公开(公告)号：KR1020080066781A

公开(公告)日：2008-07-16

申请号：KR1020087011016

申请日：2005-10-10

Applicant: 실버브룩 리서치 피티와이 리미티드

Inventor： 실버브룩키아

IPC: B81C1/00 ,  B41J2/05 ,  B41J2/16

CPC classification number: B41J2/1404 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2002/14403 ,  B41J2002/14475 ,  B41J2202/11 ,  B81B2201/032 ,  B81B2201/052 ,  B81B2203/0109 ,  B81C1/00611 ,  B81C2201/0108 ,  B81C2201/0126

Abstract: A method of forming a suspended beam in a MEMS process is disclosed. In the process a pit (8) is etched into a substrate (5). Sacrificial material (10) is deposited in the pit (8) and on the surrounding substrate surface. The sacrificial material (10) is then removed from the surrounding substrate surface and from the periphery of the pit (8) so that there is a gap between the sacrificial material and at least two sidewalls of the pit. The sacrificial material is then heated so that it reftows such that the remaining sacrificial material contacts the sidewalls of the pit. Material for the beam (12), which is typically a metal, is then deposited on the substrate surface and the reflowed sacrificial material, and the sacrificial material is then removed to form the suspended beam. The beam could be used as the heating element in an inkjet printer.

Abstract translation: 公开了一种在MEMS工艺中形成悬挂梁的方法。 在该过程中，凹坑（8）被蚀刻到衬底（5）中。 牺牲材料（10）沉积在凹坑（8）中和周围的基底表面上。 然后将牺牲材料（10）从周围的衬底表面和凹坑（8）的周边移除，使得在牺牲材料和凹坑的至少两个侧壁之间存在间隙。 然后将牺牲材料加热，使得其牺牲使得剩余的牺牲材料接触凹坑的侧壁。 然后将通常为金属的梁（12）的材料沉积在衬底表面和回流牺牲材料上，然后去除牺牲材料以形成悬挂梁。 该光束可用作喷墨打印机中的加热元件。

公开(公告)号：KR1020070088584A

公开(公告)日：2007-08-29

申请号：KR1020077007838

申请日：2005-10-04

Applicant: 실버브룩 리서치 피티와이 리미티드

Inventor： 맥레이놀드대럴라루 ,  실버브룩키아

IPC: H01L21/3065 ,  H01L27/00

CPC classification number: H01L21/02057 ,  B41J2/1412 ,  B41J2/1601 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B81B2201/052 ,  B81B2203/033 ,  B81C1/00849 ,  B81C2201/0112 ,  B81C2201/0132

Abstract: A method of removing a polymeric coating from sidewalls of an etched trench defined in a silicon wafer is provided. The method comprises etching the wafer in a biased plasma etching chamber using an O2 plasma. The chamber temperature is in the range of 90 to 180 °C.

Abstract translation: 提供从硅晶片中限定的蚀刻沟槽的侧壁去除聚合物涂层的方法。 该方法包括使用O 2等离子体在偏压等离子体蚀刻室中蚀刻晶片。 室温度在90至180℃的范围内。

公开(公告)号：EP2935908A4

公开(公告)日：2016-11-23

申请号：EP13865265

申请日：2013-12-20

Applicant: MICRONICS INC

Inventor： KOLB ANDREW ,  SPRAGUE ISAAC ,  KAY JUSTIN L ,  BRAGD MATTHEW SCOTT ,  STONE MARTHA

IPC: F15C3/04

CPC classification number: B01L3/50273 ,  B01L3/502707 ,  B01L3/502738 ,  B01L2200/0689 ,  B01L2200/12 ,  B01L2300/0816 ,  B01L2300/0874 ,  B01L2300/0887 ,  B01L2300/123 ,  B01L2400/0481 ,  B01L2400/0487 ,  B01L2400/0638 ,  B01L2400/0655 ,  B29C43/021 ,  B29C65/16 ,  B29K2101/00 ,  B29L2009/00 ,  B29L2031/7496 ,  B81B2201/052 ,  B81C1/00119 ,  F04B43/043 ,  F16K99/0015 ,  F16K99/0059 ,  F16K2099/0078 ,  F16K2099/008 ,  F16K2099/0084 ,  F16K2099/0086 ,  Y10T156/1026

