公开(公告)号：JP2008197118A

公开(公告)日：2008-08-28

申请号：JP2008116165

申请日：2008-04-25

Applicant: Formfactor Inc ,  フォームファクター, インコーポレイテッド

Inventor： GRUBE GARY W ,  KHANDROS IGOR K ,  ELDRIDGE BENJAMIN N ,  MATHIEU GAETAN L ,  LOTFIZADEH POYA ,  TSENG CHIH-CHIANG

IPC: G01R1/073 ,  G01R31/26 ,  G01R31/28 ,  H01L21/66

CPC classification number: G01R1/07314 ,  G01R1/07342 ,  G01R1/07378 ,  G01R3/00 ,  G01R31/2886 ,  G01R31/2889 ,  Y10T29/49002 ,  Y10T29/49004 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49126 ,  Y10T29/4913 ,  Y10T29/49147 ,  Y10T29/49149 ,  Y10T29/49453

Abstract: PROBLEM TO BE SOLVED: To provide a process of designing and manufacturing a probe card assembly. SOLUTION: A method of designing and manufacturing a probe card assembly includes prefabricating one or more elements of the probe card assembly to one or more predefined designs. Thereafter, design data regarding a newly designed semiconductor device is received along with data describing the tester and testing algorithms to be used to test the semiconductor device. Using the received data, one or more of the prefabricated elements are selected. Again using the received data, one or more of the selected prefabricated elements is customized. The probe card assembly is then built using the selected and customized elements. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供设计和制造探针卡组件的过程。 解决方案：设计和制造探针卡组件的方法包括将探针卡组件的一个或多个元件预制成一个或多个预定的设计。 此后，接收关于新设计的半导体器件的设计数据以及描述用于测试半导体器件的测试器和测试算法的数据。 使用接收到的数据，选择一个或多个预制元素。 再次使用接收的数据，定制一个或多个所选择的预制元素。 然后使用选定和定制的元件构建探针卡组件。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2006084475A

公开(公告)日：2006-03-30

申请号：JP2005278874

申请日：2005-09-26

Applicant: Formfactor Inc ,  フォームファクター,インコーポレイテッド

Inventor： KHANDROS IGOR Y ,  MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/073 ,  B23K1/00 ,  B23K20/00 ,  B23K31/02 ,  C23C18/16 ,  C25D5/08 ,  C25D5/16 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/04 ,  G01R1/06 ,  G01R1/067 ,  G01R31/26 ,  G01R31/28 ,  H01L21/00 ,  H01L21/48 ,  H01L21/56 ,  H01L21/58 ,  H01L21/60 ,  H01L21/603 ,  H01L21/607 ,  H01L21/66 ,  H01L21/68 ,  H01L23/02 ,  H01L23/12 ,  H01L23/32 ,  H01L23/48 ,  H01L23/485 ,  H01L23/49 ,  H01L23/498 ,  H01L23/538 ,  H01L25/065 ,  H01L25/07 ,  H01L25/16 ,  H01L25/18 ,  H01R9/00 ,  H01R12/71 ,  H01R13/05 ,  H01R13/24 ,  H01R29/00 ,  H01R31/06 ,  H01R33/74 ,  H01R33/76 ,  H01R107/00 ,  H05H1/18 ,  H05K1/14 ,  H05K1/18 ,  H05K3/20 ,  H05K3/24 ,  H05K3/30 ,  H05K3/32 ,  H05K3/34 ,  H05K3/36 ,  H05K3/40 ,  H05K7/10

