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公开(公告)号：KR1020050065895A
公开(公告)日：2005-06-30
申请号：KR1020030097055
申请日：2003-12-26
Applicant: 한국전자통신연구원
CPC classification number: G01N33/53 , B01L9/527 , B01L2300/0681
Abstract: 본 발명은 내부에 유로를 갖는 제 1 유로 구조물과, 다수개의 구멍들이 형성되어 이 구멍들을 통해서 유체가 통과할 수 있도록 하는 Dry Film Resist을 포함하여 구성되며, 다수개의 구멍들을 이용하여 생체 분자를 크기별로 분리하는 생체분자 필터를 제공한다.
여러 성분이 혼합된 샘플에서 분석 대상 분자를 농축할 수 있는 생체분자 필터를 랩온어칩에 제조함으로써 종래에는 칩 외부에서 전처리과정을 수행하여 분석샘플을 제조했던 것에 비해서, 분석시간, 비용을 절감할 수 있고 휴대 가능한 형태의 미소유체 소자를 제조할 수 있는 효과가 있다.-
192.发明授权
公开(公告)号：KR100479265B1
公开(公告)日：2005-03-28
申请号：KR1020020070645
申请日：2002-11-14
Applicant: 한국전자통신연구원
IPC: C12Q1/68
Abstract: 본 발명의 패턴 광 발생 장치는, 생체 고분자 어레이 형성을 위한 패턴 광 발생 장치이다. 이 패턴 광 발생 장치는 복수개의 단위 광 발생 장치들 및 구동부를 포함하여 구성된다. 복수개의 단위 광 발생 장치들은 동일 평면상에서 어레이 형태로 배열된다. 그리고 구동부는, 복수개의 단위 광 발생 장치들 중에서 원하는 패턴 형상에 대응하는 일부 단위 광 발생 장치들만을 선택적으로 동작시켜 원하는 패턴 형상의 광이 발생되도록 한다.
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公开(公告)号：KR1020040041824A
公开(公告)日：2004-05-20
申请号：KR1020020069883
申请日：2002-11-12
Applicant: 한국전자통신연구원
IPC: H01L21/027
CPC classification number: B81C1/00492 , G03F7/0035 , G03F7/161
Abstract: PURPOSE: A method for forming a photoresist pattern is provided to be capable of stably forming the photoresist pattern by closing the opening portion of a vertical trench with high step using a DFR(Dry Film Resistor) layer. CONSTITUTION: A trench(102) having a high step is formed on a substrate(100). A DFR layer(110) is deposited on the substrate. A DFR pattern is formed by carrying out the first photolithography process on the resultant structure for closing only the opening portion of the trench. A photoresist layer is coated on the entire surface of the resultant structure. Then, a photoresist pattern is formed by carrying out the second photolithography process. Preferably, the DFR layer having a thickness of 1-70 μm is deposited at the adhesion temperature of 70-100 °C by using one selected from a group consisting of an adhesive lamination method, a melt lamination method, an extrusion lamination method, and a heat lamination method.
Abstract translation: 目的：提供一种用于形成光致抗蚀剂图案的方法，以能够通过使用DFR（干膜电阻器）层通过以高步骤闭合垂直沟槽的开口部分来稳定地形成光致抗蚀剂图案。 构成：在基板（100）上形成具有高台阶的沟槽（102）。 DFR层（110）沉积在衬底上。 通过在所得结构上进行第一光刻处理来仅形成沟槽的开口部分，形成DFR图案。 在所得结构的整个表面上涂覆光致抗蚀剂层。 然后，通过进行第二光刻工艺形成光致抗蚀剂图案。 优选地，通过使用选自粘合层压法，熔融层压法，挤出层压法和挤出层压法中的一种，在70-100℃的粘附温度下沉积厚度为1-70μm的DFR层 热层压法。
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公开(公告)号：KR1020030096716A
公开(公告)日：2003-12-31
申请号：KR1020020033720
申请日：2002-06-17
Applicant: 한국전자통신연구원
IPC: G02B26/08
Abstract: PURPOSE: An optical signal switch array for optical communication is provided to drive easily a reflection mirror by arranging a digital switch type reflection mirror between an optical signal input part and an optical signal output part. CONSTITUTION: An optical signal switch array for optical communication includes an optical signal input part(100), a switching array part(200), and an optical signal output part(300). The optical signal input part(100) includes a plurality of optical signal transferring grooves having the predetermined stepped parts and a plurality of optical fibers located on the optical signal transferring grooves. A plurality of digital switch type reflection mirrors are arranged in matrix on a gradient surface of the switching array part(200) in order to control the optical signals by changing the direction of the optical signals of the optical signal input part(100). The optical signal output part(300) receives and outputs the reflected optical signals of the switching array part(200).
