公开(公告)号：US20080100301A1

公开(公告)日：2008-05-01

申请号：US11588109

申请日：2006-10-26

Applicant: Richard A. Knott

Inventor： Richard A. Knott

IPC: G01L21/30

CPC classification number: H01J41/04 ,  Y10T29/49002

Abstract: Shields for feedthrough pin insulators of a hot cathode ionization gauge are provided to increase the operational lifetime of the ionization gauge in harmful process environments. Various shield materials, designs, and configurations may be employed depending on the gauge design and other factors. In one embodiment, the shields may include apertures through which to insert feedthrough pins and spacers to provide an optimal distance between the shields and the feedthrough pin insulators before the shields are attached to the gauge. The shields may further include tabs used to attach the shields to components of the gauge, such as the gauge's feedthrough pins. Through use of example embodiments of the insulator shields, the life of the ionization gauge is extended by preventing gaseous products from a process in a vacuum chamber or material sputtered from the ionization gauge from depositing on the feedthrough pin insulators and causing electrical leakage from the gauge's electrodes.

Abstract translation: 提供了用于热阴极电离计的馈通针绝缘子的屏蔽，以增加电离计在有害工艺环境中的使用寿命。 根据仪表设计和其他因素，可以采用各种屏蔽材料，设计和构造。 在一个实施例中，屏蔽件可以包括孔，通过该孔可插入馈通引脚和间隔件，以在屏蔽件附接到量规之前在屏蔽件和馈通销绝缘体之间提供最佳距离。 屏蔽件还可以包括用于将屏蔽件附接到量规的部件的突出部，例如量规的馈通引脚。 通过使用绝缘体屏蔽的示例性实施例，电离计的寿命通过防止来自真空室中的过程的气体产物或从电离计溅出的材料沉积在馈通销绝缘体上并导致来自量规的电泄漏 电极。

公开(公告)号：US07352187B2

公开(公告)日：2008-04-01

申请号：US11389007

申请日：2006-03-27

Applicant: Wolfram Knapp ,  Martin Wuest

Inventor： Wolfram Knapp ,  Martin Wuest

IPC: G01L21/30 ,  G01N27/62

CPC classification number: G01L21/32 ,  G01L21/12 ,  H01J1/3042 ,  H01J41/04

Abstract: An electron-emitting cathode consists of an electrically conducting emitter layer attached to a side wall which consists of stainless steel and a gate which is fixed at a mall distance inside a concave emitter surface of the emitter layer. The cathode surrounds a reaction area containing a cylindrical grid-like anode and a central ion collector which consists of a straight axial filament. An ion collector current reflecting the density of the gas in the reaction region is measured by a current meter while a gate voltage is kept between the ground voltage of the emitter layer and a higher anode voltage and is regulated in such a way that an anode current is kept constant. The emitter layer may consists of carbon nanotubes, diamond-like carbon, a metal or a mixture of metals or a semiconductor material, e.g., silicon which may be coated, e.g., with carbide or molybdenum. The emitter surface can, however, also be a portion of the inside surface of the side wall roughened by, e.g., chemical etching. The gate may be a grid or it may be made up of patches of metal film covering spacers distributed over the emitter area or a metal film covering an electron permeable layer placed on the emitter surface.

Abstract translation: 电子发射阴极由连接到侧壁的导电发射极层组成，该侧壁由不锈钢和在发射极层的凹面发射器表面内的商场距离处固定的栅极组成。 阴极围绕包含圆柱形网状阳极和中心离子收集器的反应区域，其由直轴向丝线组成。 通过电流计测量反映反应区域中气体密度的离子集电极电流，同时将栅极电压保持在发射极层的接地电压和较高的阳极电压之间，并以这样的方式进行调节，使得阳极电流 保持不变。 发射极层可由碳纳米管，类金刚石碳，金属或金属或半导体材料的混合物组成，例如可以用碳化物或钼涂覆的硅。 然而，发射体表面也可以是通过例如化学蚀刻使侧壁的内表面的一部分变粗糙。 栅极可以是栅格，或者它可以由分布在发射极区域上的覆盖间隔的金属膜的贴片或覆盖放置在发射器表面上的电子渗透层的金属膜构成。

公开(公告)号：US07295015B2

公开(公告)日：2007-11-13

申请号：US11354278

申请日：2006-02-14

Applicant: Paul C. Arnold ,  Paul M. Rutt

Inventor： Paul C. Arnold ,  Paul M. Rutt

IPC: G01L21/30 ,  G01N27/62

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and decelerates and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) are be located within the anode volume. The ionization gauge can be a Bayard-Alpert type that measures pressure.

Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积的阳极，并且将电子减速并保持在阳极的区域中。 电离计可以具有多个电子源和/或集电极。 集电极位于阳极容积内。 电离计可以是衡量压力的Bayard-Alpert型。

公开(公告)号：US20060197537A1

公开(公告)日：2006-09-07

申请号：US11354278

申请日：2006-02-14

Applicant: Paul Arnold ,  Paul Rutt

Inventor： Paul Arnold ,  Paul Rutt

IPC: G01N27/62

CPC classification number: H01J41/04 ,  G01L21/32

Abstract: An ionization gauge for isolating an electron source from gas molecules includes the electron source for generating electrons, a collector electrode for collecting ions formed by the impact between the electrons and gas molecules, and an electron window which isolates the electron source from the gas molecules. The ionization gauge can have an anode which defines an anode volume and decelerates and retains the electrons in a region of the anode. The ionization gauge can have a plurality of electron sources and/or collector electrodes. The collector electrode(s) are be located within the anode volume. The ionization gauge can be a Bayard-Alpert type that measures pressure.

Abstract translation: 用于从气体分子中分离电子源的电离计包括用于产生电子的电子源，用于收集由电子和气体分子之间的冲击形成的离子的集电极，以及将电子源与气体分子隔离的电子窗口。 电离计可以具有限定阳极体积的阳极，并且将电子减速并保持在阳极的区域中。 电离计可以具有多个电子源和/或集电极。 集电极位于阳极容积内。 电离计可以是衡量压力的Bayard-Alpert型。

公开(公告)号：US5373240A

公开(公告)日：1994-12-13

申请号：US189914

申请日：1994-02-01

Applicant: Haas Guenter

Inventor： Haas Guenter

IPC: G01L21/30 ,  G01L21/32 ,  H01J41/04

CPC classification number: G01L21/32 ,  H01J41/04

Abstract: A hot cathode ionization pressure gauge with the following electrodes, arged at a distance from one another in the specified sequence along an axis:a) a thermionic cathode filament which has a central active part and lateral support parts;b) an essentially flat, diaphragm-like control electrode,c) an essentially flat apertured acceleration electrode andd) an essentially flat ion collector electrode,and with a base plate on which the control electrode, the acceleration electrode and ion collector electrode are mounted, in each case via support means running at right angles to the main part of the relevant electrode and via a support bolt connected to the support means.

Abstract translation: 一种具有以下电极的热阴极电离压力计，沿着一个轴线以规定的顺序彼此间隔一定距离：a）具有中心活性部分和侧向支撑部分的热离子阴极细丝; b）基本上平坦的隔膜状控制电极，c）基本上平坦的有孔加速电极，以及d）基本上平坦的离子集电极电极，以及其上安装有控制电极，加速电极和离子集电极的基板 在每种情况下都经由与相关电极的主要部分成直角运行的支撑装置，并且经由连接到支撑装置的支撑螺栓。

公开(公告)号：US4093913A

公开(公告)日：1978-06-06

申请号：US670512

申请日：1976-03-24

Applicant: Charles D. O'Neal, III

Inventor： Charles D. O'Neal, III

IPC: H01J41/04 ,  G01N27/00

CPC classification number: H01J41/04

Abstract: A triode ionization gauge controller employing logarithmic amplifiers develops a signal proportional to the logarithm of the ratio of an ion current to the ionizing current. Gaseous thermal conductivity is employed to reduce emission current at high pressure, thereby prolonging the life of the cathode. Complete over-pressure protection is accomplished by comparing emission current with respect to a predetermined limiting current.

