公开(公告)号：US20140104614A1

公开(公告)日：2014-04-17

申请号：US13830466

申请日：2013-03-14

Applicant: CYMER, INC.

Inventor： Rostislav Rokitski ,  Nakgeuon Seong ,  Kevin O'Brien

IPC: G01J3/28 ,  G03F7/20

CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/1809 ,  G01J11/00 ,  G01J2001/4238 ,  G01J2009/006 ,  G03F7/70091 ,  G03F7/70575 ,  G03F7/7085

Abstract: A spectral feature of a pulsed light beam produced by an optical source is estimated by modifying the wavelength of the pulsed light beam based on a predefined repeating pattern having a pattern period including a plurality of steps, the modification including shifting the wavelength of the pulsed light beam by a wavelength offset from a baseline wavelength for each step in the pattern period; measuring the wavelength of the light beam for each step in the pattern period as the wavelength is modified across the pattern; and estimating a spectral feature of the pulsed light beam over an evaluation window that includes all of the steps within the pattern period based at least in part on the measured wavelength of the light beam for each step in the pattern period.

Abstract translation: 由光源产生的脉冲光束的光谱特征通过基于具有包括多个步骤的图案周期的预定重复图案修改脉冲光束的波长来估计，该修改包括移动脉冲光的波长 在图案周期中对于每个步骤的基线波长的波长偏移; 在图案周期中测量每个步骤的光束的波长，当波长跨越图案被修改时; 以及至少部分地基于所述模式周期中的每个步骤的所述光束的波长来估计包括所述模式周期内的所有步骤的评估窗口上的所述脉冲光束的光谱特征。

公开(公告)号：US08331027B2

公开(公告)日：2012-12-11

申请号：US12510900

申请日：2009-07-28

Applicant: Howard A. Padmore ,  Dmytro L. Voronov ,  Rossana Cambie ,  Valeriy V. Yashchuk ,  Eric M. Gullikson

Inventor： Howard A. Padmore ,  Dmytro L. Voronov ,  Rossana Cambie ,  Valeriy V. Yashchuk ,  Eric M. Gullikson

IPC: G02B5/18 ,  G01J3/28

CPC classification number: G02B5/1838 ,  B29D11/0073 ,  B29D11/00769 ,  B82Y10/00 ,  G01J3/1809 ,  G21K1/06 ,  G21K1/062 ,  G21K2201/061 ,  G21K2201/067

Abstract: A diffraction grating structure having ultra-high density of grooves comprises an echellette substrate having periodically repeating recessed features, and a multi-layer stack of materials disposed on the echellette substrate. The surface of the diffraction grating is planarized, such that layers of the multi-layer stack form a plurality of lines disposed on the planarized surface of the structure in a periodical fashion, wherein lines having a first property alternate with lines having a dissimilar property on the surface of the substrate. For example, in one embodiment, lines comprising high-Z and low-Z materials alternate on the planarized surface providing a structure that is suitable as a diffraction grating for EUV and soft X-rays. In some embodiments, line density of between about 10,000 lines/mm to about 100,000 lines/mm is provided.

Abstract translation: 具有超高密度凹槽的衍射光栅结构包括具有周期性重复的凹陷特征的薄片基片和设置在薄片基片上的多层材料堆叠。 衍射光栅的表面被平坦化，使得多层叠层的层以周期的方式形成布置在结构的平坦化表面上的多条线，其中具有第一属性的线与具有不同性质的线交替 衬底的表面。 例如，在一个实施例中，包括高Z和低Z材料的线在平坦化表面上交替，提供适合作为EUV和软X射线的衍射光栅的结构。 在一些实施例中，提供约10,000线/ mm至约100,000线/ mm之间的线密度。

公开(公告)号：US20110285993A1

公开(公告)日：2011-11-24

申请号：US13147190

申请日：2010-01-25

Applicant: Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

Inventor： Helmut Becker-Ross ,  Stefan Florek ,  Michael Okruss

IPC: G01J3/40 ,  G01J3/443 ,  G01J3/42

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0213 ,  G01J3/2803 ,  G01J2003/1828

Abstract: An Echelle spectrometer arrangement (10) with internal order separation contains an Echelle grating (34) and a dispersing element (38) for order separation so that a two-dimensional spectrum having a plurality of separate orders (56) can be generated, an imagine optical system (18, 22, 28, 46), a flat-panel detector (16), and predispersion means (20) for predispersing the radiation into the direction of traverse dispersion of the dispersion element (38). The arrangement is characterized in that the predispersion means (20) comprise a predispersion element which is arranged along the optical path behind the inlet spacing (12) inside the spectrometer arrangement. The imaging optical system is designed in such a manner that the predispersed radiation can be imaged onto an additional image plane (24) which does not have any boundaries in the predispersion direction and which is arranged along the optical path between the predispersion element (20) and the echelle grating (34). Optical means (20, 68) in the area of the predispersed spectrum are arranged to influence the spatial and/or the spectral beam density distribution on the detector (16).

