中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

544 records (took 0.031 seconds)

    Mirror drive device and driving method thereof
    133.
    发明授权
    Mirror drive device and driving method thereof 有权

    公开(公告)号：US09864189B2

    公开(公告)日：2018-01-09

    申请号：US14330452

    申请日：2014-07-14

    Applicant: FUJIFILM Corporation

    Inventor： Takayuki Naono

    IPC: G02B26/08 ,  H01L41/187 ,  B81B7/00 ,  G02B26/10 ,  B81B7/02 ,  B81B3/00 ,  H01L41/09

    CPC classification number: G02B26/0858 ,  B81B3/0043 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/04 ,  G02B26/105 ,  H01L41/0933 ,  H01L41/1876

    Abstract: In a mirror drive device, a first and second actuator sections are arranged on both sides of a mirror supporting section that supports a mirror section so as to sandwich the mirror supporting section. Division of an upper and lower electrodes of each of the first and second actuator sections is performed correspondingly to stress distribution of principal stresses in a piezoelectric body in resonant mode vibration, and a piezoelectric body portion corresponding to positions of a first and third upper electrode sections, and a piezoelectric body portion corresponding to positions of a second and fourth upper electrode sections have stresses in opposite directions to each other. Division of the lower electrodes is performed similar to the upper electrodes, and drive voltages having the same phase can be respectively applied to the upper and lower electrode sections of the piezoelectric body portions that are different due to a division arrangement.

    METHOD FOR MANUFACTURING THERMAL BIMORPH DIAPHRAGM AND MEMS SPEAKER WITH THERMAL BIMORPHS
    134.
    发明申请
    METHOD FOR MANUFACTURING THERMAL BIMORPH DIAPHRAGM AND MEMS SPEAKER WITH THERMAL BIMORPHS 有权
    用热二极管制造热二极管膜和MEMS扬声器的方法

    公开(公告)号：US20170041719A1

    公开(公告)日：2017-02-09

    申请号：US15305089

    申请日：2014-08-26

    Applicant: GOERTEK INC.

    Inventor： Quanbo ZOU ,  Zhe WANG ,  Jifang TAO ,  Guanxun QIU

    IPC: H04R19/02 ,  B81C1/00 ,  B81B7/00 ,  H04R31/00

    CPC classification number: H04R19/02 ,  B81B7/008 ,  B81B2201/0257 ,  B81B2201/032 ,  B81B2203/0127 ,  B81B2207/012 ,  B81C1/00158 ,  B81C2201/0197 ,  H04R7/06 ,  H04R19/013 ,  H04R31/00 ,  H04R31/003 ,  H04R2201/003 ,  H04R2307/025 ,  H04R2307/027

    Abstract: The present invention provides a method for manufacturing a thermal bimorph diaphragm and a MEMS speaker with thermal bimorphs, wherein the method comprises the steps of: thermally oxidizing a substrate to obtain an insulating layer thereon and providing a metal layer on the insulating layer; providing a sacrificial layer on the metal layer; providing a first thermal bimorph layer on the sacrificial layer; providing a second thermal bimorph layer on the first thermal bimorph layer; providing a metal connecting layer at the positions on the metal layer where the sacrificial layer is not provided; forming corresponding back holes on the substrate and the insulating layer and releasing the sacrificial layer; forming the thermal bimorph diaphragm which is warped with the first thermal bimorph layer and the second thermal bimorph layer after the sacrificial layer is released.

    Abstract translation: 本发明提供了一种制造具有热双压电晶片的热双压电晶片和MEMS扬声器的方法，其中该方法包括以下步骤：对衬底进行热氧化以在其上获得绝缘层并在绝缘层上提供金属层; 在所述金属层上提供牺牲层; 在牺牲层上提供第一热双压电晶片; 在第一热双压电晶片层上提供第二热双压电晶片层; 在不设置牺牲层的金属层上的位置提供金属连接层; 在基板和绝缘层上形成相应的后孔并释放牺牲层; 在牺牲层被释放之后形成与第一热双压电晶片层和第二热双压电晶片层翘曲的热双压电晶片。

    DEVICE FOR TRANSFORMING AN OUT-OF-PLANE MOVEMENT INTO AN IN-PLANE MOVEMENT, AND/OR VICE-VERSA
    135.
    发明申请
    DEVICE FOR TRANSFORMING AN OUT-OF-PLANE MOVEMENT INTO AN IN-PLANE MOVEMENT, AND/OR VICE-VERSA 审中-公开
    将平面外移动转换成平面内运动和/或VICE-VERSA的装置

    公开(公告)号：US20160195893A1

    公开(公告)日：2016-07-07

    申请号：US14978965

    申请日：2015-12-22

    Applicant: Commissariat A L'Energie Atomique et aux Energies Alternatives

    Inventor： Thierry HILT

    IPC: G05G11/00 ,  H01L41/08

    CPC classification number: G05G11/00 ,  B81B3/0051 ,  B81B2201/032 ,  B81B2201/037 ,  B81B2203/051 ,  H01H1/0036 ,  H01H2001/0078 ,  H01L41/08

    Abstract: An actuator comprising two devices each comprising an out-of-plane deformable element, said deformable element comprising a first fixed end anchored on a substrate and a second free end relative to the substrate, said device also comprising means to guide the second free end in in-plane translation along a first direction, the first deformable element being capable of deforming out-of-plane through application of a stimulus so that the second free end draws close to the first fixed end following in-plane translational movement. The actuator also comprises an element mobile in rotation about an axis orthogonal to the plane and mechanically linked to the free ends of the deformable elements, and a translationally mobile element mechanically linked to the rotationally mobile element.