CPC classification number: H05K7/1069 ,  B23K1/0016 ,  B23K20/004 ,  B23K2201/40 ,  C25D5/08 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/0466 ,  G01R1/0483 ,  G01R1/06711 ,  G01R1/07314 ,  G01R1/07342 ,  G01R1/07357 ,  G01R1/07371 ,  G01R1/07378 ,  G01R31/2884 ,  G01R31/2886 ,  G01R31/2889 ,  H01L21/4853 ,  H01L21/4889 ,  H01L21/563 ,  H01L21/67138 ,  H01L22/20 ,  H01L23/32 ,  H01L23/49811 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/29 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L24/72 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05599 ,  H01L2224/05647 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/131 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13639 ,  H01L2224/13644 ,  H01L2224/13647 ,  H01L2224/13655 ,  H01L2224/13657 ,  H01L2224/16145 ,  H01L2224/29111 ,  H01L2224/45014 ,  H01L2224/45015 ,  H01L2224/45111 ,  H01L2224/45124 ,  H01L2224/45139 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/4554 ,  H01L2224/456 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48463 ,  H01L2224/48599 ,  H01L2224/48699 ,  H01L2224/48799 ,  H01L2224/49109 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/78301 ,  H01L2224/81801 ,  H01L2224/85201 ,  H01L2225/0651 ,  H01L2225/06527 ,  H01L2225/06555 ,  H01L2225/06572 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01012 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01037 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01057 ,  H01L2924/0106 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01076 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01088 ,  H01L2924/0132 ,  H01L2924/01322 ,  H01L2924/0133 ,  H01L2924/014 ,  H01L2924/07802 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/1517 ,  H01L2924/15312 ,  H01L2924/1532 ,  H01L2924/15787 ,  H01L2924/16195 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01R12/52 ,  H01R13/2407 ,  H01R13/2464 ,  H05K1/141 ,  H05K3/20 ,  H05K3/326 ,  H05K3/3421 ,  H05K3/368 ,  H05K3/4015 ,  H05K3/4092 ,  H05K2201/0397 ,  H05K2201/068 ,  H05K2201/1031 ,  H05K2201/10318 ,  H05K2201/10378 ,  H05K2201/10719 ,  H05K2201/10734 ,  H05K2201/10757 ,  H05K2201/10878 ,  Y02P70/611 ,  H01L2924/00 ,  H01L2924/01013 ,  H01L2924/01026 ,  H01L2924/3512 ,  H01L2224/29099 ,  H01L2224/48 ,  H01L2924/20752 ,  H01L2924/20753 ,  H01L2924/20754 ,  H01L2924/20755 ,  H01L2924/00012 ,  H01L2924/20751 ,  H01L2924/20756 ,  H01L2924/20757 ,  H01L2924/00015 ,  H01L2924/2075

Abstract: PROBLEM TO BE SOLVED: To provide a technique for applying a probe onto a semiconductor element, wherein the tip of a probe element can be oriented without changing the position of a probe card. SOLUTION: The probe card assembly includes: the probe card (electronic component) having an upper surface, a lower surface, and a plurality of terminals in the upper surface; an intervening body (electronic component) having an upper surface, a lower surface, a first plurality of restorable contact structures extending from terminals in the lower surface, and a second plurality of restorable contact structures extending from terminals in the upper surface; and an interval changer having an upper surface, a lower surface, a plurality of contact pads (terminals) provided on the lower surface, and a third restorable contact structure (probe element) extending from a terminal in the upper surface. COPYRIGHT: (C)2006,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种将探针施加到半导体元件上的技术，其中探针元件的尖端可以定向而不改变探针卡的位置。 解决方案：探针卡组件包括：在上表面具有上表面，下表面和多个端子的探针卡（电子部件）; 具有上表面，下表面，从下表面中的端子延伸的第一多个可恢复接触结构的中间体（电子部件）和从上表面中的端子延伸的第二多个可恢复接触结构; 以及具有上表面，下表面，设置在下表面上的多个接触垫（端子）和从上表面中的端子延伸的第三可恢复接触结构（探针元件）的间隔变换器。 版权所有（C）2006，JPO＆NCIPI