Abstract translation: 具有内部顺序分离的Echelle光谱仪装置（10）包含Echelle光栅（34）和分散元件（38），用于顺序分离，使得可以产生具有多个分开的阶数（56）的二维光谱， 光学系统（18,22,28,46），平板检测器（16）和用于将辐射预分散到分散元件（38）的横向分散方向的预分散装置（20）。 该装置的特征在于，预分散装置（20）包括预分散元件，该预分散元件沿着光谱仪装置内的入口间隔（12）的光路布置。 成像光学系统被设计成使得预分散的辐射可以被成像到在预分散方向上没有任何边界并且沿着预分散元件（20）之间的光路布置的附加图像平面（24）上， 和梯形光栅（34）。 在预分散频谱的区域中的光学装置（20,68）被布置成影响检测器（16）上的空间和/或光谱光束密度分布。

公开(公告)号：US07936455B2

公开(公告)日：2011-05-03

申请号：US12246232

申请日：2008-10-06

Applicant: Burt Jay Beardsley ,  Wendy Lynn Beardsley

Inventor： Burt Jay Beardsley ,  Wendy Lynn Beardsley

IPC: G01J3/28

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0262 ,  G01J3/027 ,  G01J3/0291 ,  G01J3/443

Abstract: A spectrograph including a primary mirror, a secondary mirror, and a tertiary mirror forming a TMA having a common vertex axis. The spectrograph also may include a collimating mirror, a diffraction grating, and a dispersive prism. The collimating mirror and an entrance aperture form an interchangeable module. Radiation received through the entrance aperture is reflected in a collimated pattern towards an aperture stop. The diffraction grating, located between the collimating mirror and prism, diffracts radiation passed through the aperture stop into multiple beams directed onto the prism. A flat mirror, located to one side of the vertex axis. receives and reflects the multiple beams exiting the prism onto the primary mirror, where they are reflected onto the secondary mirror. The secondary mirror reflects the beams to the tertiary mirror where they are reflected onto an image plane located on the other side of the vertex axis.

Abstract translation: 包括主镜，次镜和形成具有共同顶点轴的TMA的第三镜的光谱仪。 光谱仪还可以包括准直镜，衍射光栅和分散棱镜。 准直镜和入口孔形成可互换的模块。 通过入射孔收到的辐射以朝向孔径光阑的准直图案反射。 位于准直镜和棱镜之间的衍射光栅将通过孔径光阑的辐射衍射成多个指向棱镜的光束。 平面镜，位于顶点轴的一侧。 接收和反射离开棱镜的多个光束到主镜上，在那里它们被反射到次镜上。 次级反射镜将光束反射到第三级反射镜，它们被反射到位于顶点轴线另一侧的图像平面上。

公开(公告)号：US07936454B2

公开(公告)日：2011-05-03

申请号：US12551375

申请日：2009-08-31

Applicant: Burt Jay Beardsley ,  Wendy Lynn Beardsley

Inventor： Burt Jay Beardsley ,  Wendy Lynn Beardsley

IPC: G01J3/30

CPC classification number: G01J3/02 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0272 ,  G01J3/18 ,  G01J3/1809 ,  G01J3/2803 ,  G01J3/2823

Abstract: A portable spectrograph including a primary mirror, a secondary mirror, and a tertiary mirror forming a TMA having a common vertex axis, a diffraction grating, and a dispersive prism, where the portable spectrograph can detect wavelengths between 150 nm and 1.1 μm. The portable spectrograph also may include a collimating mirror and an entrance aperture, which form an interchangeable module. Radiation received through the entrance aperture is reflected in a collimated pattern towards an aperture stop. The diffraction grating, located between the collimating mirror and prism, diffracts radiation passed through the aperture stop into multiple beams directed onto the prism. A flat mirror, located to one side of the vertex axis receives and reflects the multiple beams exiting the prism onto the primary mirror, where they are reflected onto the secondary mirror. The secondary mirror reflects the beams to the tertiary mirror where they are reflected onto an image plane located on the other side of the vertex axis.

