11.
    发明专利
    未知

    公开(公告)号:FR2740224B1

    公开(公告)日:1998-12-31

    申请号:FR9612844

    申请日:1996-10-15

    Applicant: IBM

    Abstract: The invention relates to a contact probe arrangement for electrically connecting a test system with contact pads of a device to be tested. The contact probes are located in guide grooves. The guide grooves as well as areas are provided in a plane parallel to the surface of a guide plate and are covered by a protective plate. The contact probes may bend out laterally into the respective areas. This assures a very dense contact probe array. Contact probe arrays of this type may be used, for example, for detecting opens and shorts in integrated circuits or semiconductor chips. The invention overcomes the problem of adjusting for height differences in the contact pads caused by an uneven surface of the device to be tested.

    MANUFACTURING PROCESS FOR GROOVED SUBSTRATES AND MULTILAYER STRUCTURE

    公开(公告)号:CA2049261A1

    公开(公告)日:1992-02-18

    申请号:CA2049261

    申请日:1991-08-15

    Applicant: IBM

    Abstract: GE9-90-001 Grooved substrates and multilayer structures, especially suitable for optical disks, are taught. The major process steps include spin coating of a supporting plate (1) with dissolved material forming a soft layer (7) thereon, stamping grooves (2) into the soft layer (7) to form a structured soft layer showing the negative image of the stamp and hardening the structured soft layer (7) by thermal treatment. The dissolved material contains polymeric organometal compounds comprising polymer siloxane and/or polymer silicates. In one embodiment the structured soft layer is a dielectric layer (8) containing various combinations of the oxides SiO2, La2O3, PbO and TiO2. The multilayer structure is completed by a magneto-optic layer (4), a reflector layer (5) and a passivation layer (6).

    14.
    发明专利
    未知

    公开(公告)号:DE19538792A1

    公开(公告)日:1997-04-24

    申请号:DE19538792

    申请日:1995-10-18

    Applicant: IBM

    Abstract: The invention relates to a contact probe arrangement 1 for electrically connecting a test system with the circular contact pads 2 of a device to be tested 3. In order to achieve a low contact resistance the contact probes 4 are orthogonally pressed onto the contact pads 2, and for adjusting height differences in the contact pads 2 caused by an uneven surface of the device to be tested 3 they may bend out laterally into the provided areas 6a, 6b. The contact probes 4 are located in guide grooves 5. The guide grooves 5 as well as the areas 6a, 6b are provided in a plane parallel to the surface of a guide plate 7 and are covered by a protective plate. This assures a very dense contact probe array. Contact probe arrays of this type may be used, for example, for detecting opens and shorts in electrical circuit arrays of microelectronic compounds.

    Contact probe arrangement
    16.
    发明专利

    公开(公告)号:GB2306804B

    公开(公告)日:1999-07-14

    申请号:GB9621500

    申请日:1996-10-16

    Applicant: IBM

    Abstract: The invention relates to a contact probe arrangement for electrically connecting a test system with contact pads of a device to be tested. The contact probes are located in guide grooves. The guide grooves as well as areas are provided in a plane parallel to the surface of a guide plate and are covered by a protective plate. The contact probes may bend out laterally into the respective areas. This assures a very dense contact probe array. Contact probe arrays of this type may be used, for example, for detecting opens and shorts in integrated circuits or semiconductor chips. The invention overcomes the problem of adjusting for height differences in the contact pads caused by an uneven surface of the device to be tested.

    Contact probe arrangement
    17.
    发明专利

    公开(公告)号:GB2306804A

    公开(公告)日:1997-05-07

    申请号:GB9621500

    申请日:1996-10-16

    Applicant: IBM

    Abstract: The invention relates to a contact probe arrangement for electrically connecting a test system with contact pads of a device to be tested. The contact probes are located in guide grooves. The guide grooves as well as areas are provided in a plane parallel to the surface of a guide plate and are covered by a protective plate. The contact probes may bend out laterally into the respective areas. This assures a very dense contact probe array. Contact probe arrays of this type may be used, for example, for detecting opens and shorts in integrated circuits or semiconductor chips. The invention overcomes the problem of adjusting for height differences in the contact pads caused by an uneven surface of the device to be tested.

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