-
131.发明授权전자후각 센서어레이, 이를 포함하는 센서시스템, 그센서어레이 제조방법 및 그 센서시스템을 이용한 분석방법 有权电子鼻传感器阵列，具有传感器阵列的传感器系统，制造传感器阵列的方法和使用传感器系统进行分析的方法
公开(公告)号：KR100842247B1
公开(公告)日：2008-06-30
申请号：KR1020050072325
申请日：2005-08-08
Applicant: 한국전자통신연구원
IPC: G01N27/04 , G01N27/87 , G01N33/00 , G01N27/407
CPC classification number: G01N33/0031 , Y10T29/49007
Abstract: 개인정보단말기을 이용하여 용이하게 시료를 측정하고 처리할 수 있으며, 대량생산이 가능한 전자후각 센서어레이, 이를 포함하는 센서시스템, 그 센서어레이 제조방법 및 그 센서시스템을 이용한 분석방법을 제공한다. 그 센서어레이는 고분자기판의 일측면에 형성되어, 피분석 화학종과 반응하여 전기적인 저항의 변화를 유발하는 복수개의 감지막 및 감지막의 양측에 접촉하며, 저항의 변화를 감지하는 복수개의 감지전극을 포함한다.
전자후각, 센서어레이, 센서시스템, 개인정보단말기, 감지막-
公开(公告)号：KR1020080052249A
公开(公告)日：2008-06-11
申请号：KR1020070060954
申请日：2007-06-21
Applicant: 한국전자통신연구원
Abstract: A metal-oxide-semiconductor chemical sensor and a fabrication method thereof are provided to make a sensing membrane of a sensor substrate with metal oxide nano-particles to lower the drive temperature. A metal-oxide-semiconductor chemical sensor comprises a sensor substrate(10), a measuring chamber(30) and a light source(20), wherein the sensor substrate includes an insulating substrate, a sensing electrode insulating substrate and a sensing membrane of metal oxide nano-particles deposited on the sensing electrode, so that the metal-oxide-semiconductor chemical sensor is adapted to sense a sample at low temperature below 100°C.
Abstract translation: 提供了一种金属氧化物半导体化学传感器及其制造方法，以使传感器基板的感测膜具有金属氧化物纳米颗粒以降低驱动温度。 金属氧化物半导体化学传感器包括传感器基板（10），测量室（30）和光源（20），其中传感器基板包括绝缘基板，感测电极绝缘基板和金属感测膜 氧化物纳米颗粒沉积在感测电极上，使得金属氧化物半导体化学传感器适于在低于100℃的低温下感测样品。
-
公开(公告)号：KR1020080052036A
公开(公告)日：2008-06-11
申请号：KR1020060124030
申请日：2006-12-07
Applicant: 한국전자통신연구원
IPC: G01N33/49 , G01N33/483
CPC classification number: G01N33/491 , B01D21/0075 , B01D21/0087 , B01D21/265 , B01D2221/10 , B01L3/502753 , B01L2200/0647 , B01L2300/0816 , B01L2300/0864 , B01L2400/0409 , B01L2400/0487 , B01L2400/086
Abstract: A serum separator is provided to improve convenience of manufacturing and automatically separating serum from the blood by simple pumping without additional devices by arranging the separation member for separating blood corpuscles from the blood without blood corpuscle accumulation to the microchannel. A serum separator for separating serum from whole blood comprises: a body having a cover substrate(500) and a channel substrate(550) which are conjugated each other; a microchannel(400) formed in the body through which the introduced blood(930) flows; separation member(300) formed in the microchannel for separating serum and blood corpuscles by disturbing the flow of blood corpuscles or serum in blood; a blood inlet part(100) communicated with the microchannel; and a blood outlet part(200) communicated with the microchannel. Further, a chemical treating part for increasing a separating efficiency between the serum and the blood corpuscles is additionally contained on the microchannel.