Abstract translation: 使用对数放大器的三极管电离计控制器产生与离子电流与电离电流的比率的对数成比例的信号。 采用气体热导率来降低高压下的发射电流，从而延长阴极的使用寿命。 通过将发射电流相对于预定极限电流进行比较来实现完全的过压保护。

公开(公告)号：US3760212A

公开(公告)日：1973-09-18

申请号：US3760212D

申请日：1971-10-26

Applicant: BALZERS PATENT BETEILIG AG

Inventor： MENNEGA H

IPC: H01J41/04 ,  G01T1/18 ,  G01N27/00

CPC classification number: H01J41/04

Abstract: An ionization pressure gauge tube is designed as a triode including an electron-emitting hot cathode, an electronaccelerating electrode and an ion collector arranged between the cathode and the accelerating electrode. The cathode, accelerating electrode and collector have dimensions and a relative arrangement such that the triode system has a transconductance of 0.25 to 1.00. The accelerating electrode is designed as a cylinder and the ion collector is designed as a system of 3 to 5 rods extending parallel to the axis of the tube and arranged symmetrically around the cathode. The cylindrical accelerating electrode has a diameter of from 8 to 16 mm.

Abstract translation: 电离压力表管被设计为三极管，其包括布置在阴极和加速电极之间的电子发射热阴极，电子加速电极和离子收集器。 阴极，加速电极和集电器具有尺寸和相对布置，使得三极管系统的跨导为0.25至1.00。 加速电极设计为圆柱体，离子收集器设计为平行于管轴线延伸的3至5个棒的系统，并且围绕阴极对称地布置。 圆筒状加速电极的直径为8〜16mm。

公开(公告)号：US3731094A

公开(公告)日：1973-05-01

申请号：US17304571

申请日：1971-08-19

Applicant: PHILIPS CORP

Inventor： LE POOLE J

IPC: G01Q30/02 ,  H01J29/56 ,  H01J37/04 ,  H01J37/063 ,  H01J37/067 ,  H01J37/145 ,  H01J37/153 ,  H01J41/04 ,  H01J37/26

CPC classification number: H01J37/04 ,  H01J29/56 ,  H01J37/063 ,  H01J37/067 ,  H01J37/145 ,  H01J37/153 ,  H01J41/04

Abstract: An apparatus for generating an electrostatic space charge in a rotation-symmetrical magnetic field, in which an electron beam from an electron gun which is arranged laterally on the field space generates the space charge in the field space. The electron beam may be adjusted by mechanical adjustment of the gun and also by means of the potential of a conducting sleeve in the magnetic field. By means of this potential, it is also possible to adjust the ratio between the contributions to the space charge which are due to primary electrons and to secondary electrons produced by the primary electrons in a residual gas in the field space.

Abstract translation: 一种用于在旋转对称磁场中产生静电空间电荷的装置，其中来自电子枪的电子束横向设置在场空间上，在场空间中产生空间电荷。 电子束可以通过枪的机械调节以及通过导磁套在磁场中的电位来调节。 通过这种电位，还可以调整由于一次电子引起的空间电荷的贡献与在场空间中残留气体中的一次电子产生的二次电子之间的比率。

公开(公告)号：US3573523A

公开(公告)日：1971-04-06

申请号：US3573523D

申请日：1968-08-28

Applicant: LEYBOLD HERAEUS VERWALTUNG

Inventor： REICH GUNTHER ,  NOLLER HANS-GEORG ,  SCHULZ WOLFDIETRICH

IPC: H01J41/04 ,  H01J41/14 ,  G01N27/62 ,  H01J41/00

CPC classification number: H01J41/14 ,  H01J41/04

Abstract: A heat protective electrode positioned between a hot cathode ion source having an ionization chamber and an associated electrode system having an ion collector. The heat protective electrode is connected to a flangelike supporting member which supports the housing in which the electrode system is contained.

公开(公告)号：US3394286A

公开(公告)日：1968-07-23

申请号：US45940765

申请日：1965-05-27

Applicant: NAT RES CORP

Inventor： BROCK FRANK J

IPC: H01J41/04

CPC classification number: H01J41/04