公开(公告)号：US20110149260A1

公开(公告)日：2011-06-23

申请号：US12644591

申请日：2009-12-22

Applicant: Francis Goodwin

Inventor： Francis Goodwin

IPC: G03B27/54 ,  H01J3/00

CPC classification number: G03F7/70575

Abstract: A band pass filter includes a first electrode, a second electrode, and a plasma generated by the first and second electrode. The plasma is confined to a region of space through which electromagnetic waves having a frequency above an intrinsic plasma frequency are transmitted, and electromagnetic waves having a frequency below the intrinsic plasma frequency are reflected. The band pass filter may be implemented in a photo lithography tool between a source module and an exposure module. The plasma of the band pass filter may be adapted to reduce IR radiation (or other out of band radiation) exposure to the exposure module by reflecting IR radiation back to the radiation source. In an extreme ultraviolet photo lithography tool, the plasma of the band pass filter may be adapted to transmit EUV radiation.

Abstract translation: 带通滤波器包括第一电极，第二电极和由第一和第二电极产生的等离子体。 等离子体被限制在具有高于固有等离子体频率的频率的电磁波的空间区域，并且具有低于固有等离子体频率的频率的电磁波被反射。 带通滤波器可以在源模块和曝光模块之间的光刻工具中实现。 带通滤波器的等离子体可以适于通过将IR辐射反射回辐射源来减少暴露于曝光模块的IR辐射（或其它带外辐射）。 在极紫外光刻工具中，带通滤波器的等离子体可适于传输EUV辐射。

公开(公告)号：US20110057566A1

公开(公告)日：2011-03-10

申请号：US12812270

申请日：2009-01-08

Applicant: Maxime Makarov

Inventor： Maxime Makarov

IPC: H01J3/00

CPC classification number: H01J3/021 ,  H01J33/00 ,  H01S3/0959 ,  H01S3/09707

Abstract: The invention relates to a pumped electron source (1) that comprises an ionisation chamber (4), an acceleration chamber (2) with an electrode (3) for extracting and accelerating primary ions and forming a secondary-electron beam, characterised in that said pumped electron source (1) comprises a power supply (11) adapted for applying to said electrode (3) a positive voltage for urging a primary plasma (17) outside the acceleration chamber (2), and a negative voltage pulse for extracting and accelerating the primary ions and forming a secondary-electron beam.

Abstract translation: 本发明涉及一种泵浦电子源（1），其包括电离室（4），具有用于提取和加速初级离子并形成二次电子束的电极（3）的加速室（2），其特征在于所述 抽吸电子源（1）包括适于向所述电极（3）施加用于促使加速室（2）外部的初级等离子体（17）的正电压的电源（11）和用于提取和加速的负电压脉冲 初级离子并形成二次电子束。

公开(公告)号：US20110057565A1

公开(公告)日：2011-03-10

申请号：US12812245

申请日：2009-01-08

Applicant: Maxime Makarov

Inventor： Maxime Makarov

IPC: H01J3/00

CPC classification number: H01J3/021 ,  H01J33/00

Abstract: The power supply device (14) for an ion-bombardment-induced secondary-emission electron source in a low-pressure chamber comprises a control input, two high-voltage outputs, a means for generating a plurality of positive pulses on a high-voltage output, and a means for generating a negative pulse on the other high-voltage output after at least some of the positive pulses.

Abstract translation: 用于低压室中的离子轰击诱发二次发射电子源的供电装置（14）包括控制输入端，两个高电压输出端，用于在高压电路上产生多个正脉冲的装置 输出，以及用于在至少一些正脉冲之后在另一高压输出上产生负脉冲的装置。

公开(公告)号：US07820992B2

公开(公告)日：2010-10-26

申请号：US12179900

申请日：2008-07-25

Applicant: Katsuhiko Yoshida

Inventor： Katsuhiko Yoshida

IPC: G02B5/00 ,  G21K1/00 ,  H01J1/52 ,  H01J3/00 ,  H01J5/18 ,  H01J29/46

CPC classification number: G21K1/04 ,  G21K1/043

Abstract: A neutron chopper according to the present invention includes a housing which internally forms a sealed space, the housing having window portions through which neutrons pass, a fixed shaft which is fixed inside the housing, a rotor which is rotatably supported by the fixed shaft, the rotor provided with a blocking portion which can block neutrons passing through the housing, and a motor which is provided inside the housing for rotating the rotor of the neutron chopper, where a stator of the motor is fixed to the fixed shaft, and a rotor of the motor receives a rotating force from the stator around the fixed shaft, and is fixed to the rotor of the neutron chopper. The neutron chopper is formed with small size, and neutron guides are easily disposed closely, consequently vacuum leak is hardly occurred in the neutron chopper.