公开(公告)号：JP2004139992A

公开(公告)日：2004-05-13

申请号：JP2003361559

申请日：2003-10-22

Applicant: Formfactor Inc ,  フォームファクター,インコーポレイテッド

Inventor： ELDRIDGE BENJAMIN N ,  GRUBE GARY W ,  KHANDROS IGOR Y ,  MADSEN ALEC ,  MATHIEU GAETAN L

IPC: G01R1/073 ,  H01R4/26 ,  H01R12/55 ,  H01R12/71 ,  H01R13/24 ,  H01R43/16

CPC classification number: H01R13/2407 ,  G01R1/06711 ,  G01R1/06727 ,  H01R4/26 ,  H01R9/091 ,  H01R12/57 ,  H01R13/2442 ,  H01R2201/20 ,  Y10T29/49004 ,  Y10T29/49128 ,  Y10T29/49165

Abstract: PROBLEM TO BE SOLVED: To provide a device and a method of bringing about an improved mutual connection element and a tip end structure body for carrying out pressure connection between terminals of electronic parts. SOLUTION: The tip end structure body has a sharp blade, and this blade is arranged so that the length of the blade will become substantially in parallel with a horizontal movement direction of the tip end structural body when the tip end structure body bends and crosses the terminals of the electronic parts. In this way, the sharp blade arranged substantially in parallel clearly cuts in through a certain non-conductive layer (singular number or multiples), and brings about sure electric connection between the interconnetion element and the terminals of the electronic parts. COPYRIGHT: (C)2004,JPO

公开(公告)号：JP2003179110A

公开(公告)日：2003-06-27

申请号：JP2002285164

申请日：2002-09-30

Applicant: FORMFACTOR INC

Inventor： KHANDROS IGOR Y ,  MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/073 ,  B23K1/00 ,  B23K20/00 ,  B23K31/02 ,  C23C18/16 ,  C25D5/08 ,  C25D5/16 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/04 ,  G01R1/06 ,  G01R1/067 ,  G01R31/26 ,  G01R31/28 ,  H01L21/00 ,  H01L21/48 ,  H01L21/56 ,  H01L21/58 ,  H01L21/60 ,  H01L21/603 ,  H01L21/607 ,  H01L21/66 ,  H01L21/68 ,  H01L23/02 ,  H01L23/12 ,  H01L23/32 ,  H01L23/48 ,  H01L23/485 ,  H01L23/49 ,  H01L23/498 ,  H01L23/538 ,  H01L25/065 ,  H01L25/07 ,  H01L25/16 ,  H01L25/18 ,  H01R9/00 ,  H01R12/16 ,  H01R12/71 ,  H01R13/05 ,  H01R13/24 ,  H01R29/00 ,  H01R33/74 ,  H01R33/76 ,  H01R107/00 ,  H05H1/18 ,  H05K1/14 ,  H05K1/18 ,  H05K3/20 ,  H05K3/24 ,  H05K3/30 ,  H05K3/32 ,  H05K3/34 ,  H05K3/36 ,  H05K3/40 ,  H05K7/10

Abstract: PROBLEM TO BE SOLVED: To enable the tip of a probe element to be oriented without changing the direction of a probe card. SOLUTION: A probe card assembly (500) comprises a probe card (502), a space converter (506) equipped with a contact structure (probe element) (524), and an interposer (504) interposed in between the space converter (506) and the probe card (502). The space converter (506) and the interposer (504) are stacked up, and mechanisms (532), (536), (538), and (546) suitable for adjusting the orientation of the space converter (506) are provided. A probe can be easily made to bear against many large sites on a semiconductor wafer (508) through the above technique, and the probe elements (524) can be arranged so as to optimize probing of the wafer (508) as a whole. COPYRIGHT: (C)2003,JPO

