公开(公告)号：JPS61214429A

公开(公告)日：1986-09-24

申请号：JP5414985

申请日：1985-03-20

Applicant: CANON KK

Inventor： SHIMODA ISAMU

IPC: G03F9/00 ,  H01L21/027 ,  H01L21/30 ,  H01L21/67 ,  H01L21/68

Abstract: PURPOSE:To reduce the time necessary for position alignment, by forming the wafer or the mask with the suitable quantity and sequence corresponding with the distribution of initial positions of wafers after pre-alignment. CONSTITUTION:The input means 11 inputs the distribution of initial positions of wafers, while the calculation output means 12 calculates quantity and sequence to move the wafer according to the input data through the input means 11. These data of the calculation output means 12 are delivered to the moving means 13 which moves the wafer according to them. The measuring means 14 measure the relative displacement between the mask and the wafer. The distance necessary to move the wafer so that the alignment mark may cross the scanning line of laser widely varies in accordance with the shape of distribution. The best sequence to move the wafer also differs and the necessary time becomes short in case of small distance. Consequently, the alignment time can be minimized by moving the wafer in accordance with the distribution state of the initial positions.

公开(公告)号：JPS5617424A

公开(公告)日：1981-02-19

申请号：JP9458279

申请日：1979-07-23

Applicant: CANON KK

Inventor： SHIMODA ISAMU ,  YOMODA MINORU ,  SATOU TERUYA

IPC: G06F13/28 ,  G06F3/00 ,  G06F13/00 ,  G06F13/38

Abstract: PURPOSE:To prevent the number of data transfer lines from increasing not in proportion to the volume of data of a terminal, by providing a RAM memory between CPU and the terminal unit. CONSTITUTION:CPU performs data transfer with RAM, which provides time- division data transfer with a circuit in a time other than the access time of CPU. While CPU is not in input-output operation with RAM, selector 4 selects an artificial address signal from counter 2 and data from RAM are selected, thereby exercising data transfer. CPU attains access to output RAM5 on an interface without access direct to the terminal and, after storing RAM5 temporarily with data to be output, outputs them from RAM5. Then, data are output by making use of the latch function that RAM possesses, so that a decoder on an address line can be eliminated

公开(公告)号：JP2561263B2

公开(公告)日：1996-12-04

申请号：JP5034487

申请日：1987-03-06

Applicant: CANON KK

Inventor： KANEKO TETSUYA ,  SUZUKI AKIRA ,  SHIMODA ISAMU ,  TSUKAMOTO TAKEO ,  TAKEDA TOSHIHIKO ,  YONEHARA TAKAO ,  ICHIKAWA TAKESHI ,  OKUNUKI MASAHIKO

IPC: H01J9/02

公开(公告)号：JP2518621B2

公开(公告)日：1996-07-24

申请号：JP19185286

申请日：1986-08-15

Applicant: CANON KK

Inventor： NAKAMURA KENJI ,  KAN FUMITAKA ,  TAKENOCHI MASANORI ,  HAYAKAWA NAOJI ,  SHIMODA ISAMU ,  OKUNUKI MASAHIKO

IPC: H01L27/14 ,  G11C11/34 ,  G11C11/401 ,  H01J31/00 ,  H01L27/10 ,  H03K19/018 ,  H03K19/08 ,  H03K19/14

公开(公告)号：JPH07160440A

公开(公告)日：1995-06-23

申请号：JP30955393

申请日：1993-12-09

Applicant: CANON KK

Inventor： SHIMODA ISAMU

IPC: B41J5/30 ,  G06F3/12

Abstract: PURPOSE:To virtually give instruction on key operation by holding bit data sent out of a data source in off-line transfer mode and transferring different control signals, generated according to key operation instructions on an output device to the output device through respective data lines addressed according to the bit data. CONSTITUTION:A comparator 6 compares the data value of an n-bit data line with a previously set transfer mode switching value and switches the n-bit data line to the off-line transfer mode consisting of plural data lines DATA1 and DATA2 consisting of at least 2 bits. Then, the bit data sent out of the data source are held in data latches 3-1 and 3-2 through the data lines and on the basis of them, the different control signals generated according to the key operation instructions on the printer are transferred to the output device through the respective data lines to virtually give instruction on the key operation by utilizing the normal data lines.

