-
公开(公告)号：JPH01205972A
公开(公告)日：1989-08-18
申请号：JP2766288
申请日：1988-02-10
Applicant: CANON KK
Inventor： HIYOSHI TOYOHIKO , SUZUKI MASANORI , WATANABE KAZUO , IWATA MIKIO , OKAWA SHINKICHI
Abstract: PURPOSE:To feed a uniform and fresh abrasive at all times, stabilize a polishing amount and enhance machining accuracy by providing a tape feed means for supplying and travelling a tape having an abrasive between the machined plane of a rotating workpiece and an oscillating polishing tool. CONSTITUTION:A drive motor is actuated to turn a feed screw and cause the slide of a slide axis 32 toward a workpiece 1, thereby clamping a nose 38 fitted to an abrasive supply device 40 fixed to the said axis 32 between lap tapes 39 and causing the hitting of the nose 38 to the workpiece 1. Then, the workpiece 1 is turned with a drive motor 22 and another drive motor is to cause the lap tapes 39 to travel on tension in an approximately vertical direction along the curvature of the tip of the nose 38, and the abrasive on the lap tapes 39 polishes an area where the tip of the nos 38 and the workpiece 1 are in contact with each other. In this case, the nose 38 is oscillated with an oscillation device 201 and pressed to the workpiece 1 with a weight 33 by the predetermined pressing force.
-
公开(公告)号：JPS63232941A
公开(公告)日：1988-09-28
申请号：JP6480587
申请日：1987-03-19
Applicant: CANON KK
Inventor： HIYOSHI TOYOHIKO , IWATA MIKIO , WATANABE KAZUO , OKAWA SHINKICHI
Abstract: PURPOSE:To stabilize the corrective stock removal of a microscopic part as well as to make highly accurate polishing performable, by variably controlling either of tape travel speed and relative displacement speed on the basis of input data corresponding to the working quantity of a polishing surface and the polishing position. CONSTITUTION:In this device, there is provided with a controlling computer 110 which variably controls either of at least travel speed of a lap tape 39 and relative displacement speed of a traveling device on the basis of input data corresponding to the working quantity of a polishing surface of a workpiece 1 and the working position. And, the relative position and the relative displacement speed between a nose 38 and the workpiece 1 and the travel speed of the lap tape 39 are all variably controlled by the controlling computer 110 according to the working quantity and the working position of the workpiece 1. Therefore, since stock removal is determined by polishing speed and working time, the working quantity is precisely controllable with the preset input data, thus partial corrective polishing can be done very precisely and highly accurately.
-
公开(公告)号：JPH0758009A
公开(公告)日：1995-03-03
申请号：JP15850394
申请日：1994-07-11
Applicant: CANON KK
Inventor： YAMAMOTO SEKINORI , OKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , HIGOMURA MAKOTO , KARIYA TAKUO
IPC: G01B21/00 , G03F7/20 , G03F9/00 , G12B5/00 , H01L21/027
Abstract: PURPOSE:To provide a vertical aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises a main frame MF, a sub-frame SF, stages XS, Y1S, Y2S held in the sub-frame SF and movable in a direction including a vertical component, means Y1M, Y2M, XM for relatively moving the stages to exposure luminous flux EX to be introduced substantially from a horizontal direction, wherein the sub-frame is supported in the main frame through support means MF1R, MF1L, MF2R, MF2L.
-
公开(公告)号：JPH0758007A
公开(公告)日：1995-03-03
申请号：JP15850194
申请日：1994-07-11
Applicant: CANON KK
Inventor： YAMAMOTO SEKINORI , OKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , HIGOMURA MAKOTO , KARIYA TAKUO
IPC: G01B21/00 , G03F7/20 , G12B5/00 , H01L21/027
Abstract: PURPOSE:To provide a vertical aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises stages XS, Y1S, Y2S movable in a direction including a vertical component, gravity compensating means having constant tension spring mechanisms Y1BR, Y2BR, Y1BL, Y2BL for suspending the stages to gravity-compensate and belts Y1SR, Y1SL, and means Y1M, Y2M, XM for relatively moving the stages to exposure luminous flux EX to be introduced substantially from a horizontal direction.
-
公开(公告)号：JPH0259696A
公开(公告)日：1990-02-28
申请号：JP21081488
申请日：1988-08-26
Applicant: CANON KK
Inventor： OKAWA SHINKICHI , KARIYA TAKUO
Abstract: PURPOSE:To compensate the unbalance of tension and to prevent the influence exerted on the positioning accuracy and the attitude accuracy of a moving body by bringing a connecting part of a stage being the moving body and a dead weight compensating mechanism to one-point suspension, and also, forming i by a rotation free structure. CONSTITUTION:Two pieces of steel belts 3 for suspending and supporting steel are connected to a base 2 through a rotating means 50, and the base 2 is connected to a Y stage 1 through a rotating means 40. In this case, the stage is rotatable in the vertical surface against a balancer, and suspended and supported at one point substantially through the rotating means 40. In such a way, even if a difference is generated in tension of the steel belt 3 and the base 2 is inclined, the base 2 rotates against the Y stage 1 by the rotating means 40, therefore, the difference of tension is absorbed and it is not transmitted to the Y stage 1. Also, even if a difference of tension is generated in two pieces of steel belts 3 by the rotating mans, the base 2 can always hold the same attitude.
