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公开(公告)号：KR101262269B1
公开(公告)日：2013-05-08
申请号：KR1020110079483
申请日：2011-08-10
Applicant: 한국과학기술연구원
IPC: H01L21/027 , H01L21/66
Abstract: 본발명은마스크패턴검사용 3차원영상획득시스템및 그방법에관한것으로, 극자외선(Extreme Ultra-Violet, EUV)을방사하는광원부와, 상기광원부로부터방사된극자외선을반사하여집광하는오목거울과, 상기오목거울에의해집광된극자외선을측정대상마스크를향하여반사하는반사거울과, 상기측정대상마스크를안착시키는스테이지와, 상기스테이지의일측에구비되며, 상기측정대상마스크의전체이미지를스캔할수 있도록상기스테이지를 X축, Y축및 Z축방향으로이동시키기위한이동수단과, 상기측정대상마스크의 3차원높이정보를획득할수 있도록상기스테이지의 X축및 Y축중 적어도하나의축을기준으로일정각도좌/우측방향으로틸팅(tilting)시키기위한틸팅수단과, 상기측정대상마스크로부터반사된회절이미지를획득하는 CCD(Charged Coupled Device) 카메라와, 상기 CCD 카메라로부터획득된회절이미지를역 고속퓨리에변환(Inverse Fast Fourier Transform, IFFT)을수행하여상기측정대상마스크의패턴이미지를복원함과아울러상기이동수단및 상기틸팅수단의동작을제어하기위한구동제어신호를출력하는제어장치를포함함으로써, 극자외선(EUV) 광원으로만들어진차세대반도체공정에서사용되는 3차원구조의마스크패턴에존재하는미세결함(Defect) 등을효과적으로검사할수 있다.
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公开(公告)号：KR1020120125895A
公开(公告)日：2012-11-19
申请号：KR1020110043627
申请日：2011-05-09
Applicant: 한국과학기술연구원
IPC: G01N27/414 , G01N27/416
Abstract: PURPOSE: An automatic measuring system of a multi-sensor is provided to automatically process a probe pin inspection, an individual sensor inspection and electrical property measurement of a multi-sensor. CONSTITUTION: An automatic measuring system(100) of a multi-sensor comprises a voltage supply unit(110), a current and resistance measurement unit(120), a relay unit(130), a multiplexer unit(140), and a controller(150). The voltage supply unit supplies voltage for detection through a probe(52). The current and resistance measurement unit measures the current or resistance of individual sensors or individual probes. The relay unit switches on/off terminals of the individual sensors and individual probes when supplying voltage to a multi-sensor or receiving measurement signals from the multi-sensor. The multiplexer unit selects one among a plurality of the sensors in order to measure the current of the individual sensor while in the state that a voltage supply to the individual sensors is not cut off. The controller receives an input of a user, thereby controlling the voltage supply unit, the current and resistance measurement unit, the relay unit, and the multiplexer unit, or a controlling device of a probe station. [Reference numerals] (110) Voltage supply unit; (120) Current and resistance measuring unit; (130) Relay unit; (140) Multi-flexible unit; (150) Controller; (160) Semiconductor variable analyzer; (83) Probe chuck fixing arm controlling device; (85) Sensor transferring arm controlling device; (87) Cleaning pad transferring arm controlling device; (AA) PCB circuit
Abstract translation: 目的：提供多传感器的自动测量系统，以自动处理多针传感器的探针检测，单个传感器检测和电气性能测量。 构成：多传感器的自动测量系统（100）包括电压供应单元（110），电流和电阻测量单元（120），中继单元（130），多路复用器单元（140）和控制器 （150）。 电压供应单元通过探头（52）提供用于检测的电压。 电流和电阻测量单元测量各个传感器或单个探头的电流或电阻。 当向多传感器提供电压或从多传感器接收测量信号时，继电器单元接通各个传感器和各个探头的接通/断开端子。 多路复用器单元选择多个传感器中的一个，以便在对各个传感器的电压供应不被切断的状态下测量各个传感器的电流。 控制器接收用户的输入，从而控制电压供应单元，电流和电阻测量单元，中继单元和多路复用器单元或探测台的控制设备。 （附图标记）（110）供电单元; （120）电流和电阻测量单元; （130）继电器单元; （140）多功能单元; （150）控制器; （160）半导体可变分析仪; （83）探头卡盘固定臂控制装置; （85）传感器臂控制装置; （87）清洁垫传送臂控制装置; （AA）PCB电路
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公开(公告)号：KR1020120122179A
公开(公告)日：2012-11-07
申请号：KR1020110040199
申请日：2011-04-28
Applicant: 한국과학기술연구원
CPC classification number: G01D11/30 , G01N33/0004