公开(公告)号：JP2002359269A

公开(公告)日：2002-12-13

申请号：JP2002063664

申请日：2002-03-08

Applicant: FORMFACTOR INC

Inventor： KHANDROS IGOR Y ,  MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/06 ,  B23K1/00 ,  B23K20/00 ,  B32B15/08 ,  C23C18/16 ,  C25D5/08 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/04 ,  G01R1/067 ,  G01R1/073 ,  G01R31/26 ,  G01R31/28 ,  H01L21/00 ,  H01L21/02 ,  H01L21/288 ,  H01L21/48 ,  H01L21/56 ,  H01L21/60 ,  H01L21/603 ,  H01L21/66 ,  H01L23/48 ,  H01L23/485 ,  H01L23/49 ,  H01L23/498 ,  H01L25/065 ,  H01L25/16 ,  H01R12/52 ,  H05K1/14 ,  H05K3/20 ,  H05K3/30 ,  H05K3/32 ,  H05K3/34 ,  H05K3/36 ,  H05K3/40 ,  H05K7/10 ,  H01R12/32

Abstract: PROBLEM TO BE SOLVED: To directly fit elastic contact structure (430) to connection pads (310) on semiconductor dies (402a and 402b), before the semiconductor dies (402a and 402b) are made into single bodies (separated) from a semiconductor wafer. SOLUTION: A circuit board (710), having a plurality of terminals (712) arranged on the surface of the semiconductor die or an object similar to the board, is connected to the semiconductor dies (702 and 704). Thus, the semiconductor dies (402a and 402b) can be trained (tested and/or burnt in). The semiconductor dies (402a and 402b) are formed into the single bodies from the semiconductor wafer, and the same elastic contact structure (430) can be used for performing mutual connection between the semiconductor dies and the other electronic element (such as wiring boards and semiconductor packages). When the metal compound mutual interconnecting element (430) is used as the elastic contact structure, burn-in (792) is conducted at a temperature of 150 deg.C and it is completed in a time which is shorter than 60 minutes.

公开(公告)号：JP2011069829A

公开(公告)日：2011-04-07

申请号：JP2010235936

申请日：2010-10-20

Applicant: Formfactor Inc ,  フォームファクター, インコーポレイテッド

Inventor： KHANDROS IGOR Y ,  MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/073 ,  B23K1/00 ,  B23K20/00 ,  B23K31/02 ,  C23C18/16 ,  C25D5/08 ,  C25D5/16 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/04 ,  G01R1/06 ,  G01R1/067 ,  G01R31/26 ,  G01R31/28 ,  H01L21/00 ,  H01L21/48 ,  H01L21/56 ,  H01L21/58 ,  H01L21/60 ,  H01L21/603 ,  H01L21/607 ,  H01L21/66 ,  H01L21/68 ,  H01L23/02 ,  H01L23/12 ,  H01L23/32 ,  H01L23/48 ,  H01L23/485 ,  H01L23/49 ,  H01L23/498 ,  H01L23/538 ,  H01L25/065 ,  H01L25/07 ,  H01L25/16 ,  H01L25/18 ,  H01R9/00 ,  H01R12/71 ,  H01R13/05 ,  H01R13/24 ,  H01R29/00 ,  H01R33/74 ,  H01R33/76 ,  H01R107/00 ,  H05H1/18 ,  H05K1/14 ,  H05K1/18 ,  H05K3/20 ,  H05K3/24 ,  H05K3/30 ,  H05K3/32 ,  H05K3/34 ,  H05K3/36 ,  H05K3/40 ,  H05K7/10