Abstract translation: 提供血清分离器以通过将没有血液积聚的血液分离成血液的分离构件设置到微通道，通过简单地抽取血液而不需要额外的装置来提高制造的便利性并自动分离血液。 用于从全血中分离血清的血清分离器包括：具有彼此共轭的盖基材（500）和通道基底（550）的主体; 形成在所述体内的引入血液流过的微通道（400）; 分离部件（300），其形成在微通道中，用于通过干扰血液中血小样或血清的流动来分离血清和血小板; 与微通道连通的血液入口部分（100）; 和与微通道连通的出血部分（200）。 此外，在微通道上另外包含用于提高血清和血小板之间的分离效率的化学处理部。
-
公开(公告)号：KR1020080050990A
公开(公告)日：2008-06-10
申请号：KR1020070084718
申请日：2007-08-23
Applicant: 한국전자통신연구원
Abstract: A method of manufacturing a MEMS(Micro Electro Mechanical System) sensor is provided to mount sensors having different functions on one chip in batch by using MEMS technology. A first electrode(102) of a physical quantity detecting sensor is formed on a substrate(100), and then a first sacrificial layer(106) is formed on the entire surface of the substrate comprising the first electrode. An impurity doped layer is formed on the first sacrificial layer over the first electrode, and a second sacrificial layer(108) is formed on the entire surface of the substrate comprising the impurity doped layer. A floating structure having a second electrode(110) is formed on the second sacrificial layer, and then the second and first sacrificial layers are selectively etched to form an etching hole. The first and second sacrificial layers are selectively etched to form an air gap(121) between the first and second electrodes.
Abstract translation: 提供了一种制造MEMS（微机电系统）传感器的方法，通过使用MEMS技术批量安装具有不同功能的传感器。 物理量检测传感器的第一电极（102）形成在基板（100）上，然后在包括第一电极的基板的整个表面上形成第一牺牲层（106）。 在第一电极上的第一牺牲层上形成杂质掺杂层，并且在包含杂质掺杂层的衬底的整个表面上形成第二牺牲层（108）。 在第二牺牲层上形成具有第二电极（110）的浮动结构，然后选择性地蚀刻第二和第一牺牲层以形成蚀刻孔。 选择性地蚀刻第一和第二牺牲层以在第一和第二电极之间形成气隙（121）。
-
公开(公告)号：KR100805816B1
公开(公告)日：2008-02-21
申请号：KR1020070036012
申请日：2007-04-12
Applicant: 한국전자통신연구원
Abstract: A surface modification process of a cycloolefin copolymer substrate is provided to allow easy modification of cycloolefin copolymer substrate, which, otherwise, is not be amenable to surface modification, and to fix various bioactive substances stably to the surface, thereby facilitating production of biosensor chips. A surface modification process of a cycloolefin copolymer substrate comprises the steps of: treating the surface of a cycloolefin copolymer substrate with oxygen plasma to produce hydroxyl groups on the surface of the substrate; treating the oxygen plasma-treated substrate with an acid; and fixing at least one compound having a functional group to the acid-treated substrate. The oxygen plasma treatment is performed at 10-500 W for 2-30 minutes under an oxygen flow rate of 10-500 sccm.
Abstract translation: 提供环烯烃共聚物基材的表面改性方法，以容易地改性环烯烃共聚物基材，否则不适于进行表面改性，并将各种生物活性物质稳定地固定在表面上，从而便于生产传感器芯片。 环烯共聚物基材的表面改性方法包括以下步骤：用氧等离子体处理环烯烃共聚物基材的表面以在基材的表面上产生羟基; 用酸处理氧等离子体处理的基板; 并将至少一种具有官能团的化合物固定在酸处理基材上。 氧气等离子体处理在10-500sccm的氧气流速下在10-500W进行2-30分钟。
-
Patent Agency Ranking136.发明授权
公开(公告)号：KR100779083B1
公开(公告)日：2007-11-27
申请号：KR1020060035769
申请日：2006-04-20
Applicant: 한국전자통신연구원
IPC: H01L21/027
Abstract: 본 발명은 반도체 공정, 특히 포토 리소그라피 공정을 이용할 수 있는 내열성 및 표면 편평도를 가지면서도 열 질량이 적은 플라스틱 구조체를 이용하여 형성된 미세가열 시스템, 그 미세가열 시스템을 이용한 랩온어칩 및 그 미세가열 시스템을 제조방법을 제공한다. 그 미세가열 시스템은 플라스틱(plastic) 필름 및 플라스틱 필름에 코팅된 내화학성 및 내열성의 박막을 구비한 플라스틱 구조체; 및 플라스틱 구조체 상에 형성된 미세 전극 및 가열기(heater)를 구비한 가열기부;를 포함한다. 본 발명의 미세가열 시스템은 플라스틱 필름에 무기 및/또는 유기물 박막을 코팅함으로써, 포토 리소그라피 공정을 통해 미세 전극, 가열기 및 온도 센서 등이 용이하게 형성될 수 있다.