Abstract: PURPOSE: A probe station for a multi-sensor is provided to replace a probe chuck of an assembly form including a probe socket when the replacement of the probe chuck is necessary, thereby easily replace the probe chuck. CONSTITUTION: A probe station for a multi-sensor comprises a lower body(20), an upper body(10), a probe chuck(50), a probe elevating unit(30), and a sensor support plate(60). The upper body is closed and opened by being connected to the lower body with a hinge. The probe chuck is fixed so that a probe(52) is extended downwardly. The probe chuck is joined to the upper body so that the probe is exposed to the lower part of the upper body. The probe elevating unit elevates the probe chuck and is installed in the upper body. A sensor seating groove is formed in the lower part of the probe chuck in the lower body when the upper body is closed with respect to the lower body. The sensor supporting plate forms the bottom surface of the sensor seating groove and is installed to be touch to the probe.
Abstract translation: 目的：当需要更换探头卡盘时，提供用于多传感器的探测台来替换包括探针插座的组件形式的探头卡盘，从而可以方便地更换探头卡盘。 构成：用于多传感器的探测台包括下体（20），上体（10），探头卡盘（50），探头升降单元（30）和传感器支撑板（60）。 通过用铰链连接到下身，上身被封闭并打开。 探针卡盘被固定，使得探针（52）向下延伸。 探头卡盘与上体接合，使得探头暴露于上身的下部。 探头升降单元升高探头卡盘，并安装在上身上。 当上身相对于下身体关闭时，传感器安置槽形成在下体中的探头卡盘的下部。 传感器支撑板形成传感器安置槽的底面，并安装成与探头接触。
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公开(公告)号：KR101190811B1
公开(公告)日：2012-10-15
申请号：KR1020110049606
申请日：2011-05-25
Applicant: 한국과학기술연구원
CPC classification number: H03H7/12 , H02M1/42 , H03F3/45 , H03H11/0427 , H03H11/12
Abstract: PURPOSE: A tunable band pass filter for processing a multi-bio signal is provided to reduce an occupied area using one load capacitor instead of an array of a load capacitor occupying a large area. CONSTITUTION: A tunable band pass filter for processing a multi-bio signal comprises an amplifier(100) and a variable constant-voltage rectifier(200) for controlling a bandwidth. The band pass filter comprises first and second feedback loops(300a,300b), first and second input capacitors(Cin1,Cin2), and first and second load capacitors(CL1,CL2). The amplifier controls output resistance. The amplifier comprises a differential amplification part generating an output current and a bias part generating a bias current. [Reference numerals] (200) Variable constant-voltage rectifier
Abstract translation: 目的：提供一种用于处理多生物信号的可调带通滤波器，以便使用一个负载电容器来代替占用大面积的负载电容器的阵列来减少占用面积。 构成：用于处理多生物信号的可调带通滤波器包括用于控制带宽的放大器（100）和可变恒压整流器（200）。 带通滤波器包括第一和第二反馈回路（300a，300b），第一和第二输入电容器（Cin1，Cin2）以及第一和第二负载电容器（CL1，CL2）。 放大器控制输出电阻。 放大器包括产生输出电流的差分放大部分和产生偏置电流的偏置部分。 （附图标记）（200）可变恒压整流器
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Patent Agency Ranking
公开(公告)号：KR1020110135138A
公开(公告)日：2011-12-16
申请号：KR1020100054881
申请日：2010-06-10
Applicant: 한국과학기술연구원
CPC classification number: C23C14/243 , C23C14/12 , C23C14/14 , C23C14/26
Abstract: PURPOSE: A side emitting type linear evaporation source, a manufacturing method thereof, and a linear evaporator are provided to uniformly evaporate materials on a large-size substrate. CONSTITUTION: A side emitting type linear evaporation source comprises a Pyrolytic Boron Nitride crucible(10). A first heating unit(20), multiple side discharging units, a first protection film, and an insulation unit. The top of the PBN crucible is opened to accept materials. The first heating unit is evaporated on the outer surface of the PBN crucible. Patterns suitable for heating are formed on the first heating unit. The side discharging units are formed by passing through the side surface of the PBN crucible and the first heating unit. The first protection film is formed on the inner surface of the PBN crucible and the surface of the side discharging units. The insulating unit electrically insulates the first heating unit from the first protection film.
