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121.发明公开
公开(公告)号：KR1020120067249A
公开(公告)日：2012-06-25
申请号：KR1020100128728
申请日：2010-12-15
Applicant: 전자부품연구원
CPC classification number: H01L21/02603 , B82Y40/00 , C01G9/02 , C01P2004/16
Abstract: PURPOSE: A manufacturing method of zinc oxide nano-wires using metal masking and a zinc oxide nano-wire material manufactured by the method are provided to control density of growing zinc oxide nano-wires by forming metallic mask layer on a catalyst layer without a light exposure process. CONSTITUTION: A manufacturing method of zinc oxide nano-wires using metal masking comprises the following steps: preparing a substrate(10); forming a catalyst layer(20) of zinc oxide material on the substrate; forming a mask layer(30) having a plurality of growth holes(33) through a thermal process; and growing zinc oxide nano-wires(40) based on the catalyst layer part which is exposed to the plurality of growth holes. The metallic mask layer formation step comprises the following steps: forming a coating layer with 20-30 nano meters thickness by spreading aqueous solution including the metal nano-particles on the catalyst layer; and forming the metallic mask layer by heat treating the coating layer at 150-700 deg. Celsius.
Abstract translation: 目的：提供使用金属掩蔽的氧化锌纳米线的制造方法和通过该方法制造的氧化锌纳米线材料，以通过在不具有光的催化剂层上形成金属掩模层来控制生长的氧化锌纳米线的密度 曝光过程。 构成：使用金属掩模的氧化锌纳米线的制造方法包括以下步骤：制备基板（10）; 在衬底上形成氧化锌材料的催化剂层（20）; 通过热处理形成具有多个生长孔（33）的掩模层（30）; 以及基于暴露于多个生长孔的催化剂层部分生长氧化锌纳米线（40）。 金属掩模层形成步骤包括以下步骤：通过在催化剂层上铺展包含金属纳米颗粒的水溶液，形成20-30纳米厚的涂层; 以及通过在150-700度下热处理该涂层来形成金属掩模层。 摄氏度。
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公开(公告)号：KR1020120015798A
公开(公告)日：2012-02-22
申请号：KR1020100078233
申请日：2010-08-13
Applicant: 전자부품연구원
IPC: B05C5/00
CPC classification number: B05C5/027 , B05C5/0291 , B05C11/1034 , B05C11/1044
Abstract: PURPOSE: An electrostatic multi-nozzle droplet discharging apparatus using triode and a method for driving the same are provided to improve the precision of patterns and to be applicable for mass-production. CONSTITUTION: A droplet discharging apparatus(10) includes the following: a reservoir(13) contains a solution; a chuck(19) loads a substrate; a nozzle(14) includes a droplet outlet; a gate electrode(17) is arranged between the substrate and the nozzle and includes a through hole through which droplet passes to be discharged on a substrate; a first voltage supplying unit(15) supplies a direct bias voltage to the nozzle; and a second voltage supplying unit(16) supplies a gate voltage of a pulse form to the gate electrode.
Abstract translation: 目的：提供使用三极管的静电多喷嘴液滴喷射装置及其驱动方法，以提高图案的精度并适用于批量生产。 构成：液滴喷射装置（10）包括以下部件：容器（13）包含溶液; 卡盘（19）装载基板; 喷嘴（14）包括液滴出口; 在基板和喷嘴之间布置有栅电极（17），并且包括通孔，通过该通孔将其排出到基板上; 第一电压供给单元（15）向喷嘴提供直接偏置电压; 并且第二电压供给单元（16）将脉冲形式的栅极电压提供给栅电极。
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公开(公告)号：KR100917793B1
公开(公告)日：2009-09-21
申请号：KR1020070076899
申请日：2007-07-31
Applicant: 전자부품연구원
IPC: H01L21/66
Abstract: 본 발명은 프로브 핀에 대한 정렬장치에 관한 것으로, 보다 자세하게는 프로브 핀을 연결해주는 패드와 프로브 핀의 위치를 결정해주는 가이드를 일체화함으로써, 프로브 유닛과 프로브 핀 가이드를 체결하는 과정에서 생기는 정렬 오차를 감소시켜 프로브 핀의 수명을 증가시킬 수 있는 프로브 핀에 대한 정렬장치에 관한 것이다.
