公开(公告)号：EP2778652A2

公开(公告)日：2014-09-17

申请号：EP14159460.6

申请日：2014-03-13

Applicant: FEI COMPANY

Inventor： Schmidt, Michael ,  Stone, Stacey ,  Senowitz, Corey

IPC: G01N1/28

CPC classification number: H01J37/3023 ,  G01N1/286 ,  H01J2237/201 ,  H01J2237/208 ,  H01J2237/31745

Abstract: An improved method for extracting and handling multiple samples for S/TEM analysis is disclosed. Preferred embodiments of the present invention make use of a micromanipulator that attaches multiple samples at one time in a stacked formation and a method of placing each of the samples onto a TEM grid. By using a method that allows for the processing of multiple samples, the throughput of sample prep in increased significantly.

公开(公告)号：EP2749863A2

公开(公告)日：2014-07-02

申请号：EP13197357.0

申请日：2013-12-16

Applicant: FEI COMPANY

Inventor： Schmidt, Michael ,  Blackwood, Jeff ,  Stone, Stacey ,  Lee, Sang Hoon ,  Kelley, Ronald

IPC: G01N1/28

CPC classification number: G01N1/32 ,  G01N1/28 ,  H01L21/30655

Abstract: A method and apparatus is provided for preparing samples for observation in a charged particle beam system in a manner that reduces or prevents artifacts. Material is deposited onto the sample using charged particle beam deposition just before or during the final milling, which results in an artifact-free surface. Embodiments are useful for preparing cross sections for SEM observation of samples having layers of materials of different hardnesses. Embodiments are useful for preparation of thin TEM samples.

Abstract translation: 提供了一种方法和装置，用于以减少或防止伪影的方式制备用于在带电粒子束系统中观察的样品。 在最终研磨之前或期间，使用带电粒子束沉积将材料沉积到样品上，这导致无伪影的表面。 实施例对于制备具有不同硬度的材料层的样品的SEM观察的横截面是有用的。 实施例可用于制备薄TEM样品。

公开(公告)号：EP1821146A1

公开(公告)日：2007-08-22

申请号：EP07102322.0

申请日：2007-02-14

Applicant: FEI COMPANY

Inventor： Schmidt, Michael ,  Blackwood, Jeff

IPC: G03F1/00 ,  H01L21/3213 ,  H01J37/317 ,  C23C14/22 ,  B23K15/00

CPC classification number: B23K15/06 ,  B23K15/0086 ,  B23K2201/40 ,  C23C14/30 ,  H01J37/302 ,  H01J37/3056

Abstract: A coating is applied to a work piece (222) in a charged particle beam system (200) without directing the beam (218) to the work piece. The coating is applied by sputtering, either within the charged particle beam vacuum chamber (226) or outside the charged particle beam vacuum chamber. In one embodiment, the sputtering is performed by directing the charged particle beam (218) to a sputter material source (242), such as a needle (240) from a gas injection system. Material is sputtered from the sputter material source onto the work piece to form, for example, a protective or conductive coating, without requiring the beam to be directed to the work piece, thereby reducing or eliminating damage to the work piece.

Abstract translation: 的涂层而不束（218）引导至所述工件施加到带电粒子束系统（200）对工件（222）。 该涂层通过溅射施用，既可带电粒子束真空室（226）内或带电粒子束真空室外部。 在一个，实施方式的溅射由带电粒子束（218）引导至溅射材料源（242）来执行：例如从气体喷射系统的针（240）将材料从溅射材料源溅射到工作 片，以形成，例如，保护性涂层或导电的，而不需要光束被引导至工件，从而减少或消除对工件的损坏。

公开(公告)号：EP2778652A3

公开(公告)日：2016-05-25

申请号：EP14159460.6

申请日：2014-03-13

Applicant: FEI COMPANY

Inventor： Schmidt, Michael ,  Stone, Stacey ,  Senowitz, Corey

IPC: G01N1/28 ,  H01J37/20 ,  H01J37/302

CPC classification number: H01J37/3023 ,  G01N1/286 ,  H01J2237/201 ,  H01J2237/208 ,  H01J2237/31745

Abstract: An improved method for extracting and handling multiple samples for S/TEM analysis is disclosed. Preferred embodiments of the present invention make use of a micromanipulator that attaches multiple samples at one time in a stacked formation and a method of placing each of the samples onto a TEM grid. By using a method that allows for the processing of multiple samples, the throughput of sample prep in increased significantly.

Abstract translation: 公开了一种用于提取和处理多个样品进行S / TEM分析的改进方法。 本发明的优选实施例利用将叠层结构中的多个样品同时附着的显微操纵器和将每个样品放置在TEM网格上的方法。 通过使用允许多个样品处理的方法，样品制备的生产量显着增加。

公开(公告)号：EP3018693A1

公开(公告)日：2016-05-11

申请号：EP15192862.9

申请日：2015-11-04

Applicant: FEI Company

Inventor： Brogden, Valerie ,  Blackwood, Jeff ,  Schmidt, Michael ,  Trivedi, Dhruti ,  Young, Richard ,  Miller, Tom ,  Routh, Jr., Brian ,  Stone, Stacey ,  Templeton, Todd

IPC: H01J37/304 ,  G01N1/28

CPC classification number: H01J37/3023 ,  G01N1/286 ,  G01N2001/2873 ,  H01J37/28 ,  H01J37/285 ,  H01J37/3045 ,  H01J37/31 ,  H01J2237/208 ,  H01J2237/31745

Abstract: Techniques are described that facilitate automated extraction of lamellae and attaching the lamellae to sample grids for viewing on transmission electron microscopes. Some embodiments of the invention involve the use of machine vision to determine the positions of the lamella, the probe, and/or the TEM grid to guide the attachment of the probe to the lamella and the attachment of the lamella to the TEM grid. Techniques that facilitate the use of machine vision include shaping a probe tip so that its position can be readily recognized by image recognition software. Image subtraction techniques can be used to determine the position of the lamellae attached to the probe for moving the lamella to the TEM grid for attachment. In some embodiments, reference structures are milled on the probe or on the lamella to facilitate image recognition.

Abstract translation: 描述了有助于自动提取薄片并将薄片附着到样品网格上以在透射电子显微镜上观察的技术。 本发明的一些实施例涉及使用机器视觉来确定薄片，探针和/或TEM网格的位置，以将探针附着到薄片和将薄片附接到TEM网格。 便于使用机器视觉的技术包括成形探针尖端，使其位置可以被图像识别软件容易地识别。 图像减法技术可用于确定附着于探针的薄片的位置，以将薄片移动到TEM网格以进行附着。 在一些实施例中，参考结构在探头上或薄片上铣削以便于图像识别。