Abstract translation: 根据本发明的中子切碎机包括内部形成密封空间的壳体，所述壳体具有中子通过的窗口部分，固定在壳体内部的固定轴，由固定轴可旋转地支撑的转子， 转子，其设置有阻挡穿过壳体的中子的阻挡部分;以及电动机，其设置在壳体内部，用于使中子切断器的转子旋转，其中电动机的定子固定到固定轴;转子， 电机从定子绕固定轴接收旋转力，并固定在中子切碎机的转子上。 中子斩波器形成为小尺寸，并且中子引导件容易紧密地设置，因此在中子斩波器中几乎不发生真空泄漏。

公开(公告)号：US20100181479A1

公开(公告)日：2010-07-22

申请号：US12459078

申请日：2009-06-25

Applicant: Rainer Knippelmeyer ,  Oliver Kienzle ,  Thomas Kemen ,  Heiko Mueller ,  Stephan Uhlemann ,  Maximilian Haider ,  Antonio Casares

Inventor： Rainer Knippelmeyer ,  Oliver Kienzle ,  Thomas Kemen ,  Heiko Mueller ,  Stephan Uhlemann ,  Maximilian Haider ,  Antonio Casares

IPC: H01J3/00 ,  H01J37/02 ,  H01J37/26 ,  H01J37/30

CPC classification number: H01J37/04 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/09 ,  H01J37/10 ,  H01J37/14 ,  H01J37/153 ,  H01J37/28 ,  H01J37/3007 ,  H01J37/3177 ,  H01J2237/0435 ,  H01J2237/0453 ,  H01J2237/047 ,  H01J2237/04735 ,  H01J2237/04756 ,  H01J2237/06 ,  H01J2237/14 ,  H01J2237/2817 ,  H01J2237/31774

Abstract: A particle-optical arrangement comprises a charged-particle source for generating a beam of charged particles; a multi-aperture plate arranged in a beam path of the beam of charged particles, wherein the multi-aperture plate has a plurality of apertures formed therein in a predetermined first array pattern, wherein a plurality of charged-particle beamlets is formed from the beam of charged particles downstream of the multi-aperture plate, and wherein a plurality of beam spots is formed in an image plane of the apparatus by the plurality of beamlets, the plurality of beam spots being arranged in a second array pattern; and a particle-optical to element for manipulating the beam of charged particles and/or the plurality of beamlets; wherein the first array pattern has a first pattern regularity in a first direction, and the second array pattern has a second pattern regularity in a second direction electron-optically corresponding to the first direction, and wherein the second regularity is higher than the first regularity.

Abstract translation: 粒子光学装置包括用于产生带电粒子束的带电粒子源; 布置在带电粒子束的光束路径中的多孔板，其中多孔板具有以预定的第一阵列图案形成在其中的多个孔，其中多个带电粒子子束由束形成 在多孔板下游的带电粒子，并且其中通过所述多个子束在所述装置的图像平面中形成多个束斑，所述多个束斑以第二阵列图案布置; 以及用于操纵带电粒子束和/或多个子束的粒子光学元件; 其中所述第一阵列图案在第一方向上具有第一图案规则性，并且所述第二阵列图案在与所述第一方向对应的电子 - 光学上的第二方向上具有第二图案规则性，并且其中所述第二规则性高于所述第一规则性。

公开(公告)号：US07728315B2

公开(公告)日：2010-06-01

申请号：US11868658

申请日：2007-10-08

Applicant: Tewfik J. Bichay

Inventor： Tewfik J. Bichay

IPC: G02B5/00 ,  G21K1/00 ,  H01J1/52 ,  H01J3/00 ,  H01J5/18 ,  H01J29/46 ,  G21C11/00 ,  G21F3/02

CPC classification number: G21F7/00 ,  A61N2005/1094 ,  G21Y2002/201 ,  G21Y2002/301 ,  G21Y2002/501 ,  G21Y2004/30

