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    AN INTEGRATED STRUCTURE AND METHOD FOR FABRICATING THE SAME
    11.
    发明专利
    AN INTEGRATED STRUCTURE AND METHOD FOR FABRICATING THE SAME 未知

    公开(公告)号：AU2003301975A1

    公开(公告)日：2004-06-03

    申请号：AU2003301975

    申请日：2003-11-07

    Applicant: IBM

    Inventor： POGGE BERNHARD ,  DESPONT MICHEL ,  DRECHSLER UTE ,  PRASAD CHANDRIKA ,  VETTIGER PETER ,  YU ROY

    IPC: B81C3/00 ,  H01L21/768

    Abstract: A vertically integrated structure includes a micro-electromechanical system (MEMS) and a chip for delivering signals to the MEMS. The structure includes a metal stud connecting a surface of the chip and the MEMS; the MEMS has an anchor portion having a conducting pad on an underside thereof contacting the metal stud. The MEMS is spaced from the chip by a distance corresponding to a height of the metal stud, and the MEMS includes a doped region in contact with the conducting pad. In particular, the MEMS may include a cantilever structure, with the end portion including a tip extending in the vertical direction. A support structure (e.g. of polyimide) may surround the metal stud and contact both the underside of the MEMS and the surface of the chip. A temporary carrier plate is used to facilitate handling of the MEMS and alignment to the chip.

    Integrated electro-mechanical actuator
    12.
    发明专利
    Integrated electro-mechanical actuator 未知

    公开(公告)号：GB2489186A

    公开(公告)日：2012-09-19

    申请号：GB201213155

    申请日：2011-03-29

    Applicant: IBM

    Inventor： DESPONT MICHEL

    IPC: H01H59/00

    Abstract: The present invention provides an integrated electro -mechanical actuator and a manufacturing method for manufacturing such an integrated electro-mechanical actuator. The integrated electro-mechanical actuator comprises an electrostatic actuator gap between actuator electrodes and an electrical contact gap between contact electrodes. An inclination with an inclination angle is provided between the actuator electrodes and the contact electrodes. The thickness of this electrical contact gap is equal to the thickness of a sacrificial layer which is etched away in a manufacturing process.

    THERMAL MOVEMENT SENSOR
    15.
    发明专利
    THERMAL MOVEMENT SENSOR 未知

    公开(公告)号：AU2003253213A1

    公开(公告)日：2004-03-19

    申请号：AU2003253213

    申请日：2003-08-22

    Applicant: IBM

    Inventor： BINNIG GERD K ,  DESPONT MICHEL ,  LANTZ MARK A ,  VETTIGER PETER

    IPC: B81B3/00 ,  G01Q60/58 ,  G11B9/00 ,  G11B9/12 ,  G12B21/02

    Abstract: A transducer for detecting movement of an article mounted for movement in a plane, the transducer comprising: a heater facing the plane of movement of the article and having a temperature dependent resistance; and, an edge defined in the article between regions of different thermal conductivity; wherein, as the article describes the movement, the edge moves relative to the heater producing a corresponding variation in heat loss from the heater and a corresponding variation in resistance of the heater.

    Electromechanical switching device wtih 2D layered material surfaces
    17.
    发明专利
    Electromechanical switching device wtih 2D layered material surfaces 未知

    公开(公告)号：GB2518185A

    公开(公告)日：2015-03-18

    申请号：GB201316262

    申请日：2013-09-12

    Applicant: IBM

    Inventor： DESPONT MICHEL ,  DUERIG URS T ,  GROGG DANIEL ,  KNOLL ARMIN W ,  KOREN ELAD

    IPC: H01H1/00 ,  B81B3/00 ,  B81B5/00 ,  H01H59/00

    Abstract: An electromechanical switch comprises a first electrode 11 comprising layers 21 of a first 2D layered material exhibiting a first surface, and a second electrode 12 comprising layers 22 of a second 2D layered material exhibiting a second surface vis-Ã -vis or face to face with the first surface. Each of the 2D materials is electrically conducting and an actuator actuates one of the electrodes to modify a distance between the surfaces, to modify electrical conductivity transverse to the surfaces and enable current modulation between the electrodes. The electrodes may comprise a drain and a source and the actuator a gate electrode (fig 1,13). The surfaces may move parallel to each other, actuation modifying an overlap between them or move transversely with actuation modifying a transverse distance (fig 1, d). An active region comprising one of the surfaces may be surrounded by and level with an inactive region of insulating material (fig 10B, S5) such as hexagonal boron nitride. An actuatable electrode may pivot, flex, rotate and/or slide and comprise an anchored beam. Source and drain electrodes may be side-by-side and parallel to each other and bridged by a third electrode (fig 13, 122) that can rotate (fig 15). The 2D layer may comprise graphene, graphite, BN, MoS2, WS2, MoSe2, NbSe2 NbS2, NbTe2, TaS2, TaTe2 or TiSe2. Actuation may be electrostatic, piezoelectric, magnetic, by thermal deformation, or by material stress. The switch may be micro-electromechanical or nano-electromechanical.

