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    Micromechanical component and corresponing production method
    154.
    发明申请
    Micromechanical component and corresponing production method 失效
    微机械部件和对应生产方法

    公开(公告)号：US20030116813A1

    公开(公告)日：2003-06-26

    申请号：US10169464

    申请日：2002-10-28

    Inventor： Hubert Benzel ,  Heribert Weber ,  Hans Artmann ,  Frank Schaefer

    IPC: H01L021/00 ,  H01L027/14 ,  H01L029/84

    CPC classification number: B81C1/00595 ,  B81B2201/0235 ,  B81B2201/036 ,  B81C2201/0114 ,  B81C2201/0115 ,  B81C2201/0136 ,  B81C2203/0136

    Abstract: A micromechanical component having a substrate (10) made from a substrate material having a first doping type (p), a micromechanical functional structure provided in the substrate (10) and a cover layer to at least partially cover the micromechanical functional structure. The micromechanical functional structure has zones (15; 15a; 15b; 15c; 730; 740; 830) made from the substrate material having a second doping type (n), the zones being at least partially surrounded by a cavity (50; 50e-f), and the cover layer has a porous layer (30) made from the substrate material.

    Abstract translation: 一种具有由具有第一掺杂型（p）的衬底材料制成的衬底（10）的微机械部件，以及设置在衬底（10）中的微机械功能结构和覆盖层，以至少部分地覆盖微机械功能结构。 所述微机械功能结构具有由具有第二掺杂型（n）的所述衬底材料制成的区域（15; 15a; 15b; 15c; 730; 740; 830），所述区域至少部分地被空腔（50; 50e- f），并且覆盖层具有由基板材料制成的多孔层（30）。

    Micropump with valve structure
    158.
    发明授权
    Micropump with valve structure 失效
    微型阀门结构

    公开(公告)号：US5259737A

    公开(公告)日：1993-11-09

    申请号：US724697

    申请日：1991-07-02

    Applicant: Shinichi Kamisuki ,  Yasuto Nose ,  Nobuo Shimizu ,  Shinichi Yotsuya

    Inventor： Shinichi Kamisuki ,  Yasuto Nose ,  Nobuo Shimizu ,  Shinichi Yotsuya

    IPC: B81B3/00 ,  F04B43/04 ,  F04B53/10 ,  H01L21/308 ,  F04B35/04

    CPC classification number: B81B3/0005 ,  F04B43/046 ,  F04B53/102 ,  H01L21/3083 ,  B81B2201/036 ,  B81B2201/054 ,  B81B2203/0127

    Abstract: A micropump for pumping liquid from an entry channel to an exit channel is disclosed. The micropump is formed in a semiconductor substrate sealed by two glass substrates. The micropump includes first and second chambers and flow channel means coupled between the two chambers. The micropump also includes a valve coupled between the entry channel and the first chamber. The valve includes a flexible valve membrane positioned closer to a second side of the semiconductor substrate than to its first side for causing the valve to be or not to be in contact with the second side of the semiconductor substrate for closing or opening the valve on the glass substrate. Additionally, the micropump includes a diaphragm forming part of a flexible wall of the second chamber and positioned closer to the second side of the semiconductor substrate than to its first side. The diaphragm is responsive to external pressure for causing liquid to be pumped from the entry channel to the exit channel. Thus, the height of the valve is reduced, preventing deformation due to strength such as its own weight and may impact due to a dropping. As a result, the valve sealing is improve on the glass substrate. Therefore, the micropump can accurately discharge a small quantity of liquid.

    Abstract translation: 公开了一种用于将液体从进入通道泵送到出口通道的微型泵。 微型泵形成在由两块玻璃基板密封的半导体基板中。 微型泵包括连接在两个室之间的第一和第二室和流动通道装置。 微型泵还包括连接在入口通道和第一室之间的阀。 阀包括位于比半导体衬底的第二侧更靠近第一侧的柔性阀膜，用于使阀与半导体衬底的第二侧接触或不与第二侧接触，以关闭或打开阀 玻璃基板。 此外，微型泵包括形成第二室的柔性壁的一部分并且比其第一侧更靠近半导体衬底的第二侧的膜片。 隔膜响应于外部压力，以使液体从入口通道泵送到出口通道。 因此，阀的高度减小，防止由于其自身重量等强度而引起的变形，并且可能由于跌落而撞击。 结果，玻璃基板上的阀密封得到改善。 因此，微型泵可以精确地排出少量的液体。

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