CPC classification number: H05K7/1069 ,  B23K1/0016 ,  B23K20/004 ,  B23K2201/40 ,  C25D5/08 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/0466 ,  G01R1/0483 ,  G01R1/06711 ,  G01R1/07314 ,  G01R1/07342 ,  G01R1/07357 ,  G01R1/07371 ,  G01R1/07378 ,  G01R31/2884 ,  G01R31/2886 ,  G01R31/2889 ,  H01L21/4853 ,  H01L21/4889 ,  H01L21/563 ,  H01L21/67138 ,  H01L22/20 ,  H01L23/32 ,  H01L23/49811 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/29 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L24/72 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05599 ,  H01L2224/05647 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/131 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13639 ,  H01L2224/13644 ,  H01L2224/13647 ,  H01L2224/13655 ,  H01L2224/13657 ,  H01L2224/16145 ,  H01L2224/29111 ,  H01L2224/45014 ,  H01L2224/45015 ,  H01L2224/45111 ,  H01L2224/45124 ,  H01L2224/45139 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/4554 ,  H01L2224/456 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48463 ,  H01L2224/48599 ,  H01L2224/48699 ,  H01L2224/48799 ,  H01L2224/49109 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/78301 ,  H01L2224/81801 ,  H01L2224/85201 ,  H01L2225/0651 ,  H01L2225/06527 ,  H01L2225/06555 ,  H01L2225/06572 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01012 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01037 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01057 ,  H01L2924/0106 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01076 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01088 ,  H01L2924/0132 ,  H01L2924/01322 ,  H01L2924/0133 ,  H01L2924/014 ,  H01L2924/07802 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/1517 ,  H01L2924/15312 ,  H01L2924/1532 ,  H01L2924/15787 ,  H01L2924/16195 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01R12/52 ,  H01R13/2407 ,  H01R13/2464 ,  H05K1/141 ,  H05K3/20 ,  H05K3/326 ,  H05K3/3421 ,  H05K3/368 ,  H05K3/4015 ,  H05K3/4092 ,  H05K2201/0397 ,  H05K2201/068 ,  H05K2201/1031 ,  H05K2201/10318 ,  H05K2201/10378 ,  H05K2201/10719 ,  H05K2201/10734 ,  H05K2201/10757 ,  H05K2201/10878 ,  Y02P70/611 ,  H01L2924/00 ,  H01L2924/01013 ,  H01L2924/01026 ,  H01L2924/3512 ,  H01L2224/29099 ,  H01L2224/48 ,  H01L2924/20752 ,  H01L2924/20753 ,  H01L2924/20754 ,  H01L2924/20755 ,  H01L2924/00012 ,  H01L2924/20751 ,  H01L2924/20756 ,  H01L2924/20757 ,  H01L2924/00015 ,  H01L2924/2075

Abstract: PROBLEM TO BE SOLVED: To enable orientation of a tip of a probe element without changing the position of a probe card. SOLUTION: A probe card assembly 500 includes: a probe card 502; a space converter having a contact structure (probe element) 524, which is a space converter 506; and an interposer 504 disposed between the space converter and the probe card. Mechanisms 532, 536, 538, 546 are disclosed, which are suitable for determining the degree of adjustment by "stacking" the space converter and the interposer, and by adjusting orientation of the space converter. A probe is allowed to abut on many die sites on a semiconductor wafer 508 easily by using the disclosed technique, and the probe element can be arrayed to optimize probe abutment on the whole wafer. COPYRIGHT: (C)2011,JPO&INPIT

Abstract translation: 要解决的问题：为了使得探针元件的尖端的取向而不改变探针卡的位置。 解决方案：探针卡组件500包括：探针卡502; 具有接触结构（探针元件）524的空间转换器，其是空间转换器506; 以及设置在空间转换器和探针卡之间的插入件504。 公开了适用于通过“堆叠”空间转换器和插入器以及通过调整空间转换器的取向来确定调节程度的机构532,536,538,546。 通过使用所公开的技术，允许探针容易地邻接在半导体晶片508上的许多裸片位置，并且可以排列探针元件以优化整个晶片上的探针邻接。 版权所有（C）2011，JPO＆INPIT

公开(公告)号：JP2010107517A

公开(公告)日：2010-05-13

申请号：JP2009289863

申请日：2009-12-21

Applicant: Formfactor Inc ,  フォームファクター, インコーポレイテッド

Inventor： MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/073 ,  B23H9/00 ,  H01L21/66