    18.
    发明专利
    未知

    公开(公告)号：DE60230673D1

    公开(公告)日：2009-02-12

    申请号：DE60230673

    申请日：2002-06-07

    Applicant: IBM

    Inventor： DESPONT MICHEL ,  DRECHSLER UTE ,  ROTHUIZEN HUGO E ,  VETTIGER PETER ,  WIDMER ROLAND W

    IPC: G02B6/35 ,  G02B26/08 ,  B81B3/00 ,  G02B6/122 ,  G11C23/00 ,  H01H1/00 ,  H01H61/02

    Abstract: A microsystem switch ( 1, 20, 25, 30, 33 ) has a support ( 2 ) defining a recess ( 3 ), and a flexible bridge ( 6 ) is mounted on the support ( 2 ) bridging the recess ( 3 ). The bridge ( 6 ) is shaped so as to hold selectively a concave stable state, in which the bridge bulges into the recess ( 3 ), and a convex stable state in which the bridge bulges out of the recess ( 3 ). The switch includes an actuator ( 8, 9; 26, 27 ) for effecting flexing of the bridge ( 6 ) between the stable states, and a switching element ( 7, 31, 34 ) is mounted on the bridge ( 6 ) such that movement of the bridge between the stable states moves the switching element between an on position and an off position. According to another design, a microsystem switch ( 40, 55 ) has a support ( 41 ) defining a recess ( 42 ), and an elongate torsion member ( 44 ) is mounted on the support ( 41 ) bridging the recess ( 42 ). A flexible bridge ( 43, 56 ) is mounted on the support ( 41 ) bridging the recess ( 42 ) in a direction substantially perpendicular to the torsion member ( 44 ). The bridge ( 43, 56 ) is connected to the torsion member ( 44 ) at the cross-point thereof so that a first section of the bridge extends between the cross-point and one side of the recess ( 42 ) and a second section of the bridge extends between the cross-point and the opposite side of the recess ( 42 ). The bridge ( 43, 56 ) is shaped so as to hold selectively a first stable state, in which the first section of the bridge bulges into the recess and the second section of the bridge bulges out of the recess, and a second stable state in which this configuration is reversed. A switching element ( 45 ) is mounted at the cross-point of the bridge ( 43, 56 ) and torsion member ( 44 ), and an actuator ( 46 a, 46 b; 58 a, 58 b) is again provided for effecting flexing of the bridge ( 43, 56 ) between the stable states. Here, movement of the bridge ( 43, 56 ) between the stable states effects twisting of the torsion member ( 44 ) and rotation of the switching element ( 45 ) between an on position and an off position. Switching devices incorporating these switches, and switching apparatus comprising arrays of such switching devices, are also provided.

    Microsystem switches
    20.
    发明专利
    Microsystem switches 未知

    公开(公告)号：AU2002309106A1

    公开(公告)日：2003-02-24

    申请号：AU2002309106

    申请日：2002-06-07

    Applicant: IBM

    Inventor： ROTHUIZEN HUGO E ,  DESPONT MICHEL ,  DRECHSLER UTE ,  VETTIGER PETER ,  WIDMER ROLAND W

    IPC: G02B26/08 ,  B81B3/00 ,  G02B6/122 ,  G02B6/35 ,  G11C23/00 ,  H01H1/00 ,  H01H61/02

    Abstract: A microsystem switch ( 1, 20, 25, 30, 33 ) has a support ( 2 ) defining a recess ( 3 ), and a flexible bridge ( 6 ) is mounted on the support ( 2 ) bridging the recess ( 3 ). The bridge ( 6 ) is shaped so as to hold selectively a concave stable state, in which the bridge bulges into the recess ( 3 ), and a convex stable state in which the bridge bulges out of the recess ( 3 ). The switch includes an actuator ( 8, 9; 26, 27 ) for effecting flexing of the bridge ( 6 ) between the stable states, and a switching element ( 7, 31, 34 ) is mounted on the bridge ( 6 ) such that movement of the bridge between the stable states moves the switching element between an on position and an off position. According to another design, a microsystem switch ( 40, 55 ) has a support ( 41 ) defining a recess ( 42 ), and an elongate torsion member ( 44 ) is mounted on the support ( 41 ) bridging the recess ( 42 ). A flexible bridge ( 43, 56 ) is mounted on the support ( 41 ) bridging the recess ( 42 ) in a direction substantially perpendicular to the torsion member ( 44 ). The bridge ( 43, 56 ) is connected to the torsion member ( 44 ) at the cross-point thereof so that a first section of the bridge extends between the cross-point and one side of the recess ( 42 ) and a second section of the bridge extends between the cross-point and the opposite side of the recess ( 42 ). The bridge ( 43, 56 ) is shaped so as to hold selectively a first stable state, in which the first section of the bridge bulges into the recess and the second section of the bridge bulges out of the recess, and a second stable state in which this configuration is reversed. A switching element ( 45 ) is mounted at the cross-point of the bridge ( 43, 56 ) and torsion member ( 44 ), and an actuator ( 46 a, 46 b; 58 a, 58 b) is again provided for effecting flexing of the bridge ( 43, 56 ) between the stable states. Here, movement of the bridge ( 43, 56 ) between the stable states effects twisting of the torsion member ( 44 ) and rotation of the switching element ( 45 ) between an on position and an off position. Switching devices incorporating these switches, and switching apparatus comprising arrays of such switching devices, are also provided.

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