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公开(公告)号：KR100759095B1
公开(公告)日：2007-09-19
申请号：KR1020070017681
申请日：2007-02-22
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B26/0858 , B81B7/02 , B81B2201/04 , G02B6/3584 , G02B26/105
Abstract: A two-axis driven MEMS(Micro-Electro-Mechanical System) mirror using piezoelectric force is provided to secure independent driving along the directions of first and second axes perpendicular to each other and to implement a two-axis drive MEMS mirror having an improved fill-factor by using piezoelectric power. A two-axis driven MEMS mirror(300) using piezoelectric force is composed of a substrate; a silicon layer(310) formed on the substrate; a piezoelectric driving unit layer(320) formed on the silicon layer to tilt the MEMS mirror in the directions of first and second axes crossing each other and composed of first and second symmetrical parts(322,323) separated from each other and piezoelectric materials; a pair of mirror pedestals(330) arranged on the silicon layer and positioned in the first and second symmetrical parts, respectively; and a mirror plate(340) disposed on a pair of mirror pedestals. The first and second symmetrical parts comprise a first piezoelectric driving unit(326) of a first inverse-staple form having a rotary shaft(324) crossing adjacently to the center of the mirror plate and a second piezoelectric driving unit(328) of a second inverse-staple form installed in the first inverse-staple form of the first piezoelectric driving unit to surround the mirror plate.
Abstract translation: 提供使用压电力的双轴驱动的MEMS（微电子机械系统）镜，以确保沿着彼此垂直的第一和第二轴的方向的独立驱动，并且实现具有改进的填充的双轴驱动MEMS镜 因子通过使用压电功率。 使用压电力的双轴驱动MEMS反射镜（300）由基板构成; 形成在所述基板上的硅层（310） 形成在硅层上的压电驱动单元层（320），用于使MEMS反射镜沿彼此交叉的第一和第二轴线的方向倾斜，并且由彼此分离的第一和第二对称部分（322,323）和压电材料组成; 布置在硅层上并分别位于第一和第二对称部分中的一对反射镜基座（330） 以及设置在一对镜座上的镜板（340）。 第一和第二对称部分包括具有与镜板中心相邻的旋转轴（324）的第一反相装置形式的第一压电驱动单元（326）和第二压电驱动单元（328），第二压电驱动单元 安装在第一压电驱动单元的第一反相装置中以包围镜板的反相装置。
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公开(公告)号：KR1020050018568A
公开(公告)日：2005-02-23
申请号：KR1020040017047
申请日：2004-03-12
Applicant: 후지쯔 가부시끼가이샤
IPC: G02B26/08
CPC classification number: H02N1/008 , B81B7/02 , B81B2201/04 , G02B26/0841
Abstract: PURPOSE: A micro-shaking device and a method of driving the same are provided to realize rotation operation having large rotation displacement at an operation part with a high operation speed. CONSTITUTION: The micro-shaking device comprises a main operation part, and the first and the second frame(120,130). The first connection part(140) connects the main operation part and the first frame, and regulates the first rotation axis of the first rotation operation of the main operation part as to the first frame. The second connection part(150) connects the first frame and the second frame, and regulates the second rotation axis of the second rotation operation of the first frame and the main operation part as to the second frame. The first driving tools(160,170) generate a driving force of the first rotation operation. The second driving tools(180,190) generate a driving force of the second rotation operation. The first rotation axis is not orthogonal to the second rotation axis.
Abstract translation: 目的：提供一种微动装置及其驱动方法，以在高操作速度的操作部上实现具有大的旋转位移的旋转操作。 构成：微动装置包括主操作部分和第一和第二框架（120,130）。 第一连接部（140）连接主操作部和第一框，并且对第一框架的主操作部的第一旋转动作的第一旋转轴进行调节。 第二连接部分（150）连接第一框架和第二框架，并且调节关于第二框架的第一框架和主操作部件的第二旋转操作的第二旋转轴线。 第一驱动工具（160,170）产生第一旋转操作的驱动力。 第二驱动工具（180,190）产生第二旋转操作的驱动力。 第一旋转轴线不与第二旋转轴线正交。
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公开(公告)号：KR1020040083341A
公开(公告)日：2004-10-01
申请号：KR1020040005284
申请日：2004-01-28
Applicant: 가부시키가이샤 히타치세이사쿠쇼
IPC: G02B26/08
CPC classification number: G02B6/3564 , G02B6/3518 , G02B6/3556 , G02B6/357 , G02B6/359 , B81B7/02 , B81B2201/04
Abstract: PURPOSE: An optical switch for changing over connections of optical signals transmitted over plural optical fibers and an optical switch system using the same are provided to reduce a size of the optical switch by arranging effectively components within the optical switch. CONSTITUTION: A collimator array(4) is formed with a plurality of collimators coupled to optical fibers(2). A mirror array(6) includes a plurality of movable mirrors(5). The movable mirrors are optically coupled to light outputted from a first collimator of the collimator array. A first mirror(7) is optically coupled to the light outputted from the mirror of the mirror array. A second mirror(8) is optically coupled to the light outputted from the first mirror. A second collimator of the collimator array is optically coupled to the light outputted from the second mirror. The light outputted from the second mirror passes the first mirror and the mirror array and optically couples to the second collimator.
