PHOTOSENSITIVE POLYIMIDE PRECURSOR COMPOSITION

    公开(公告)号:JPH0643640A

    公开(公告)日:1994-02-18

    申请号:JP25254792

    申请日:1992-09-22

    Applicant: IBM

    Abstract: PURPOSE: To obtain a compsn. increasing resolution and sensitivity while reducing the lass of thickness at the time of development by using a polyimide precursor and a complex cation of a polymerizable functional carboxylic acid compd. having a tert. amino functional group as a reactivity modifier. CONSTITUTION: An unmodified polyimide precursor such as a precursor of polyester imide, polyamide-imide-ester, polyamide-imide or polysiloxane-imide as well as other mixed polyimides is included in a polyimide precursor (polyamic acid) used. A required reactivity modifier is a complex cation of a polymerizable functional carboxylic acid compd. having a tert. amino functional group. This tert. amino functional substance preferably contains a polymerizable part such as an ethylenic unsatd. part and/or plural tert. amino positions.

    PATTERNIZATION OF CATIONIC HARDENABLE PHOTORESIST

    公开(公告)号:JPH02259762A

    公开(公告)日:1990-10-22

    申请号:JP30943489

    申请日:1989-11-30

    Applicant: IBM

    Abstract: PURPOSE: To enable free radical polymn. without using an oxygen barrier sheet and to enhance the resolution of an image by using a specified photoresist. CONSTITUTION: A curable cationic photoresist is formed on a substrate and imagewisely exposed with laser beams from Ar ion laser, etc., the exposed part of the photoresist is cured by cationic polymn. and the photoresist is patterned by development. The photoresist preferably contains about 69-79wt.% octafunctional bisphenol A epoxy novolak (e.g. a compd. represented by formula I), about 15-17wt.% bifunctional alicyclic epoxy (e.g. a compd. represented by formula II), about 4-6wt.% trifunctional epoxy (e.g. a compd. represented by formula III), about 2.9-6.9wt.% photosensitizer (e.g. a compd. represented by formula IV) and 0 to about 0.15wt.% surfactant (e.g. a desired fluorine-contg. surfactant).

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