公开(公告)号：PT834218E

公开(公告)日：2009-05-06

申请号：PT96923321

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： ADAMS SCOTT G ,  BERTSCH FRED M ,  SHAW KEVIN A ,  MACDONALD NOEL C

IPC: H03H9/125 ,  H03H9/205 ,  H02N1/00 ,  H03H9/02 ,  H03H9/24 ,  H03H9/46

公开(公告)号：AT334477T

公开(公告)日：2006-08-15

申请号：AT98116809

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00 ,  H01J37/063 ,  G01N27/00

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：AT269588T

公开(公告)日：2004-07-15

申请号：AT94903348

申请日：1993-12-03

Applicant: CORNELL RES FOUNDATION INC

Inventor： SHAW KEVIN A ,  ZHANG Z LISA ,  MACDONALD NOEL C

IPC: C23F4/00 ,  B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L21/302 ,  H01L21/3065 ,  H01L29/82 ,  H01L29/84 ,  H01L21/44 ,  H01L21/449 ,  H01L23/48 ,  H01L29/06 ,  H01L29/86 ,  H01L29/96

Abstract: A single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independently of crystal orientation.

公开(公告)号：AT177875T

公开(公告)日：1999-04-15

申请号：AT92912228

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00 ,  H01J37/063 ,  G01N27/00

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：CA2224402A1

公开(公告)日：1997-01-09

申请号：CA2224402

申请日：1996-06-20

Applicant: CORNELL RES FOUNDATION INC

Inventor： MACDONALD NOEL C ,  SHAW KEVIN A ,  BERTSCH FRED M ,  ADAMS SCOTT G

IPC: H03H9/125 ,  H02N1/00 ,  H03H9/02 ,  H03H9/205 ,  H03H9/24 ,  H03H9/46

Abstract: A tunable electromechanical resonator structure incorporates an electrostatic actuator (66, 68) which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers (70, 72, 84, 90). One set (70, 72) is mounted on a movable portion (54) of the resonator structure and one set (84, 90) is mounted on an adjacent fixed base (132, 134) on the substrate, adjacent ends spaced apart by a gap (86, 92). An adjustable bias voltage (130) across the sets of electrodes adjusts the resonant frequency of the movable structure.

公开(公告)号：WO2004028952A3

公开(公告)日：2004-09-16

申请号：PCT/US0320057

申请日：2003-06-26

Applicant: CORNELL RES FOUNDATION INC

Inventor： SUBRAMANIAN KANAKASABAPATHI ,  MACDONALD NOEL C

IPC: B81C1/00 ,  H01L21/20

CPC classification number: B81C1/00142 ,  B81B2203/0361 ,  B81C1/00071 ,  B81C1/00111 ,  B81C2201/0112 ,  Y10S977/70 ,  Y10S977/762

Abstract: A process cycles between etching and passivating chemistries to create rough sidewalls that are converted into small structures. In one embodiment, a mask is used to define lines in a single crystal silicon wafer. The process creates ripples on sidewalls of the lines corresponding to the cycles. The lines are oxidized in one embodiment to form a silicon wire corresponding to each ripple. The oxide is removed in a further embodiment to form structures ranging from micro sharp tips to photonic arrays of wires. Fluidic channels are formed by oxidizing adjacent rippled sidewalls. The same mask is also used to form other structures for MEMS devices.

Abstract translation: 蚀刻和化学钝化之间的过程会产生粗糙的侧壁，并转化为小的结构。 在一个实施例中，使用掩模来限定单晶硅晶片中的线。 该过程在与周期对应的线的侧壁上产生波纹。 在一个实施例中，线被氧化以形成对应于每个波纹的硅线。 在另一个实施例中去除氧化物以形成从微锐尖到金属丝光子阵列的结构。 流体通道通过氧化相邻的波纹侧壁而形成。 同样的掩模也用于形成MEMS器件的其他结构。

公开(公告)号：WO9704283A2

公开(公告)日：1997-02-06

申请号：PCT/US9611827

申请日：1996-07-19

Applicant: CORNELL RES FOUNDATION INC

Inventor： MILLER SCOTT A ,  MACDONALD NOEL C ,  XU YANG

IPC: G01L1/14 ,  G01B5/28 ,  G01B7/34 ,  G01B21/30 ,  G01N37/00 ,  G01P15/125 ,  G01P15/13 ,  G01Q70/02 ,  G01Q70/16 ,  G01B

CPC classification number: G01Q70/16 ,  G01B5/28 ,  G01P15/0894 ,  G01P15/125 ,  G01P15/131 ,  G01P2015/0831 ,  Y10S977/873

Abstract: A torsional cantilever is microfabricated for reduced size to increase its resonance frequency, increase its scanning speed, and permit fabrication of large numbers in an array to provide parallel scanning. The cantilever may incorporate a tip for highly sensitive force detection. The device preferably includes a cantilever arm and a counterbalance mounted on opposite sides of a laterally extending torsional beam fixed at its outer ends. Sensors detect rotation of the cantilever arm and may provide control of sensor locator through a feedback loop.

