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公开(公告)号：KR1020050074768A
公开(公告)日：2005-07-19
申请号：KR1020040002657
申请日：2004-01-14
Applicant: 삼성전자주식회사
IPC: G02F1/13
CPC classification number: G09G3/006 , G06T7/0004 , G09G3/20 , G09G3/36 , Y10S345/904
Abstract: 본 발명은 평판 디스플레이(FPD) 검사방법에 관한 것으로서, 평판 디스플레이에 영상신호를 인가하고 촬영 장치를 통해 상기 평판 디스플레이의 영상을 획득하는 단계와, 획득된 상기 평판 디스플레이의 영상으로부터 위치별 원본밝기정보를 산출하는 단계와, 상기 원본밝기정보를 기초로 곡선접합(curve fitting)에 따라 위치별 접합밝기정보를 산출하는 단계와, 상기 원본밝기정보와 상기 접합밝기정보의 밝기차를 위치별로 산출하는 단계와, 소정 허용범위 이상의 상기 원본밝기정보와 상기 접합밝기정보의 밝기차를 갖는 얼룩위치를 검출하는 단계를 포함하는 것을 특징으로 한다. 이에 의해 평판 디스플레이의 영역형 얼룩을 신속하고 정밀하게 검사할 수 있다.
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公开(公告)号：KR100487148B1
公开(公告)日：2005-05-04
申请号：KR1020010058081
申请日：2001-09-19
Applicant: 삼성전자주식회사
IPC: G03B42/02
CPC classification number: G01N23/046 , G01N2223/419
Abstract: 본 발명은 엑스선 영상으로부터 3차원 영상을 얻고자 하는 엑스선 촬영장치의 단층영상 복원방법에 관한 것으로, 피검사물의 모델정보를 획득하고, 피검사물의 투과영상을 획득하며, 투과영상에서 상기 모델정보에 의해 단층영상을 복원하고 표시함으로써, 단층영상을 얻는 처리속도를 향상시킬 수 있을 뿐만 아니라 영상처리시의 정밀도를 향상시킬 수 있으며, 피검사물의 모델정보를 미리 획득함에 따라 투과영상만을 촬영하는 엑스선촬영장치에서도 피검사물의 단층영상을 빠른 속도로 양호하게 얻을 수 있다.
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公开(公告)号：KR1020050011370A
公开(公告)日：2005-01-29
申请号：KR1020030050449
申请日：2003-07-23
Applicant: 삼성전자주식회사
IPC: G02F1/13
CPC classification number: G01N21/8806 , G01N2021/9513 , G02F1/1309
Abstract: PURPOSE: A panel inspection device is provided to rotatively support cameras which take photographs of a panel to inspect, thereby reducing the number of cameras required for the inspection. CONSTITUTION: A panel inspection device includes a panel supporting die for supporting a display panel, and a plurality of cameras apart from by the panel supporting die with a predetermined distance for taking photographs of the display panel supported by the panel supporting die. At least one of the cameras is rotatively supported by a camera supporting part(20). The camera supporting part has a driving part(21) for driving one camera(7) of the cameras to rotate, wherein the camera is provided to an acute angle with respect to the panel. The camera supporting part has a first bracket(25) provided between the driving part and the other camera(5) for supporting the other camera, and a second bracket(27) provided between the driving part and the one camera for supporting the one camera.
Abstract translation: 目的：提供一种面板检查装置，用于旋转支撑照相机，照相机拍摄照片进行检查，从而减少检查所需的照相机数量。 构成：面板检查装置包括用于支撑显示面板的面板支撑模具和与面板支撑模具隔开预定距离的多个摄像机，用于拍摄由面板支撑模具支撑的显示面板的照片。 至少一个相机由相机支撑部件（20）可旋转地支撑。 相机支撑部具有用于驱动照相机的一个照相机（7）旋转的驱动部分（21），其中相机相对于面板设置成锐角。 相机支撑部件具有设置在驱动部分和另一相机（5）之间用于支撑另一相机的第一支架（25），以及设置在驱动部分和一个相机之间用于支撑一个相机的第二支架（27） 。
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公开(公告)号：KR100423967B1
公开(公告)日：2004-03-22
申请号：KR1020010040380
申请日：2001-07-06
Applicant: 삼성전자주식회사
IPC: G03B42/02
CPC classification number: G01N23/04 , Y10S378/901
Abstract: Disclosed herein is a three-dimensional image constructing method using an X-ray apparatus. In the three-dimensional image constructing method, a construction space of a subject and information for the construction space are set. Thereafter, a plurality of transmission images of the subject are obtained. The data of the construction space are calculated on the basis of the information for the construction space set at the setting step and the transmission images obtained at the image obtaining step. The construction space is constructed on the basis of the data calculated at the image processing step.