Abstract: Fluidic cartridges, and manufacture thereof, having a plurality of circuit element subtypes containing pneumatically operated diaphragm members, where the diaphragm materials are selected for yield point, chemical resistance, breathability and other properties individually according to the fluidic element subtype are provided. A process of in-situ edge-bonded decoupage for forming diaphragm members inside a cartridge, and fluidic circuits having diaphragm members as active and passive circuit elements, including pumps, valves, vents, waste receptacles, reagent reservoirs, and cuvettes with optical windows, where the material composition of each individual diaphragm member may be selected from an assortment of materials during manufacture are also provided.

Abstract translation: 提供具有包含气动操作的隔膜部件的多个电路元件亚型的流体盒及其制造，其中根据流体元件亚型分别选择隔膜材料用于屈服点，耐化学性，透气性和其它性质。 用于在筒内形成隔膜构件的原位边缘粘合去耦的过程，以及具有作为主动和被动电路元件的隔膜构件的流体回路，包括泵，阀，通风口，废物容器，试剂储存器和具有光学窗口的比色杯， 其中还提供了每个单独隔膜构件的材料组成可以在制造期间从各种材料中选择。

公开(公告)号：EP2172415A4

公开(公告)日：2014-10-08

申请号：EP08830937

申请日：2008-09-04

Applicant: PANASONIC CORP

Inventor： NAKATANI MASAYA ,  USHIO HIROSHI ,  HIRAOKA SOICHIRO ,  OSHIMA AKIYOSHI ,  TAKAHASHI MAKOTO

IPC: B81C1/00 ,  G01N33/487

CPC classification number: G01N33/48728 ,  B81B2201/0214 ,  B81B2201/052 ,  B81C1/00206 ,  Y10T428/23943

公开(公告)号：EP1800334A4

公开(公告)日：2012-07-04

申请号：EP05789502

申请日：2005-10-04

Applicant: SILVERBROOK RES PTY LTD

Inventor： MCREYNOLDS DARRELL LARUE ,  SILVERBROOK KIA

IPC: H01L21/3065 ,  B41J2/14 ,  B41J2/16 ,  B81C1/00 ,  H01L21/02 ,  H01L21/308

CPC classification number: H01L21/02057 ,  B41J2/1412 ,  B41J2/1601 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/164 ,  B81B2201/052 ,  B81B2203/033 ,  B81C1/00849 ,  B81C2201/0112 ,  B81C2201/0132

公开(公告)号：EP2448678A1

公开(公告)日：2012-05-09

申请号：EP10732736.3

申请日：2010-07-02

Applicant: Cambridge Enterprise Ltd.

Inventor： BAUER, Wolfgang Andreas ,  HUCK, Wilhelm T. S. ,  FISCHLECHNER, Martin

IPC: B01L3/00 ,  B01F13/00 ,  G01N27/447

CPC classification number: B01L3/502707 ,  B01F17/00 ,  B01J2219/00511 ,  B01J2219/0059 ,  B01J2219/00637 ,  B01J2219/00783 ,  B01J2219/00788 ,  B01J2219/00831 ,  B01J2219/00833 ,  B01J2219/00837 ,  B01J2219/0097 ,  B01L2200/0636 ,  B01L2300/0867 ,  B01L2300/16 ,  B01L2300/161 ,  B05C7/04 ,  B05D7/22 ,  B05D7/222 ,  B81B2201/0214 ,  B81B2201/05 ,  B81B2201/052 ,  B81B2201/058 ,  B81C1/00119 ,  B81C1/00206 ,  Y10T137/8593

Abstract: We describe a method of layer-by-layer deposition of a plurality of layers of material onto the wall or walls of a channel of a microfluidic device, the method comprising: loading a tube with a series of segments of solution, a said segment of solution bearing a material to be deposited; coupling said tube to said microfluidic device; and injecting said segments of solution into said microfluidic device such that said segments of solution pass, in turn, through said channel depositing successive layers of material to perform said layer-by-layer deposition onto said wall or walls of said channel. Embodiments of the methods are particularly useful for automated surface modification of plastic, for example PDMS (Poly(dimethylsiloxane)), microchannels. We also describe methods and apparatus for forming double-emulsions.