본 발명의 프로브 핀에 대한 정렬장치에 있어서, 상기 프로브 핀의 움직임을 제한하기 위한 일측면의 상부 슬릿 및 하기 하판과 결합하기 위한 타측면의 홈이 형성되어 있는 상판; 및 상기 상판과 결합하기 위한 돌출부와 상기 프로브 핀을 삽입하기 위한 하부 슬릿 및 드라이버 IC를 연결하기 위한 홈이 형성되어 있는 하판을 포함함에 기술적 특징이 있다.
프로브 유닛, 정렬장치, 정렬가이드-
公开(公告)号：KR100877076B1
公开(公告)日：2009-01-09
申请号：KR1020070052620
申请日：2007-05-30
Applicant: 전자부품연구원
Abstract: 본 발명은 유리잉크 코팅법을 이용한 프로브카드용 탐침의 절연방법에 관한 것으로, 보다 자세하게는 고집적화되는 반도체 칩 및 디스플레이 회로검사에 사용되는 프로브카드용 탐침 상호 간에 절연성을 확보하기 위한 방법에 관한 것이다.
본 발명의 유리잉크 코팅법을 이용한 프로브카드용 탐침의 절연방법은 프로브카드용 탐침을 절연하는 방법에 있어서, 도금 또는 에칭 공정으로 탐침을 제작하는 단계; 상기 탐침을 크리닝한 후, 유리잉크를 이용하여 코팅하는 단계; 상기 코팅된 탐침의 양끝을 연마하여 프로브 유닛에 삽입하는 단계; 및 상기 탐침을 에폭시로 고정한 후, 상기 프로브 유닛을 PCB 회로부에 연결시키는 단계를 포함한다.
프로브카드, 탐침, 절연, 유리잉크, 에폭시-
公开(公告)号：KR100848262B1
公开(公告)日：2008-07-25
申请号：KR1020070053723
申请日：2007-06-01
Applicant: 전자부품연구원
IPC: G02F1/1345
CPC classification number: G02F1/1309 , B41J2/14 , B41J2/1642 , G02F1/1303 , G03F7/0002 , H04N5/225
Abstract: A minute pattern transfer apparatus with the variable line path is provided to form the patterns with various line paths by controlling the interval between probes. An ink preserving member(320) preserves ink. An ink transmitting member(330) transmits the ink to a probe member. The probe member(340) transfers the ink introduced from the ink transmitting member. A driving member controls the interval formed at the probe member. The probe member includes a space for preserving the ink transmitted from the ink preserving member. Plural probes(341) transfer the ink. A spring(370) is connected with the probe member in order to support the motion of the probe. Plural probes are formed in parallel to each other. The driving member includes a magnet fixed to the probe member. A coil is located at the upper portion of the magnet and makes the current flow.
Abstract translation: 提供具有可变线路径的微小图案转印装置，通过控制探针之间的间隔来形成具有各种线路径的图案。 油墨保存构件（320）保留油墨。 墨水传送部件（330）将墨水传送到探针部件。 探针构件（340）传送从墨水传送构件引入的墨。 驱动构件控制在探针构件上形成的间隔。 探针构件包括用于保存从保墨构件透过的墨的空间。 多个探头（341）传送墨水。 弹簧（370）与探针构件连接以便支撑探针的运动。 多个探针彼此平行地形成。 驱动构件包括固定到探针构件的磁体。 线圈位于磁体的上部并使电流流动。
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Patent Agency Ranking
公开(公告)号：KR1020070009789A
公开(公告)日：2007-01-19
申请号：KR1020050063672
申请日：2005-07-14
Applicant: 전자부품연구원
IPC: G01Q60/38 , H01L21/027 , H01L21/31 , H01L21/324
CPC classification number: G01Q60/38 , H01L21/0273 , H01L21/31 , H01L21/324
Abstract: A probe of an AFM(Atomic Force Microscope) cantilever using a ferroelectric is provided to precisely measure the electric polarization of the ferroelectric by using the ferroelectric in the probe of the cantilever. A probe of an AFM(Atomic Force Microscope) cantilever using a ferroelectric includes a cantilever support(100), an insulation layer(110), a metal layer(120), and a ferroelectric(130). The insulation layer is formed on the cantilever support. The metal layer is formed on the insulation layer. The ferroelectric is formed at the tip head of the metal layer. The ferroelectric has a domain of 180 degrees. The ferroelectric uses a PZT.