Abstract translation: 一种便携式光谱仪，其包括主镜，次镜和形成具有共同顶点轴的TMA的第三镜，衍射光栅和色散棱镜，其中便携式光谱仪可以检测150nm和1.1μm之间的波长。 便携式光谱仪还可以包括形成可互换模块的准直镜和入口孔。 通过入射孔收到的辐射以朝向孔径光阑的准直图案反射。 位于准直镜和棱镜之间的衍射光栅将通过孔径光阑的辐射衍射成多个指向棱镜的光束。 位于顶点轴的一侧的平面镜将接收并反射离开棱镜的多个光束到主镜上，并将反射镜反射到次镜上。 次级反射镜将光束反射到第三级反射镜，它们被反射到位于顶点轴线另一侧的图像平面上。

公开(公告)号：US07869040B1

公开(公告)日：2011-01-11

申请号：US12184419

申请日：2008-08-01

Applicant: Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

Inventor： Hidong Kwak ,  Shankar Krishnan ,  Shing Lee ,  Haixing Zou

IPC: G01J4/00

CPC classification number: G01J3/10 ,  G01B11/0641 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/14 ,  G01J3/1809 ,  G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/212 ,  G01N2021/213 ,  G01N2021/95676

Abstract: An illumination subsystem configured to provide illumination for a measurement system includes first and second light sources configured to generate light for measurements in different wavelength regimes. The illumination subsystem also includes a TIR prism configured to be moved into and out of an optical path from the first and second light sources to the measurement system. If the TIR prism is positioned out of the optical path, light from only the first light source is directed along the optical path. If the TIR prism is positioned in the optical path, light from only the second light source is directed along the optical path. Various measurement systems are also provided. One measurement system includes an optical subsystem configured to perform measurements of a specimen using light in different wavelength regimes directed along a common optical path. The different wavelength regimes include vacuum ultraviolet, ultraviolet, visible, and near infrared wavelength regimes.

Abstract translation: 被配置为为测量系统提供照明的照明子系统包括被配置为产生用于不同波长方案中的测量的光的第一和第二光源。 照明子系统还包括被配置为移入和移出从第一和第二光源到测量系统的光路的TIR棱镜。 如果TIR棱镜位于光路外，则仅沿着光路引导来自第一光源的光。 如果TIR棱镜位于光路中，则仅沿着光路引导来自第二光源的光。 还提供了各种测量系统。 一个测量系统包括光学子系统，该光学子系统被配置为使用沿着公共光路引导的不同波长方式的光来对样本进行测量。 不同的波长方案包括真空紫外线，紫外线，可见光和近红外波长方案。

公开(公告)号：US20100182594A1

公开(公告)日：2010-07-22

申请号：US12690205

申请日：2010-01-20

Applicant: Keith Carron

Inventor： Keith Carron

IPC: G01N21/00 ,  G01J3/44 ,  G01J3/28

CPC classification number: G01J3/42 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/0294 ,  G01J3/1809 ,  G01J3/44 ,  G01J2001/4242

Abstract: An apparatus is described for the real-time identification of one or more selected components of a target material. In one embodiment, an infrared spectrometer and a separate Raman spectrometer are coupled to exchange respective spectral information of the target material preferably normalized and presented in a single graph. In an alternative embodiment, both an infrared spectrometer and a Raman spectrometer are included in a single instrument and a common infrared light source is used by both spectrometers. In another embodiment, a vibrational spectrometer and a stoichiometric spectrometer are combined in a single instrument and are coupled to exchange respective spectral information of the target material and to compare the spectral information against a library of spectra to generate a real-time signal if a selected component is present in the target material.

Abstract translation: 描述了用于实时识别目标材料的一个或多个选定部件的装置。 在一个实施例中，红外光谱仪和单独的拉曼光谱仪被耦合以交换目标材料的各个光谱信息，优选地被归一化并呈现在单个图中。 在替代实施例中，红外光谱仪和拉曼光谱仪均包括在单个仪器中，并且两个光谱仪都使用通用的红外光源。 在另一个实施例中，将振动光谱仪和化学计量光谱仪组合在单个仪器中，并耦合以交换目标材料的相应光谱信息，并将光谱信息与光谱库进行比较以产生实时信号，如果选定 组分存在于目标材料中。

公开(公告)号：US20100171953A1

公开(公告)日：2010-07-08

申请号：US12665665

申请日：2008-05-09

Applicant: Helmut Becker-Ross ,  Michael Okruss ,  Stefan Florek

Inventor： Helmut Becker-Ross ,  Michael Okruss ,  Stefan Florek

IPC: G01J3/28

CPC classification number: G01J3/22 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/08 ,  G01J3/1809 ,  G01J3/2823 ,  G01J3/32

Abstract: The invention relates to a spectrometer arrangement (10) having a spectrometer for producing a spectrum of radiation from a radiation source on a detector (34), comprising an optical imaging Littrow arrangement (18, 20) for imaging the radiation entering the spectrometer arrangement (16) in an image plane, a first dispersion arrangement (28, 30) for the spectral decomposition of a first wavelength range of the radiation entering the spectrometer arrangement, a second dispersion arrangement (58, 60) for the spectral decomposition of a second wavelength range of the radiation entering the spectrometer arrangement, and a common detector (34) arranged in the image plane of the imagine optics, characterized in that the imaging optical arrangement (18, 20) comprises an element (20) that can be moved between two positions (20, 50), wherein the radiation entering the spectrometer arrangement in the first position is guided via the first dispersion arrangement and in the second position via the second dispersion arrangement.