Abstract translation: 这里公开了一种使用X射线装置的三维图像构建方法。 在三维图像构建方法中，设置主体的构造空间和构造空间的信息。 之后，获得对象的多个透射图像。 基于在设定步骤中设定的建筑用空间的信息和在图像取得工序中取得的透过图像，计算建筑空间的数据。 建筑空间是根据在图像处理步骤计算的数据构建的。
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公开(公告)号：KR1020030004736A
公开(公告)日：2003-01-15
申请号：KR1020010040380
申请日：2001-07-06
Applicant: 삼성전자주식회사
IPC: G03B42/02
CPC classification number: G01N23/04 , Y10S378/901
Abstract: PURPOSE: A method for embodying three-dimensional image of X-ray photographing unit is provided to allow an examiner to directly observe an object and perform an accurate inspection by reconstructing three-dimensional image for the object through the X-ray photographing unit. CONSTITUTION: A method comprises a first step(S10,S20) of setting a reconstruction space for an object and data in accordance with the reconstruction space; a second step(S30) of obtaining a transmission image; a third step(S40) of calculating data of reconstruction space in accordance with the transmission image obtained in the second step and the data set in the first step; and a fourth step(S50 to S70) of reconstructing the reconstruction space in accordance with the data calculated in the third step.
Abstract translation: 目的：提供一种用于体现X射线摄影单元的三维图像的方法，以允许检查者直接观察物体并通过重建通过X射线摄影单元的物体的三维图像来进行准确的检查。 构成：一种方法，包括：根据重建空间设定对象的重建空间和数据的第一步骤（S10，S20）; 获得发送图像的第二步骤（S30）; 根据在第二步骤中获得的传输图像和在第一步骤中设置的数据来计算重建空间的数据的第三步骤（S40） 以及根据在第三步骤中计算的数据重构重建空间的第四步骤（S50至S70）。
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Patent Agency Ranking
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公开(公告)号：KR1020170083678A
公开(公告)日：2017-07-19
申请号：KR1020160002690
申请日：2016-01-08
Applicant: 삼성전자주식회사
IPC: H01L21/66 , G03F7/20 , H01L31/101
CPC classification number: H01L22/20 , G01N21/9501 , G01N21/95607 , G01N2021/8864 , G06F17/5081 , H01L22/12
Abstract: 본발명의실시예에따른기판검사방법은, 제 1 공정이완료된기판상에광을조사하는것, 상기기판으로부터출사된상기광의스펙트럼데이터를획득하는것, 상기스펙트럼데이터로부터상기기판의불량영역을검출하는것 및상기불량영역중 상기제 1 공정에의해발생된상기기판의제 1 불량영역을추출하는것을포함하되, 상기제 1 불량영역을추출하는것은, 상기제 1 공정이상기기판에대해영향을미치는유효영역을설정하는것 및상기불량영역중 상기유효영역과중첩되는중첩영역을추출하는것을포함하되, 상기중첩영역은상기제 1 불량영역으로정의된다.