Abstract translation: 目的：提供侧面发射型线性蒸发源，其制造方法和线性蒸发器以均匀蒸发大尺寸基板上的材料。 构成：侧面发射型线性蒸发源包括热解氮化硼坩埚（10）。 第一加热单元（20），多个侧排出单元，第一保护膜和绝缘单元。 打开PBN坩埚的顶部接受材料。 第一加热单元在PBN坩埚的外表面上蒸发。 适于加热的图案形成在第一加热单元上。 侧排出单元通过穿过PBN坩埚和第一加热单元的侧表面而形成。 第一保护膜形成在PBN坩埚的内表面和侧排出单元的表面上。 绝缘单元将第一加热单元与第一保护膜电绝缘。
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公开(公告)号：KR101092376B1
公开(公告)日：2011-12-09
申请号：KR1020100093366
申请日：2010-09-27
Applicant: 한국과학기술연구원
Abstract: PURPOSE: A method for observing a target object and an optical device thereof are provided to observe a target object using a phase difference of lights which have vibration directions of different magnetic fields. CONSTITUTION: A light generating unit(110) applies first and second light signals, which are vertically polarized, to a target object through one light path. A reflective light processing unit(130) forms an image per wavelength of a target object. A reflective mirror(120) transmits first and second reflective signals to the reflective light processing unit. An image observing unit(160) provides an image by wavelength to a user.
Abstract translation: 目的：提供用于观察目标物体的方法及其光学装置，以使用具有不同磁场的振动方向的光的相位差观察目标物体。 构成：光产生单元（110）通过一个光路向对象物体施加垂直极化的第一和第二光信号。 反射光处理单元（130）每个目标对象的波长形成图像。 反射镜（120）将第一和第二反射信号传输到反射光处理单元。 图像观察单元（160）通过波长向用户提供图像。
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公开(公告)号：KR101085953B1
公开(公告)日：2011-11-22
申请号：KR1020100040571
申请日：2010-04-30
Applicant: 한국과학기술연구원
IPC: H01L31/04
CPC classification number: Y02E10/542 , Y02P70/521
Abstract: 유리기판 위에 전도성막을 형성하고 그 위에 염료 분자가 흡착된 나노 반도체 산화물 입자를 전극 소재로 사용하는 염료감응형 태양전지 및 그의 제조 방법이 개시된다. 본 발명의 염료감응형 태양전지는 홈(구멍)이 형성된 전도성막의 표면에 부착되는 반도체 입자들 및 이들 상에 적층되는 반도체 입자들을 상기 홈 내 또는 홈 상부에 구비하는 나노 산화물 전극층을 포함한다. 이때 홈의 반경은 20 마이크로미터 이하일 수 있고, 홈의 깊이는 20 마이크로미터 이상일 수 있다. 홈은, 벽 구조, 격벽 구조, 기둥 구조 중 어느 하나이다.