플라스틱 필름, 플라스틱 가열 시스템, 바이오 칩, 랩온어칩-
公开(公告)号：KR100758273B1
公开(公告)日：2007-09-12
申请号：KR1020060088453
申请日：2006-09-13
Applicant: 한국전자통신연구원
CPC classification number: H05B3/267 , B01J2219/00317 , B01J2219/00662 , B01J2219/00722 , B01L3/50851 , B01L3/50853 , B01L7/52 , B01L2200/12 , B01L2200/147 , B01L2300/0645 , B01L2300/12 , B01L2300/1827 , G01N2035/00158 , B01L2200/0663
Abstract: A plastic-based microfabricated thermal device, a method for manufacturing the same device are provided to reduce the production costs of the device while temperature of substrate is uniformly controlled with low power compared to silicon or glass. A plastic-based microfabricated thermal device comprises: a plastic substrate(11); a heating tool which is formed on the upper side of plastic substrate, heats the plastic substrate and contains a heater(12A), an electrode(12C) and pads(12D, 12E) for supplying electric source to the heater through the electrode; a sensing tool(12B) which is formed on the upper side of plastic substrate and detects heat; and a diffusion tool(12F) which is formed in the rear side of the plastic substrate and diffuses heat to the plastic substrate, and further comprises an insulating membrane(13A) for covering the heating tool, sensing tool and diffusion tool in the upper and rear sides of substrate. The DNA amplification chip contains the plastic-based microfabricated thermal device, a silicon micro chamber which has a concave portion and is conjugated to the plastic-based microfabricated thermal device, and a cover for forming a reaction chamber by covering the concave portion.
Abstract translation: 提供了一种基于塑料的微制造热装置，制造相同装置的方法，以降低与硅或玻璃相比以低功率均匀地控制基板的温度的装置的生产成本。 一种基于塑料的微加热热装置包括：塑料基板（11）; 加热工具，其形成在塑料基板的上侧，加热塑料基板并包含加热器（12A），电极（12C）和用于通过电极向加热器供电的焊盘（12D，12E）; 感测工具（12B），其形成在塑料基板的上侧并检测热量; 和扩散工具（12F），其形成在塑料基板的后侧，并将热量扩散到塑料基板，并且还包括用于覆盖加热工具的绝缘膜（13A），在上部的传感工具和扩散工具 衬底的背面。 DNA扩增芯片包含基于塑料的微制造热装置，具有凹部并与塑料基微制造热装置共轭的硅微室，以及通过覆盖凹部形成反应室的盖。
-
公开(公告)号：KR100744556B1
公开(公告)日：2007-08-01
申请号：KR1020060046522
申请日：2006-05-24
Applicant: 한국전자통신연구원
IPC: B81B3/00
Abstract: 본 발명은 유체의 유동 및 그의 유량을 제어할 수 있는 열공압 마이크로 밸브에 관한 것이다. 상기 본 발명에 따른 열공압 마이크로밸브는 유체를 유동시키기 위한 채널들; 상기 채널들을 연결하는 유동 제어 챔버; 온도 변화에 따라 부피가 팽창하는 매질을 포함하는 압력 제어 챔버; 상기 압력 제어 챔버의 매질의 온도를 제어하기 위한 온도 제어부; 및 상기 유동 제어 챔버 및 압력 제어 챔버를 분할하고 상기 압력 제어 챔버의 압력이 증가하는 경우 탄성 변형되어 상기 유동 제어 챔버를 차지함으로써 상기 채널들의 유체 유동을 제어하는 멤브레인을 포함한다.