Abstract translation: 目的：提供一种用于光通信的光信号开关阵列，通过在光信号输入部分和光信号输出部分之间布置数字开关型反射镜，容易地驱动反射镜。 构成：用于光通信的光信号开关阵列包括光信号输入部分（100），开关阵列部分（200）和光信号输出部分（300）。 光信号输入部分（100）包括具有预定阶梯部分的多个光信号传送槽和位于光信号传送槽上的多个光纤。 为了通过改变光信号输入部分（100）的光信号的方向来控制光信号，多个数字开关型反射镜被矩阵地布置在开关阵列部分（210）的梯度表面上。 光信号输出部（300）接收并输出开关阵列部（200）的反射光信号。
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公开(公告)号：KR1020030055485A
公开(公告)日：2003-07-04
申请号：KR1020010085040
申请日：2001-12-26
Applicant: 한국전자통신연구원
IPC: G02B26/08
Abstract: PURPOSE: A method for fabricating a buried inductor magnetically-induced optical switch is provided wherein it is easy and simple to process and assemble a substrate without assembling a number of substrates and optical components. CONSTITUTION: According to the method for fabricating an optical switch which changes a light path by being aligned vertically on a substrate(100) supporting a mirror(300) by a magnetic force of an inductor, a groove(210) where a mirror pocket(200) and the inductor are to be buried is formed on the substrate by etching a back of the substrate. The inductor wound with coil in parallel with the substrate is buried into the groove. Then, the mirror aligned to the mirror pocket and a torsion bar(110) supporting the mirror are formed in a body, by processing a front surface of the substrate, and then the mirror pocket is opened completely.
Abstract translation: 目的：提供一种制造埋地电感器磁感应光开关的方法，其中在不组装多个基板和光学部件的情况下处理和组装基板是容易且简单的。 构成：根据用于制造光开关的方法，该光开关通过在电感器的磁力下在支撑反射镜（300）的基板（100）上垂直取向而改变光路，其中凹槽（210） 200），并且通过蚀刻衬底的背面而在衬底上形成电感器。 缠绕有与基板平行的线圈的电感器被埋入槽中。 然后，通过处理基板的前表面，在主体中形成与镜子凹穴对准的反射镜和支撑反射镜的扭杆（110），然后完全打开反射镜腔。
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Patent Agency Ranking
公开(公告)号：KR100378597B1
公开(公告)日：2003-04-03
申请号：KR1020000080802
申请日：2000-12-22
Applicant: 한국전자통신연구원
CPC classification number: H01J31/127
Abstract: A high-resolution field emission display that applies a field emission device(or a field emission array) being an electron source element to a flat panel display device. The field emission display includes an upper plate and a lower plate that fac each other, wherein the lower plate and the upper plate are vacuum-packaged in parallel positions. A dot pixel of the lower plate includes a high-voltage amorphous silicon thin film transistor formed on the glass substrate of the lower plate, a diode type field emission film partially formed on the drain of the high-voltage amorphous silicon TFT, a passivation insulation layer formed on the high-voltage amorphous silicon TFT and the lateral side of the diode type field emission film, and an electron beam focusing electrode/light-shading film which vertically overlaps with the high-voltage amorphous silicon TFT on some parts of the passivation insulation layer and is formed on a lateral side of the diode type field emission film. A dot pixel of the upper plate includes a transparent electrode formed on the glass substrate of the upper plate, and a red, green or blue phosphor formed on some parts of the transparent electrode. Therefore, the high-resolution field emission display device can obtain an effect of focusing the electron beam trajectory and a light-shading effect for the TFT at the same time, and thus remarkably enhance the performance and the resolution of the field emission display.