Abstract translation: 扭转悬臂是微加工的，以减小尺寸以增加其共振频率，增加其扫描速度，并允许在阵列中制造大量数量以提供并行扫描。 悬臂可以包含用于高度敏感的力检测的尖端。 该装置优选地包括安装在固定在其外端的横向延伸的扭转梁的相对侧上的悬臂和平衡。 传感器检测悬臂的旋转，并可通过反馈环来提供对传感器定位器的控制。

公开(公告)号：EP0584233A4

公开(公告)日：1996-10-02

申请号：EP92912228

申请日：1992-05-12

Applicant: CORNELL RES FOUNDATION INC

Inventor： ARNEY SUSANNE CHRISTINE ,  MACDONALD NOEL C ,  YAO JUN JASON

IPC: G01B7/34 ,  B81B1/00 ,  B81B3/00 ,  G01B7/00 ,  G01N37/00 ,  G01Q20/04 ,  G01Q60/16 ,  G01Q70/12 ,  G01Q70/14 ,  H01J37/28 ,  H02N1/00 ,  H01J37/063

CPC classification number: H02N1/008 ,  G01Q20/04 ,  G01Q60/16 ,  Y10S977/874

Abstract: Self-aligned, opposed, nanometer dimension tips (12, 22) are fabricated in pairs, one of each pair being located on a movable (24) single crystal beam, with the beam being movable in three dimensions with respect to a substrate (18) carrying the other tip (12) of a pair. Motion of one tip with respect to the other is controlled or sensed by transducers (120, 122, 124, 126) formed on the supporting beams (62, 64). Spring means (76, 80, 86, 88) in each beam allow axial motion of the beam. The tips (12, 22) and beams (62, 64) are fabricated from single crystal silicon substrate (18) and the tips (12, 22) may be electrically isolated from the substrate (18) by fabricating insulating segments (40, 54) in the beam structure.

公开(公告)号：EP0702796A4

公开(公告)日：1997-01-22

申请号：EP94919153

申请日：1994-05-23

Applicant: CORNELL RES FOUNDATION INC

Inventor： SHAW KEVIN A ,  ADAMS SCOTT G ,  MACDONALD NOEL C

IPC: B60G23/00 ,  B81B3/00 ,  B81C1/00 ,  G01P1/00 ,  G01P15/08 ,  G01P15/125 ,  G01P15/13 ,  H01L29/84

CPC classification number: G01P15/131 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/0136 ,  G01P1/006 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0831 ,  G01R33/0286

Abstract: A microelectromechanical accelerometer (60) having submicron features is fabricated from a single crystal silicon substrate (10). The accelerometer includes a movable portion incorporating an axial beam (102) carrying laterally-extending high aspect ratio released fingers (110-117, 120-127) cantilevered above the floor of a cavity formed in the substrate during the fabrication process. The movable portion is supported by restoring springs (132, 142) having controllable flexibility to vary the resonant frequency of the structure. A multiple-beam structure provides stiffness in the movable portion for accuracy.

Abstract translation: 具有亚微米特征的微机电加速度计（60）由单晶硅衬底（10）制造。 加速度计包括结合轴向梁（102）的可移动部分，所述轴向梁承载在制造过程期间在形成于衬底中的空腔的底板上方悬伸的横向延伸高纵横比释放指状物（110-117,120-127）。 可移动部分由具有可控柔性的复位弹簧（132,142）支撑，以改变结构的谐振频率。 为了精度，多梁结构在可移动部分中提供刚度。

公开(公告)号：EP0683921A4

公开(公告)日：1997-01-02

申请号：EP94903348

申请日：1993-12-03

Applicant: CORNELL RES FOUNDATION INC

Inventor： SHAW KEVIN A ,  ZHANG Z LISA ,  MACDONALD NOEL C

IPC: C23F4/00 ,  B81B3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L21/302 ,  H01L21/3065 ,  H01L29/82 ,  H01L29/84 ,  H01L21/44 ,  H01L21/449 ,  H01L23/48 ,  H01L29/06 ,  H01L29/86 ,  H01L29/96

CPC classification number: B81C1/00619 ,  B81C1/00142 ,  B81C1/0015 ,  B81C1/00626 ,  B81C2201/0112 ,  B81C2201/0132 ,  B81C2201/053 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814 ,  G01P2015/0817 ,  G01P2015/0828 ,  Y10S73/01 ,  Y10S148/05

Abstract: The invention provides a single mask, low temperature reactive ion etching process for fabricating high aspect ratio, released single crystal microelectromechanical structures independent of crystal orientation. A dielectric mask (12) on a single-crystal substrate (154) is patterned to define isolating trenches. A protective conformal layer (28) is applied to the resultant structure. The conformal layer (28) on the floor of the trenches is removed and a second etch deepens the trench to expose the mesa walls which are removed during the release step by isotropic etching. A metal layer (44) is formed on the resultant structure providing opposed plates (156) and (158) of a capacitor. The cantilever beam (52) with the supporting end wall (152) extends the grid-like structure (150) into the protection of the deepened isolation trenches (54). A membrane can be added to the released structures to increase their weight for use in accelerometers, and polished for use as movable mirrors.