-
公开(公告)号：KR1020070061109A
公开(公告)日：2007-06-13
申请号：KR1020060046522
申请日：2006-05-24
Applicant: 한국전자통신연구원
IPC: B81B3/00
CPC classification number: B81B3/0035 , B81B3/0018 , B81B2201/036 , B81B2201/054
Abstract: A thermo-pneumatic micro valve with a membrane is provided to be applied for pumping liquid in a flow control chamber in a predetermined direction through a continuous heating and cooling. A thermo-pneumatic micro valve with a membrane includes a plurality of channels, a flow control chamber(102), a pressure control chamber(107), a pair of temperature control units(105,106), and a membrane(101). The channels are connected with the flow control chamber. The flow control chamber controls the flow and an amount of the fluid in the channels. The pressure control chamber is wrapped by a side wall formed in a second substrate, a top of which is wrapped by the membrane, a bottom of which is wrapped by a temperature control substrate(108). The temperature control unit controls a temperature of a medium of the pressure control chamber. The membrane controls the flow of the fluid of the channels.
Abstract translation: 提供具有膜的热气动微型阀，用于通过连续的加热和冷却将预定方向上的液体泵送到流量控制室中。 具有膜的热气动微型阀包括多个通道，流量控制室（102），压力控制室（107），一对温度控制单元（105,106）和膜（101）。 通道与流量控制室连接。 流量控制室控制通道中的流量和流量。 压力控制室被形成在第二衬底中的侧壁包裹，第二衬底的顶部被膜包裹，其底部被温度控制衬底（108）包裹。 温度控制单元控制压力控制室的介质的温度。 膜控制通道流体的流动。
-
公开(公告)号：KR100701152B1
公开(公告)日：2007-03-28
申请号：KR1020050120164
申请日：2005-12-08
Applicant: 한국전자통신연구원
Abstract: A monolithic MEMS(Micro-Electro Mechanical System) sensor without a step and a method of fabricating the same are provided to use a quality high temperature deposited layer for an MEMS since formation of a membrane is performed before a metal wiring process of a reading circuit. In a monolithic MEMS sensor without a step, an MEMS is formed on a left side of a substrate(10) as a first region. A reading circuit(50) is formed on a right side of the substrate as a second region. The MEMS includes a protection layer(20), a membrane(40), an insulation layer(41), and a sensor electrode(60) on the substrate. The protection layer is formed of a silicon oxide layer or a silicon nitride layer. The membrane is formed on a top of the protection layer as a silicon nitride layer or a silicon oxide layer. The insulation layer is formed of a silicon oxide layer. The sensor electrode is formed of a conductive material on the insulation layer. And, a sacrificial layer burying a trench is removed by an etching path(70).
Abstract translation: 提供了没有台阶的单片MEMS（微电子机械系统）传感器及其制造方法，以使用用于MEMS的优质高温沉积层，因为在读取电路的金属布线处理之前执行膜的形成 。 在没有台阶的单片MEMS传感器中，MEMS作为第一区域形成在基板（10）的左侧。 读取电路（50）形成在基板的右侧作为第二区域。 MEMS在衬底上包括保护层（20），膜（40），绝缘层（41）和传感器电极（60）。 保护层由氧化硅层或氮化硅层形成。 膜作为氮化硅层或氧化硅层形成在保护层的顶部上。 绝缘层由氧化硅层形成。 传感器电极由绝缘层上的导电材料形成。 并且，通过蚀刻路径（70）去除埋入沟槽的牺牲层。
-
-
-
-
-
-
-
-
-
Search Results
159
records
(took 0.025 seconds)