-
Patent Agency Ranking
公开(公告)号：JPS63232940A
公开(公告)日：1988-09-28
申请号：JP6480387
申请日：1987-03-19
Applicant: CANON KK
Inventor： HIYOSHI TOYOHIKO , IWATA MIKIO , WATANABE KAZUO , OKAWA SHINKICHI
IPC: B24B13/00
Abstract: PURPOSE:To stabilize the stock removal of corrective polishing for a microscopic part as well as to make yet more highly accurate polishing performable, by installing a pressurizing device, pressing a polishing tool to the polishing surface of a rotating workpiece at constant pressure, and also a tape feeding device feeding a tape with an abradant and traveling in space between the abrasive tool and the polishing surface. CONSTITUTION:In this device, there are provided with a weight 33, pressing a nose 38 to the polishing surface of a rotating workpiece 1 at constant pressure, a slide shaft 32, supporting this nose 38 free of slide motion toward the workpiece 1, and an abrasive feeder 40 feeding a lap tape 39 and traveling between the nose 38 and the polishing surface. With suchlike constitution, the lap tape 39 is fed to an interspace between the rotating workpiece 1 and the polishing surface and traveled between them, whereby the nose 38 is made so as to be pressed to the polishing surface at constant pressure, so that the uniform, new lap tape 39 is always fed, thus removal stock is stabilized. Accordingly, accuracy in such partial corrective polishing that polishes the workpiece while eliminating a partial form error at the time of machining an optical mirror, by may of example, is improvable.
-
公开(公告)号：JPS637645A
公开(公告)日：1988-01-13
申请号：JP14968986
申请日：1986-06-27
Applicant: CANON KK
Inventor： MATSUSHITA KOICHI , YAMAURA TOSHIHIKO , OKAWA SHINKICHI
Abstract: PURPOSE:To stabilize and maintain a high-speed, highly accurate positioning performance for elapse of time, by providing a first guide means, which has moving bodies that are moved in moving direction and constrains the direction orthogonal to the moving plane, and providing a second guide means, which constrains the direction at a right angle to the moving direction and in parallel to the moving plane. CONSTITUTION:The first guide is composed of the following parts: guide rails 2a and 2b, which are fixed on a base table 1; roller bearings 3a and 3b, which are aligned on the surfaces of the rails at a sepcified interval with holders (not shown); and a moving stage 11, which is mounted on the bearings. The second guide is composed of the following parts: guide rails 4a and 4b fixed to the base table 1; a reference roller unit comprising an outer roller wheel 5a attached to the moving stage 11, a roller bearing 6a and a roler shaft 7a; and a compressing roller unit comprising an outer roller wheel 5b, a roller bearing 6b and a roller shaft 7b. Thus, time change in frictional force can be made less remarkably, and the times of maintenaces can be reduced.
-
公开(公告)号：JPH0758010A
公开(公告)日：1995-03-03
申请号：JP15850494
申请日：1994-07-11
Applicant: CANON KK
Inventor： YAMAMOTO SEKINORI , OKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , HIGOMURA MAKOTO , KARIYA TAKUO
Abstract: PURPOSE:To provide a vertical aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises a frame MF in which its interior is held hermetically sealed, a wafer conveying section MW0 provided in the frame MF, a first stage Y2S movable between the wafer conveying section and a wafer exposure unit, a second stage XS, Y1S placed in the first stage and movable in a plane including a vertical component, and means Y1M, XM for relatively moving the second stage to exposure luminous flux EX to be introduced substantially from a horizontal direction.
-
公开(公告)号：JPH0758006A
公开(公告)日：1995-03-03
申请号：JP15850094
申请日：1994-07-11
Applicant: CANON KK
Inventor： YAMAMOTO SEKINORI , OKAWA SHINKICHI , MATSUSHITA KOICHI , KAWAI YASUO , HIGOMURA MAKOTO , KARIYA TAKUO
IPC: G01B21/00 , G03F7/20 , G03F9/00 , G12B5/00 , H01L21/027
Abstract: PURPOSE:To provide a vertical scanning type X-ray aligner which can accurately position by an effective and stable operating mechanism. CONSTITUTION:The aligner comprises stages XS, Y1S, Y2S movable in a direction including a vertical component, and means for relatively scanning the stages to an X-ray EX of parallel luminous fluxes to be substantially introduced from a horizontal direction, and exposes a wafer by scanning exposure. In this case, the wafer and a mask are held substantially integrally, and the mask and the wafer are fed at a constant speed to the fluxes thereby to expose to transfer a mask pattern to the wafer.
-
公开(公告)号：JPH0388400A
公开(公告)日：1991-04-12
申请号：JP22535689
申请日：1989-08-31
Applicant: CANON KK
Inventor： IWAMOTO KAZUNORI , CHIBA HIROSHI , OKAWA SHINKICHI , UZAWA SHUNICHI , KARIYA TAKUO , EBINUMA RYUICHI
IPC: H05K13/04 , H01L21/027
Abstract: PURPOSE:To reduce outer force to a precision equipment due to reduction in inner pressure of a vacuum container and prevent functional change and damage to the precision equipment by forming a fulcrum member for mounting the precision equipment into the vacuum container in a structure which can be deformed or rotated. CONSTITUTION:A precision equipment 1 in a unit, a vacuum container 2 whose internal part is set to a desired reduced pressure atmosphere, and first and second fulcrum members 3 and 4 which mount the precision equipment 1 into the vacuum container 2 so that it can be suspended in Y-direction are provided. The first and second fulcrum members 3 and 4 are provided apart in X-direction which crosses Y-direction at right angle, one of them has freedom in the direction of rotation so that force due to deformation of the vacuum container 2 may not be transmitting to the precision equipment 1 when the internal pressure within the vacuum container 2 is set to a desired reduced pressure atmosphere, and the other fixes the precision equipment 1 regarding Z direction for the vacuum container 2, thus drastically reducing outer force to the precision equipment 1 due to reduction in internal pressure within the vacuum container 2 and preventing functional change and damage to the precision equipment 1.
-
-
-
-
-
-
-
-
-
Search Results
26
records
(took 0.021 seconds)