Abstract translation: 我们描述了在微流体装置的通道的壁或壁上逐层沉积多层材料的方法，所述方法包括：加载具有一系列溶液段的管，所述段 带有待沉积材料的溶液; 将所述管耦合至所述微流体装置; 以及将所述溶液片段注入所述微流体装置，使得所述溶液片段依次通过所述通道沉积连续的材料层以在所述通道的所述一个或多个壁上执行所述逐层沉积。 该方法的实施方式对于塑料的自动化表面改性特别有用，例如PDMS（聚（二甲基硅氧烷））微通道。 我们还描述了形成双重乳液的方法和设备。

公开(公告)号：EP1294635B1

公开(公告)日：2008-02-27

申请号：EP01927492.7

申请日：2001-05-02

Applicant: Silverbrook Research Pty. Limited

Inventor： SILVERBROOK, Kia, Silverbrook Research Pty Ltd

IPC: B81B3/00 ,  B41J2/14 ,  B41J2/16

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator ( 6 ) is provided with a group of upper arms ( 23, 25, 26 ) and a group of lower arms ( 27, 28 ) which are non planar, so increasing the stiffness of the arms. The arms ( 23, 25, 26,27,28 ) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material

公开(公告)号：EP1580161A1

公开(公告)日：2005-09-28

申请号：EP04019950.7

申请日：2004-08-23

Applicant: Hewlett-Packard Development Company, L.P.

Inventor： Gore, Makarand ,  Guo, James

IPC: B81B7/00

CPC classification number: B41J2/16 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1632 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B81B3/0035 ,  B81B2201/047 ,  B81B2201/052 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/1461 ,  H01L2924/00014 ,  H01L2924/00

Abstract: A method is disclosed for forming a chamber (350) in an electronic device (310), including the steps of preparing an outer surface (336) on a solidified core material (334), the solidified core material (334) in a depression (316) formed in a substrate (312). The method further includes establishing a layer (338) on the prepared outer surface (336) of the solidified core material (334) and a portion of the substrate (312) surrounding the depression (316). The established layer (338) and the substrate (312) define a chamber (350).

公开(公告)号：EP1226944B1

公开(公告)日：2005-08-10

申请号：EP02250367.6

申请日：2002-01-18

Applicant: Xerox Corporation

Inventor： Gulvin, Peter M. ,  Eklund, Elliott A.

IPC: B41J2/14 ,  H04R19/00 ,  H04R7/08 ,  F04B43/04

CPC classification number: B81B3/007 ,  B41J2/14314 ,  B41J2/16 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B81B2201/052 ,  B81B2203/0127 ,  F04B43/043 ,  H04R7/08

公开(公告)号：EP1294635A4

公开(公告)日：2004-09-15

申请号：EP01927492

申请日：2001-05-02

Applicant: SILVERBROOK RES PTY LTD

Inventor： SILVERBROOK KIA

IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  B41J2/16 ,  B81B3/00 ,  B81C1/00

CPC classification number: B41J2/1645 ,  B41J2/14427 ,  B41J2/1623 ,  B41J2/1626 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1648 ,  B81B3/007 ,  B81B2201/031 ,  B81B2201/036 ,  B81B2201/052 ,  Y10T29/42 ,  Y10T29/49083 ,  Y10T29/49401

Abstract: A thermal bend actuator ( 6 ) is provided with a group of upper arms ( 23, 25, 26 ) and a group of lower arms ( 27, 28 ) which are non planar, so increasing the stiffness of the arms. The arms ( 23, 25, 26,27,28 ) may be spaced transversely of each other and do not overly each other in plan view, so enabling all arms to be formed by depositing a single layer of arm forming material