Abstract translation: 根据本发明的实施例的基板检查方法中，第一步是haneungeot整个衬底上照射光，haneungeot获得所述从基底发射的光的光谱数据，从haneungeot的光谱数据来检测所述基板的缺陷区 并且从所述缺陷区域中提取由所述第一处理生成的所述衬底的第一缺陷区域，其中提取所述第一缺陷区域包括： 并且提取与缺陷区域中的有效区域重叠的重叠区域，其中重叠区域被定义为第一缺陷区域。
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公开(公告)号：KR1020150031827A
公开(公告)日：2015-03-25
申请号：KR1020130111516
申请日：2013-09-17
Applicant: 삼성전자주식회사
CPC classification number: G01N21/211 , G01N2021/213 , G01N2021/214
Abstract: The present invention relates to an ellipsometer for detecting a surface to prevent the loss of a measurement area due to a change in an azimuth angle and improve the processing speed of data as a measured value can be changed in accordance with a measured azimuth angle when measuring physical properties of a measurement object. According to an embodiment of the present invention, the ellipsometer for detecting a surface comprises a light source irradiating light to a substrate; a polarizing unit polarizing the light irradiated from the light source and breaking down the polarized light; a detector measuring an amount of the polarized light passing through a polarization analyzer; and a driving unit rotating the detector to allow the detector to be rotated as much as the azimuth angle as the substrate is rotated in the direction of the azimuth angle. In addition, the present invention may include a control unit controlling the rotation drive of the driving unit to allow the detector to be rotated as much as the azimuth by calculating a rotating azimuth angle of the substrate.
Abstract translation: 本发明涉及一种用于检测表面以防止由于方位角的变化导致的测量区域的损失的椭圆偏振仪，并且当测量时可以根据测量的方位角改变作为测量值的数据的处理速度 测量物体的物理性质。 根据本发明的实施例，用于检测表面的椭偏仪包括将光照射到衬底的光源; 偏振单元，偏振从光源照射的光并分解偏振光; 测量通过偏振分析器的偏振光的量的检测器; 以及驱动单元，其使所述检测器旋转，以使得所述检测器在所述基板沿所述方位角的方向旋转时旋转所述方位角。 此外，本发明可以包括控制单元，该控制单元通过计算基板的旋转方位角来控制驱动单元的旋转驱动以允许检测器旋转多达方位角。
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公开(公告)号：KR1020050042657A
公开(公告)日：2005-05-10
申请号：KR1020030077705
申请日：2003-11-04
Applicant: 삼성전자주식회사
IPC: G01M11/00
CPC classification number: G01N21/95 , G01N2021/9513
Abstract: 본 발명은 대상물에 대하여 렌즈의 광축이 경사진 위치에서 대상물을 촬영할 때 대상물 전체에 대하여 선명한 상을 맺도록 하기 위한 광학계에 관한 것으로,
본 발명에 따른 광학계는 대상물에서 오는 빛을 굴절시키는 렌즈와, 상기 렌즈에서 굴절된 빛에 의한 상이 맺히는 결상면과, 상기 결상면을 가변시키기 위한 결상면 조절부를 포함하고, 상기 결상면 조절부는 상기 렌즈의 광축에 대한 상기 결상면의 각도를 조절하기 위한 각도 조절부를 포함하는 것을 특징으로 한다.-
公开(公告)号：KR1020050001807A
公开(公告)日：2005-01-07
申请号：KR1020030042143
申请日：2003-06-26
Applicant: 삼성전자주식회사
IPC: H04N5/225
CPC classification number: H04N5/23212 , H04N5/2253 , H04N5/2258
Abstract: PURPOSE: An apparatus for obtaining an image is provided to pick up the image of a target object easily and efficiently by solving a focus problem and a moire phenomenon generated when the image is picked up at a sloped visual field angle. CONSTITUTION: An optical path variation unit(50) is installed between a solid state pick-up device(40) and a focus lens(36). The optical path variation unit varies the length of the path of a light which is incident from a target object when an image is picked up at a sloped viewing angle. The solid state pick-up device is comprised of a CCD(Charge Coupled Device). The optical path variation unit is comprised of a prism.
Abstract translation: 目的：提供一种用于获得图像的装置，通过解决当以倾斜视场角拍摄图像时产生的焦点问题和产生的莫尔条纹现象，容易且有效地拾取目标对象的图像。 构成：在固态拾取装置（40）和聚焦透镜（36）之间安装光路变化部（50）。 当以倾斜的视角拾取图像时，光路变化单元改变从目标物体入射的光的路径的长度。 固态拾取装置由CCD（电荷耦合器件）组成。 光路变化单元由棱镜构成。
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