Abstract translation: 目的：提供一种用于切换通过多根光纤传输的光信号的连接的光开关，以及使用该光开关的光开关系统，通过在光开关内有效地布置组件来减小光开关的尺寸。 构成：准直器阵列（4）形成有耦合到光纤（2）的多个准直器。 镜阵列（6）包括多个可移动镜（5）。 可移动镜与从准直器阵列的第一准直仪输出的光光学耦合。 第一反射镜（7）光学耦合到从反射镜阵列的反射镜输出的光。 第二反射镜（8）光耦合到从第一反射镜输出的光。 准直器阵列的第二准直器光耦合到从第二反射镜输出的光。 从第二反射镜输出的光通过第一反射镜和反射镜阵列，并光耦合到第二准直仪。
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公开(公告)号：KR1020170018439A
公开(公告)日：2017-02-17
申请号：KR1020177001195
申请日：2015-05-29
Applicant: 로베르트 보쉬 게엠베하
CPC classification number: G02B26/085 , B81B3/0054 , B81B2201/04 , B81B2201/042 , B81B2203/051 , B81B2203/058 , G02B26/105 , G03B21/2066
Abstract: 본발명은, 제1 평면에놓여있는가동구동요소및 안내장치를갖는구동장치와; 상기구동요소에탄성적으로결합되어있고정지위치에서제1 평면에대해평행하게놓인제2 평면에놓여있는미러;를갖춘마이크로미러장치에관한것으로, 상기안내장치는, 제1 평면에놓여있는직선상에서구동요소의운동을안내하도록형성된다. 또한, 본발명은상응하는투사시스템과도관련이있다.
Abstract translation: 本发明涉及一种微镜装置，其包括具有位于第一平面中的可移动驱动元件和引导系统的驱动系统，并且其包括反射镜，该反射镜弹性地联接到所述驱动元件并处于静止位置时 在平行于第一平面的第二平面中，引导系统被设计成将驱动元件的运动引导到位于第一平面内的直线上。 本发明还涉及相应的投影系统。
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公开(公告)号：KR1020150002220A
公开(公告)日：2015-01-07
申请号：KR1020130075775
申请日：2013-06-28
Applicant: 엘지이노텍 주식회사
CPC classification number: B81B3/0035 , B81B3/0018 , B81B7/02 , B81B2201/04 , G02B7/28 , G03B5/00
Abstract: 본 발명은 캐비티를 가지는 고정기판, 상기 캐비티 내에 배치되며, 상기 고정기판으로부터 부유하는 구동부, 상기 고정기판과 상기 구동부를 물리적으로 연결하며, 제어전류에 따라 상기 구동부의 높이를 가변하는 탄성부를 포함하고, 상기 구동부는 제어전압에 따라 상기 구동부 평면 내에서 상기 구동부의 높이 가변 방향에 대하여 수직한 제1 방향 및 상기 제1 방향과 수직한 제2 방향으로 이동하는 흔들림 보상부를 포함하는 멤스 소자를 제공한다. 따라서, 3축 이동이 가능하여 흔들림 보상 및 자동초점 기능을 동시에 수행하므로, 소형화가 가능하다. 또한, 멤스 소자는 소모전력, 코일과 자석에 의한 소형화의 한계를 극복하기 위해 하나의 렌즈를 구동시켜 소비전력이 적고 소형화가 가능하다.