CPC classification number: B23H9/00 ,  G01R1/07314

Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive and efficient method of manufacturing a high density probe array.
SOLUTION: The method of forming the probe array includes forming a layer of tip material 101 over a block of probe material 102. A first electron discharge machine (EDM) electrode 201 is arranged over the layer of tip material 101, and the EDM electrode 201 has a plurality of openings corresponding to a plurality of probes to be formed. Excess material is removed from the layer of tip material 101 and the block of probe material 102 to form the plurality of probes. A substrate having a plurality of through holes corresponding to the plurality of probes is arranged so that the plurality of probes penetrate the plurality of through holes. The substrate is bonded to the plurality of probes. Excess probe material 102 is removed so as to planarize the substrate.
COPYRIGHT: (C)2010,JPO&INPIT

Abstract translation: 要解决的问题：提供制造高密度探针阵列的廉价且有效的方法。 解决方案：形成探针阵列的方法包括在探针材料102的块上形成尖端材料层101.第一电子放电机（EDM）电极201布置在尖端材料层101的上方，并且 EDM电极201具有与要形成的多个探针对应的多个开口。 从尖端材料层101和探针材料块102去除多余的材料以形成多个探针。 具有与多个探针对应的多个贯通孔的基板被布置成使得多个探针穿透多个通孔。 衬底被结合到多个探针。 去除过量的探针材料102以使基底平坦化。 版权所有（C）2010，JPO＆INPIT

公开(公告)号：JP2008102145A

公开(公告)日：2008-05-01

申请号：JP2007296079

申请日：2007-11-14

Applicant: Formfactor Inc ,  フォームファクター, インコーポレイテッド

Inventor： GRUBE GARY W ,  KHANDROS IGOR K ,  ELDRIDGE BENJAMIN N ,  MATHIEU GAETAN L ,  LOTFIZADEH POYA ,  TSENG CHIH-CHIANG

IPC: G01R1/073 ,  G01R31/26 ,  G01R31/28 ,  H01L21/66

CPC classification number: G01R31/2886 ,  G01R1/07314 ,  G01R1/07342 ,  G01R1/07357 ,  G01R1/07378 ,  G01R3/00 ,  Y10T29/49126

Abstract: PROBLEM TO BE SOLVED: To shorten a probe card assembly designing/manufacturing process. SOLUTION: A method of designing/manufacturing the probe card assembly includes a step for prefabricating one or more elements of the probe card assembly according to one or more predefined designs. Thereafter, design data about a newly designed semiconductor device are received along with data describing a tester and testing algorithms to be used to test the semiconductor device. Using the received data, one or more of the prefabricated elements are selected. Again using the received data, one or more of the selected prefabricated elements are customized. The probe card assembly is then built by using the selected and customized elements. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：缩短探针卡组件的设计/制造过程。 解决方案：一种设计/制造探针卡组件的方法包括根据一个或多个预定设计来预先制作探针卡组件的一个或多个元件的步骤。 此后，接收关于新设计的半导体器件的设计数据以及描述用于测试半导体器件的测试器和测试算法的数据。 使用接收到的数据，选择一个或多个预制元素。 再次使用接收到的数据，定制一个或多个所选择的预制元素。 然后通过使用选定和定制的元素构建探针卡组件。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2008034861A

公开(公告)日：2008-02-14

申请号：JP2007216518

申请日：2007-08-22

Applicant: Formfactor Inc ,  フォームファクター, インコーポレイテッド

Inventor： KHANDROS IGOR Y ,  MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/073 ,  H01L21/66 ,  B23K1/00 ,  B23K20/00 ,  B23K31/02 ,  C23C18/16 ,  C25D5/08 ,  C25D5/16 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/04 ,  G01R1/06 ,  G01R1/067 ,  G01R31/26 ,  G01R31/28 ,  H01L21/00 ,  H01L21/48 ,  H01L21/56 ,  H01L21/58 ,  H01L21/60 ,  H01L21/603 ,  H01L21/607 ,  H01L21/68 ,  H01L23/02 ,  H01L23/12 ,  H01L23/32 ,  H01L23/48 ,  H01L23/485 ,  H01L23/49 ,  H01L23/498 ,  H01L23/538 ,  H01L25/065 ,  H01L25/07 ,  H01L25/16 ,  H01L25/18 ,  H01R9/00 ,  H01R12/71 ,  H01R13/05 ,  H01R13/24 ,  H01R29/00 ,  H01R33/74 ,  H01R33/76 ,  H01R107/00 ,  H05H1/18 ,  H05K1/14 ,  H05K1/18 ,  H05K3/20 ,  H05K3/24 ,  H05K3/30 ,  H05K3/32 ,  H05K3/34 ,  H05K3/36 ,  H05K3/40 ,  H05K7/10

