is opened to the atmosphere and an outlet through which the sample is discharged to the measurement unit; and a surface emission type electron emission element housed in the casing such that an electron emission surface thereof opposes to the opening.