Abstract translation: 提供了一种微机电系统（MEMS）装置，其包括具有空腔的固定基板; 驱动单元，其布置在空腔中并从固定基板悬挂; 弹性单元，其物理地连接固定基板和驱动单元，并根据控制电流改变驱动单元的高度; 以及抖动补偿单元，其根据控制电流沿垂直于驱动单元的高度的可变方向的第一方向和垂直于驱动单元的平面中的第一方向的第二方向移动。 因此，三轴可以移动，并且可以同时执行抖动补偿功能和自动对焦功能，因此可以小型化。 此外，MEMS器件由一个透镜操作，以克服功率消耗和线圈和磁体的尺寸减小的限制，因此功耗低并且小型化是可能的。
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Patent Agency Ranking
公开(公告)号：KR1020130038751A
公开(公告)日：2013-04-18
申请号：KR1020110103286
申请日：2011-10-10
Applicant: 엘지전자 주식회사
IPC: G02B26/10
CPC classification number: G02B26/127 , B81B7/0087 , B81B2201/04 , G02B26/105 , H04N1/113
Abstract: PURPOSE: A scanning micro-mirror and a temperature compensation method including the temperature compensation function of a sensor are provided to reduce a measuring error of a driving angle depending on the temperature change of a sensor measuring the driving angle through the temperature compensation method when measuring a mirror plate of the scanning micro or the driving angle of a gimbal, in order to measure the driving angle more accurately. CONSTITUTION: A mirror plate(11) reflects the light radiating from the light source and is supported by a gimbal(13). The gimbal is equipped near the mirror plate and is connected with the mirror plate through a first elastomer(12). A supporting part(15) supports the gimbal through the second elastomer(14), and supports the rotation of the gimbal when the gimbal is twisted toward the second elastomer shaft. A winding wire is equipped on the top of the gimbal through one side supporting part(15a) to one side second elastomer(14a), and is distributed through the other side second elastomer to the other side supporting part(15b). A sensor unit(230) is equipped at least one among the first elastomer and the second elastomer and measures the rotation angle of the mirror plate or the gimbal. A rotation angle detection part(240) detects the rotation angle of the mirror plate or the gimbal based on the ambient temperature of a measured value and the sensor unit.
Abstract translation: 目的：提供一种包括传感器温度补偿功能的扫描微镜和温度补偿方法，以便在测量时通过温度补偿方法降低测量驱动角度的传感器的温度变化的驱动角度的测量误差 扫描微镜的镜板或万向节的驱动角，以更精确地测量驱动角度。 构成：镜板（11）反射从光源辐射的光并由万向节（13）支撑。 万向架配备在镜板附近，并通过第一弹性体（12）与镜板连接。 支撑部件（15）通过第二弹性体（14）支撑万向节，并且当万向架朝向第二弹性体轴线扭转时支撑万向节的旋转。 通过一侧支撑部（15a）与一侧第二弹性体（14a）在万向架的顶部配置绕组线，并且通过另一侧第二弹性体分配到另一侧支撑部（15b）。 传感器单元（230）配备有第一弹性体和第二弹性体中的至少一个，并且测量镜板或万向节的旋转角度。 旋转角度检测部（240）根据测量值的环境温度和传感器单元来检测镜板或万向节的旋转角度。
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公开(公告)号：KR1020100042908A
公开(公告)日：2010-04-27
申请号：KR1020080102118
申请日：2008-10-17
Applicant: 삼성전기주식회사
CPC classification number: B81C1/00015 , B81B7/02 , B81B2201/04 , G02B26/00
Abstract: PURPOSE: A manufacturing method of an optical modulation device is provided to form a uniform interface by preventing etching of an upper insulating layer after protecting the upper insulating layer with a mask layer when the protective layer is wet-etched. CONSTITUTION: A manufacturing method of an optical modulation device includes the following steps: forming an insulating layer(120) on a substrate(110); forming a sacrificial layer(130) on the insulating layer; forming a structural layer(140) on the sacrificial layer; forming a protective layer(150) on the structural layer; forming a piezoelectric driving body on the both ends of the structural layer; laminating the upper insulating layer on the structural layer; etching the upper insulating layer with a first mask layer; forming a second mask layer; and etching the protective layer after patterning the second mask layer.
Abstract translation: 目的：提供一种光调制装置的制造方法，以在保护层被湿蚀刻时，通过防止上绝缘层与掩模层之间的上保护层的蚀刻来形成均匀的界面。 构成：光调制装置的制造方法包括以下步骤：在基板（110）上形成绝缘层（120）; 在绝缘层上形成牺牲层（130）; 在牺牲层上形成结构层（140）; 在所述结构层上形成保护层（150）; 在结构层的两端形成压电驱动体; 在结构层上层叠上绝缘层; 用第一掩模层蚀刻上绝缘层; 形成第二掩模层; 并且在图案化第二掩模层之后蚀刻保护层。
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公开(公告)号：KR100888080B1
公开(公告)日：2009-03-11
申请号：KR1020080037474
申请日：2008-04-22
Applicant: 이화여자대학교 산학협력단
CPC classification number: G02B26/0841 , B81B2201/04 , G02B6/357 , G02B17/002 , H01L21/77
Abstract: A method for manufacturing a micro-mirror array is provided to joint a mirror plate and a driving unit and form the driving unit while the driving unit and the mirror plate are joined, so a crack is not generated on the mirror plate. A micromirror array manufacturing method is comprised of the steps: forming a comb electrode(S10), a forming a mirror plate(S20), bonding a wafer(S30), finishing the comb electrode formation(S40), and separating the mirror plate(S50). The comb electrode is formed by using the multi-step etch height and the comb-electrode for the driving part is formed on the first wafer. The mirror plate is formed on the second wafer, and the first wafer and the second wafer are joined. The comb electrode is formed while first wafer and the second wafer are joined.