CPC classification number: H05K7/1069 ,  B23K1/0016 ,  B23K20/004 ,  B23K2201/40 ,  C25D5/08 ,  C25D5/22 ,  C25D7/12 ,  C25D21/02 ,  G01R1/0466 ,  G01R1/0483 ,  G01R1/06711 ,  G01R1/07314 ,  G01R1/07342 ,  G01R1/07357 ,  G01R1/07371 ,  G01R1/07378 ,  G01R31/2884 ,  G01R31/2886 ,  G01R31/2889 ,  H01L21/4853 ,  H01L21/4889 ,  H01L21/563 ,  H01L21/67138 ,  H01L22/20 ,  H01L23/32 ,  H01L23/49811 ,  H01L24/11 ,  H01L24/12 ,  H01L24/16 ,  H01L24/29 ,  H01L24/45 ,  H01L24/48 ,  H01L24/49 ,  H01L24/72 ,  H01L24/81 ,  H01L25/0652 ,  H01L25/16 ,  H01L2224/0401 ,  H01L2224/05124 ,  H01L2224/05166 ,  H01L2224/05599 ,  H01L2224/05647 ,  H01L2224/1134 ,  H01L2224/13099 ,  H01L2224/131 ,  H01L2224/13124 ,  H01L2224/13144 ,  H01L2224/13147 ,  H01L2224/13639 ,  H01L2224/13644 ,  H01L2224/13647 ,  H01L2224/13655 ,  H01L2224/13657 ,  H01L2224/16145 ,  H01L2224/29111 ,  H01L2224/45014 ,  H01L2224/45015 ,  H01L2224/45111 ,  H01L2224/45124 ,  H01L2224/45139 ,  H01L2224/45144 ,  H01L2224/45147 ,  H01L2224/4554 ,  H01L2224/456 ,  H01L2224/48091 ,  H01L2224/48227 ,  H01L2224/48463 ,  H01L2224/48599 ,  H01L2224/48699 ,  H01L2224/48799 ,  H01L2224/49109 ,  H01L2224/73203 ,  H01L2224/73204 ,  H01L2224/73265 ,  H01L2224/78301 ,  H01L2224/81801 ,  H01L2224/85201 ,  H01L2225/0651 ,  H01L2225/06527 ,  H01L2225/06555 ,  H01L2225/06572 ,  H01L2924/00013 ,  H01L2924/00014 ,  H01L2924/01005 ,  H01L2924/01006 ,  H01L2924/01011 ,  H01L2924/01012 ,  H01L2924/01014 ,  H01L2924/01015 ,  H01L2924/01018 ,  H01L2924/01019 ,  H01L2924/01022 ,  H01L2924/01023 ,  H01L2924/01027 ,  H01L2924/01028 ,  H01L2924/01029 ,  H01L2924/0103 ,  H01L2924/01032 ,  H01L2924/01033 ,  H01L2924/01037 ,  H01L2924/01039 ,  H01L2924/01042 ,  H01L2924/01044 ,  H01L2924/01045 ,  H01L2924/01046 ,  H01L2924/01047 ,  H01L2924/01049 ,  H01L2924/0105 ,  H01L2924/01051 ,  H01L2924/01057 ,  H01L2924/0106 ,  H01L2924/01074 ,  H01L2924/01075 ,  H01L2924/01076 ,  H01L2924/01077 ,  H01L2924/01078 ,  H01L2924/01079 ,  H01L2924/01082 ,  H01L2924/01088 ,  H01L2924/0132 ,  H01L2924/01322 ,  H01L2924/0133 ,  H01L2924/014 ,  H01L2924/07802 ,  H01L2924/10253 ,  H01L2924/10329 ,  H01L2924/12041 ,  H01L2924/12042 ,  H01L2924/12044 ,  H01L2924/14 ,  H01L2924/15153 ,  H01L2924/15165 ,  H01L2924/1517 ,  H01L2924/15312 ,  H01L2924/1532 ,  H01L2924/15787 ,  H01L2924/16195 ,  H01L2924/181 ,  H01L2924/19041 ,  H01L2924/19043 ,  H01L2924/30105 ,  H01L2924/30107 ,  H01L2924/3011 ,  H01L2924/3025 ,  H01R12/52 ,  H01R13/2407 ,  H01R13/2464 ,  H05K1/141 ,  H05K3/20 ,  H05K3/326 ,  H05K3/3421 ,  H05K3/368 ,  H05K3/4015 ,  H05K3/4092 ,  H05K2201/0397 ,  H05K2201/068 ,  H05K2201/1031 ,  H05K2201/10318 ,  H05K2201/10378 ,  H05K2201/10719 ,  H05K2201/10734 ,  H05K2201/10757 ,  H05K2201/10878 ,  Y02P70/611 ,  H01L2924/00 ,  H01L2924/01013 ,  H01L2924/01026 ,  H01L2924/3512 ,  H01L2224/29099 ,  H01L2224/48 ,  H01L2924/20752 ,  H01L2924/20753 ,  H01L2924/20754 ,  H01L2924/20755 ,  H01L2924/00012 ,  H01L2924/20751 ,  H01L2924/20756 ,  H01L2924/20757 ,  H01L2924/00015 ,  H01L2924/2075