Abstract translation: 一种高分辨率场发射显示器，其将作为电子源元件的场发射装置（或场发射阵列）应用于平板显示装置。 场发射显示器包括彼此相对的上板和下板，其中下板和上板被平行地真空包装。 下板的点像素包括形成在下板的玻璃基板上的高压非晶硅薄膜晶体管，部分形成在高压非晶硅TFT的漏极上的二极管型场发射膜，钝化绝缘层 形成在高压非晶硅TFT和二极管型场致发射膜的侧面上的电子束聚焦电极/遮光膜以及在钝化的一些部分上与高压非晶硅TFT垂直交叠的电子束聚焦电极/ 绝缘层并形成在二极管型场发射膜的侧面上。 上板的点像素包括在上板的玻璃基板上形成的透明电极以及在透明电极的一些部分上形成的红色，绿色或蓝色磷光体。 因此，高分辨率场致发射显示装置可以同时获得聚焦电子束轨迹和遮光效果的效果，从而显着提高了场发射显示器的性能和分辨率。
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公开(公告)号：KR100373328B1
公开(公告)日：2003-02-25
申请号：KR1020000072326
申请日：2000-12-01
Applicant: 한국전자통신연구원
Abstract: PURPOSE: A field emission display having a horizontal field emission emitter and a method for fabricating the same are provided to drive the field emission display under a low voltage by using a horizontal carbon nano tube emitter. CONSTITUTION: An insulating layer(41) is formed on a lower substrate(40). A conductive layer pattern(42) is formed on the insulating layer(41). The first insulating layer(43) having the first opening portion is formed on the conductive layer pattern(42). A plug is formed within a contact hole(44) for exposing the conductive layer pattern(42). A catalysis metal layer pattern(45) is connected with the plug of the contact hole(44). A carbon nano tube field emission emitter(46) is formed on one side of the catalysis metal layer pattern(45). The second insulating layer(47) having the second opening portion is formed on the carbon nano tube field emission emitter(46) and the first insulating layer(43). An electron beam control electrode(48) is formed on the first insulating layer(43). An anode electrode(49) is formed on one side of the first opening portion and one side of the second opening portion. A fluorescent layer(50) is formed on the anode electrode(49). An upper substrate(51) is bonded parallel with the lower substrate(40). A spacer(52) is used as a support portion.