公开(公告)号：JPH0574181B2

公开(公告)日：1993-10-15

申请号：JP10303287

申请日：1987-04-28

Applicant: CANON KK

Inventor： OKUNUKI MASAHIKO ,  SHIMODA ISAMU ,  MYAWAKI MAMORU ,  TSUKAMOTO TAKEO ,  SUZUKI AKIRA ,  KANEKO TETSUYA ,  TAKEDA TOSHIHIKO ,  SEKI MITSUAKI

IPC: H01J37/06 ,  G11B9/10 ,  H01J37/147 ,  H01J37/305 ,  H01L21/027 ,  H01L21/30 ,  H01L21/66

公开(公告)号：JPH0535838A

公开(公告)日：1993-02-12

申请号：JP21429891

申请日：1991-07-31

Applicant: CANON KK

Inventor： SHIMODA ISAMU

IPC: G06T1/00 ,  H04N1/00 ,  H04N1/40

Abstract: PURPOSE:To reduce weight and to easily store a document by providing a storage device storing a document image and a controller controlling the storage device, lighting device, photographing device and processor. CONSTITUTION:A document image is illuminated with a lighting device 1 and photographed by a photographing device 5, and the photographed document image is displayed on a display device 9. A storage device 7 composed of a volatile storage element and/or non-volatile storage element, and a controller 10 controlling the storage device 7, lighting device 1, photographing device 5 and a processor 8, are added to store/reproduce the document image. The controller 10 has a built-in operation element and provided with a control means capable of intermittently lighting up the light device 1. The display device 9 is composed of a non-electronic element such as liquid crystal.

公开(公告)号：JPH02192112A

公开(公告)日：1990-07-27

申请号：JP1129289

申请日：1989-01-20

Applicant: CANON KK

Inventor： OZAWA KUNITAKA ,  KAWAKAMI EIGO ,  KUROSAWA HIROSHI ,  SHIMODA ISAMU ,  UZAWA SHUNICHI

IPC: G03F9/00 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To make it possible to prevent the collision generating by the movement of a plurality of pickups in an easy and effective manner by a method wherein a plurality of pickups are shifted while a safe region, in which interference is automatically prevented, is being secured. CONSTITUTION:The driving systems, in the directions vertical and parallel to the side of the exposure region 6 corresponding to pickups 1 to 4, are provided. Even when the relations between the exposure region 6, the arrangement of a position-detecting mark and the size of the pickups 1 to 4 are critical, or even when there are pickups which cannot be driven due to a mechanical or electrical failure, an action is taken to prevent the generation of a collision between the pickups. To be more precise, each pickup is driven toward the outside in vertical direction against the side of the exposure region 6 corresponding to the pickups 1 to 4 respectively. As a result, the throughput of the entire device can be improved by conducting the movement of the pickups excellently when a pickup optical system is set.

公开(公告)号：JPH0298120A

公开(公告)日：1990-04-10

申请号：JP24990288

申请日：1988-10-05

Applicant: CANON KK

Inventor： TANAKA YUTAKA ,  MIZUSAWA NOBUTOSHI ,  AMAMIYA MITSUAKI ,  KARIYA TAKUO ,  SHIMODA ISAMU

IPC: G21K5/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To make it possible to correct any decline in helium purity due to air leakage as well as to avoid the decline in X-ray transmittivity by a method where in a means to constantly feed a specified amount of helium is provided in a stage containing chamber. CONSTITUTION:An X-ray source containing chamber 3 is exhausted by a high vacuum pump 13 with a partition valve 7 closed and a bypass valve 26 opened. On the other hand, a stage containing chamber 5 is exhausted by a low vacuum pimp 14 down to the pressure not exceeding 0.029Torr. At thin time, the bypass valve 26 is closed to exhaust the X-ray source containing chamber 3 down to the final pressure not exceeding 10 Torr. Later, the stage containing chamber 5 is fed with helium in purity of 99.9999% up to internal pressure of 150Torr. Thereafter, the pressure inside the stage containing chamber 5 is kept at 150Torr avoiding the dispersion thereof by a controller 21 and a variable valve 22 to continue the feeding of specified amount of helium corresponding to any air leakage amount.

公开(公告)号：JPH0287112A

公开(公告)日：1990-03-28

申请号：JP23944388

申请日：1988-09-22

Applicant: CANON KK

Inventor： MINOURA KAZUO ,  SHIMODA ISAMU

IPC: G02B26/10

Abstract: PURPOSE:To prevent the diameter of a laser spot from increasing owing to environmental variation in temperature, etc., by controlling the focusing position of a light beam on a scanning surface with a signal obtained from a means for detecting a light beam which is reflected by a reflecting optical member and passed through a deflector again. CONSTITUTION:The reflecting optical member 7 which reflects parts of the light beam from a light source to the deflector 4 again is arranged on the way of the optical path extending from the deflector 4 to the scanning surface and the detecting means 12 which detects the light beam reflected by the reflecting optical member 4 and passed through the deflector 4 again is arranged on the way of the optical path from the deflector to the light source. Then the focusing position of the light beam on the scanning surface is controlled with the signal obtained from the detecting means 12. Consequently, the diameter of the laser spot is prevented from increasing owing to environmental variation in temperature, etc.