이러한 염료감응형 태양전지는, 유리기판 위에 전도성막을 입히고, 전도성막에 적어도 하나의 홈(구멍)을 형성한 후, 홈 내 또는 홈의 상부까지 나노 산화물 전극층을 형성함으로써, 제조 가능하다. 또는, 유리기판 위에 적어도 하나의 홈(구멍)을 형성하고, 홈의 측면 및 홈의 하부에 전도성막을 입힌 후(홈의 기둥 상부에 전도성막을 추가적으로 입힐 수도 있음), 홈 내 또는 홈의 상부까지 나노 산화물 전극층을 형성함으로써, 제조 가능하다.-
公开(公告)号：KR1020110057604A
公开(公告)日：2011-06-01
申请号：KR1020090114068
申请日：2009-11-24
Applicant: 한국과학기술연구원
IPC: C23C14/24
Abstract: PURPOSE: A heater-integrated molecular beam evaporation source for vacuum deposition, a manufacturing method thereof, and an evaporator using the same are provided to minimize the thermal load of a vacuum system by controlling the temperature of a heater to be similar to the temperature of a crucible. CONSTITUTION: A heater-integrated molecular beam evaporation source for vacuum deposition comprises a PBN(Pyrolytic Boron Nitride) crucible(10), a first heater(20), and a first protective film. The PBN crucible accepts materials. The first heater is deposited on the outer surface of the PBN crucible and forms a pattern proper for heating without influence of magnetic field on a specimen. The first protective film is deposited on the inner surface of the PBN crucible to protect the crucible from the specimen easy to adhere to PBN and partially removed for insulation from the first heater.
Abstract translation: 目的：提供一种用于真空沉积的加热器集成分子束蒸发源，其制造方法和使用其的蒸发器，以通过将加热器的温度控制为与加热器的温度相似来最小化真空系统的热负荷 一个坩埚 构成：用于真空沉积的加热器集成分子束蒸发源包括PBN（热解氮化硼）坩埚（10），第一加热器（20）和第一保护膜。 PBN坩埚接受材料。 第一个加热器沉积在PBN坩埚的外表面上，并形成适合加热的图案，而不影响样品上的磁场。 第一保护膜沉积在PBN坩埚的内表面上，以保护坩埚容易粘附到PBN上，并部分地从第一加热器去除绝缘。
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100.发明公开단일벽 탄소나노튜브의 선택적 조립 방법 및 이를 이용한 단일벽 탄소나노튜브 다중 채널을 갖는 전계 효과 트랜지스터의 제조 방법 有权单壁碳纳米管的选择性组装工艺及其应用于SWNT多通道FET器件
公开(公告)号：KR1020110044360A
公开(公告)日：2011-04-29
申请号：KR1020090100982
申请日：2009-10-23
Applicant: 한국과학기술연구원
IPC: B82B3/00 , H01L21/027 , H01L29/78 , H01L21/336
CPC classification number: H01L29/66477 , B82B3/0004 , B82B3/0038 , G01N27/3272 , G01N27/4145 , H01L29/78
Abstract: PURPOSE: The selective assembling method of a single-walled carbon nanotube and a method for manufacturing a field effect transistor with a single-walled carbon nanotube multichannel using the same are provided to prevent the dropping phenomenon of the carbon nanotube from the multichannel. CONSTITUTION: The surface of a substrate is processed into the hydrophilic property. One of natural oxide film, a thermal oxide film, a spin-on-glass-based oxide film, a PECVD-based oxide film, or LPCVD-based oxide film is deposited on the substrate. Single-walled carbon nanotube is selectively assembled with the surface of the oxide film, on the surface of which is processed. The selective arranged pattern of the single-walled carbon nanotube is formed using a photo-resist pattern.
Abstract translation: 目的：提供单壁碳纳米管的选择性组装方法和使用其的具有单壁碳纳米管多通道的场效应晶体管的制造方法，以防止来自多通道的碳纳米管的滴落现象。 构成：将基材的表面加工成亲水性。 天然氧化物膜，热氧化膜，旋涂玻璃基氧化物膜，PECVD基氧化物膜或LPCVD基氧化物膜之一沉积在衬底上。 单壁碳纳米管与氧化膜的表面选择性地组装，其表面被加工。 单壁碳纳米管的选择排列图案使用光刻胶图案形成。
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