Abstract translation: 目的：提供一种具有水平场发射发射器的场发射显示器及其制造方法，以通过使用水平碳纳米管发射器在低电压下驱动场发射显示器。 构成：绝缘层（41）形成在下基板（40）上。 导电层图案（42）形成在绝缘层（41）上。 具有第一开口部分的第一绝缘层（43）形成在导电层图案（42）上。 在用于暴露导电层图案（42）的接触孔（44）内形成插塞。 催化金属层图案（45）与接触孔（44）的插塞连接。 碳纳米管场发射发射体（46）形成在催化金属层图案（45）的一侧上。 在碳纳米管场发射发射体（46）和第一绝缘层（43）上形成具有第二开口部分的第二绝缘层（47）。 电子束控制电极（48）形成在第一绝缘层（43）上。 阳极电极（49）形成在第一开口部分的一侧和第二开口部分的一侧。 荧光层（50）形成在阳极（49）上。 上基板（51）与下基板（40）平行地接合。 间隔件（52）被用作支撑部分。
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公开(公告)号：KR1020020042960A
公开(公告)日：2002-06-08
申请号：KR1020000072326
申请日：2000-12-01
Applicant: 한국전자통신연구원
Abstract: PURPOSE: A field emission display having a horizontal field emission emitter and a method for fabricating the same are provided to drive the field emission display under a low voltage by using a horizontal carbon nano tube emitter. CONSTITUTION: An insulating layer(41) is formed on a lower substrate(40). A conductive layer pattern(42) is formed on the insulating layer(41). The first insulating layer(43) having the first opening portion is formed on the conductive layer pattern(42). A plug is formed within a contact hole(44) for exposing the conductive layer pattern(42). A catalysis metal layer pattern(45) is connected with the plug of the contact hole(44). A carbon nano tube field emission emitter(46) is formed on one side of the catalysis metal layer pattern(45). The second insulating layer(47) having the second opening portion is formed on the carbon nano tube field emission emitter(46) and the first insulating layer(43). An electron beam control electrode(48) is formed on the first insulating layer(43). An anode electrode(49) is formed on one side of the first opening portion and one side of the second opening portion. A fluorescent layer(50) is formed on the anode electrode(49). An upper substrate(51) is bonded parallel with the lower substrate(40). A spacer(52) is used as a support portion.
Abstract translation: 目的：提供具有水平场发射发射极的场发射显示器及其制造方法，以通过使用水平碳纳米管发射体来驱动低电压下的场发射显示。 构成：在下基板（40）上形成绝缘层（41）。 导电层图案（42）形成在绝缘层（41）上。 具有第一开口部分的第一绝缘层（43）形成在导电层图案（42）上。 在用于暴露导电层图案（42）的接触孔（44）内形成插塞。 催化金属层图案（45）与接触孔（44）的插塞连接。 在催化金属层图案（45）的一侧上形成碳纳米管场致发射体（46）。 具有第二开口部分的第二绝缘层（47）形成在碳纳米管场致发射体（46）和第一绝缘层（43）上。 电子束控制电极（48）形成在第一绝缘层（43）上。 阳极电极（49）形成在第一开口部分的一侧和第二开口部分的一侧。 荧光层（50）形成在阳极电极（49）上。 上基板（51）与下基板（40）平行地结合。 间隔件（52）用作支撑部分。
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公开(公告)号：KR1020010104960A
公开(公告)日：2001-11-28
申请号：KR1020000026389
申请日：2000-05-17
Applicant: 한국전자통신연구원
Abstract: 본 발명은 전계방출소자(field emission device)를 구성하는 핵심요소인 전자방출용 캐소드 및 그 제조방법에 관한 것이다.
본 발명은 전기적 부도체 재료로 이루어진 하부기판과; 상기 하부기판상에 전기적 도전성을 갖는 물질로 형성되는 캐소드전극; 및 상기 캐소드전극의 위에 패터닝되어 부착되는 에미터로 구성되는 전계방출소자용 캐소드를 제공한다. 또한 전기적 부도체 재료로 이루어진 하부기판에 전기적 도전성을 갖는 물질로 캐소드전극을 형성시키는 공정과; 형성된 캐소드전극 위에 에미터 재료를 사진식각(photolithography) 공정으로 패터닝하여 에미터를 부착시키는 공정으로 이루어지며, 상기 에미터 부착 공정은, 낮은 전계에서 전자방출이 용이한 입자형 에미터 재료와 자외선에 감광되는 물질인 감광제(photo-sensitizer)를 함유하는 혼합체(mixture) 용액을 제조하는 단계; 제조된 혼합체 용액을 균일한 두께로 캐소드전극을 함유한 하부기판에 균일하게 도포하여 혼합체막을 형성하는 단계; 상기 혼합체막에 마스크를 사용하여 선별적으로 자외선을 조사하는 단계; 및 자외선에 노출된 부분과 노출되지 않은 부분에 있던 혼합체막을 선택적으로 제거하는 현상 단계를 포함하는 전계방출소자용 캐소드의 제조방법을 제공한다. -
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