Abstract translation: 提供使用铁电体的AFM（原子力显微镜）悬臂的探针，通过在悬臂的探针中使用铁电体来精确测量铁电体的电极化。 使用铁电体的AFM（原子力显微镜）悬臂的探针包括悬臂支撑件（100），绝缘层（110），金属层（120）和铁电体（130）。 绝缘层形成在悬臂支架上。 金属层形成在绝缘层上。 铁电体形成在金属层的尖端处。 铁电体具有180度的域。 铁电使用PZT。
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公开(公告)号：KR1020040026989A
公开(公告)日：2004-04-01
申请号：KR1020020058669
申请日：2002-09-27
Applicant: 전자부품연구원
IPC: G02B6/24
Abstract: PURPOSE: A package module of an optical waveguide device by using a passive alignment device and a method for manufacturing the same are provided to achieve the mass production by the implement of the high speed packaging since the alignment is realized by a mechanical assembly. CONSTITUTION: A package module of an optical waveguide device by using a passive alignment device includes an optical waveguide device(30), an input and an output optical fiber passive alignment devices(20a,20b) and a plurality of optical fibers(40). The optical waveguide device(30) is formed by forming a plurality of waveguides on a substrate. Each of the input and an output optical fiber passive alignment devices(20a,20b) is provided with a receiving groove and a plurality of grooves formed inside of the receiving groove. And, the plurality of optical fibers(40) optically aligns with the optical waveguide by being positioned each of the grooves of the input and the output optical fiber passive alignment devices(20a,20b).
Abstract translation: 目的：提供通过使用无源对准装置的光波导装置的封装模块及其制造方法，以通过机械组件实现对准来实现高速封装的实现的大规模生产。 构成：使用无源对准装置的光波导装置的封装模块包括光波导器件（30），输入和输出光纤无源对准器件（20a，20b）和多个光纤（40）。 光波导器件（30）通过在衬底上形成多个波导来形成。 输入和输出光纤无源对准装置（20a，20b）中的每一个设置有接收槽和形成在接收槽内部的多个槽。 并且，通过将输入光纤和输出光纤无源对准装置（20a，20b）的每个槽定位，多个光纤（40）与光波导光学对准。
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公开(公告)号：KR100338365B1
公开(公告)日：2002-05-30
申请号：KR1019990043075
申请日：1999-10-06
Applicant: 전자부품연구원
IPC: H01L41/22
Abstract: 본발명의초음파트랜스듀서어레이형상구조물제작방법은초음파트랜스듀서어레이패턴이현상된 PMMA판을이용하여금속금형을만든다. 그런후에, 사출방식을이용하여플라스틱금형을대량으로제조하여초음파트랜스듀서어레이형상구조물을만들거나이 금속금형을 PZT 판에그대로찍어이 PZT 판을소결함으로써초음파트랜스듀서어레이형상구조물을만든다. 이렇게하여플라스틱금형을대량으로제조할수 있을뿐만아니라금속금형을그대로 PZT 판에압착시킴으로써제작공정을줄일수 있다.
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公开(公告)号：KR1020010005192A
公开(公告)日：2001-01-15
申请号：KR1019990025994
申请日：1999-06-30
Applicant: 전자부품연구원
Abstract: PURPOSE: A method for fabricating a diaphram of a plasma display panel is provided to fabricate precisely the diaphram of the plasma display panel on lower expenses. CONSTITUTION: A method for fabricating a diaphram of a plasma display panel applies X-rays to a sensitive film(20) through a mask to expose to the light, develops the sensitive film to form the sensitive film structure, forms a metal structure on top of the first substrate(10) which the sensitive film structure is formed by the electron plating, and forms the diaphram structure on the second substrate by pressing on top of the second substrate with the metal substrate.
Abstract translation: 目的：提供一种制造等离子体显示面板的方法，以更低的成本准确地制造等离子体显示面板的膜。 构成：用于制造等离子体显示面板的方法通过掩模将X射线施加到敏感膜（20）以暴露于光，形成敏感膜以形成敏感膜结构，在顶部形成金属结构 通过电子电镀形成敏感膜结构的第一基板（10），并且通过用金属基板压在第二基板上而在第二基板上形成双层结构。
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公开(公告)号：KR101894128B1
公开(公告)日：2018-09-03
申请号：KR1020150053901
申请日：2015-04-16
Applicant: 전자부품연구원
Abstract: 고에너지밀도및 고출력특성을갖는리튬이온커패시터전극용다차원탄소나노구조체및 이를포함하는리튬이온커패시터가제안된다. 본발명에따른리튬이온커패시터전극용전극활물질은 1차원탄소소재및 2차원탄소소재가결합된다차원탄소나노구조체를포함한다.
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