Abstract: A radiation attenuation corridor couples a radiation therapy room and a control room. The radiation attenuation corridor is made of a material that substantially absorbs ionizing radiation and substantially blocks the transmission of the ionizing radiation. Specific wall portions at the entrance of the corridor are covered with borated polyethylene (BPE). Specific wall portions diverge from an axis defined by the corridor by from about 10 degrees to about 45 degrees. The corridor thus leads out of the room and angles laterally across the wall of the therapy room, before angling again and opening to a safe room. The added angles in the radiation corridor increase the distance of radiation travel, and make the path more indirect, thereby increasing the contact of the radiation emissions with the radiation shielding and further attenuating the radiation.

Abstract translation: 辐射衰减走廊耦合放射治疗室和控制室。 辐射衰减走廊由基本上吸收电离辐射并且基本上阻挡电离辐射的透射的材料制成。 在走廊入口处的特定壁部分用硼酸化聚乙烯（BPE）覆盖。 具体的壁部分从走廊限定的轴线偏离约10度至约45度。 因此，走廊从房间转过来，并横向穿过治疗室的墙壁，然后再次前进并开放到安全的房间。 辐射走廊中增加的角度增加了辐射行进的距离，并使路径更间接，从而增加辐射辐射与辐射屏蔽的接触，并进一步衰减辐射。

公开(公告)号：US07211785B1

公开(公告)日：2007-05-01

申请号：US11355820

申请日：2006-02-16

Applicant: Amir Berger ,  Moshe B. Haim ,  Sergey Zaslavasky

Inventor： Amir Berger ,  Moshe B. Haim ,  Sergey Zaslavasky

IPC: H01J3/00 ,  G03B42/00

CPC classification number: G03B42/02 ,  A61B6/032 ,  G01T1/2014 ,  G02B5/02 ,  H04N1/029 ,  H04N1/06 ,  H04N1/0834 ,  H04N1/0869 ,  H04N2201/0079 ,  H04N2201/02495

Abstract: A scanning apparatus including a cylindrical member and an optical system. The cylindrical member rotates about a rotational axis and has an outer surface to support a storage phosphor sample thereon. The optical system moves in translation parallel to the rotational axis to scan the sample. The optical system comprises an opening, an excitation beam, an integrating member, and a single detector. The excitation beam is directed through the opening to impinge on a sample and cause light to be emitted from the sample. The integrating member reflects the emitted light using an interior three-dimensional polynomial surface providing diffuse reflection. The single detector is disposed adjacent the integrating member for collecting the reflected emitted light.

Abstract translation: 一种包括圆柱形构件和光学系统的扫描装置。 圆柱形构件围绕旋转轴线旋转并且具有外表面以在其上支撑存储荧光体样品。 光学系统平行于旋转轴线平移移动以扫描样品。 光学系统包括开口，激发光束，积分元件和单个检测器。 激发光束被引导通过开口以撞击在样品上并导致从样品发射光。 积分元件使用提供漫反射的内部三维多项式表面反射发射的光。 单个检测器邻近积分元件设置以收集反射的发射光。

公开(公告)号：US5862349A

公开(公告)日：1999-01-19

申请号：US754400

申请日：1996-11-21

Applicant: Sung-Soo Cho ,  Diane M. Bryant ,  James P. Kardach ,  Feng Deng

Inventor： Sung-Soo Cho ,  Diane M. Bryant ,  James P. Kardach ,  Feng Deng

IPC: G06F13/12 ,  G06F1/16 ,  G06F3/00 ,  G06F13/40 ,  H01J3/00

CPC classification number: G06F13/4081 ,  G06F1/1632 ,  Y02B60/1228 ,  Y02B60/1235

Abstract: Prior art quiet docking and undocking methods used an interface that was located within the notebook computer, thus adding to the cost, complexity, weight, and power consumption of the notebook computer. The present invention provides for an apparatus for quiet docking of a notebook computer to a docking station, including interface circuitry located within the docking station. The interface detects when the notebook computer has been inserted within the docking station, and correspondingly enables a switch such that a common system bus is coupled between the notebook computer and the docking station. The interface also generates events to allow a software routine to configure the notebook computer and docking station without prior user intervention. The interface also includes circuitry to detect an undock request, and correspondingly undock the computer such that a transaction occurring on the system bus is not affected.

