DILUTION TOOL AND METHOD
    171.
    发明专利

    公开(公告)号:JPH1119871A

    公开(公告)日:1999-01-26

    申请号:JP19983298

    申请日:1998-06-30

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To provide a dilution tool and method reducing vaporization of volatile gas and preventing a hazard exposing a person in the vicinity in hazardous chemicals. SOLUTION: In a dilution tool 100 and a method, in order to remove residue from a semiconductor wafer, a solution is prepared with two fluids. The fluid, for forming the desired solution, is combined in a filter 130. A seal-less pump 141, 142 is driven by a common motor 143, even when a flow amount of the solution is changed, the fluid is pumped out by fixing ratio of each flow amount. Conductivity of the solution, for determining concentration, is measured by a conductivity meter 166.

    FORMATION OF SEMICONDUCTOR DEVICE
    173.
    发明专利

    公开(公告)号:JPH1116877A

    公开(公告)日:1999-01-22

    申请号:JP17965998

    申请日:1998-06-10

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To realize a long life of a pad, rapid polishing velocity and improvement of velocity stability by executing conditioning of a polishing pad in a field before polishing is finished while a board is on a pad. SOLUTION: In the embodiment, field conditioning is finished before a polishing process is finished; however, conditioning of a polishing pad 22 by using a conditioner 29 is started about one minute before a board 27 attains the pad 22. After one minute passed, conditioning is executed while a semiconductor element board 27 with an insulation layer is polished. After about one and a half minutes, conditioning is finished and polishing is further continued for about one minute. Since both a second conditioning arm and a second conditioner can be used, polishing function can be enlarged and conditioning is possible outside a site.

    MULTIMODES COMMUNICATION DEVICE AND METHOD FOR OPERATING MULTI-MODE COMMUNICATION DEVICE

    公开(公告)号:JPH10336757A

    公开(公告)日:1998-12-18

    申请号:JP14053098

    申请日:1998-05-07

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To provide a method and a communication device for a multi-mode communication with multiple autonomous communication systems. SOLUTION: This method and a communication device 102 enable a multi- mode communication with multiple autonomous communication systems that store the first communication system 104 and the second communication system 106. Resources are dedicated to communication with regard to each communication system. In order to minimize product costs, resources, whenever possible, are shared among communications at each mode. In other cases, it is also possible for a system supervisor installed in the communication device to prioritize, to plan and to control communication between this communication device and the autonomous communication system.

    CLOCK SIGNAL GENERATING METHOD AND CLOCK GENERATOR

    公开(公告)号:JPH10308731A

    公开(公告)日:1998-11-17

    申请号:JP12176897

    申请日:1997-04-24

    Abstract: PROBLEM TO BE SOLVED: To generate a clock signal synchronized with receiving data at a high speed in a data receiver. SOLUTION: This method generates a clock signal SCLK substantially synchronized with receiving data which is used in a data receiver 6. Receiving data is provided with a synchronous word that has a prescribed frequency ftx and a prescribed value. This method generates n clocks (CLK1 to 8) which virtually has a frequency fclk of the prescribed data frequency ftx and also whose phase is deviated by 1/n clock cycle from an adjacent clock (A), uses each of n clocks, samples the synchronous word and also decides which one optimally synchronizes with the synchronous word among n clocks (B) and is also provided with each stage that offers a prescribed one among n clocks which offers the clock signal SCLK to an output 18 (C).

    FORMATION OF HETERO-JUNCTION SEMICONDUCTOR DEVICE HAVING STRAINED LAYER

    公开(公告)号:JPH10308513A

    公开(公告)日:1998-11-17

    申请号:JP11147798

    申请日:1998-04-07

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To form the hetero-junction having the expanded layer formed on a relaxation layer at the low-level defects by forming the first semiconductor layer having the first lattice constant on the substrate constituted of the material having the second lattice constant that is different from the first lattice constant. SOLUTION: A device 10 is a hetero-junction semiconductor device and has a semiconductor substrate 11, a relaxation semiconductor layer 12 formed on the substrate 11 and an expanding semiconductor layer 14 formed on the relaxation layer 12. The substrate 11 and the expanding semiconductor layer 14 are composed of the material having the lattice constant different from that of the relaxation semiconductor layer 12. Ideally, the substrate 11 is composed of silicon, the relaxation layer 12 is composed of Si1-x Gex and the expanding layer 14 is composed of silicon. The device 10 has a source region 16, a drain region 17, a gate dielectric layer 18 formed on the expanding layer 14, a source electrode 21, a gate electrode 22 and a drain electrode 23. The gate dielectric layer 18 and the gate electrode 22 form the gate control structure together. These elements of the device 10 are formed by using the conventional technology.

    LONG-WAVELENGTH VCSEL
    178.
    发明专利

    公开(公告)号:JPH10303515A

    公开(公告)日:1998-11-13

    申请号:JP12680998

    申请日:1998-04-21

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To provide a long-wavelength vertical cavity surface emitting laser(VCSEL) whose reliability is high. SOLUTION: A VCSEL which emits long-wavelength light is provided with an active structure 23 sandwiched between a GaAs (111) substrate element 12, a first mirror stack 14 which is composed of a GaAs/AlGaAs substance-based mirror pair and whose latticle is made to agree with a GaInAsN active region 2, a first cladding region 24 adjacent to the first mirror stack 14 and a second cladding region 25. The active structure 23 contains a GaInAsN active region 20 containing quantum wells 35, 36, 37 using a nitride as a base, and a second mirror stack 26 whose lattice is made to agree with the second cladding region 25 and which comprises a GaAs/AlGaAs substance-based mirror pair.

    METHOD FOR INSPECTING SEMICONDUCTOR COMPONENT BY AUTOMATIC MEASUREMENT OF PROBE TIP PARAMETER

    公开(公告)号:JPH10303260A

    公开(公告)日:1998-11-13

    申请号:JP12680898

    申请日:1998-04-21

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To provide an inspecting method for integrating the measurement and the inspection of a probe tip parameter in a production flow. SOLUTION: A measurement device of a parameter of a probe tip 20 is integrated on a chuck 24 of a probe inspection station 10, namely, on a substrate holder. The force of the probe tip on the single probe pin of a probe card 18, plural probe pins or all probe pins can simultaneously be measured. Data on a real time basis on a probe process is obtained by the integration of the measurement of the parameter at the probe tip such as probe tip force. Then, feedback between the excess driving of the measured probe tip parameter and the probe chuck in a vertical direction is realized. Inspection is integrated by periodically inspecting the parameter of the probe tip in the test of a die on a wafer 22.

    METHOD FOR FETCHING AND ISSUING DUAL WORD OR PLURAL INSTRUCTION AND DEVICE THEREFOR

    公开(公告)号:JPH10301779A

    公开(公告)日:1998-11-13

    申请号:JP12005598

    申请日:1998-04-14

    Applicant: MOTOROLA INC

    Abstract: PROBLEM TO BE SOLVED: To fetch single and double word instructions, and to issue two single word instructions to be simultaneously executed in a simple constitution. SOLUTION: An instruction fetch and issue unit 200 fetches two instruction words, and issues at least one instruction word to an instruction decoder 250 in each clock cycle. Two multiplexes 220 and 230 receive the two fetched instructions, and one or both of two words among three words are stored in an instruction register 240. A controller 210 selectively controls the load of the three words among from the inputs of the multiplexers 220 and 230 to the instruction register 240 according to a state figure (207-209). The instruction register 240 issues two instructions at most in each clock cycle without requesting any stall, and efficiently issues double word instructions or parallel two instructions.

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