Abstract translation: 本发明涉及一种具有用于在检测器（34）上产生来自辐射源的辐射光谱的光谱仪的光谱仪装置（10），该光谱仪包括用于对进入光谱仪装置的辐射进行成像的光学成像Littrow布置（18,20） 16），用于对进入光谱仪装置的辐射的第一波长范围进行光谱分解的第一色散装置（28,30），用于第二波长的光谱分解的第二色散装置（58,60） 进入光谱仪布置的辐射的范围以及布置在想象光学器件的图像平面中的公共检测器（34），其特征在于，成像光学装置（18,20）包括可在两者之间移动的元件（20） 位置（20,50），其中在第一位置进入分光计装置的辐射经由第一分散装置被引导，并且经由 第二分散布置。

公开(公告)号：US07469092B2

公开(公告)日：2008-12-23

申请号：US11782492

申请日：2007-07-24

Applicant: Andrew D. Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Patrick Masterson

Inventor： Andrew D. Sappey ,  James Howell ,  Henrik Hofvander ,  Bernard Patrick Masterson

IPC: G02B6/00

CPC classification number: G01J3/36 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/0237 ,  G01J3/024 ,  G01J3/0289 ,  G01J3/0297 ,  G01J3/108 ,  G01J3/1809 ,  G01J5/601 ,  G01J2003/104 ,  G01J2003/423 ,  G01N21/359 ,  G01N21/39 ,  G01N2021/399 ,  G02B6/14

Abstract: A diode laser spectroscopy gas sensing apparatus having a diode laser with a select lasing frequency, a pitch optic coupled to the diode laser with the pitch optic being operatively associated with a process chamber and oriented to project laser light along a projection beam through the process chamber. This embodiment additionally includes a catch optic in optical communication with the pitch optic to receive the laser light projected through the process chamber and an optical fiber optically coupled to the catch optic. In addition, the catch optic is operatively associated with a catch side alignment mechanism which provides for the alignment of the catch optic with respect to the projection beam to increase a quantity of laser light received by the catch optic from the pitch optic and coupled to the optical fiber and a detector sensitive to the select lasing frequency optically coupled to the optical fiber. The catch side alignment mechanism may consist of means to tilt the catch optic along a first axis and a second axis orthogonal to the first axis with both the first and second axes being approximately orthogonal to the projection beam.

Abstract translation: 一种具有选择激光频率的二极管激光器的二极管激光光谱气体感测装置，耦合到二极管激光器的俯仰光学器件，其中俯仰光学器件与处理室可操作地相关联并且被定向成沿着投影束将激光投射通过处理室 。 该实施例另外包括与俯仰光学器件光学通信的接收光学器件，以接收通过处理室投射的激光，以及光学耦合到捕捉光学器件的光纤。 另外，捕捉光学元件与捕捉侧对准机构可操作地相关联，该机构提供捕获光学元件相对于投影光束的对准，以增加由光阑从俯仰光学元件接收的激光的数量并耦合到 光纤和对光纤耦合的选择激光频率敏感的检测器。 捕获侧对准机构可以包括用于使捕获光学器件沿第一轴线和与第一轴线正交的第二轴线倾斜的装置，其中第一和第二轴线几乎与投影光束正交。

公开(公告)号：US20080174777A1

公开(公告)日：2008-07-24

申请号：US11786234

申请日：2007-04-11

Applicant: Keith Carron

Inventor： Keith Carron

IPC: G01J3/28 ,  G01J3/00 ,  G01N21/47

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/021 ,  G01J3/0229 ,  G01J3/2803 ,  G01J3/2846 ,  G01J3/2889 ,  G01J3/44 ,  G01J3/443 ,  G01J2001/4242 ,  G01N21/718

Abstract: Echelle gratings and microelectromechanical system (MEMS) digital micromirror device (DMD) detectors are used to provide rapid, small, and highly sensitive spectrometers. The new spectrometers are particularly useful for laser induced breakdown and Raman spectroscopy, but could generally be used with any form of emission spectroscopy. The new spectrometers have particular applicability in the detection of improvised explosive devices.

Abstract translation: Echelle光栅和微机电系统（MEMS）数字微镜器件（DMD）检测器用于提供快速，小型和高灵敏度的光谱仪。 新的光谱仪对于激光诱导击穿和拉曼光谱特别有用，但通常可以用于任何形式的发射光谱。 新型光谱仪特别适用于简易爆炸装置的检测。