    Abstract translation: 一种致动器，包括两个装置，每个装置均包括一个面外可变形元件，所述可变形元件包括锚定在基板上的第一固定端和相对于基板的第二自由端，所述装置还包括将第二自由端引导到 沿着第一方向的平面内平移，第一可变形元件能够通过施加刺激而在平面外变形，使得第二自由端在平面内平移运动之后接近第一固定端。 所述致动器还包括可围绕垂直于所述平面的轴线旋转的元件，并机械地连接到所述可变形元件的自由端，以及与所述旋转移动元件机械连接的平移移动元件。

    MEMS DEVICE
    136.
    发明申请
    MEMS DEVICE 审中-公开
    MEMS器件

    公开(公告)号：US20160062076A1

    公开(公告)日：2016-03-03

    申请号：US14784802

    申请日：2014-04-21

    Applicant: LG INNOTEK CO. LTD.

    Inventor： Yong Jun KO ,  Sang Won SEO ,  Jeong Gi SEO ,  Chul KIM ,  Don Han JUN ,  Wan Seop CHOI

    IPC: G02B7/09 ,  B81B7/02 ,  H02N1/00 ,  G02B7/02

    CPC classification number: G02B7/09 ,  B81B3/0024 ,  B81B7/02 ,  B81B2201/032 ,  B81B2201/047 ,  B81B2203/0163 ,  B81B2203/053 ,  G02B7/028 ,  G02B7/08 ,  G03B3/10 ,  H02N1/006

    Abstract: The disclosure provides a MEMS device including: a fixed substrate having a cavity; a driving unit disposed in the cavity and floating above the fixed substrate; and an elastic unit for physically connecting the fixed substrate with the driving unit and varying the height of the driving unit according to a control current, wherein the elastic unit includes a bimorph driving unit connected to the fixed substrate and bent according to the control current, a spring connected to the driving unit, and a frame connecting the bimorph driving unit to the spring. Therefore, in order to overcome the limitations according to the power consumption and the size-reduction due to a coil and a magnet, the MEMS device drives one lens and thus can reduce the power consumption and the size thereof. Further, the MEMS device applies a thermal scheme which performs an automatic focusing function through vertical operation of a lens by a thermal expansion difference of different materials, thereby simplifying the structure thereof and reducing the cost.

    Abstract translation: 本公开提供了一种MEMS器件，包括：具有空腔的固定衬底; 驱动单元，设置在所述空腔中，并且浮置在所述固定基板上; 以及用于将固定基板与驱动单元物理连接并根据控制电流改变驱动单元的高度的弹性单元，其中弹性单元包括连接到固定基板并根据控制电流弯曲的双压电晶片驱动单元， 连接到驱动单元的弹簧和将双压电晶片驱动单元连接到弹簧的框架。 因此，为了克服根据功率消耗和由于线圈和磁体引起的尺寸减小的限制，MEMS器件驱动一个透镜，从而可以降低功耗及其尺寸。 此外，MEMS器件通过不同材料的热膨胀差来应用通过透镜的垂直操作来执行自动聚焦功能的热方案，从而简化其结构并降低成本。

    DEVICE AND METHOD FOR GENERATING A SECOND TEMPERATURE VARIATION FROM A FIRST TEMPERATURE VARIATION
    138.
    发明申请
    DEVICE AND METHOD FOR GENERATING A SECOND TEMPERATURE VARIATION FROM A FIRST TEMPERATURE VARIATION 有权
    从第一温度变化产生第二温度变化的装置和方法

    公开(公告)号：US20140295365A1

    公开(公告)日：2014-10-02

    申请号：US14362285

    申请日：2012-11-29

    Applicant: Commissariat à I'énergie atomique et aux énergies alternatives

    Inventor： Fabrice Casset

    IPC: F24J3/00

    CPC classification number: F24V99/00 ,  B81B3/0024 ,  B81B3/0081 ,  B81B2201/0271 ,  B81B2201/031 ,  B81B2201/032 ,  F03G7/06 ,  H01L41/1136 ,  H02N2/18

    Abstract: A device for generating a second temperature variation ΔT2 from a first use temperature variation ΔT1, includes an elastocaloric material layer, having an internal temperature which is able to vary by ΔT2 in response to a given mechanical stress variation Δσ applied to the elastocaloric material layer. The variation Δσ being induced by the first use temperature variation ΔT1 There is a suspended element in mechanical contact with the elastocaloric material layer so as to apply to this layer a mechanical stress that varies in response to the use temperature variation ΔT1. The suspended element is arranged so as to make the mechanical stress applied to the elastocaloric material layer vary by Δσ in response to the temperature variation ΔT1 to generate the second temperature variation ΔT2.