Abstract translation: 现有技术的安静对接和脱离方法使用位于笔记本计算机内的接口，从而增加笔记本计算机的成本，复杂性，重量和功率消耗。 本发明提供了一种用于将笔记本计算机安静地对接到对接站的装置，包括位于坞站内的接口电路。 该接口检测笔记本计算机何时被插入对接站内，并且相应地启用开关，使得公共系统总线耦合在笔记本计算机和对接站之间。 该界面还生成事件，以允许软件程序配置笔记本电脑和扩展坞，无需用户干预。 接口还包括检测未停靠请求的电路，并相应地使计算机取消停靠，使得系统总线上发生的事务不受影响。

公开(公告)号：US5717950A

公开(公告)日：1998-02-10

申请号：US371376

申请日：1995-01-11

Applicant: Toshio Yamaguchi ,  Kazuo Imai ,  Masatoshi Haraguchi

Inventor： Toshio Yamaguchi ,  Kazuo Imai ,  Masatoshi Haraguchi

IPC: G06F15/16 ,  H01J3/00

CPC classification number: G06F15/161 ,  Y10S707/99943

Abstract: In a multi-computer system having a plurality of computers, an input/output device configuration definition table and an input/output device configuration reference table are adapted to be collectively managed. A configuration management program manages the configuration definition of all input/output devices of a plurality of computers by using the input/output device configuration definition table, and generates a changed data file when an input/output device configuration is changed. Dynamic system alteration is effected by changing the contents of the input/output device configuration reference table stored in a shared memory, in accordance with the changed data file. The input/output device configuration definition table and the input/output device configuration reference table each have an input/output device information part and an input/output device connection information part arranged in a matrix form to allow addition/deletion of an input/output device and a computer.

公开(公告)号：US5594702A

公开(公告)日：1997-01-14

申请号：US495867

申请日：1995-06-28

Applicant: Larry N. Wakeman ,  Roy T. Myers, Jr. ,  Wesley C. Lee

Inventor： Larry N. Wakeman ,  Roy T. Myers, Jr. ,  Wesley C. Lee

IPC: G06F5/06 ,  G11C8/00 ,  G06F15/00 ,  H01J3/00

CPC classification number: G06F5/065

Abstract: A multi-first-in-first-out (henceforth "multi-FIFO") memory circuit in accordance with this invention comprises: (1) a plurality of groups of storage elements, for example, each group corresponds to a first-in-first-out (FIFO) memory (2) a time multiplexed first address generator for generating address signals of a storage element from a first group that is cyclically selected from the plurality of groups by a sequencer included in the first address generator and (3) a second address generator for generating address signals of a number of successive storage elements from a second group that is selected from the plurality of groups by a signal on a group request terminal of the second address generator. In one embodiment the storage elements are part of a dualport random-access-memory (RAM), and are accessed by each of the first and second address generators using a number of pairs of pointer registers that are coupled to the address generators. Each pair of pointer registers includes a read pointer register that indicates a corresponding group's next storage element to be read and a write pointer register that indicates the group's next storage element to be written.

Abstract translation: 根据本发明的多先进先出（以下称为“多FIFO”）存储器电路包括：（1）多个存储元件组，例如每个组对应于第一存储元件， 先出（FIFO）存储器（2），时分复用第一地址发生器，用于通过包括在第一地址生成器中的定序器从第一组生成来自多个组的循环选择的存储元件的地址信号;（3） 第二地址发生器，用于通过第二地址发生器的组请求终端上的信号从多个组中选择的第二组生成多个连续存储元件的地址信号。 在一个实施例中，存储元件是双端口随机存取存储器（RAM）的一部分，并且由第一和第二地址发生器中的每一个使用耦合到地址发生器的多对指针寄存器来访问。 每对指针寄存器包括读指针寄存器，其指示相应组的下一个要读取的存储元件和指示该组下一个要写入的存储元件的写指针寄存器。