公开(公告)号：KR1020130049747A

公开(公告)日：2013-05-14

申请号：KR1020120123696

申请日：2012-11-02

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 나까하라다마사히로 ,  사까따요지 ,  미야따아끼라 ,  하야시신이찌 ,  에노끼다스구루 ,  나까시마쯔네나가

IPC: H01L21/02

CPC classification number: H01L21/67046 ,  H01L21/67173 ,  H01L21/67178 ,  H01L21/6719 ,  H01L21/67213 ,  H01L21/67253 ,  H01L21/67748 ,  H01L21/6875

Abstract: PURPOSE: A substrate processing system, a substrate transferring method, and a computer storage medium are provided to reduce a footprint by decreasing the number of wafer transferring processes. CONSTITUTION: A wafer cleaning unit(141) cleans the rear of a wafer before the wafer is inputted. A wafer inspecting unit(142) inspects whether to expose the wafer before the wafer is inputted to an exposing device. A transferring device(143) transfers the wafer. The wafer cleaning unit and the wafer inspecting unit are formed on the front of an interface station.

Abstract translation: 目的：提供基板处理系统，基板转印方法和计算机存储介质，通过减少晶片转印工艺的数量来减少占用面积。 构成：在晶片输入之前，晶片清洁单元（141）清洁晶片的后部。 晶片检查单元（142）在将晶片输入到曝光装置之前检查是否暴露晶片。 传送装置（143）传送晶片。 晶片清洁单元和晶片检查单元形成在界面站的前面。

公开(公告)号：KR1020130032274A

公开(公告)日：2013-04-01

申请号：KR1020120105203

申请日：2012-09-21

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 에노끼다스구루 ,  나까하라다마사히로 ,  기야마히데까즈 ,  이이다나루아끼 ,  미야따아끼라

IPC: H01L21/677 ,  B65G49/07 ,  B25J9/16 ,  G06F19/00

CPC classification number: H01L21/67766 ,  H01L21/67155 ,  H01L21/67178 ,  H01L21/67769 ,  H01L21/68707

Abstract: PURPOSE: A substrate processing system, a substrate processing method for the same and a computer storage medium thereof are provided to easily change a configuration by installing a transport block closely to a wafer transferring apparatus. CONSTITUTION: A process station(3) installs processing units in the upper and the lower direction. A cassette mounting table(12) loads a cassette for accommodating wafers. A wafer transfer device(21) is arranged between the process station and the cassette mounting table. A transport block(22) installs transfer units in multi-stages. The wafer transfer device includes a first transfer arm and a second transfer arm.

Abstract translation: 目的：提供一种基板处理系统及其基板处理方法及其计算机存储介质，以通过将传送块紧密地安装在晶片传送装置上来容易地改变构造。 规定：处理站（3）在上下方向安装处理单元。 盒式安装台（12）装载用于容纳晶片的盒。 晶片转移装置（21）设置在处理站和盒安装台之间。 运输箱（22）以多级安装运输单元。 晶片传送装置包括第一传送臂和第二传送臂。