    Abstract translation: 用于从第一使用温度变化＆Dgr; T1产生第二温度变化＆gt; T2的装置包括弹性体材料层，其具有响应于给定的机械应力变化＆Dgr能够变化为＆Dgr; T2的内部温度; ＆sgr 应用于弹性材料层。 变化与变化 由第一使用温度变化引起的; Dgr; T1具有与弹性体材料层机械接触的悬浮元件，以便向该层施加响应于使用温度变化＆Dgr; T1变化的机械应力。 悬挂元件布置成使得施加到弹性材料层的机械应力变化为＆Dgr; 响应于温度变化＆Dgr; T1以产生第二温度变化＆Dgr; T2。

    TUNABLE AND SWITCHABLE RESONATOR AND FILTER STRUCTURES IN SINGLE CRYSTAL PIEZOELECTRIC MEMS DEVICES USING BIMORPHS
    139.
    发明申请
    TUNABLE AND SWITCHABLE RESONATOR AND FILTER STRUCTURES IN SINGLE CRYSTAL PIEZOELECTRIC MEMS DEVICES USING BIMORPHS 有权
    单晶压电谐振器和滤波器结构在单晶压电MEMS器件中的应用

    公开(公告)号：US20140125431A1

    公开(公告)日：2014-05-08

    申请号：US14071173

    申请日：2013-11-04

    Applicant: RF Micro Devices, Inc.

    Inventor： Kushal Bhattacharjee

    IPC: H01L41/09 ,  H01G5/18 ,  B81B7/02 ,  H03H9/46

    CPC classification number: H01G5/18 ,  B81B3/0086 ,  B81B2201/018 ,  B81B2201/0271 ,  B81B2201/032 ,  H03H9/02275 ,  H03H9/02409 ,  H03H9/2405 ,  H03H9/2463 ,  H03H9/462 ,  H03H9/467 ,  H03H2009/241

    Abstract: A MEMS device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors. Notably, the piezoelectric layer is a bimorph including a first bimorph layer and a second bimorph layer. A first electrode may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrode is in contact with the first bimorph layer of the piezoelectric layer. A second electrode may be provided on a second surface of the piezoelectric layer opposite the substrate, such that the second electrode is in contact with the second bimorph layer of the piezoelectric layer. The second electrode may include a first conducting section and a second conducting section, which are inter-digitally dispersed on the second surface.

    Abstract translation: MEMS器件包括衬底，形成在衬底的第一表面上的一个或多个锚固体和通过一个或多个锚固件悬挂在衬底的第一表面上的压电层。 值得注意的是，压电层是包括第一双晶片层和第二双晶片层的双晶片。 第一电极可以设置在面对基板的第一表面的压电层的第一表面上，使得第一电极与压电层的第一双压电晶片层接触。 第二电极可以设置在与衬底相对的压电层的第二表面上，使得第二电极与压电层的第二双压电晶片层接触。 第二电极可以包括第一导电部分和第二导电部分，其在数字上分散在第二表面上。

    ELECTROMECHANICAL TRANSDUCER
    140.
    发明申请
    ELECTROMECHANICAL TRANSDUCER 有权
    机电传感器

    公开(公告)号：US20130063530A1

    公开(公告)日：2013-03-14

    申请号：US13697994

    申请日：2011-04-27

    Applicant: Kusunoki Higashino ,  Shinya Matsuda

    Inventor： Kusunoki Higashino ,  Shinya Matsuda

    IPC: B41J2/045 ,  H01L41/09

    CPC classification number: H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0127 ,  H01L41/0475

    Abstract: An electromechanical transducer (1) has a pressurizing chamber (21) and a side-chamber (23) formed in a plate (11). On a driven film (13) forming the upper wall surface (21a) of the pressurizing chamber (21) and the side-chamber (23), a lower electrode (33), a driving member, and an upper electrode (35) are formed in this order. The driving member is composed of an operation section (31p) located over the pressurizing chamber (21), and an extended section (31a) extending from the operation section (31p) to over the side-chamber (23). The side-chamber (23) has a smaller width than the pressurizing chamber (21) in a second direction perpendicular to a first direction in which the side-chamber (23) is located beside the pressurizing chamber (21). The extended section (31a) of the driving member has a smaller width than the side-chamber (23) in the second direction.

    Abstract translation: 机电换能器（1）具有形成在板（11）中的加压室（21）和侧室（23）。 在形成加压室（21）的上壁面（21a）和侧室（23）的从动膜（13）上，下电极（33），驱动部件和上电极（35） 按此顺序形成。 驱动部件由位于加压室（21）的上方的操作部（31p）和从操作部（31p）延伸到侧室（23）的延伸部（31a）构成。 侧室（23）在垂直于侧室（23）位于加压室（21）旁边的第一方向的第二方向上具有比加压室（21）更小的宽度。 驱动构件的延伸部（31a）在第二方向上具有比侧室（23）更小的宽度。

Patent Agency Ranking