Abstract: PROBLEM TO BE SOLVED: To provide a method to enable the tip of a probe element to be oriented without changing the position of a probe card. SOLUTION: A probe card assembly 500 comprises a probe card 502 and a space converter 506. The space converter 506 is equipped with the probe element 524. An interposer 504 is interposed in between the space converter 506 and the probe card 502. The space converter 506 and the interposer 504 are stacked up. The orientation of the space converter 506 is adjusted by an actuator. Thus, the probe elements 524 can be arranged so as to optimize probing of the wafer 508 as a whole. COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：提供一种使探针元件的尖端能够定向而不改变探针卡的位置的方法。 解决方案：探针卡组件500包括探针卡502和空间转换器506.空间转换器506配备有探针元件524.插入器504插入在空间转换器506和探针卡502之间。 空间转换器506和插入器504堆叠起来。 空间转换器506的方向由致动器调节。 因此，可以布置探针元件524以便优化整个晶片508的探测。 版权所有（C）2008，JPO＆INPIT

公开(公告)号：JP2006343350A

公开(公告)日：2006-12-21

申请号：JP2006223552

申请日：2006-08-18

Applicant: FORMFACTOR INC

Inventor： MATHIEU GAETAN L ,  ELDRIDGE BENJAMIN N ,  GRUBE GARY W

IPC: G01R1/06 ,  G01R31/26 ,  G01R1/073 ,  H01L21/66

Abstract: PROBLEM TO BE SOLVED: To provide method and system for planarizing of semiconductor contactor, attaining flatter relation, with regard to probe card assembly, and more specifically, between contacting element and device under test on the probe card assembly. SOLUTION: In this system, a space converter 210 is held down circumferentially with a clamp frame 212. The top face of the space converter 210 can substantially be flush with the top face of the frame 212 so that a plurality of elastic contact structures 211 extending from top face of the space converter 210 extends above the top face of the frame 212. COPYRIGHT: (C)2007,JPO&INPIT