Abstract translation: 提供一种制造微反射镜阵列的方法，用于连接镜板和驱动单元，并在驱动单元和镜板接合的同时形成驱动单元，从而在镜板上不产生裂纹。 微镜阵列制造方法包括以下步骤：形成梳状电极（S10），形成镜板（S20），接合晶片（S30），完成梳状电极形成（S40），以及分离镜板（ S50）。 通过使用多步蚀刻高度形成梳状电极，并且用于驱动部分的梳状电极形成在第一晶片上。 镜板形成在第二晶片上，第一晶片和第二晶片接合。 在第一晶片和第二晶片接合时形成梳状电极。
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公开(公告)号：KR1020080049722A
公开(公告)日：2008-06-04
申请号：KR1020087004880
申请日：2006-07-31
Applicant: 텍사스 인스트루먼츠 인코포레이티드
IPC: G02B26/08
CPC classification number: G02B26/0841 , B81B2201/04 , B81C1/00301 , G02B6/3518 , G09G3/346
Abstract: According to one embodiment of the invention a micro-mirror element (400) comprises a first address portion, a second address portion, and one or more address vias (424). The first address portion comprises a plurality of address pads (410) distributed in a first layer (420) of the micro-mirror element. The micro-mirror element has a first side and a second side and at least two of the plurality of address pads are distributed on the first side. The second address portion comprises a plurality of address electrodes (460) distributed in a second layer (450) of the micro-mirror element. The one or more address vias are operable to conductively couple the first address portion to the second address portion for the transfer of an address voltage from the first address portion to the second address portion. The distribution of the address pads of the first address portion and the address electrodes of the second address portion causes an electrostatic force provided by the second address portion to be greater than an electrostatic force provided by the first address portion.
Abstract translation: 根据本发明的一个实施例，微镜元件（400）包括第一地址部分，第二地址部分和一个或多个地址通孔（424）。 第一地址部分包括分布在微镜元件的第一层（420）中的多个地址焊盘（410）。 微镜元件具有第一侧和第二侧，并且多个地址焊盘中的至少两个分配在第一侧上。 第二地址部分包括分布在微镜元件的第二层（450）中的多个地址电极（460）。 一个或多个地址通孔可操作以将第一地址部分导电地耦合到第二地址部分，以将地址电压从第一地址部分传送到第二地址部分。 第一地址部分的地址焊盘和第二地址部分的寻址电极的分布导致由第二地址部分提供的静电力大于由第一地址部分提供的静电力。
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公开(公告)号：KR1020080000462A
公开(公告)日：2008-01-02
申请号：KR1020060058306
申请日：2006-06-27
Applicant: 삼성전기주식회사
CPC classification number: G02B6/3584 , B81B7/02 , B81B2201/04 , G02B26/0833 , G09G3/22 , H04N1/047
Abstract: A micro actuator control method and a device thereof are provided to reduce the volume of an image projection system by detecting the position of a micro actuator with a hall sensor instead of an encoder. A micro actuator control method executed in a micro actuator control device is composed of steps for generating a command signal having a predetermined form, in a command signal generating unit; driving a micro actuator correspondently to the generated command signal(300); generating a position signal corresponding to the position change of the driven micro actuator, by detecting the position change through a position sensor(310,320); judging whether the position signal is included within a preset error range or not, by comparing the position signal with a reference position signal stored in a storing unit in advance(330); storing the command signal in the storing unit if the position signal is included in a preset error range; and controlling the micro actuator according to the command signal stored in the storing unit.
Abstract translation: 提供了微型致动器控制方法及其装置，通过用霍尔传感器代替编码器检测微型致动器的位置来减小图像投影系统的体积。 在微致动器控制装置中执行的微致动器控制方法由在命令信号生成单元中产生具有预定形式的命令信号的步骤组成; 对应于所生成的命令信号（300）驱动微致动器; 通过检测通过位置传感器（310,320）的位置变化来产生与所述从动微型致动器的位置变化相对应的位置信号; 通过将位置信号与预先存储在存储单元中的参考位置信号进行比较来判断位置信号是否包含在预设误差范围内; 如果位置信号包括在预设误差范围内，则将命令信号存储在存储单元中; 以及根据存储在存储单元中的命令信号来控制微致动器。
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